KR102207774B1 - Device and method for detecting position, and method of manufacturing substrate - Google Patents

Abstract

The present invention provides a technique capable of appropriately detecting a stop position of a substrate in the case of stopping a substrate without a stopper in a conveyance unit, for example.
A position detection device according to the present technology includes an imaging unit, a conveyance unit, and a control unit. The transport unit transports the substrate along the transport direction, and stops the substrate being transported. The control unit captures an edge of the stationary substrate in the conveyance direction by the imaging unit, and detects the stop position of the substrate based on the position of the edge of the substrate in the captured image.

Description

A position detection device, a position detection method, and a manufacturing method of a substrate TECHNICAL FIELD [DEVICE AND METHOD FOR DETECTING POSITION, AND METHOD OF MANUFACTURING SUBSTRATE}

The present technology relates to a position detecting apparatus, a position detecting method, and a method of manufacturing a substrate for detecting a stop position of a substrate.

BACKGROUND ART [0002] Conventionally, a mounting system in which various devices for manufacturing a substrate are arranged in series are widely known. As an apparatus used in the mounting system, for example, a screen printing device that prints solder in a paste state on a substrate, a print inspection device that checks the print state of the solder, and an electronic component is mounted on a solder-printed substrate. BACKGROUND ART A mounting device, a mounting inspection device for checking the mounting state of electronic components, and the like are known.

In such various apparatuses, first, it is necessary to transport the substrate transferred from the apparatus on the upstream side and stop it at the stop target position. For this reason, these apparatuses generally include a conveyance part which conveys a board|substrate and stops it at a stop target position.

The conveying unit includes, for example, a pair of guides for guiding the substrate from the side, and a conveyor belt provided on the pair of guides, respectively, for conveying the substrate by the drive thereof. In addition, in order to accurately stop the substrate conveyed by the conveyor belt at the stop target position, a stopper driven by an actuator or the like is sometimes provided in the conveying section (see, for example, Patent Document 1 below).

Japanese Patent Laid-Open Publication No. 2001-144494 (paragraph [0007], Fig. 12)

However, if the substrate is stopped by the stopper, there is a risk of damage to the substrate due to impact when the moving substrate contacts the stopper. In addition, if an electronic component is mounted on the substrate, the electronic component There is also a risk of misalignment.

Thus, it is considered to stop the substrate without a stopper. However, in this case, since there is a possibility that the position of the substrate may be shifted from the target position to be stopped, a technique capable of detecting the stop position of the substrate is required.

In view of the above circumstances, it is an object of the present technology to provide a technique capable of appropriately detecting the stop position of the substrate in the case of stopping the substrate without a stopper in the transport unit, for example.

A position detection device according to the present technology includes an imaging unit, a conveyance unit, and a control unit.

The transport unit transports the substrate along the transport direction, and stops the substrate being transported.

The control unit captures an edge in the transport direction of the stationary substrate by the imaging unit, and detects the stop position of the substrate based on the position of the edge of the substrate in the captured image. do.

In such a position detection apparatus, the stop position of the substrate is detected based on the position of the edge of the substrate in the image picked up by the imaging unit. Therefore, even in the case of stopping the substrate without a stopper in the transport unit, it is possible to appropriately detect the stop position of the substrate.

In the position detection device, the control unit may first attempt to capture the edge by the imaging unit at an edge stop predicted position at which the edge of the substrate is stopped.

Thereby, the edge of the substrate can be appropriately imaged.

The position detection device may further include a moving mechanism for moving the image pickup unit or the substrate along the transport direction in order to change the relative positions of the image pickup unit and the stationary substrate in the transport direction.

In the case of a form in which the imaging unit is moved, the moving mechanism is a moving mechanism for moving the imaging unit. On the other hand, in the case of a form in which the substrate is moved, the transport unit for transporting the substrate may have a function as a moving mechanism.

In the position detection device, the control unit may correct the predicted edge stop position based on the detected stop position of the substrate.

Thereby, the predicted edge stop position can be corrected to an appropriate position.

In the position detection device, the control unit may image the edge by the image pickup unit at a different edge stop predicted position for each weight of the substrate.

Thereby, even when the weight (type) of the substrate is different, the edge of the substrate can be appropriately imaged by the imaging unit at the edge stop predicted position.

In the position detection device, the control unit determines whether or not the image captured by the image pickup unit at the edge stop expected position is an image including the edge, and the image is not an image including the edge. In this case, a retry process is executed, which is a process of attempting to image the edge by changing the relative position of the imaging unit and the substrate in the conveyance direction by the moving mechanism, and again by the imaging unit. It is okay to do it.

As such retry processing is performed, even in the case where the edge of the substrate is not detected in the image captured at the expected edge stop position, it is possible to detect the stop position of the substrate by appropriately detecting the edge of the substrate.

