CN106662444B - 角速度传感器 - Google Patents

角速度传感器 Download PDF

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Publication number
CN106662444B
CN106662444B CN201580031569.7A CN201580031569A CN106662444B CN 106662444 B CN106662444 B CN 106662444B CN 201580031569 A CN201580031569 A CN 201580031569A CN 106662444 B CN106662444 B CN 106662444B
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CN
China
Prior art keywords
vibrating reed
vibrating
resonant frequency
mode
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201580031569.7A
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English (en)
Chinese (zh)
Other versions
CN106662444A (zh
Inventor
酒井峰一
城森知也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
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Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of CN106662444A publication Critical patent/CN106662444A/zh
Application granted granted Critical
Publication of CN106662444B publication Critical patent/CN106662444B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
CN201580031569.7A 2014-06-13 2015-06-11 角速度传感器 Expired - Fee Related CN106662444B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014122512A JP6256215B2 (ja) 2014-06-13 2014-06-13 角速度センサ
JP2014-122512 2014-06-13
PCT/JP2015/002918 WO2015190103A1 (ja) 2014-06-13 2015-06-11 角速度センサ

Publications (2)

Publication Number Publication Date
CN106662444A CN106662444A (zh) 2017-05-10
CN106662444B true CN106662444B (zh) 2019-10-11

Family

ID=54833214

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580031569.7A Expired - Fee Related CN106662444B (zh) 2014-06-13 2015-06-11 角速度传感器

Country Status (5)

Country Link
US (1) US10060744B2 (enExample)
JP (1) JP6256215B2 (enExample)
CN (1) CN106662444B (enExample)
DE (1) DE112015002805T5 (enExample)
WO (1) WO2015190103A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6639377B2 (ja) * 2016-12-08 2020-02-05 株式会社東芝 振動装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011075415A (ja) * 2009-09-30 2011-04-14 Tdk Corp 圧電振動デバイス
CN103033176A (zh) * 2011-09-29 2013-04-10 精工爱普生株式会社 传感器元件及其制造方法、传感器装置以及电子设备
JP2013181856A (ja) * 2012-03-02 2013-09-12 Seiko Epson Corp 振動片、振動デバイス、物理量検出装置、および電子機器
CN103424109A (zh) * 2012-05-23 2013-12-04 精工爱普生株式会社 振动片、振动片的制造方法、角速度传感器、电子设备、移动体
JP2014006238A (ja) * 2012-05-29 2014-01-16 Denso Corp 物理量センサ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3329068B2 (ja) * 1994-04-28 2002-09-30 株式会社村田製作所 角速度センサ
JP4415383B2 (ja) 2005-01-24 2010-02-17 セイコーエプソン株式会社 振動ジャイロ素子、振動ジャイロ素子の支持構造およびジャイロセンサ
CN101796374A (zh) * 2007-09-03 2010-08-04 松下电器产业株式会社 惯性力传感器
JP4626858B2 (ja) 2008-03-31 2011-02-09 Ｔｄｋ株式会社 角速度センサ素子
FR2969278B1 (fr) * 2010-12-20 2013-07-05 Onera (Off Nat Aerospatiale) Structure planaire pour gyrometre tri-axe
JP5923970B2 (ja) 2011-12-23 2016-05-25 株式会社デンソー 振動型角速度センサ
JP5884603B2 (ja) 2012-03-30 2016-03-15 株式会社デンソー ロールオーバージャイロセンサ
JP2016085192A (ja) * 2014-10-29 2016-05-19 セイコーエプソン株式会社 振動素子、電子デバイス、電子機器および移動体
JP2016085190A (ja) * 2014-10-29 2016-05-19 セイコーエプソン株式会社 振動素子、振動素子の製造方法、電子デバイス、電子機器、および移動体

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011075415A (ja) * 2009-09-30 2011-04-14 Tdk Corp 圧電振動デバイス
CN103033176A (zh) * 2011-09-29 2013-04-10 精工爱普生株式会社 传感器元件及其制造方法、传感器装置以及电子设备
JP2013181856A (ja) * 2012-03-02 2013-09-12 Seiko Epson Corp 振動片、振動デバイス、物理量検出装置、および電子機器
CN103424109A (zh) * 2012-05-23 2013-12-04 精工爱普生株式会社 振动片、振动片的制造方法、角速度传感器、电子设备、移动体
JP2014006238A (ja) * 2012-05-29 2014-01-16 Denso Corp 物理量センサ

Also Published As

Publication number Publication date
US10060744B2 (en) 2018-08-28
WO2015190103A1 (ja) 2015-12-17
JP2016003880A (ja) 2016-01-12
US20170108335A1 (en) 2017-04-20
DE112015002805T5 (de) 2017-03-02
CN106662444A (zh) 2017-05-10
JP6256215B2 (ja) 2018-01-10

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Granted publication date: 20191011