JP6253177B2 - POSITION DETECTION DEVICE, POSITION DETECTION METHOD, PROGRAM, AND BOARD MANUFACTURING METHOD - Google Patents

Description

  The present technology relates to a position detection device that detects a stop position of a substrate, a position detection method, a program, and a substrate manufacturing method.

  2. Description of the Related Art Conventionally, a mounting system in which various devices for manufacturing a substrate are arranged in series is widely known. As an apparatus used for a mounting system, for example, a screen printing apparatus that prints paste-like solder on a substrate, a printing inspection apparatus that inspects the printed state of solder, and a mounting that mounts electronic components on a board on which solder is printed 2. Description of the Related Art Devices and mounting inspection devices that inspect the mounting state of electronic components are known.

  In these various apparatuses, first, it is necessary to transport the substrate delivered from the upstream apparatus and stop it at the stop target position. For this reason, these apparatuses generally include a transport unit that transports a substrate and stops it at a stop target position.

  The transport unit includes, for example, a pair of guides that guide the substrate from the side, and a conveyor belt that is provided in each of the pair of guides and transports the substrate by driving thereof. Moreover, in order to stop the board | substrate conveyed by the conveyor belt correctly at a stop target position, the conveyance part may be provided with the stopper driven by an actuator etc. (for example, refer patent document 1 below).

JP 2001-144494 A (paragraph [0007], FIG. 12)

  However, if the substrate is stopped by the stopper, the substrate may be damaged due to the impact when the moving substrate contacts the stopper, and when electronic components are mounted on the substrate The position of the electronic component may be shifted.

  Therefore, it is conceivable to stop the substrate without a stopper. However, in this case, since there is a possibility that the position of the substrate is shifted from the target stop position, a technique capable of detecting the stop position of the substrate is required.

  In view of the circumstances as described above, an object of the present technology is to provide a technology capable of appropriately detecting the stop position of the substrate when the substrate is stopped without a stopper in the transport unit, for example.

The position detection device according to the present technology includes an imaging unit, a transport unit, and a control unit.
The said conveyance part conveys a board | substrate along a conveyance direction, and stops the said board | substrate currently conveyed.
The control unit images the stopped edge of the substrate in the transport direction by the imaging unit, and detects the stop position of the substrate based on the position of the edge of the substrate in the captured image.

  In this position detection apparatus, the stop position of the substrate is detected based on the position of the edge of the substrate in the image captured by the imaging unit. Therefore, even when the substrate is stopped without a stopper in the transport unit, for example, the stop position of the substrate can be detected appropriately.

  In the position detection apparatus, the control unit may first attempt to capture the edge by the imaging unit at an expected edge stop position where the edge of the substrate is likely to be stopped.

  Thereby, the edge of a board | substrate can be imaged appropriately.

  The position detection device further includes a moving mechanism that moves the imaging unit or the substrate along the transport direction in order to change a relative position of the imaging unit and the stopped substrate in the transport direction. May be.

  In the case where the imaging unit is moved, the moving mechanism is a moving mechanism for moving the imaging unit. On the other hand, in the case where the substrate is moved, the transport unit that transports the substrate may have a function as a moving mechanism.

  The said position detection apparatus WHEREIN: The said control part may correct | amend the said edge stop estimated position based on the detected stop position of the said board | substrate.

  Thereby, the expected edge stop position can be corrected to an appropriate position.

  The said position detection apparatus WHEREIN: The said control part may image the said edge by the said imaging part in a different edge stop estimated position for every weight of the said board | substrate.

  Accordingly, even when the weight (type) of the substrate is different, the image of the edge of the substrate can be appropriately captured by the imaging unit at the predicted edge stop position.

  In the position detection device, the control unit determines whether an image captured by the imaging unit at the edge stop expected position is an image including the edge, and the image is not an image including the edge. The moving mechanism may change the relative position of the imaging unit and the substrate in the transport direction, and a retry process may be executed again, which is a process of attempting to capture the edge by the imaging unit.

  By executing such a retry process, even when the edge of the substrate is not detected in the image captured at the predicted edge stop position, the substrate stop position is detected appropriately. Can be detected.

  In the position detection device, the control unit determines a direction in the transport direction in which the imaging unit or the substrate should be moved based on an image captured by the imaging unit at the predicted edge stop position in the retry process. You may judge.

  Thereby, in the retry process, it is possible to determine in which direction the imaging unit or the substrate should be moved next. Therefore, the speed until the edge of the substrate is detected can be improved.

  In the position detection device, in the retry process, the control unit determines whether the imaging unit is located at a position corresponding to the substrate based on an image captured by the imaging unit at the predicted edge stop position. It may be determined, and the direction in the transport direction in which the imaging unit or the substrate should be moved may be determined according to the determination result.

  Accordingly, it is possible to appropriately determine which direction the imaging unit or the substrate should be moved next.

  The said position detection apparatus WHEREIN: The said control part may repeat the said retry process until the said edge is detected.

In the position detection device, an edge to be imaged by the imaging unit is an edge on a front end side in the transport direction,
When it is determined that the imaging unit is located at a position corresponding to the substrate, the control unit moves the imaging unit in a direction in which the substrate is transported, or a direction in which the substrate is transported The substrate may be moved in the reverse direction.

  Thereby, the edge of the front end side of a board | substrate can be imaged appropriately with an imaging part.

  In the position detection device, the control unit moves the imaging unit in a direction opposite to a direction in which the substrate is conveyed when it is determined that the imaging unit is not located at a position corresponding to the substrate. Alternatively, the substrate may be moved in the direction in which the substrate is transported.

  Thereby, the edge of the front end side of a board | substrate can be imaged appropriately with an imaging part.

In the position detection device, the edge to be imaged by the imaging unit is an edge on the rear end side in the transport direction,
When it is determined that the imaging unit is located at a position corresponding to the substrate, the control unit moves the imaging unit in a direction opposite to a direction in which the substrate is transported, or the substrate is transported. The substrate may be moved in such a direction.

  Thereby, it is possible to appropriately capture an image of the edge on the rear end side of the substrate by the imaging unit.

  In the position detection device, the control unit moves the imaging unit in a direction in which the substrate is transported when it is determined that the imaging unit is not located at a position corresponding to the substrate, or the substrate The substrate may be moved in a direction opposite to the direction in which the substrate is conveyed.

  Thereby, it is possible to appropriately capture an image of the edge on the rear end side of the substrate by the imaging unit.

  In the position detection device, when the retry process fails, the control unit manually changes a relative position in the transport direction of the imaging unit and the substrate, so that the position of the imaging unit and the edge are changed. A display signal of a teaching screen for aligning the position may be output.

  Accordingly, the operator can teach the position of the substrate with respect to the position detection device by operating the teaching screen to match the position of the imaging unit and the edge of the substrate.

The position detection device may further include a storage unit that stores a target stop position of the substrate.
In this case, the control unit images the edge by the imaging unit, detects a stop position of the substrate based on the position of the edge, and images the edge by the imaging unit, Without executing the process of detecting the stop position of the substrate based on the position of the edge, the second mode in which the stop target position of the substrate stored in the storage unit is used as the stop position of the substrate is switched. Also good.

  In the second mode, imaging of the edge of the substrate and detection of the substrate stop position based on the position of the edge are omitted, so that the processing becomes faster.

  In the position detection device, in the first mode, the control unit determines whether the variation in the stop position of each substrate detected based on the position of the edge is equal to or less than a predetermined threshold, and the variation is determined. The first mode may be switched to the second mode when it is equal to or less than the predetermined threshold.

  Thereby, the first mode can be switched to the second mode at an appropriate timing.

  In the position detection device, the control unit stops the substrate stored in the storage unit, which is used in the second mode, based on the stop position of the substrate detected in the first mode. The target position may be corrected.

  Thereby, the stop target position of the substrate used in the second mode can be appropriately corrected.

The position detection method according to the present technology includes transporting the substrate along the transport direction.
The substrate being transported is stopped.
The stopped edge in the transport direction of the substrate is imaged by the imaging unit.
Based on the position of the edge of the substrate in the captured image, the stop position of the substrate is detected.

The program related to this technology is
In the position detection device,
Transporting the substrate along the transport direction;
Stopping the substrate being transported;
Imaging an edge in the transport direction of the stopped substrate by an imaging unit;
Detecting the stop position of the substrate based on the position of the edge of the substrate in the captured image.

The manufacturing method of the board | substrate which concerns on this technique includes conveying a board | substrate along a conveyance direction.
The substrate being transported is stopped.
The stopped edge in the transport direction of the substrate is imaged by the imaging unit.
Based on the position of the edge of the substrate in the captured image, the stop position of the substrate is detected.
Processing necessary for manufacturing the substrate is performed on the substrate present at the detected stop position.

  The processes necessary for manufacturing the substrate include, for example, a process of printing solder on the board, a process of inspecting the board on which the solder is printed, a process of mounting electronic components on the board, and a board on which electronic components are mounted. For example, a process of inspecting.

  As described above, according to the present technology, it is possible to provide a technology capable of appropriately detecting the stop position of the substrate when the substrate is stopped without a stopper in the transport unit, for example.