In the position detection device, the control unit comprises, in the retry processing, the transfer direction in which the image pickup unit or the substrate is to be moved based on the image captured by the image pickup unit at the edge stop expected position. It is also possible to determine the direction in.

In this way, in the retry process, it is possible to determine in which direction the image pickup unit or the substrate is to be moved next. Therefore, it is possible to improve the speed until the edge of the substrate is detected.

In the position detecting device, the control unit is configured to determine whether the image capturing unit is at a position corresponding to the substrate based on an image captured by the image capturing unit at the predicted edge stop position during the retry processing. Is determined, and the direction in the conveyance direction in which the imaging unit or the substrate is to be moved may be determined according to the determination result.

In this way, it is possible to appropriately determine in which direction the imaging unit or substrate is to be moved next.

In the position detection device, the control unit may repeat the retry process until the edge is detected.

In the position detection device, the edge to be imaged by the imaging unit is an edge on the tip side in the conveyance direction,

When it is determined that the imaging unit is located at a position corresponding to the substrate, the control unit may move the imaging unit in a direction in which the substrate is transported, or the substrate in a direction opposite to a direction in which the substrate is transported. It is okay to move.

Thereby, the edge of the front end side of the board|substrate can be imaged suitably by the imaging part.

In the position detection device, the control unit, when it is determined that the image pickup unit does not exist at a position corresponding to the substrate, moves the image pickup unit in a direction opposite to the direction in which the substrate is transported, or The substrate may be moved in the direction in which the substrate is transported.

Thereby, the edge of the front end side of the board|substrate can be imaged suitably by the imaging part.

In the position detection device, the edge to be imaged by the imaging unit is an edge on the rear end side in the conveyance direction,

When it is determined that the image pickup unit is located at a position corresponding to the substrate, the control unit may move the image pickup unit in a direction opposite to a direction in which the substrate is transported, or the substrate in a direction in which the substrate is transported. It is okay to move.

Thereby, it is possible to appropriately image the edge of the rear end side of the substrate by the imaging unit.

In the position detection device, the control unit, when it is determined that the image pickup unit does not exist at a position corresponding to the substrate, moves the image pickup unit in a direction in which the substrate is transported, or the substrate is transported. The substrate may be moved in a direction opposite to the direction.

Thereby, it is possible to appropriately image the edge of the rear end side of the substrate by the imaging unit.

In the position detection device, the control unit manually changes the relative position of the image pickup unit and the substrate in the conveyance direction when the retry process fails, so that the position of the image pickup unit and the position of the edge are changed. It is okay to output the display signal of the teaching screen for positioning.

Thereby, the operator can teach the position of the substrate to the position detection device by operating the teaching screen and aligning the position between the position of the imaging unit and the edge of the substrate.

The position detection device may further include a storage unit for storing the stop target position of the substrate.

In this case, the control unit includes a first mode for capturing the edge by the image capturing unit, detecting a stop position of the substrate based on the position of the edge, and capturing the edge by the image capturing unit, and the Instead of performing a process of detecting the stop position of the substrate based on the position of the edge, the second mode in which the stop target position of the substrate stored in the storage unit is the stop position of the substrate may be switched.

In the second mode, since imaging of the edge of the substrate and detection of the substrate stop position based on the position of the edge are omitted, the processing is accelerated.

In the position detection device, the control unit, in the first mode, determines whether a deviation of the stop position of each substrate detected based on the position of the edge is equal to or less than a predetermined threshold, and the deviation is the predetermined If it is less than the threshold value of, the first mode may be switched to the second mode.

Thus, it is possible to switch the first mode to the second mode at an appropriate timing.

In the position detection device, the control unit corrects a stop target position of the substrate stored in the storage unit, used in the second mode, based on the stop position of the substrate detected in the first mode It is okay to do it.

Accordingly, it is possible to appropriately correct the stop target position of the substrate used in the second mode.

The position detection method according to the present technology includes transporting the substrate along the transport direction.

The substrate being conveyed is stopped.

The edge in the conveyance direction of the stationary substrate is imaged by the imaging unit.

Based on the position of the edge of the substrate in the captured image, the stop position of the substrate is detected.

The method for manufacturing a substrate according to the present technology includes conveying the substrate along the conveyance direction.

The substrate being conveyed is stopped.

The edge in the conveyance direction of the stationary substrate is imaged by the imaging unit.

Based on the position of the edge of the substrate in the captured image, the stop position of the substrate is detected.

With respect to the substrate present at the detected stop position, processing necessary for the manufacture of the substrate is performed.

The processing required for the manufacture of a substrate includes, for example, a process of printing solder on a substrate, a process of inspecting a substrate on which the solder is printed, a process of mounting electronic components on a substrate, and a process of inspecting a substrate on which an electronic component is mounted. Etc.

As described above, according to the present technology, it is possible to provide a technique capable of appropriately detecting the stop position of the substrate in the case of stopping the substrate without, for example, a stopper in the transport unit.

