JP6256215B2 - 角速度センサ - Google Patents

角速度センサ Download PDF

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Publication number
JP6256215B2
JP6256215B2 JP2014122512A JP2014122512A JP6256215B2 JP 6256215 B2 JP6256215 B2 JP 6256215B2 JP 2014122512 A JP2014122512 A JP 2014122512A JP 2014122512 A JP2014122512 A JP 2014122512A JP 6256215 B2 JP6256215 B2 JP 6256215B2
Authority
JP
Japan
Prior art keywords
resonance frequency
vibrating
angular velocity
mode
common mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2014122512A
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English (en)
Japanese (ja)
Other versions
JP2016003880A (ja
JP2016003880A5 (enExample
Inventor
酒井　峰一
峰一 酒井
知也 城森
知也 城森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP2014122512A priority Critical patent/JP6256215B2/ja
Priority to CN201580031569.7A priority patent/CN106662444B/zh
Priority to US15/311,547 priority patent/US10060744B2/en
Priority to PCT/JP2015/002918 priority patent/WO2015190103A1/ja
Priority to DE112015002805.6T priority patent/DE112015002805T5/de
Publication of JP2016003880A publication Critical patent/JP2016003880A/ja
Publication of JP2016003880A5 publication Critical patent/JP2016003880A5/ja
Application granted granted Critical
Publication of JP6256215B2 publication Critical patent/JP6256215B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2014122512A 2014-06-13 2014-06-13 角速度センサ Expired - Fee Related JP6256215B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2014122512A JP6256215B2 (ja) 2014-06-13 2014-06-13 角速度センサ
CN201580031569.7A CN106662444B (zh) 2014-06-13 2015-06-11 角速度传感器
US15/311,547 US10060744B2 (en) 2014-06-13 2015-06-11 Angular velocity sensor
PCT/JP2015/002918 WO2015190103A1 (ja) 2014-06-13 2015-06-11 角速度センサ
DE112015002805.6T DE112015002805T5 (de) 2014-06-13 2015-06-11 Winkelgeschwindigkeitssensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014122512A JP6256215B2 (ja) 2014-06-13 2014-06-13 角速度センサ

Publications (3)

Publication Number Publication Date
JP2016003880A JP2016003880A (ja) 2016-01-12
JP2016003880A5 JP2016003880A5 (enExample) 2016-06-16
JP6256215B2 true JP6256215B2 (ja) 2018-01-10

Family

ID=54833214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014122512A Expired - Fee Related JP6256215B2 (ja) 2014-06-13 2014-06-13 角速度センサ

Country Status (5)

Country Link
US (1) US10060744B2 (enExample)
JP (1) JP6256215B2 (enExample)
CN (1) CN106662444B (enExample)
DE (1) DE112015002805T5 (enExample)
WO (1) WO2015190103A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6639377B2 (ja) * 2016-12-08 2020-02-05 株式会社東芝 振動装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3329068B2 (ja) * 1994-04-28 2002-09-30 株式会社村田製作所 角速度センサ
JP4415383B2 (ja) 2005-01-24 2010-02-17 セイコーエプソン株式会社 振動ジャイロ素子、振動ジャイロ素子の支持構造およびジャイロセンサ
US8646332B2 (en) * 2007-09-03 2014-02-11 Panasonic Corporation Inertia force sensor
JP4626858B2 (ja) 2008-03-31 2011-02-09 Ｔｄｋ株式会社 角速度センサ素子
JP5353610B2 (ja) * 2009-09-30 2013-11-27 Ｔｄｋ株式会社 圧電振動デバイス
FR2969278B1 (fr) * 2010-12-20 2013-07-05 Onera (Off Nat Aerospatiale) Structure planaire pour gyrometre tri-axe
JP5838695B2 (ja) * 2011-09-29 2016-01-06 セイコーエプソン株式会社 センサー素子、センサー素子の製造方法、センサーデバイスおよび電子機器
JP5923970B2 (ja) 2011-12-23 2016-05-25 株式会社デンソー 振動型角速度センサ
JP2013181856A (ja) * 2012-03-02 2013-09-12 Seiko Epson Corp 振動片、振動デバイス、物理量検出装置、および電子機器
JP5884603B2 (ja) * 2012-03-30 2016-03-15 株式会社デンソー ロールオーバージャイロセンサ
JP5974629B2 (ja) * 2012-05-23 2016-08-23 セイコーエプソン株式会社 振動片、振動片の製造方法、角速度センサー、電子機器、移動体
JP6191151B2 (ja) * 2012-05-29 2017-09-06 株式会社デンソー 物理量センサ
JP2016085190A (ja) * 2014-10-29 2016-05-19 セイコーエプソン株式会社 振動素子、振動素子の製造方法、電子デバイス、電子機器、および移動体
JP2016085192A (ja) * 2014-10-29 2016-05-19 セイコーエプソン株式会社 振動素子、電子デバイス、電子機器および移動体

Also Published As

Publication number Publication date
WO2015190103A1 (ja) 2015-12-17
US10060744B2 (en) 2018-08-28
JP2016003880A (ja) 2016-01-12
CN106662444B (zh) 2019-10-11
DE112015002805T5 (de) 2017-03-02
CN106662444A (zh) 2017-05-10
US20170108335A1 (en) 2017-04-20

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