It is a figure which shows the mounting system for manufacturing a board | substrate. It is a perspective view showing an inspection device to which a position detection device concerning this art is applied. It is the figure which looked at the inspection apparatus from the conveyance direction of a board | substrate. It is a figure which shows the position of the deceleration sensor and inspection sensor which an inspection apparatus has. It is a block diagram which shows an inspection apparatus. It is a flowchart which shows the process of an inspection apparatus. It is a flowchart which shows the process of an inspection apparatus. It is a flowchart which shows the process of an inspection apparatus. It is a flowchart which shows the process of an inspection apparatus. It is a figure which shows the relationship between the imaging range of the imaging part located in the edge stop prediction position, and the stop position of a board | substrate. It is a figure which shows the positional relationship of the imaging range of an imaging part, and the edge of the front end side of a board | substrate when an imaging unit is moved from the edge stop estimated position. It is a figure which shows an example of the alarm screen displayed on a display part. It is a figure which shows an example of the teaching screen displayed on a display part. It is a flowchart which shows the process of the test | inspection apparatus which concerns on other embodiment. It is a flowchart which shows the process in a 2nd mode. It is a flowchart which shows the process in a 2nd mode.

  Hereinafter, embodiments according to the present technology will be described with reference to the drawings.

<First Embodiment>
FIG. 1 is a diagram showing a mounting system 100 for manufacturing a substrate 1.
As shown in FIG. 1, the mounting system 100 includes a screen printing apparatus 101, a printing inspection apparatus 102a, a mounting apparatus 103, a mounting inspection apparatus 102b, a reflow furnace 104, a cleaning / drying apparatus 105, and a final inspection apparatus in order from the upstream side. 102c. The mounting system 100 also includes a control device 106 that controls these various devices in an integrated manner. Various devices included in the mounting system 100 are connected via a communication cable so that they can communicate with each other.

  The control device 106 is, for example, a PC (Personal computer), and includes a control unit 5, an input unit 8, a display unit 7, and the like.

  The screen printing apparatus 101 includes a screen in which an opening is formed at a position corresponding to a printing pattern, a supply unit that supplies paste solder on the screen, and a squeegee that is slid on the screen. In addition, the screen printing apparatus 101 controls the screen printing apparatus 101, which transports the substrate 1 and positions it at the target stop position, an imaging unit that captures the alignment mark 3 provided on each of the board 1 and the screen, and the screen printing apparatus 101. And a control unit for controlling.

  The screen printing apparatus 101 slides a squeegee on the screen and prints solder on the substrate 1 positioned below the clean surface. Then, the screen printing apparatus 101 delivers the board 1 on which the solder is printed to the print inspection apparatus 102a.

  The print inspection apparatus 102a includes a transport unit that transports the substrate 1 on which the solder is printed and is positioned at the target stop position, an imaging unit that captures the substrate 1 on which the solder is printed, and the substrate 1 based on the captured image. And a control unit that inspects the printed state of the solder two-dimensionally or three-dimensionally. The print inspection apparatus 102a transfers the substrate 1 determined to be in a good print state to the mounting apparatus 103, and discards the substrate 1 determined to be in a bad print state (or sends it to re-inspection).

  The mounting apparatus 103 includes a transport unit that transports the substrate 1 on which the solder is printed and is positioned at the stop target position, and an imaging unit 31 that captures an image of the alignment mark 3 provided on the substrate 1 (generally, on the mounting head). Provided). In addition, the mounting apparatus 103 includes a supply unit that supplies various electronic components such as resistors, capacitors, and inductors, a mounting head that sucks and mounts electronic components supplied from the supply unit, and the mounting apparatus 103. And a control unit that controls the entire system. The mounting apparatus 103 mounts an electronic component on the substrate 1 by the mounting head, and then transfers the substrate 1 on which the electronic component is mounted to the mounting inspection apparatus 102b.

  The mounting inspection apparatus 102b includes a transport unit that transports the substrate 1 on which the electronic component is mounted and positions the substrate 1 at the stop target position, and an imaging unit that captures an image of the substrate 1 on which the electronic component is mounted. The mounting inspection apparatus 102b has a control unit that analyzes the substrate 1 two-dimensionally or three-dimensionally based on the captured image and inspects the mounting state of the electronic component. The mounting inspection apparatus 102b transfers the substrate 1 determined to be in a good mounting state to the reflow furnace 104, and discards the substrate 1 determined to be in a defective mounting state (or sends it to reinspection).

  The reflow furnace 104 melts the solder by reflowing the substrate 1 on which the electronic component is mounted, and connects the electronic component and the wiring provided on the substrate 1 via the solder. Then, the reflow furnace 104 delivers the substrate 1 after the reflow process to the cleaning / drying apparatus 105.

  The cleaning / drying device 105 cleans excess components such as flux adhering to the surface of the substrate 1 after the reflow process, and dries the cleaned substrate 1. Then, the cleaning / drying apparatus 105 transfers the substrate 1 to the final inspection apparatus 102c.

  The final inspection apparatus 102c transports the substrate 1 after the reflow processing and positions the substrate 1 at the stop target position, an imaging unit that images the substrate 1, and two-dimensionally or three-dimensionally the substrate 1 based on the captured image. And a control unit that performs dimensional analysis and final inspection of the substrate 1. The final inspection device 102c delivers the substrate 1 determined to be non-defective in the final inspection to a storage device (not shown), and discards the substrate 1 determined to be defective in the final inspection (or re-inspection). turn).

  The position detection apparatus for the substrate 1 according to the present technology can be applied to, for example, the screen printing apparatus 101, the print inspection apparatus 102a, the mounting apparatus 103, the mounting inspection apparatus 102b, and the final inspection apparatus 102c. Typically, the position detection device is any device that stops the substrate 1 at the stop target position and performs processing necessary for manufacturing the substrate 1 on the substrate 1. Applicable.

  Here, the processes necessary for manufacturing the substrate 1 include, for example, a process of printing solder on the substrate 1, a process of inspecting the substrate 1 on which the solder is printed, a process of mounting electronic components on the substrate 1, For example, a process of inspecting the substrate 1 on which electronic components are mounted.

  Hereinafter, for convenience, the case where the position detection device according to the present technology is applied to the inspection device 102 such as the print inspection device 102a, the mounting inspection device 102b, and the final inspection device 102c will be described as an example.

  FIG. 2 is a perspective view showing the inspection apparatus 102 to which the position detection apparatus according to the present technology is applied. FIG. 3 is a view of the inspection apparatus 102 as viewed from the conveyance direction of the substrate 1. FIG. 4 is a diagram showing the positions of the deceleration sensor 52 and the stop sensor 53 that the inspection apparatus 102 has. FIG. 5 is a block diagram showing the inspection apparatus 102.

  As shown in these drawings, the inspection apparatus 102 transports the substrate 1 along the transport direction (X-axis direction) and stops the transported substrate 1 at a stop target position (without a stopper). Have In addition, the inspection apparatus 102 includes a backup unit 20 that supports the substrate 1 stopped at the stop target position from below. Further, the inspection apparatus 102 moves the imaging unit 30 in the XY direction, and an imaging unit 30 having an illumination unit 32 that irradiates light to the substrate 1 and an imaging unit 31 that images the substrate 1 irradiated with light. And an imaging unit moving mechanism 40 to be moved.

  In addition, the inspection apparatus 102 includes a carry-in sensor 51 (see FIG. 5) that detects the carry-in of the substrate 1 delivered from an apparatus disposed on the upstream side of the inspection apparatus 102, and the substrate 1 that is transported by the transport unit 10. A deceleration sensor 52 and a stop sensor 53 for detecting the passage of the vehicle. Furthermore, the inspection apparatus 102 includes a control unit 5, a storage unit 6, a display unit 7, an input unit 8, and a communication unit 9.

  The position detection device according to the present technology includes at least the imaging unit 31, the transport unit 10, and the control unit 5.

  The substrate 1 to be inspected by the inspection apparatus 102 has, for example, a rectangular shape in plan view, and includes a leading edge 2a and a trailing edge 2b in the transport direction (X-axis direction) of the substrate 1. Have.

  A plurality of alignment marks 3 are provided on the substrate 1 (see FIG. 2). In the example shown in FIG. 2, an example is shown in which the alignment mark 3 is provided in the vicinity of the corner on the diagonal line of the substrate 1. As shown in FIG. 2, the alignment mark 3 is not limited to the case where the dedicated alignment mark 3 is specifically provided on the substrate 1, and a predetermined pattern (such as a wiring pattern) on the substrate 1 may be used as the alignment mark 3.

  The transport unit 10 includes two guides 11 that guide the substrate 1 along the transport direction so as to sandwich the substrate 1 from both sides. Each guide 11 is a plate-like member having a long shape in the conveyance direction of the substrate 1. A plurality of legs 12 for supporting the guide 11 from below is provided on the lower side of each guide 11. Each guide 11 is mounted on a base (not shown) of the inspection apparatus 102 via the leg portion 12.

  Conveyor belts 13 capable of forward and reverse rotation are provided on the inner side surfaces of the respective guides 11. The transport unit 10 can transport the substrate 1 to the target stop position by driving the conveyor belt 13 and can transport the substrate 1 that has been inspected. The transport unit 10 is not provided with a mechanical stopper, and the substrate 1 is stopped at the stop target position (or the vicinity thereof) by stopping the driving of the conveyor belt 13.

  In the example shown in FIGS. 2 and 4, the target stop position of the substrate 1 is a position near the center in the longitudinal direction of the guide 11. In the description of FIGS. 2 and 4, the substrate 1 is described as being carried in from the right side and carried out to the left side. That is, in FIGS. 2 and 4, the left direction is the direction in which the substrate 1 is transported.

  Each guide 11 is formed such that the upper end portion is bent inward, and the upper end portion of the guide 11 supports the substrate 1 from above when the substrate 1 is moved upward by the backup unit 20. It is possible. One of the two guides 11 is movable in a direction (Y-axis direction) perpendicular to the transport direction of the substrate 1. Thereby, the board | substrate 1 located in the stop target position can be clamped from both sides with the two guides 11, and can be fixed. In this way, the substrate 1 is inspected with the substrate 1 fixed.