1 is a diagram showing a mounting system for manufacturing a substrate.
2 is a perspective view showing an inspection device to which the position detection device according to the present technology is applied.
3 is a view of the inspection apparatus as viewed from the conveyance direction of the substrate.
4 is a diagram showing the positions of a deceleration sensor and a stop sensor included in the inspection device.
5 is a block diagram showing an inspection device.
6 is a flow chart showing the processing of the inspection device.
7 is a flow chart showing processing of the inspection device.
8 is a flow chart showing processing of the inspection device.
9 is a flow chart showing processing of the inspection device.
Fig. 10 is a diagram showing a relationship between an imaging range of an imaging unit arranged at an edge stop predicted position and a stop position of a substrate.
Fig. 11 is a diagram showing a positional relationship between an imaging range of an imaging unit and an edge on the front end side of the substrate when the imaging unit is moved from an edge stop predicted position.
12 is a diagram illustrating an example of an alarm screen displayed on a display unit.
13 is a diagram illustrating an example of a teaching screen displayed on a display unit.
14 is a flow chart showing processing of an inspection device according to another embodiment.
15 is a flow chart showing processing in the second mode.
16 is a flow chart showing processing in the second mode.

Hereinafter, embodiments according to the present technology will be described with reference to the drawings.

<First embodiment>

1 is a diagram showing a mounting system 100 for manufacturing a substrate 1.

As shown in Fig. 1, the mounting system 100 is a screen printing device 101, a print inspection device 102a, a mounting device 103, a mounting inspection device 102b, and a reflow furnace in order from the upstream side. A reflow furnace 104, a washing/drying device 105, and a final inspection device 102c are provided. In addition, the mounting system 100 is provided with a control device 106 that collectively controls these various devices. Various devices included in the mounting system 100 are connected to enable communication with each other through a communication cable.

The control device 106 is, for example, a personal computer (PC), and includes a control unit 5, an input unit 8, a display unit 7 and the like.

The screen printing apparatus 101 includes a screen in which an opening is formed at a position corresponding to a printing pattern, a supply unit for supplying a paste-like solder on the screen, and a squeegee for sliding on the screen. In addition, the screen printing apparatus 101 includes a conveying unit for transporting the substrate 1 and placing it at a stop target position, an image capturing unit for imaging alignment marks 3 respectively provided on the substrate 1 and the screen. , And a control unit that collectively controls the screen printing device 101.

The screen printing apparatus 101 slides the squeegee on the screen to print solder on the substrate 1 positioned under the screen. Then, the screen printing apparatus 101 delivers the solder-printed substrate 1 to the printing inspection apparatus 102a.

The printing inspection apparatus 102a includes a conveying unit for transporting the solder-printed substrate 1 and placing it at a stop target position, an imaging unit for imaging the solder-printed substrate 1, and a captured image. It has a control part which analyzes the board|substrate 1 two-dimensionally or three-dimensionally, and inspects the printing state of a solder. The printing inspection apparatus 102a delivers the substrate 1 judged to be in good printing condition to the mounting apparatus 103, and destroys the substrate 1 judged to be in poor printing condition (or reinspection). Return to).

The mounting device 103 includes a transfer unit for transferring the solder-printed substrate 1 and placing it at a stop target position, and an imaging unit 31 (general) for imaging the alignment marks 3 provided on the substrate 1 , Installed on the mounting head). Further, the mounting device 103 includes a supply unit for supplying various electronic components such as resistors, capacitors, and inductors, a mounting head for adsorbing electronic components supplied from the supply unit and mounting on the substrate 1, and a mounting device ( 103). The mounting device 103 mounts the electronic component on the board 1 by the mounting head, and then delivers the board 1 on which the electronic component is mounted to the mounting inspection device 102b.

The mounting inspection apparatus 102b has a conveying unit for conveying the substrate 1 on which the electronic component is mounted and placing it at a stop target position, and an imaging unit for imaging the substrate 1 on which the electronic component is mounted. In addition, the mounting inspection apparatus 102b has a control unit that analyzes the substrate 1 two-dimensionally or three-dimensionally on the basis of the captured image and inspects the mounting state of the electronic component. The mounting inspection apparatus 102b transfers the substrate 1 judged to have a good mounting condition to the reflow furnace 104, and destroys the substrate 1 judged to have a poor mounting condition (or becomes a re-inspection). Turn).

The reflow furnace 104 melts the solder by reflowing the substrate 1 on which the electronic component is mounted, and connects the electronic component and the wiring provided on the substrate 1 through the solder. Then, the reflow furnace 104 delivers the substrate 1 after the reflow process to the cleaning/drying apparatus 105.

The cleaning/drying apparatus 105 cleans excess components such as flux adhering to the surface of the substrate 1 after the reflow treatment, and then dry the cleaned substrate 1. Then, the cleaning/drying apparatus 105 delivers the substrate 1 to the final inspection apparatus 102c.

The final inspection apparatus 102c includes a conveying unit for conveying the substrate 1 after the reflow process and placing it at a stop target position, an imaging unit for imaging the substrate 1, and the substrate 1 based on the captured image. It has a control unit that analyzes two-dimensionally or three-dimensionally and finally inspects the substrate 1. The final inspection device 102c delivers the substrate 1 judged to be good in the final inspection to a storage device (not shown), and destroys the substrate 1 judged to be defective in the final inspection. Do (or return to retest).

The position detecting device of the substrate 1 according to the present technology is, for example, a screen printing device 101, a printing inspection device 102a, a mounting device 103, a mounting inspection device 102b, a final inspection device 102c, etc. Can be applied. Typically, the position detection device can be applied to any device as long as it is a device that stops the substrate 1 at a stop target position and performs the processing necessary for the manufacture of the substrate 1 on the substrate 1.

Here, the processing required for the manufacture of the substrate 1 means, for example, a process of printing solder on the substrate 1, a process of inspecting the substrate 1 on which the solder has been printed, and the electronic component on the substrate 1 It is a process of mounting, a process of inspecting the board 1 on which the electronic component is mounted, and the like.

Hereinafter, for convenience, a case where the position detection apparatus according to the present technology is applied to the inspection apparatus 102 such as the print inspection apparatus 102a, the mounting inspection apparatus 102b, and the final inspection apparatus 102c will be described as an example. do.

2 is a perspective view showing an inspection device 102 to which a position detection device according to the present technology is applied. 3: is a figure which looked at the inspection apparatus 102 from the conveyance direction of the board|substrate 1. 4 is a diagram showing the positions of the deceleration sensor 52 and the stop sensor 53 included in the inspection device 102. 5 is a block diagram showing the inspection device 102.

As shown in these figures, the inspection apparatus 102 conveys the board|substrate 1 along a conveyance direction (X-axis direction), and the conveyance which stops the conveyed board|substrate 1 at the stop target position (without a stopper) It has part 10. Moreover, the inspection apparatus 102 has a backup part 20 which supports the board|substrate 1 stopped at a stop target position from below. In addition, the inspection apparatus 102 includes an imaging unit 30 having an illumination unit 32 that irradiates light to the substrate 1 and an imaging unit 31 that captures the substrate 1 irradiated with light, It has an imaging unit moving mechanism 40 which moves the imaging unit 30 in the XY direction.

In addition, the inspection device 102 includes a carry-in sensor 51 (refer to FIG. 5) that detects the carry-in of the substrate 1 transferred from the device disposed on the upstream side of the inspection device 102, and the transfer unit 10. It has a deceleration sensor 52 and a stop sensor 53 for detecting the passage of the substrate 1 being conveyed. Further, the inspection apparatus 102 includes a control unit 5, a storage unit 6, a display unit 7, an input unit 8, and a communication unit 9.

The position detection device according to the present technology includes at least an imaging unit 31, a conveyance unit 10, and a control unit 5.

The substrate 1 to be inspected by the inspection device 102 has, for example, a rectangular shape in plan view, and an edge on the tip side in the conveying direction (X-axis direction) of the substrate 1 ( It has 2a) and an edge 2b at the rear end.

Further, on the substrate 1, a plurality of alignment marks 3 are provided (see Fig. 2). In the example shown in FIG. 2, an example in which the alignment mark 3 is provided in the vicinity of a diagonal corner portion of the substrate 1 is shown. In addition, as shown in FIG. 2, it is not limited to the case where a dedicated alignment mark 3 is specially provided on the substrate 1, and a predetermined pattern (wiring pattern, etc.) on the substrate 1 is an alignment mark ( It can be used as 3).

The conveyance section 10 has two guides 11 that guide the substrate 1 along the conveyance direction by sandwiching the substrate 1 from both sides. Each guide 11 is a plate-shaped member having an elongated shape in the conveyance direction of the substrate 1. On the lower side of each guide 11, a plurality of leg portions 12 that support the guide 11 from below are provided, respectively. Each guide 11 is attached on a base (not shown) of the inspection device 102 via the leg portion 12.

On the inner side of each guide 11, a conveyor belt 13 capable of forward and reverse rotation is provided, respectively. The conveying part 10 can convey the board|substrate 1 to a stop target position by the drive of the said conveyor belt 13, or carry out the board|substrate 1 for which inspection was completed. With respect to the conveyance section 10, a mechanical stopper is not provided, and the substrate 1 is stopped at the stop target position (or the vicinity thereof) when the drive of the conveyor belt 13 is stopped.

In the example shown in FIGS. 2 and 4, the target stop position of the substrate 1 is a position near the center in the longitudinal direction of the guide 11. In addition, in the description of FIG. 2 and FIG. 4, it is assumed that the board|substrate 1 is carried in from the right and is carried out to the left. That is, in FIGS. 2 and 4, the left direction is the direction in which the substrate 1 is conveyed.