  In the example shown in the figure, the case where the number of the conveyance units 10 is one is shown, but the number of the conveyance units 10 may be two or more. In this case, the transport units 10 are arranged so as to be arranged in the Y-axis direction.

  The carry-in sensor 51 is provided on a carry-in conveyor (not shown) arranged on the upstream side of the carrying unit 10 and detects the carry-in of the substrate 1 delivered from the upstream side of the inspection apparatus 102. The carry-in sensor 51 is configured by, for example, a reflective optical sensor.

  Similarly to the carry-in sensor 51, the deceleration sensor 52 and the stop sensor 53 are also configured by, for example, a reflection type optical sensor. The deceleration sensor 52 and the stop sensor 53 are disposed at a height corresponding to the height through which the substrate 1 passes with respect to one or both guides 11 (see FIG. 4). The stop sensor 53 is disposed at a position where the edge 2a on the front end side of the substrate 1 can be detected when the substrate 1 reaches a position slightly upstream from the target stop position. The deceleration sensor 52 is disposed, for example, at a position about 100 mm upstream from the stop sensor 53.

  The deceleration sensor 52 and the stop sensor 53 are switched between “ON” and “OFF” at the moment when the edge 2a on the front end side of the substrate 1 passes through the position where these sensors are arranged. Therefore, these sensors 52 and 53 can detect that the edge 2 at the front end of the substrate 1 has passed the position corresponding to the sensors 52 and 53.

  When the passage of the edge 2a on the front end side of the substrate 1 is detected by the deceleration sensor 52, the driving of the conveyor belt 13 is controlled so that the conveyance speed of the substrate 1 is reduced. Further, when the stop sensor 53 detects the passage of the edge 2a on the front end side of the substrate 1, the driving of the conveyor belt 13 is controlled so that the rotation of the conveyor belt 13 is stopped.

  Even if the stop sensor 53 detects the passage of the edge 2a on the front end side of the substrate 1 and the rotation of the conveyor belt 13 is stopped, the substrate 1 does not stop immediately. That is, the substrate 1 slightly stops in the traveling direction of the substrate 1 and then stops at the stop target position (or in the vicinity thereof). In the present technology, since no mechanical stopper is provided, the substrate 1 is not necessarily stopped at the target stop position accurately, and the position at which the substrate 1 is stopped may deviate from the target stop position. There is.

  The moving distance d (that is, the distance d between the stop sensor 53 and the edge 2a on the front end side of the substrate 1) that the substrate 1 travels in the traveling direction is related to the weight (type) of the substrate 1. Typically, the moving distance d of the substrate 1 increases as the weight of the substrate 1 increases. Since the distance d is different depending on the weight (type) of the substrate 1, the stop target position where the substrate 1 is stopped is different for each weight (type) of the substrate 1.

  The backup unit 20 includes a backup plate 21, a plurality of support pins 22 erected on the backup plate 21, and a plate lifting mechanism 23 that lifts and lowers the backup plate 21.

  After the substrate 1 is stopped, the backup unit 20 is moved upward by the plate lifting mechanism 23. As the backup unit 20 moves upward, the substrate 1 is pushed upward by the support pins 22 of the backup unit 20, whereby the substrate 1 is sandwiched between the upper end of the guide 11 and the backup unit 20, The substrate 1 is positioned in the vertical direction.

  The imaging unit 30 includes an imaging unit 31 and an illumination unit 32. The illumination unit 32 of the imaging unit 30 includes a dome-shaped dome member 32a having an opening formed at the top thereof, and a plurality of illuminations 32b disposed inside the dome member 32a. The illumination 32b is configured by, for example, an LED (Light Emitting Diode).

  The imaging unit 31 is fixed to the position of the opening provided in the dome member 32 a on the upper side of the dome member 32 a of the illumination unit 32, and is arranged so that its optical axis is perpendicular to the inspection surface of the substrate 1. Is done. The imaging unit 31 includes an imaging element such as a CCD sensor (CCD: Charge Coupled Device) or a CMOS sensor (CMOS: Complementary Metal Oxide Semiconductor), and an optical system such as an imaging lens.

  The imaging unit 31 captures an image of the edge 2 of the substrate 1 stopped at the stop target position (or the vicinity thereof) (in this embodiment, the edge 2a on the front end side) or the substrate 1 under the control of the control unit 5. The upper alignment mark 3 is imaged, or the inspection surface of the substrate 1 is imaged.

  The imaging range 31a of the imaging unit 31 is, for example, about 35 mm × 35 mm. When the inspection surface of the substrate 1 is imaged by the imaging unit 31, the imaging unit 31 moves a plurality of regions on the substrate 1 that need to be inspected while being moved in the X-axis direction and the Y-axis direction by the imaging unit moving mechanism 40. Take images in batches.

  In the example shown in the figure, the case where the number of imaging units 30 is one is shown, but the number of imaging units 30 may be two or more.

  The imaging unit moving mechanism 40 moves the imaging unit 30 along the transport direction (X-axis direction) of the substrate 1 and the direction (Y-axis direction) orthogonal to the transport direction of the substrate 1. The imaging unit moving mechanism 40 functions as a moving mechanism that moves the imaging unit 31 along the conveyance direction in order to change the relative position of the imaging unit 31 and the substrate 1 in the conveyance direction (X-axis direction). . The imaging unit moving mechanism 40 is configured by, for example, a ball screw driving mechanism or a rack and pinion driving mechanism.

  The control unit 5 is configured by, for example, a CPU (Central Processing Unit) or the like, and comprehensively controls each unit of the inspection apparatus 102. For example, the control unit 5 controls the imaging unit 31 to image the edge 2 in the conveyance direction of the substrate 1 or to stop the substrate 1 based on the position of the edge 2 of the substrate 1 in the captured image. Is detected. The processing of the control unit 5 will be described in detail later.

  The storage unit 6 includes a volatile memory used as a work area for the control unit 5 and a non-volatile memory in which various data and programs necessary for the processing of the control unit 5 are fixedly stored. The various programs may be read from a portable recording medium such as an optical disk or a semiconductor memory.

  The nonvolatile memory stores a table in which the type of the substrate 1, the weight of the substrate 1, the target stop position of the substrate 1, and the predicted edge stop position are associated with each other. Here, the predicted edge stop position is a position where the edge 2 of the substrate 1 is expected to stop when it is assumed that the substrate 1 has stopped at the stop target position. At this edge stop expected position, a process of trying to image the edge 2 of the substrate 1 is executed.

  As described above, since the moving distance d that the substrate 1 travels in the traveling direction after the driving of the conveyor belt 13 is stopped differs depending on the weight (type) of the substrate 1, the stop target position of the substrate 1, The expected edge stop position also varies depending on the weight (type) of the substrate 1. Accordingly, the type of the substrate 1, the weight of the substrate 1, the target stop position of the substrate 1, and the predicted edge stop position are associated with each other and are tabulated.

  The display unit 7 includes, for example, a liquid crystal display, an EL (Electro Luminescence) display, and the like. The input unit 8 includes a keyboard, a mouse, a touch sensor, and the like, and inputs various instructions from the operator. The communication unit 9 transmits information to other devices arranged in the mounting system 100 and receives information from other devices.

[Description of operation]
Next, the operation of the inspection apparatus 102 will be described. 6 to 9 are flowcharts showing processing of the inspection apparatus 102.

  With reference to FIG. 6, first, the control unit 5 starts the operation of carrying the substrate 1 delivered from the apparatus disposed upstream of the inspection apparatus 102 into the inspection apparatus 102 by driving the carry-in conveyor. (Step 101). Next, the control unit 5 determines whether or not the carry-in sensor 51 provided on the carry-in conveyor detects the carry-in of the substrate 1 (step 102).

  When the edge 2 a on the front end side of the substrate 1 passes in front of the carry-in sensor 51, a detection signal is output from the carry-in sensor 51. When receiving the detection signal from the carry-in sensor 51 (YES in Step 102), the control unit 5 starts driving the conveyor belt 13 of the transport unit 10 (Step 103).

  Next, the control unit 5 controls the imaging unit moving mechanism 40 to move the imaging unit 30 to the expected edge stop position (step 104). Note that the expected edge stop position differs for each weight (type) of the substrate 1 as described above. Therefore, the control unit 5 reads the predicted edge stop position corresponding to the type of the substrate 1 currently being inspected from the table, and moves the imaging unit 30 to the predicted edge stop position.

  The edge 2 to be imaged may be either the edge 2a on the front end side 2a or the edge 2b on the rear end side, but in this embodiment, the edge 2 to be imaged. Is described as being the edge 2a on the front end side in the transport direction.

  Next, the control part 5 determines whether the board | substrate 1 was detected by the deceleration sensor 52 (step 105). When the edge 2 a on the front end side of the substrate 1 conveyed by the conveyor belt 13 reaches the front of the deceleration sensor 52, a detection signal is output from the deceleration sensor 52. When receiving the detection signal from the deceleration sensor 52 (YES in Step 105), the controller 5 decelerates the conveyor belt 13 (Step 106).

  Next, the control unit 5 determines whether or not the substrate 1 is detected by the stop sensor 53 (step 107). When the edge 2 a on the front end side of the substrate 1 conveyed by the conveyor belt 13 reaches the front of the stop sensor 53, a detection signal is output from the stop sensor 53. When receiving the detection signal from the stop sensor 53 (YES in Step 107), the controller 5 stops the driving of the conveyor belt 13 (Step 108).