Each guide 11 is formed so that the upper end is bent toward the inside, and the upper end of the guide 11 is the upper end of the guide 11 when the substrate 1 is moved upward by the backup unit 20, the substrate 1 It can be supported from the top. Among the two guides 11, one of the guides 11 can move in a direction (Y-axis direction) orthogonal to the conveyance direction of the substrate 1. Thereby, the board|substrate 1 arrange|positioned at the stop target position can be clamped from both sides by the two guides 11, and can be fixed. In this way, the substrate 1 is inspected while the substrate 1 is fixed.

In the example shown in the drawing, the case where the number of the conveyance units 10 is one is illustrated, but the number of the conveyance units 10 may be two or more. In this case, each conveyance part 10 is arrange|positioned so that it may be parallel to the Y-axis direction.

The carry-in sensor 51 is provided on a carry-in conveyor (not shown) arranged on the upstream side of the conveyance unit 10, and detects the carry-in of the substrate 1 transferred from the upstream side of the inspection device 102. The carry-in sensor 51 is constituted by, for example, a reflective optical sensor.

Like the carry-in sensor 51, the deceleration sensor 52 and the stop sensor 53 are also constituted by, for example, a reflective optical sensor. The deceleration sensor 52 and the stop sensor 53 are disposed at a height corresponding to a height through which the substrate 1 passes with respect to one or both guides 11 (see Fig. 4). The stop sensor 53 is disposed at a position capable of detecting the edge 2a on the front end side of the substrate 1 when the substrate 1 reaches a position slightly upstream from the stop target position. The deceleration sensor 52 is disposed, for example, at a position upstream of about 100 mm from the stop sensor 53.

In the deceleration sensor 52 and the stop sensor 53, "ON" and "OFF" are switched at the moment when the edge 2a on the front end side of the substrate 1 passes the position where these sensors are disposed. Accordingly, these sensors 52 and 53 can detect that the edge 2 of the front end of the substrate 1 has passed through the positions corresponding to the sensors 52 and 53.

When the passing of the edge 2a on the front end side of the substrate 1 is detected by the deceleration sensor 52, the drive of the conveyor belt 13 is controlled so that the conveyance speed of the substrate 1 is reduced. Further, when the passing of the edge 2a on the front end side of the substrate 1 is detected by the stop sensor 53, the drive of the conveyor belt 13 is controlled so that the rotation of the conveyor belt 13 is stopped.

Further, even if the passing of the edge 2a on the front end side of the substrate 1 is detected by the stop sensor 53 and the rotation of the conveyor belt 13 is stopped, the substrate 1 does not stop immediately. That is, the substrate 1 is slightly advanced in the advancing direction of the substrate 1 and then stops at the stop target position (or the vicinity thereof). In the present technology, since a mechanical stopper is not provided, it cannot be said that the substrate 1 is necessarily stopped at an exact stop target position, and the position at which the substrate 1 is stopped is likely to deviate from the stop target position. have.

The moving distance d that the substrate 1 advances in the traveling direction (that is, the distance d between the stop sensor 53 and the edge 2a on the tip side of the substrate 1) is the substrate 1 It is related to the weight (type) of Typically, the heavier the weight of the substrate 1, the greater the moving distance d of the substrate 1 is. In addition, since the distance d is different depending on the weight (type) of the substrate 1, the stop target position at which the substrate 1 is stopped varies for each weight (type) of the substrate 1.

The backup unit 20 includes a backup plate 21, a plurality of support pins 22 erected on the backup plate 21, and a plate lifting mechanism 23 for lifting the backup plate 21.

After the substrate 1 is stopped, the backup unit 20 is moved upward by the plate lifting mechanism 23. As the backup unit 20 moves upward, the substrate 1 is pushed upward by the support pin 22 of the backup unit 20, whereby the substrate 1 is It is sandwiched between the upper end portion and the backup portion 20, so that the substrate 1 is positioned in the vertical direction.

The imaging unit 30 has an imaging unit 31 and an illumination unit 32. The illumination unit 32 of the imaging unit 30 includes a dome-shaped dome member 32a having an opening formed at its top, and a plurality of illumination units 32b disposed inside the dome member 32a. ). The illumination 32b is constituted by, for example, an LED (Light Emitting Diode).

The imaging unit 31 is fixed to the position of the opening formed in the dome member 32a above the dome member 32a of the lighting unit 32, and its optical axis is perpendicular to the inspection surface of the substrate 1 It is arranged to be. The imaging unit 31 has an imaging element such as a CCD sensor (CCD: Charge Coupled Device) or a CMOS sensor (CMOS: Complementary Metal Oxide Semiconductor), and an optical system such as an imaging lens.

The imaging unit 31, under the control of the control unit 5, the edge 2 of the substrate 1 stopped at the stop target position (or its vicinity) (in this embodiment, the edge 2a on the tip side) An image is taken, the alignment mark 3 on the substrate 1 is captured, or the inspection surface of the substrate 1 is captured.

The imaging range 31a of the imaging unit 31 is, for example, about 35 mm x 35 mm. When the inspection surface of the substrate 1 is imaged by the imaging unit 31, the imaging unit 31 needs to be inspected while being moved in the X-axis direction and the Y-axis direction by the imaging unit moving mechanism 40. The area on the existing substrate 1 is divided into a plurality of circuits to capture an image.

In the example shown in the drawing, a case where the number of the imaging units 30 is one is illustrated, but the number of the imaging units 30 may be two or more.

The imaging unit moving mechanism 40 moves the imaging unit 30 along the conveyance direction of the board|substrate 1 (X-axis direction) and the direction orthogonal to the conveyance direction of the board|substrate 1 (Y-axis direction). The imaging unit moving mechanism 40 moves the imaging section 31 along the conveying direction in order to change the relative position between the imaging section 31 and the substrate 1 in the conveying direction (X-axis direction). It functions as a moving mechanism to let you do. The imaging unit moving mechanism 40 is constituted by, for example, a ball screw drive mechanism, a rack and pinion drive mechanism, or the like.

The control unit 5 is configured by, for example, a CPU (Central Processing Unit) or the like, and collectively controls each unit of the inspection device 102. The control unit 5 controls the imaging unit 31, for example, to capture the edge 2 in the conveyance direction of the substrate 1, or the edge 2 of the substrate 1 in the captured image. Based on the position of, the stop position of the substrate 1 is detected. The processing of the control unit 5 will be described in detail later.

The storage unit 6 has a volatile memory used as a work area of the control unit 5 and a nonvolatile memory in which various types of data and programs required for processing by the control unit 5 are fixedly stored. . The above various programs may be read from a portable recording medium such as an optical disk and a semiconductor memory.

The nonvolatile memory stores a table in which the type of the substrate 1, the weight of the substrate 1, the target stop position of the substrate 1, and the predicted edge stop position are associated. Here, the predicted edge stop position is a position where the edge 2 of the substrate 1 is expected to be stopped when it is assumed that the substrate 1 is stopped at the stop target position. At the edge stop predicted position, a process of attempting to image the edge 2 of the substrate 1 is executed.

As described above, since the moving distance d that the substrate 1 advances in the traveling direction after the drive of the conveyor belt 13 is stopped is different for each weight (type) of the substrate 1, the substrate 1 The stop target position and the edge stop predicted position are also different for each weight (type) of the substrate 1. Therefore, the type of the substrate 1, the weight of the substrate 1, the target stop position of the substrate 1, and the predicted edge stop position are correlated, and a table is formed.

The display portion 7 is constituted by, for example, a liquid crystal display, an EL (Electro Luminescence) display, or the like. The input unit 8 is constituted by a keyboard, a mouse, a touch sensor, or the like, and inputs various instructions from an operator. The communication unit 9 transmits information to other devices arranged in the mounting system 100 or receives information from other devices.

[Description of operation]

Next, the operation of the inspection device 102 will be described. 6 to 9 are flow charts showing processing of the inspection device 102.

Referring to FIG. 6, first, the control unit 5 performs an operation of carrying in the inspection apparatus 102 the substrate 1 transferred from the apparatus disposed on the upstream side of the inspection apparatus 102 by driving the carry-in conveyor. Start (step 101). Next, the control unit 5 determines whether or not the carry-in of the substrate 1 has been detected by the carry-in sensor 51 provided on the carry-in conveyor (step 102).

When the edge 2a on the front end side of the board 1 passes through the front of the carry-in sensor 51, a detection signal is output from the carry-in sensor 51. When the control unit 5 receives the detection signal from the carry-in sensor 51 (YES in step 102), it starts driving the conveyor belt 13 of the conveyance unit 10 (step 103).

Next, the control unit 5 controls the imaging unit moving mechanism 40 to move the imaging unit 30 to an edge stop predicted position (step 104). In addition, the predicted edge stop position differs for each weight (type) of the substrate 1 as described above. Accordingly, the control unit 5 reads the predicted edge stop position corresponding to the type of the substrate 1 currently being inspected from the table, and moves the imaging unit 30 to the predicted edge stop position.

In addition, the edge 2 to be imaged may be any edge 2 of the edge 2a on the front end side and the edge 2b on the rear end side, but in this embodiment, the imagery target is The resulting edge 2 will be described as being the edge 2a on the front end side in the conveying direction.

Next, the control unit 5 determines whether or not the substrate 1 has been detected by the deceleration sensor 52 (step 105). When the edge 2a on the front end side of the substrate 1 conveyed by the conveyor belt 13 reaches the front of the deceleration sensor 52, a detection signal is output from the deceleration sensor 52. When receiving the detection signal from the deceleration sensor 52 (YES in step 105), the control unit 5 decelerates the conveyor belt 13 (step 106).