  Next, the control unit 5 moves the backup unit 20 upward, positions the substrate 1 in the vertical direction, and then moves one guide 11 in the Y-axis direction so that the substrate 1 is moved to both sides by the pair of guides 11. Then, the substrate 1 is fixed (step 109).

  Next, the control unit 5 turns on the illumination 32b of the imaging unit 30 that has been moved to the expected edge stop position, and attempts to image the edge 2a on the front end side of the substrate 1 by the imaging unit 31 (step 110).

  Here, when the driving of the conveyor belt 13 is stopped in step 108, the substrate 1 does not stop immediately, but is stopped at the stop target position after slightly proceeding in the traveling direction. In addition, since the mechanical stopper is not provided in this technique, the board | substrate 1 is not necessarily stopped to a stop target position correctly, and the position where the board | substrate 1 is stopped will shift | deviate from a stop target position. there is a possibility.

  Basically, the shift amount of the stop position of the substrate 1 with respect to the stop target position is expected not to be so large if the substrate 1 is of the same type (if the substrate 1 has the same weight). However, for example, when foreign matter is attached to the back surface of the substrate 1, the foreign matter causes the substrate 1 to slide on the conveyor belt 13 when the conveyor belt 13 is stopped, and the actual substrate 1. There may be a case where the stop position is greatly shifted in the traveling direction.

  Even if the position where the substrate 1 is stopped deviates from the target stop position, if the amount of deviation is within the imaging range 31 a of the imaging unit 31, the imaging unit 31 at the expected edge stop position causes the tip of the substrate 1. The side edge 2a can be imaged. In the present embodiment, since the imaging range 31a is 35 mm × 35 mm, if the deviation amount of the substrate 1 with respect to the stop target position is within ± 17.5 mm, the imaging unit 31 located at the edge stop expected position is the substrate 1. It is possible to take an image of the edge 2a on the tip side.

  On the other hand, when the shift amount of the substrate 1 with respect to the stop target position exceeds the imaging range 31a (± 17.5 mm) of the imaging unit 31, the edge 2a on the front end side of the substrate 1 is moved by the imaging unit 31 at the expected edge stop position. I can't take an image.

  FIG. 10 is a diagram illustrating a relationship between the imaging range 31 a of the imaging unit 31 positioned at the edge stop expected position and the stop position of the substrate 1. The upper drawing in FIG. 10 shows an example in which the edge 2 a on the front end side of the substrate 1 is within the imaging range 31 a of the imaging unit 31. In the central drawing in FIG. 10, an example of the case where the substrate 1 has stopped beyond the stop target position and the edge 2 a on the front end side of the substrate 1 is not within the imaging range 31 a of the imaging unit 31. It is shown. In the lower drawing in FIG. 10, the substrate 1 has stopped before the stop target position, and the edge 2 a on the front end side of the substrate 1 is not within the imaging range 31 a of the imaging unit 31. An example is shown.

  In the present embodiment, the edge 2 of the substrate 1 can be appropriately imaged even when the edge 2a on the front end side of the substrate 1 cannot be imaged by the imaging unit 31 at the expected edge stop position. Such processing is executed (retry processing described later).

  Referring to FIG. 7, when the imaging unit 31 located at the expected edge stop position attempts to image the edge 2 a on the front end side of the substrate 1, the control unit 5 next executes step 111. In step 111, the control unit 5 performs image processing on the image captured by the imaging unit 31 at the expected edge stop position, and determines whether the image includes the edge 2 a on the front end side of the substrate 1.

  When the captured image is an image including the edge 2a on the front end side, the image on the left side is dark and the right side on which the substrate 1 is reflected becomes bright. It can be determined whether or not the image includes the edge 2a.

  For example, as shown in the upper diagram of FIG. 10, when the edge 2 a on the front end side of the substrate 1 is within the imaging range 31 a of the imaging unit 31 located at the predicted edge stop position, the substrate 1 is included in the image. A leading edge 2a is included. In this case, since edge 2 is detected in the image (YES in step 111), the control unit 5 proceeds to step 119.

  On the other hand, for example, when the edge 2a on the front end side of the substrate 1 is not within the imaging range 31a of the imaging unit 31 located at the expected edge stop position, as shown in the center diagram and the lower diagram in FIG. The edge 2a on the front end side of the substrate 1 is not included in the image. In this case, since edge 2 is not detected in the image (NO in step 111), the control unit 5 proceeds to step 112.

  In step 112, the control unit 5 executes a process of setting the count value for the number of times the retry process is executed to +1. Next, the control unit 5 determines whether or not the number of retry processes is equal to or less than the upper limit value N (step 113).

  In the retry process, the imaging unit moving mechanism 40 moves the imaging unit 30 along the conveyance direction (X-axis direction) (changes the relative position of the imaging unit 31 and the substrate 1 in the conveyance direction), and again performs imaging. This is processing for attempting to image the edge 2 by the unit 31. The upper limit value N of the number of retry processes is, for example, 2 times, but is not limited thereto. The value of N may be changeable via the input unit 8 of the inspection apparatus 102 or the input unit of the control apparatus 106, for example.

  When the number of retry processes is equal to or less than the upper limit value N (YES in step 113), the control unit 5 proceeds to the next step 114. In step 114, the control unit 5 determines that the image pickup unit 31 is based on the image picked up at the predicted edge stop position (first retry) or the image picked up in step 118 described later (after the second retry). It is determined whether or not it is located on 1 (step 114).

  For example, in the example shown in the center diagram of FIG. 10, the image captured by the imaging unit 31 at the predicted edge stop position is an image in which a part of the substrate 1 is reflected in the entire image. In this case, since the board | substrate 1 is illuminated by the light from the illumination 32b, the image imaged in the edge stop expected position turns into a bright image as a whole. When such an entire image is bright, the control unit 5 determines that the imaging unit 31 is located on the substrate 1 (YES in step 114).

  On the other hand, for example, in the case of the example shown in the lower diagram of FIG. 10, an image captured by the imaging unit 31 at the predicted edge stop position is mounted on a member below the substrate 1 (for example, a pair of guides 11 is mounted. This is an image of the base). In this case, since the light from the illumination 32b does not reach the members below the substrate 1 as a whole, the image captured at the predicted edge stop position is a dark image as a whole. When such an entire image is dark, the control unit 5 determines that the imaging unit 31 is not located on the substrate 1 (NO in step 114).

  When it is determined in step 114 that the imaging unit 31 is located on the substrate 1, the control unit 5 moves the imaging unit 30 to the carry-out side of the substrate 1 (direction in which the substrate 1 is transported) (step 1). 115). On the other hand, when it is determined in step 114 that the imaging unit 31 is not located on the substrate 1, the control unit 5 moves the imaging unit 30 to the carry-in side of the substrate 1 (opposite to the direction in which the substrate 1 is conveyed). ).

  That is, in step 114, the control unit 5 determines whether or not the imaging unit 31 is located on the substrate 1 based on the captured image, and the conveyance direction in which the imaging unit 30 should be moved according to the determination result. The direction is determined.

  In the first retry process, in step 114, the direction in which the imaging unit 30 should be moved is determined based on the image captured at the predicted edge stop position. In the second and subsequent retry processing, the direction in which the imaging unit 30 should be moved is determined based on the image captured at the position moved from the predicted edge stop position. Here, in the second and subsequent retry processes, the direction in which the imaging unit 30 is moved is the same as the direction in which the imaging unit 30 was moved last time. Accordingly, in the second and subsequent retry processing, it is possible to omit step 114 for determining which direction the imaging unit 30 is moved.

  FIG. 11 is a diagram illustrating a positional relationship between the imaging range 31a of the imaging unit 31 and the edge 2a on the front end side of the substrate 1 when the imaging unit 30 is moved from the expected edge stop position. In the center diagram of FIG. 11, it is determined that the imaging unit 31 is located on the substrate 1 and the imaging unit 30 is moved toward the carry-out side. In the lower diagram of FIG. 11, it is determined that the imaging unit 31 is not located on the substrate 1 and the imaging unit 30 is moved toward the carry-in side.

  The distance that the imaging unit 30 is moved along the transport direction is a distance corresponding to the imaging range 31 a of the imaging unit 31. For example, when the imaging range 31a in the transport direction of the imaging unit 31 is 35 mm, the moving distance of the imaging unit 30 is 35 mm. Alternatively, the moving distance of the imaging unit 30 may be set so that the imaging range 31a before the movement and the imaging range 31a after the movement overlap. In this case, for example, the overlap amount is 5 mm, and the moving distance of the imaging unit 30 is 30 mm.

  In addition, when moving the imaging unit 30, when the movable range of the imaging unit 30 is exceeded, the control unit 5 moves the imaging unit 30 to a position where the imaging unit 30 can move at the maximum.

  After moving the imaging unit 30 to the carry-out side in step 115 or after moving the imaging unit 30 to the carry-in side in step 116, the control unit 5 uses the imaging unit 31 at the moved position to move the substrate 1. An attempt is made to image the leading edge 2a (step 117). Next, the control unit 5 determines whether or not the captured image is an image including the leading edge 2a (step 118).

  When the image captured by the image capturing unit 31 after the movement is an image including the edge 2a on the front end side (YES in Step 118), the control unit 5 proceeds to Step 119. On the other hand, when the image picked up by the image pickup unit 31 after the movement is not an image including the edge 2a on the front end side (step 118), the control unit 5 returns to step 112 again and executes the processing after step 112. . That is, the control unit 5 moves the imaging unit 30 along the conveyance direction and repeats the retry process of trying to image the edge 2a on the front end side again by the imaging unit 31 until the edge 2a is detected (N is an upper limit). ).