Next, the control unit 5 determines whether or not the substrate 1 has been detected by the stop sensor 53 (step 107). When the edge 2a on the front end side of the substrate 1 conveyed by the conveyor belt 13 reaches the front of the stop sensor 53, a detection signal is output from the stop sensor 53. When receiving the detection signal from the stop sensor 53 (YES in step 107), the control unit 5 stops driving the conveyor belt 13 (step 108).

Next, the control unit 5 moves the backup unit 20 upward, positions the substrate 1 in the vertical direction, and then moves one of the guides 11 in the Y-axis direction, thereby forming a pair of guides. The substrate 1 is clamped from both sides by (11), and the substrate 1 is fixed (step 109).

Next, the control unit 5 turns on the illumination 32b of the imaging unit 30 moved to the predicted edge stop position, and the edge 2a on the front end side of the substrate 1 by the imaging unit 31 Image capture is attempted (step 110).

Here, when the drive of the conveyor belt 13 is stopped in step 108, the substrate 1 does not stop immediately, but is stopped at the stop target position after a little progress in the traveling direction. In addition, in the present technology, since a mechanical stopper is not provided, it cannot be said that the substrate 1 is necessarily stopped at the exact stop target position, and the position at which the substrate 1 is stopped may deviate from the stop target position. There is this.

Basically, the amount of deviation of the stop position of the substrate 1 with respect to the stop target position is expected not to be very large if the substrates 1 of the same type (substrates 1 having the same weight). However, for example, in the case of a foreign object adhering to the back surface of the substrate 1, such foreign matter is the cause, and when the conveyor belt 13 is stopped, the substrate 1 is moved to the conveyor belt ( 13) There is a case where it slides on and the stop position of the actual board|substrate 1 is largely shifted in the traveling direction.

Even if the position at which the substrate 1 is stopped is shifted from the stop target position, if the amount of the shift is within the imaging range 31a of the image pickup unit 31, the substrate 1 is caused by the image pickup unit 31 at the predicted edge stop position. The edge 2a on the tip side of) can be imaged. In this embodiment, since the imaging range 31a is 35 mm x 35 mm, if the amount of deviation from the target stop position of the substrate 1 is within ±17.5 mm, the imaging unit 31 at the edge stop expected position ), the edge 2a on the front end side of the substrate 1 can be imaged.

On the other hand, when the amount of deviation of the substrate 1 with respect to the stop target position exceeds the imaging range 31a (±17.5 mm) of the imaging unit 31, the substrate ( The edge 2a on the tip side of 1) cannot be imaged.

10 is a diagram showing the relationship between the imaging range 31a of the imaging unit 31 arranged at the edge stop predicted position and the stop position of the substrate 1. An example of the case where the edge 2a on the front end side of the substrate 1 falls within the imaging range 31a of the imaging unit 31 is shown in the upper drawing in FIG. 10. In the drawing in the center of FIG. 10, the substrate 1 is stopped beyond the stop target position, and the edge 2a on the tip side of the substrate 1 falls within the imaging range 31a of the imaging unit 31. An example of the case where it does not exist is shown. In the lower figure in FIG. 10, the substrate 1 is stopped in front of the stop target position, and the edge 2a on the tip side of the substrate 1 falls within the imaging range 31a of the imaging unit 31. An example of the case where it does not exist is shown.

In the present embodiment, even when the edge 2a on the front end side of the substrate 1 cannot be imaged by the imaging unit 31 at the predicted edge stop position, the edge 2 of the substrate 1 is appropriately adjusted. A process capable of capturing an image is executed (retry processing described later).

Referring to FIG. 7, when an attempt is made to capture the edge 2a on the front end side of the substrate 1 by the imaging unit 31 disposed at the predicted edge stop position, the controller 5 proceeds to step 111. Run. In step 111, the control unit 5 processes the image captured by the imaging unit 31 at the predicted edge stop position, and the image includes the edge 2a on the front end side of the substrate 1 Whether or not it is determined.

When the captured image is an image including the edge 2a on the tip side, the image is dark on the left side and bright on the right side on which the substrate 1 is applied, so that the control unit 5 processes the image It is possible to determine whether or not it is an image including the edge 2a on the tip side.

For example, as shown in the figure on the upper side of Fig. 10, when the edge 2a on the front end side of the substrate 1 is contained within the imaging range 31a of the image pickup unit 31 disposed at the predicted edge stop position, the image The edge 2a on the front end side of the substrate 1 is contained therein. In this case, since the edge 2 is detected in the image (YES in step 111), the control unit 5 proceeds to step 119.

On the other hand, for example, as shown in the center figure and the lower figure of FIG. 10, the edge 2a on the front end side of the board|substrate 1 within the imaging range 31a of the imaging part 31 arrange|positioned at the edge stop predicted position When is not included, the edge 2a on the front end side of the substrate 1 is not included in the image. In this case, since the edge 2 is not detected in the image (NO in step 111), the control unit 5 proceeds to step 112.