  When the leading edge 2a is detected in step 111 or 118, the controller 5 determines the stop position of the substrate 1 in the transport direction based on the current position of the imaging unit 30 and the position of the edge 2a in the image. Detect (step 119).

  Next, the control unit 5 corrects the predicted edge stop position based on the detected actual stop position of the substrate 1, and stores the corrected edge stop predicted position in the storage unit 6 (table) (step 120). ). The control unit 5 also corrects the stop target position of the substrate 1 in accordance with the correction of the predicted edge stop position, and stores the corrected stop target position in the storage unit 6 (table).

  For example, a case where the leading edge 2a is detected in the image captured at the predicted edge stop position (upper side in FIG. 11), but the actual stop position of the substrate 1 is shifted to the right or left from the stop target position. Suppose. In this case, the control unit 5 executes a process of shifting the edge stop predicted position to the right side or the left side according to the shift amount. Similarly, the control unit 5 executes a process of shifting the stop target position of the substrate 1 to the right side or the left side.

  Further, for example, it is assumed that the edge 2a on the front end side is not detected in the image captured at the predicted edge stop position, and the edge 2 is included in the image captured by moving the imaging unit 30 ( FIG. 11 middle and lower side). In this case, the control unit 5 executes a process of shifting the predicted edge stop position to the right side or the left side according to the shift amount of the substrate 1 from the stop target position. Similarly, the control unit 5 executes a process of shifting the stop target position of the substrate 1 to the right side or the left side.

  Alternatively, when the deviation amount of the stop position of the substrate 1 from the stop target position is too large and exceeds the threshold value, the control unit 5 uses the deviation amount to correct the expected edge stop position and the stop target position of the substrate 1. It does not have to be reflected.

  Next, the control unit 5 calculates the imaging position of the alignment mark 3 provided on the substrate 1 based on the detected stop position of the substrate 1 (step 121), and causes the imaging unit 30 to image the alignment mark 3. Move to position (step 122). And the control part 5 irradiates light to the alignment mark 3 with the illumination 32b of the imaging unit 30, and images the alignment mark 3 with the imaging part 31 (step 123). The control unit 5 typically executes a process of imaging two or more different alignment marks 3 at two or more different positions.

  Next, the control unit 5 recognizes the position of the substrate 1, the inclination of the substrate 1 around the Z axis, the size of the substrate 1, and the like based on the imaged two or more alignment marks 3 (step 124). ). Next, the control unit 5 inspects the inspection surface of the substrate 1 (step 125). In the inspection of the substrate 1, the control unit 5 divides the inspection region on the substrate 1 that needs to be inspected into a plurality of times while moving the imaging unit 30 in the X axis direction and the Y axis direction by the imaging unit moving mechanism 40. Take an image. Then, the control unit 5 inspects the substrate 1 by analyzing the substrate 1 two-dimensionally or three-dimensionally based on the captured image.

  When the inspection of the substrate 1 is completed, the control unit 5 then moves one guide 11 of the transport unit 10 along the Y-axis direction to release the clamped state of the substrate 1 and moves the backup unit 20 downward. (Step 126). And the control part 5 drives the conveyor belt 13 of the conveyance part 10, and carries the board | substrate 1 out of the test | inspection apparatus 102 (step 127).

  Next, processing when the number of times of retry processing exceeds the upper limit value N and the retry processing fails will be described. In step 113 in FIG. 7, when the number of retry processes exceeds the upper limit (NO in step 113), the control unit 5 proceeds to step 128 in FIG. 9. In step 128, the control unit 5 outputs a display signal for the alarm screen 15 and causes the display unit 7 to display the alarm screen 15.

  FIG. 12 is a diagram illustrating an example of the alarm screen 15. As shown in FIG. 12, on the left side of the alarm screen 15, the date and time when the error occurred, the lane where the error occurred (when the transport unit 10 is 2 or more), the alarm code, and details about the alarm are displayed. Is displayed. On the right side of the alarm screen 15, candidates that can be assumed as the cause of the error and a coping method for eliminating the error are displayed.

  In the example shown in FIG. 12, it can be seen that an error due to failure in recognition of edge detection occurred in the front lane (conveyance unit 10) at 12:24:56 on October 24, 2013. Further, it can be seen from the possible cause that the stop position of the substrate 1 may exceed the imaging range 31a of the imaging unit 31 and that the image processing may have failed in edge detection. Further, as a coping method for eliminating this error, the substrate 1 is returned to the loading side and then loaded again, the stop position of the substrate 1 is confirmed, parameters of the inspection method (for example, edge stop prediction) It is understood that the position etc. may be adjusted.

  In FIG. 12, a “teaching” button 15 a and a “close” button 15 b are displayed at the lower position of the alarm screen 15. The “teaching” button 15a is a button for changing the display to the teaching screen 16 (see FIG. 13), and the “close” button 15b is a button for closing the alarm screen 15.

  Referring to FIG. 9, after displaying alarm screen 15 on the screen, control unit 5 determines whether “close” button 15b is selected via input unit 8 (step 129). When the “close” button 15b is not selected (NO in step 129), the control unit 5 determines whether the “teaching” button 15a is selected via the input unit 8 (step 130). When the “teaching” button 15a is not selected (NO in step 130), the control unit 5 returns to step 129 and determines whether the “close” button 15b is selected.

  When the “teaching” button 15a is selected (YES in step 130), the control unit 5 outputs a display signal of the teaching screen 16 and causes the display unit 7 to display the teaching screen 16 (step 131). As a result, the teaching screen 16 is displayed on the display unit 7 instead of the alarm screen 15.

  FIG. 13 is a diagram illustrating an example of the teaching screen 16. The teaching screen 16 manually moves the imaging unit 30 in the transport direction and aligns the position of the imaging unit 31 with the position of the edge 2a on the front end side, thereby teaching the stop position of the substrate 1 to the inspection apparatus 102. It is a screen to do.

  On the left side of the teaching screen 16, an image display area 16 a for displaying an image currently captured by the imaging unit 31 is arranged. In the example illustrated in FIG. 13, an example in which a part of the left side of the substrate 1 is reflected at a position on the right side of the image is illustrated. At the center position in the horizontal direction of the image display area 16a, one line 16b is arranged in the vertical direction. The line 16b is a line for performing alignment with the edge 2a on the front end side of the substrate 1.

  Further, on the right side of the image display area 16a, a “zoom-in” button 16c for zooming in on the image, a “zoom-out” button 16d for zooming out the image, and “actual magnification” for displaying the image at the actual magnification. A button 16e and a “full screen” button 16f for displaying an image on a full screen are arranged.

  On the right side of the teaching screen 16, a four-way button 16g for moving the imaging unit 30 along the X-axis and Y-axis directions is displayed. The four-direction button 16g includes a “left direction” button 16h, a “right direction” button 16i, an “upward direction” button 16j, and a “downward direction” button 16k. The operator moves the imaging unit 30 along the X-axis direction by operating the “left direction” button 16h and the “right direction” button 16i, among the four-direction buttons 16g, and thereby aligns the position. The line 16b for use and the edge 2a on the front end side of the substrate 1 are aligned.

  For example, in the example shown in FIG. 13, the operator moves the imaging unit 30 to the right by selecting the “right direction” button 16 i, and thereby the alignment line 16 b and the front end side of the substrate 1. The edge 2a is aligned.

  Further, on the upper side of the four-way button 16g, a “high speed” button 16l and a “low speed” button 16m for switching between high speed and low speed of the moving speed of the imaging unit 30 are displayed. Typically, when the alignment line 16b approaches the edge 2a on the front end side of the substrate 1, the operator switches the moving speed of the imaging unit 30 from “high speed” to “low speed”. Make fine adjustments to the alignment.

  On the teaching screen 16, an “OK” button 16 n and a “Cancel” button 16 o are displayed at the lower position. The “OK” button 16n is a button for confirming teaching, and the “Cancel” button 16o is a button for canceling teaching and returning to the alarm screen 15.

  Referring to FIG. 9, when displaying teaching screen 16 on display unit 7, control unit 5 determines whether “cancel” button 16o has been selected via input unit 8 (step 132). When the “cancel” button 16o is selected (YES in step 132), the control unit 5 causes the display unit 7 to display the alarm screen 15 instead of the teaching screen 16 (step 128).

  When the “cancel” button 16o has not been selected (NO in step 132), the control unit 5 determines whether any of the four-way buttons 16g has been selected via the input unit 8 (step 133). . If no button has been selected (NO in step 133), the control unit 5 returns to step 132 and determines whether the “cancel” button 16o has been selected.

  On the other hand, when any one of the four-direction buttons 16g is selected (YES in Step 133), the control unit 5 moves the imaging unit 30 in the direction corresponding to the button (Step 134). As the imaging unit 30 moves, the image displayed in the image display area 16a changes. By such processing, the operator can move the imaging unit 30 by selecting the four-way button 16g to align the alignment line 16b with the edge 2a on the front end side of the substrate 1. it can.

  When the image pickup unit 30 is moved, the control unit 5 next determines whether or not the “OK” button 16n is selected via the input unit 8 (step 135). If the OK button has not been selected (NO in step 135), the control unit 5 returns to step 132 and determines whether the “cancel” button 16o has been selected.

  On the other hand, when the “OK” button 16 n is selected (YES in step 135), the control unit 5 proceeds to the next step 136. For example, the operator selects the “OK” button 16 n after the alignment between the alignment line 16 b and the edge 2 a on the front end side of the substrate 1 is completed.

  When the “OK” button 16n is selected, the control unit 5 calculates the stop position of the substrate 1 in the transport direction based on the current position of the imaging unit 30 (step 136). Next, the control unit 5 stores the calculated stop position of the substrate 1 in the storage unit 6 as a teaching result (step 137). Then, the control unit 5 returns to step 128 to display the alarm screen 15 on the display unit 7.

  When the “close” button 15b on the alarm screen 15 is selected (YES in step 129), the control unit 5 determines whether the stop position of the substrate 1 based on the teaching result is stored in the storage unit 6 (step 138). . When the teaching result is stored in the storage unit 6 (YES in step 138), the control unit 5 calculates the imaging position of the alignment mark 3 based on the stop position of the substrate 1 based on the teaching result (step 139).

  After calculating the imaging position of the alignment mark 3, the control unit 5 then proceeds to step 122 in FIG. 8 and moves the imaging unit 30 to the imaging position of the alignment mark 3. And the control part 5 performs the process after step 123. FIG.

  On the other hand, when the teaching result is not stored in the storage unit 6 in step 138 (NO in step 138), the control unit 5 moves one guide 11 of the transport unit 10 in the Y-axis direction to The clamped state is released (step 140). And the control part 5 reversely rotates the conveyor belt 13, and returns the board | substrate 1 to the carrying-in side (step 141). After that, the control unit 5 returns to Step 103, rotates the conveyor belt 13 in the forward direction, transports the substrate 1 toward the transport side, and then executes the processing after Step 104.

  In the description here, the case where the alarm screen 15 and the teaching screen 16 are displayed on the display unit 7 of the inspection apparatus 102 has been described. However, the alarm screen 15 and the teaching screen 16 are displayed on the display unit of the control device 106. Also good. In this case, the control device 106 displays the alarm screen 15 and the teaching screen 16 on the display unit 7 of the control device 106 based on the display signal output from the control unit 5 of the inspection device 102.

[Action etc.]
The inspection device 102 (position detection device) according to the present embodiment has the following operational effects, for example.

  In the present embodiment, the stop position of the substrate 1 is detected based on the position of the edge 2 of the substrate 1 in the image captured by the imaging unit 31. Therefore, even when the substrate 10 is stopped without a stopper in the transport unit 10, for example, the stop position of the substrate 1 can be detected appropriately.

  In addition, since the imaging unit 31 attempts to capture the edge 2 at the expected edge stop position where the edge 2 of the substrate 1 will be stopped, the imaging unit 31 can appropriately capture the edge 2 of the substrate 1. it can. In addition, since the predicted edge stop position is set to a different position for each weight (type) of the substrate 1, the imaging unit at the predicted edge stop position even when the weight (type) of the substrate 1 is different. 31 can appropriately image the edge 2 of the substrate 1.

  Further, in the present embodiment, the predicted edge stop position is corrected based on the detected actual stop position of the substrate 1, and therefore the predicted edge stop position can be corrected to an appropriate position.

  In the present embodiment, since the retry process is performed for edge detection, even when the edge 2 of the substrate 1 cannot be imaged by the imaging unit 31 at the expected edge stop position, the substrate 1 The edge 2 can be appropriately imaged.

  Further, in the retry process, based on the captured image, it is determined in which direction the imaging unit 30 should be moved in the transport direction, so that the speed until the edge 2 of the substrate 1 is detected is improved. Can do.

  In the present embodiment, the teaching screen 16 is displayed when the retry process fails. Thereby, the operator can teach the position of the substrate 1 to the inspection apparatus 102 by operating the teaching screen 16 and aligning the position of the imaging unit 31 with the edge 2 of the substrate 1.

Second Embodiment
Next, a second embodiment of the present technology will be described. In the description after the second embodiment, the description of the members having the same functions or configurations as those of the first embodiment will be omitted or simplified.

  In the first embodiment described above, the edge detection of the substrate 1 is performed for all the substrates 1. On the other hand, in the second embodiment, when the stop position of the substrate 1 stopped without a stopper is stable, the edge detection of the substrate 1 is omitted. Since this point is different from the first embodiment in the second embodiment, this point will be mainly described.

  The inspection apparatus 102 (position detection apparatus) according to the second embodiment has two modes, and the two modes can be switched. In the first mode, the edge 2 of the substrate 1 is imaged by the imaging unit 31 for all the substrates 1, and the stop position of the substrate 1 is detected based on the position of the edge 2. In this first mode, the same processing as in FIGS. 6 to 9 described above is executed.

  In the second mode, the stop target of the substrate 1 stored in the storage unit 6 is executed without performing the process of capturing the edge 2 by the imaging unit 31 and detecting the stop position of the substrate 1 based on the position of the edge 2. In this mode, the position is the stop position of the substrate 1.

  FIG. 14 is a flowchart showing processing of the inspection apparatus according to the second embodiment. 15 and 16 are flowcharts showing processing in the second mode.

  In the second embodiment, first, the control unit 5 determines whether or not the current mode is the first mode (step 201). In the initial state, the first mode is executed. When the current mode is the first mode, the control unit 5 executes processing in the first mode (step 202). That is, the control unit 5 captures the edge 2 of the substrate 1 with the imaging unit 31 for all the substrates 1, and detects the stop position of the substrate 1 based on the position of the edge 2 (see FIGS. 6 to 9).

  When the process in the first mode is executed, the control unit 5 next determines whether or not a predetermined condition is satisfied in the process in the first mode (step 202). Here, as the predetermined condition, the following (1) and (2) may be mentioned.

(1) In the image picked up by the image pickup unit 31 at the expected edge stop position, the image pickup of the edge 2 of the substrate 1 has succeeded more than a predetermined number of times.
Here, the predetermined number of times is, for example, three times, but is not limited thereto. This predetermined number of times may be changeable via the input unit 8.

(2) The variation in the stop position of each substrate 1 detected based on the position of the edge 2 of the substrate 1 is not more than a predetermined threshold value.
Here, the predetermined threshold is, for example, about 1.5 mm, but is not limited thereto. This threshold value may be changeable via the input unit 8.

  The set condition may be both of the conditions (1) and (2), or may be one of the conditions (1) and (2).

  When the control unit 5 determines that both of the conditions (1) and (2) (or (1) or (2)) are satisfied (YES in step 203), the first mode is changed to the first mode. The mode is switched to mode 2 (step 204). That is, the control unit 5 switches the first mode to the second mode when the stop position of the substrate 1 stopped without a stopper is stable. And the control part 5 returns to step 201, and determines whether the present mode is a 1st mode.

  On the other hand, when it is determined that both conditions (or (1) or (2)) shown in (1) and (2) are not satisfied (NO in step 203), the control unit 5 Return to step 201 without switching the mode to the second mode.

  In step 201, when the current mode is the second mode (NO in step 201), the control unit 5 executes processing in the second mode (step 205).

  The process in the second mode will be described with reference to FIGS. 15 and 16. Comparing the flowchart in the second mode shown in FIG. 15 with the flowchart in the first mode shown in FIG. 6, steps 304 and 310 are different from steps 104 and 110.

  That is, in the first mode, the control unit 5 moves the imaging unit 30 to the expected edge stop position, and executes processing for attempting to image the edge 2 of the substrate 1 by the imaging unit 31 (steps 104 and 110 in FIG. 6). ). On the other hand, in the second mode, the control unit 5 does not perform the process of moving the imaging unit 30 to the expected edge stop position and imaging the edge 2 of the substrate 1 by the imaging unit 31. In this case, the control unit 5 directly moves the imaging unit 30 to the alignment mark imaging position, and executes processing for imaging the alignment mark 3 by the imaging unit 31 (FIG. 15, steps 304 and 310). In addition, the control part 5 performs the process which images two or more different alignment marks 3 in two or more different positions.

  When the imaging unit 30 is moved to the alignment mark imaging position in step 304, the control unit 5 assumes that the substrate 1 exists at the target stop position stored in the storage unit 6, and sets the alignment mark imaging position from this stop target position. calculate. Then, the imaging unit 30 is moved to the alignment mark imaging position.

  Here, in the first mode, the stop target position of the substrate 1 is corrected to an appropriate position according to the actual stop position of the substrate 1 detected based on the image captured by the imaging unit 31 ( FIG. 8, step 120). Therefore, in the second mode, the alignment mark 3 can be imaged at an appropriate alignment mark imaging position by calculating the alignment mark imaging position using this stop target position.

  Referring to FIG. 16, when the alignment mark 3 is imaged, the control unit 5 next determines the position of the substrate 1 and the Z axis of the substrate 1 based on the imaged two or more alignment marks 3. The inclination and the size of the substrate 1 are recognized (step 311).

  Next, the control unit 5 determines whether or not the position of the substrate 1 has been successfully recognized (step 312). When the position of the substrate 1 is successfully recognized (YES in step 312), the control unit 5 inspects the inspection surface of the substrate 1 (step 313). When the inspection of the substrate 1 is completed, the control unit 5 releases the clamped state of the substrate 1 (step 314) and carries the substrate 1 out of the inspection apparatus 102 (step 315).

  On the other hand, if the recognition of the position of the substrate 1 has failed (NO in step 312), the control unit 5 proceeds to the next step 316. The case where the recognition of the position of the substrate 1 fails is a case where the actual stop position of the substrate 1 is deviated from the stop target position of the substrate 1 and imaging of the alignment mark 3 fails.

  In this case, the control unit 5 moves the imaging unit 30 to the predicted edge stop position (step 316), and tries to capture the edge 2 of the substrate 1 by the imaging unit 31 at the predicted edge stop position (step 317). And the control part 5 performs the process after step 111 of FIG. That is, the control unit 5 executes retry processing and the like.

  Referring to FIG. 14, when the processing in the second mode is completed, control unit 5 next determines whether or not a predetermined condition is satisfied in the processing in the second mode (step 206). . Here, examples of the predetermined condition include the following (1) ′ and (2) ′.

(1) 'The position of the substrate 1 has failed to be recognized continuously for a predetermined number of times (see step 312).
Here, the predetermined number of times is, for example, twice, but is not limited thereto. This predetermined number of times may be changeable via the input unit 8.

(2) The number of substrates 1 whose position recognition has failed / the total number of substrates 1 processed in the second mode exceeds a predetermined threshold.
Here, the predetermined threshold is, for example, about 5%, but is not limited thereto. This threshold value may be changeable via the input unit 8.

  The set condition may be both of the conditions (1) ′ and (2) ′, or may be one of the conditions (1) ′ and (2) ′.

  When the control unit 5 determines that both conditions (or (1) ′ or (2) ′) shown in (1) ′ and (2) ′ are satisfied (YES in step 206), the control unit 5 5 switches the second mode to the first mode (step 207). That is, the control unit 5 switches the second mode to the first mode when the stop position of the substrate 1 stopped without a stopper is unstable.

  On the other hand, when it is determined that both conditions (or (1) ′ or (2) ′) shown in (1) ′ and (2) ′ are not satisfied (NO in step 206), the control unit 5 The process returns to step 201 without switching the second mode to the first mode.

  Note that it may be possible to set via the input unit 8 whether the first mode is always executed or whether the first mode and the second mode are switched.

[Action etc.]
The inspection apparatus 102 (position detection apparatus) according to the second embodiment has the following operational effects, for example.

  In the second embodiment, in the second mode, the edge 2 is imaged by the imaging unit 31 and the process of detecting the stop position of the substrate 1 based on the position of the edge 2 is omitted. Time can be shortened.

  Further, since the first mode is switched to the second mode when the stop position of the substrate 1 stopped without a stopper is stable, the first mode is switched to the second mode at an appropriate timing. Can do. Furthermore, since the second mode is switched to the first mode when the stop position of the substrate 1 stopped without a stopper is not stable, the second mode is switched to the first mode at an appropriate timing. Can do.

<Various modifications>
In the above description, for the sake of convenience, the case where the edge 2a on the front end side of the substrate 1 is to be imaged by the imaging unit 31 has been described. However, the edge 2 b on the rear end side of the substrate 1 may be an object to be imaged by the imaging unit 31. In this case, an expected edge stop position is set at a position corresponding to the edge 2b on the rear end side of the substrate 1. At this position, the imaging unit 31 attempts to image the edge 2 b on the rear end side of the substrate 1.

  The imaging unit 30 is moved in the retry process when the leading edge 2a is an imaging target of the imaging unit 31 and when the trailing edge 2b is the imaging target of the imaging unit 31. The direction is reversed.

  For example, when it is determined in step 114 of FIG. 7 that the imaging unit 31 is located at a position corresponding to the substrate 1, the control unit 5 moves the imaging unit 30 to the carry-in side of the substrate 1 (the substrate 1 is transported). In the opposite direction). On the other hand, when it is determined that the imaging unit 31 is not located at a position corresponding to the substrate 1, the control unit 5 moves the imaging unit 30 to the carry-out side of the substrate 1 (direction in which the substrate 1 is conveyed).

  In the above description, the case where the imaging unit 31 side is moved when the relative position in the transport direction of the imaging unit 31 and the substrate 1 is changed in the retry process has been described. However, in the retry process, the relative position in the transport direction of the imaging unit 31 and the substrate 1 may be changed by moving the substrate 1 side. In this case, in a state where the imaging unit 30 is stopped at the expected edge stop position, the conveyor belt 13 of the transport unit 10 is driven to move the substrate 1.

  In this case, a case will be described in which the edge 2a on the distal end side is an object to be imaged by the imaging unit 31. In this case, when it is determined in step 114 in FIG. 7 that the imaging unit 31 is located at a position corresponding to the substrate 1, the control unit 5 rotates the conveyor belt 13 of the transport unit 10 in the reverse direction to 1 is moved to the carry-in side (the direction opposite to the direction in which the substrate 1 is conveyed). On the other hand, when it is determined that the imaging unit 31 is not located at a position corresponding to the substrate 1, the control unit 5 rotates the conveyor belt 13 of the transport unit 10 in the forward direction to remove the substrate 1 (the substrate 1 is Move in the direction of conveyance).

  A case will be described in which the rear edge 2b is an imaging target of the imaging unit 31. In this case, when it is determined in step 114 in FIG. 7 that the imaging unit 31 is located at a position corresponding to the substrate 1, the control unit 5 rotates the conveyor belt 13 of the transport unit 10 in the normal direction to perform the substrate rotation. 1 is moved to the carry-out side (direction in which the substrate 1 is conveyed). On the other hand, when it is determined that the imaging unit 31 is not located at a position corresponding to the substrate 1, the control unit 5 rotates the conveyor belt 13 of the transport unit 10 in the reverse direction to bring the substrate 1 into the carry-in side (the substrate 1 is Move in the direction opposite to the direction of conveyance).

  The distance that the substrate 1 is moved along the transport direction in the retry process is related to the imaging range 31 a of the imaging unit 31. For example, when the imaging range 31a in the transport direction of the imaging unit 31 is 35 mm, the movement distance of the substrate 1 is set to 35 mm. Alternatively, when the overlap is considered, for example, the overlap amount is 5 mm and the movement distance of the substrate 1 is 30 mm.

  When the relative position in the transport direction of the imaging unit 31 and the substrate 1 is changed in the retry process, both the imaging unit 31 and the substrate 1 may be moved in the transport direction.

  In the above description, the case where the position detection device according to the present technology is applied to the inspection device 102 has been described. However, the position detection device according to the present technology may be applied to the mounting device 103 and the screen printing device 101. When the position detection device is applied to the mounting device 103, the edge 2 of the substrate 1 is imaged by an imaging unit for imaging the alignment mark attached to a mounting head that is movable in the X-axis direction and the Y-axis direction. When the position detection device is applied to the screen printing apparatus 101, the edge 2 of the substrate 1 is imaged by an imaging unit for imaging the alignment mark, which is movable in the X-axis direction and the Y-axis direction.

  Since the imaging unit 31 for substrate inspection, the imaging unit for alignment mark imaging, and the like are used as the imaging unit 31 for edge imaging, the existing imaging unit can be used as the imaging unit 31 for edge imaging. There is an advantage that cost reduction can be realized. However, the existing imaging unit does not necessarily have to be used as the imaging unit 31 for edge imaging, and a dedicated imaging unit 31 for imaging the edge 2 may be specially provided in the position detection device. .

  When a dedicated imaging unit 31 for imaging the edge 2 of the substrate 1 is specially provided, the imaging unit 31 is arranged at a position where the substrate 1 can be imaged from the lower side, for example. The imaging unit 31 may be configured to be movable in the transport direction (X-axis direction) or may be configured to be fixed at the expected edge stop position (particularly, the substrate 1 side is moved in the retry process). In the case of a form).

  In the above description, the case where the stop target position and the expected edge stop position of the substrate 1 are set in advance for each weight (type) of the substrate 1 has been described. However, the stop target position and the expected edge stop position may not be set in advance for each weight (type) of the substrate 1. For example, as the stop target position and the expected edge stop position, first, a common stop target position and expected edge stop position may be set for each weight (type) of the substrate 1.

  The reason for this will be described. As described above, in the present technology, the target stop position of the substrate 1 and the predicted edge stop position are corrected based on the actual stop position of the substrate 1. Therefore, even if a common edge stop prediction position is used for each weight (type) of the substrate 1 (that is, even if the edge stop prediction position is somewhat inaccurate), if time passes, The target stop position and the predicted edge stop position are corrected to appropriate positions for each weight (type) of the substrate 1. Therefore, the stop target position and the expected edge stop position may not be set in advance for each weight (type) of the substrate 1 (that is, may be somewhat inaccurate).

The present technology can also employ the following configurations.
(1) an imaging unit;
A transport unit that transports the substrate along the transport direction and stops the substrate being transported;
A position detection unit comprising: a control unit that captures an edge in the transport direction of the substrate that has been stopped by the imaging unit, and detects a stop position of the substrate based on a position of the edge of the substrate in the captured image apparatus.
(2) The position detection device according to (1) above,
The control unit first attempts to image the edge by the imaging unit at an expected edge stop position where the edge of the substrate will be stopped.
(3) The position detection device according to (2) above,
A position detection device further comprising a moving mechanism that moves the imaging unit or the substrate along the transport direction in order to change a relative position of the imaging unit and the stopped substrate in the transport direction.
(4) The position detection device according to (2) or (3) above,
The control unit corrects the predicted edge stop position based on the detected stop position of the substrate.
(5) The position detection device according to any one of (2) to (4) above,
The said control part image | photographs the said edge by the said imaging part in a different edge stop prediction position for every weight of the said board | substrate. The position detection apparatus.
(6) The position detection device according to (3) above,
The control unit determines whether an image captured by the imaging unit at the predicted edge stop position is an image including the edge, and when the image is not an image including the edge, A position detection device that changes a relative position of the imaging unit and the substrate in the transport direction, and again performs a retry process, which is a process of attempting to image the edge by the imaging unit.
(7) The position detection device according to (6) above,
The control unit determines a direction in the transport direction in which the imaging unit or the substrate should be moved based on an image captured by the imaging unit at the predicted edge stop position in the retry process.
(8) The position detection device according to (7) above,
In the retry process, the control unit determines whether the imaging unit is located at a position corresponding to the substrate based on an image captured by the imaging unit at the predicted edge stop position. In response, a position detection device that determines an orientation in the transport direction in which the imaging unit or the substrate should be moved.
(9) The position detection device according to any one of (6) to (8) above,
The control unit repeats the retry process until the edge is detected.
(10) The position detection device according to (8) above,
The edge to be imaged by the imaging unit is an edge on the front end side in the transport direction,
When it is determined that the imaging unit is located at a position corresponding to the substrate, the control unit moves the imaging unit in a direction in which the substrate is transported, or a direction in which the substrate is transported A position detection device that moves the substrate in the reverse direction.
(11) The position detection device according to (10) above,
When it is determined that the imaging unit is not located at a position corresponding to the substrate, the control unit moves the imaging unit in a direction opposite to a direction in which the substrate is transported, or the substrate is transported. A position detection device that moves the substrate in a direction to be moved.
(12) The position detection device according to (8) above,
The edge to be imaged by the imaging unit is an edge on the rear end side in the transport direction,
When it is determined that the imaging unit is located at a position corresponding to the substrate, the control unit moves the imaging unit in a direction opposite to a direction in which the substrate is transported, or the substrate is transported. A position detection device that moves the substrate in a direction.
(13) The position detection device according to (12) above,
When it is determined that the imaging unit is not located at a position corresponding to the substrate, the control unit moves the imaging unit in a direction in which the substrate is transported, or a direction in which the substrate is transported. Is a position detection device that moves the substrate in the opposite direction.
(14) The position detection device according to any one of (6) to (13),
When the retry process fails, the control unit manually changes a relative position of the imaging unit and the substrate in the transport direction to align the position of the imaging unit with the position of the edge. Position detection device that outputs a display signal for teaching screens.
(15) The position detection device according to any one of (1) to (14),
A storage unit for storing a target stop position of the substrate;
The control unit images the edge by the imaging unit, detects a stop position of the substrate based on the position of the edge, images the edge by the imaging unit, and positions the edge. A position inspection apparatus that switches between the second mode in which the substrate stop target position stored in the storage unit is set to the substrate stop position without executing the process of detecting the substrate stop position based on the position.
(16) The position detection device according to (15) above,
In the first mode, the control unit determines whether a variation in the stop position of each substrate detected based on the position of the edge is equal to or less than a predetermined threshold, and the variation is equal to or less than the predetermined threshold. In some cases, the position inspection device switches the first mode to the second mode.
(17) The position detection device according to (15) or (16) above,
The control unit corrects the target stop position of the substrate stored in the storage unit, which is used in the second mode, based on the stop position of the substrate detected in the first mode. Detection device.

DESCRIPTION OF SYMBOLS 1 ... Board | substrate 2 ... Edge 5 ... Control part 6 ... Memory | storage part 7 ... Display part 10 ... Conveyance part 11 ... Guide 13 ... Conveyor belt 20 ... Backup part 30 ... Imaging unit 31 ... Imaging part 31a ... Imaging range 32 ... Illumination part 40 ... Imaging unit moving mechanism 102 ... Inspection device

Claims (16)

An imaging unit;
A transport unit that transports the substrate along the transport direction and stops the substrate being transported;
A moving mechanism for moving the imaging unit or the substrate along the transport direction in order to change the relative position in the transport direction of the imaging unit and the stopped substrate;
The stopped edge of the substrate in the transport direction is imaged by the imaging unit, the stop position of the substrate is detected based on the position of the edge of the substrate in the captured image, and first, the edge of the substrate is detected. Whether or not the image captured by the imaging unit at the predicted edge stop position is an image including the edge. If the image is not an image including the edge, the relative position of the imaging unit and the substrate in the transport direction is changed by the moving mechanism, and the imaging unit attempts to capture the edge again. A retry process is executed, and in the retry process, the image captured by the imaging unit at the predicted edge stop position Zui, the position detecting apparatus comprising a determining controller an orientation in the conveying direction to move the imaging unit or the substrate. The position detection device according to claim 1 ,
The control unit corrects the predicted edge stop position based on the detected stop position of the substrate. The position detection device according to claim 1 ,
The said control part image | photographs the said edge by the said imaging part in a different edge stop prediction position for every weight of the said board | substrate. The position detection apparatus. The position detection device according to claim 1 ,
In the retry process, the control unit determines whether the imaging unit is located at a position corresponding to the substrate based on an image captured by the imaging unit at the predicted edge stop position. In response, a position detection device that determines an orientation in the transport direction in which the imaging unit or the substrate should be moved. The position detection device according to claim 1 ,
The control unit repeats the retry process until the edge is detected. The position detection device according to claim 4 ,
The edge to be imaged by the imaging unit is an edge on the front end side in the transport direction,
When it is determined that the imaging unit is located at a position corresponding to the substrate, the control unit moves the imaging unit in a direction in which the substrate is transported, or a direction in which the substrate is transported A position detection device that moves the substrate in the reverse direction. The position detection device according to claim 6 ,
When it is determined that the imaging unit is not located at a position corresponding to the substrate, the control unit moves the imaging unit in a direction opposite to a direction in which the substrate is transported, or the substrate is transported. A position detection device that moves the substrate in a direction to be moved. The position detection device according to claim 4 ,
The edge to be imaged by the imaging unit is an edge on the rear end side in the transport direction,
When it is determined that the imaging unit is located at a position corresponding to the substrate, the control unit moves the imaging unit in a direction opposite to a direction in which the substrate is transported, or the substrate is transported. A position detection device that moves the substrate in a direction. The position detection device according to claim 8 ,
When it is determined that the imaging unit is not located at a position corresponding to the substrate, the control unit moves the imaging unit in a direction in which the substrate is transported, or a direction in which the substrate is transported. Is a position detection device that moves the substrate in the opposite direction. The position detection device according to claim 1 ,
When the retry process fails, the control unit manually changes a relative position of the imaging unit and the substrate in the transport direction to align the position of the imaging unit with the position of the edge. Position detection device that outputs a display signal for teaching screens. The position detection device according to claim 1 ,
A storage unit for storing a target stop position of the substrate;
The control unit images the edge by the imaging unit, detects a stop position of the substrate based on the position of the edge, images the edge by the imaging unit, and positions the edge. A position detection device that switches between the second mode in which the target stop position of the substrate stored in the storage unit is set to the stop position of the substrate without executing the process of detecting the stop position of the substrate based on the position. The position detection device according to claim 11 ,
In the first mode, the control unit determines whether a variation in the stop position of each substrate detected based on the position of the edge is equal to or less than a predetermined threshold, and the variation is equal to or less than the predetermined threshold. In some cases, the position detection device switches the first mode to the second mode. The position detection device according to claim 11 ,
The control unit corrects the target stop position of the substrate stored in the storage unit, which is used in the second mode, based on the stop position of the substrate detected in the first mode. Detection device. Transport the substrate along the transport direction,
Stop the substrate being transported,
Imaging the edge in the transport direction of the substrate stopped by the imaging unit,
Detecting the stop position of the substrate based on the position of the edge of the substrate in the captured image;
First, in the expected edge stop position where the edge of the substrate would have stopped, the imaging unit tried to image the edge,
It is determined whether the image captured by the imaging unit at the predicted edge stop position is an image including the edge, and when the image is not an image including the edge, a moving mechanism is used to detect the image capturing unit and the substrate. Change the relative position in the transport direction, and again execute a retry process that is an attempt to image the edge by the imaging unit,
In the retry process, a position detection method for determining a direction in the transport direction in which the imaging unit or the substrate should be moved based on an image captured by the imaging unit at the predicted edge stop position . In the position detection device,
Transporting the substrate along the transport direction;
Stopping the substrate being transported;
Imaging an edge in the transport direction of the stopped substrate by an imaging unit;
Detecting a stop position of the substrate based on a position of an edge of the substrate in a captured image;
First, at the edge stop expected position where the edge of the substrate will stop, trying to image the edge by the imaging unit;
It is determined whether the image captured by the imaging unit at the predicted edge stop position is an image including the edge, and when the image is not an image including the edge, a moving mechanism is used to detect the image capturing unit and the substrate. Changing the relative position in the transport direction, and again executing a retry process that is a process of attempting to image the edge by the imaging unit;
In the retry process, a program for executing a step of determining an orientation in the transport direction in which the imaging unit or the substrate should be moved based on an image captured by the imaging unit at the predicted edge stop position . Transport the substrate along the transport direction,
Stop the substrate being transported,
Imaging the edge in the transport direction of the substrate stopped by the imaging unit,
Detecting the stop position of the substrate based on the position of the edge of the substrate in the captured image;
For the substrate present at the detected stop position, processing necessary for manufacturing the substrate is performed ,
First, in the expected edge stop position where the edge of the substrate would have stopped, the imaging unit tried to image the edge,
It is determined whether the image captured by the imaging unit at the predicted edge stop position is an image including the edge, and when the image is not an image including the edge, a moving mechanism is used to detect the image capturing unit and the substrate. Change the relative position in the transport direction, and again execute a retry process that is an attempt to image the edge by the imaging unit,
In the retry process, a substrate manufacturing method of determining an orientation in the transport direction in which the imaging unit or the substrate should be moved based on an image captured by the imaging unit at the predicted edge stop position .