In step 112, the control unit 5 executes a process in which the count value for the number of times the retry process is executed is +1. Next, the control unit 5 determines whether or not the number of times of retry processing is equal to or less than the upper limit value N (step 113).

With the retry processing, the imaging unit 30 is moved along the conveying direction (X-axis direction) by the imaging unit moving mechanism 40 (the relative position of the imaging unit 31 and the substrate 1 in the conveying direction). Change), and again, the imaging unit 31 attempts to capture the edge 2. The upper limit (N) of the number of retry processing is, for example, twice, but is not limited thereto. The value of N may be changed, for example, through the input unit 8 of the inspection device 102 or the input unit of the control device 106.

When the number of times of the retry process is equal to or less than the upper limit value N (YES in step 113), the control unit 5 proceeds to the next step 114. In step 114, the control unit 5, based on the image captured at the edge stop predicted position (the first retry), or the image captured in step 118 described later (the second and subsequent retries), the imaging unit 31 ) Is present on the substrate 1 (step 114).

For example, in the case of the example shown in the center diagram of FIG. 10, an image captured by the imaging unit 31 at the edge stop predicted position becomes an image in which a part of the substrate 1 is taken over the entire image. In this case, since the substrate 1 is illuminated by the light from the illumination 32b, the image captured at the edge stop predicted position becomes a bright image. In the case of such an entirely bright image, the control unit 5 determines that the imaging unit 31 is present on the substrate 1 (YES in step 114).

On the other hand, in the case of the example shown in the lower figure of FIG. 10, for example, the image captured by the imaging unit 31 at the predicted edge stop position is a member lower than the substrate 1 (e.g., a pair of guides 11 ) Is an image taken of an expectation, etc.). In this case, since light from the illumination 32b does not reach much to the member lower than the substrate 1, the image captured at the edge stop expected position becomes a dark image as a whole. In the case of such an entirely dark image, the control unit 5 determines that the imaging unit 31 does not exist on the substrate 1 (NO in step 114).

In step 114, when it is determined that the imaging unit 31 is present on the substrate 1, the control unit 5 moves the imaging unit 30 to the carrying side of the substrate 1 (substrate 1 is In the conveying direction) (step 115). On the other hand, in step 114, when it is determined that the imaging unit 31 does not exist on the substrate 1, the control unit 5 transfers the imaging unit 30 to the carrying side of the substrate 1 (substrate ( 1) Move in the opposite direction to the direction in which it is conveyed).

That is, in step 114, the control unit 5 determines whether the imaging unit 31 is present on the substrate 1 based on the captured image, and moves the imaging unit 30 according to the determination result. The direction in the conveying direction to be made is determined.

Further, in the first retry process, in step 114, the direction in which the imaging unit 30 is to be moved is determined based on the image captured at the edge stop predicted position. After the second and subsequent retry processing, the direction in which the imaging unit 30 is to be moved is determined based on the image captured at the position moved from the edge stop predicted position. Here, after the second and subsequent retry processing, the direction in which the imaging unit 30 is moved is the same as the direction in which the imaging unit 30 was moved in the previous time. Therefore, after the second and subsequent retry processing, it is also possible to omit step 114 for determining in which direction the imaging unit 30 is to be moved.

FIG. 11 shows the positional relationship between the imaging range 31a of the imaging unit 31 and the edge 2a on the tip side of the substrate 1 when the imaging unit 30 is moved from the edge stop predicted position. It is a drawing. In the figure in the center of FIG. 11, the state when it is determined that the imaging unit 31 exists on the board|substrate 1, and the imaging unit 30 is moved toward the carrying-out side is shown. In the lower figure of FIG. 11, it is determined that the imaging unit 31 does not exist on the board|substrate 1, and the state when the imaging unit 30 is moved toward the carrying-in side is shown.

The distance that the imaging unit 30 moves along the conveyance direction becomes a distance corresponding to the imaging range 31a of the imaging unit 31. For example, when the imaging range 31a in the conveyance direction of the imaging unit 31 is 35 mm, the moving distance of the imaging unit 30 is 35 mm. Alternatively, the moving distance of the imaging unit 30 may be set so that the imaging range 31a before movement and the imaging range 31a after movement overlap. In this case, for example, the overlap amount is 5 mm, and the moving distance of the imaging unit 30 is 30 mm.

In addition, when moving the imaging unit 30, when it exceeds the movable range of the imaging unit 30, the control unit 5 moves the imaging unit 30 to a position where the imaging unit 30 can move to the maximum. ) To move.

After moving the imaging unit 30 to the carry-in side in step 115, or after moving the imaging unit 30 to the carry-in side in step 116, the control unit 5 controls the imaging unit 31 at the moved position. In this way, imaging of the edge 2a on the front end side of the substrate 1 is attempted (step 117). Next, the control unit 5 determines whether or not the captured image is an image including the edge 2a on the tip side (step 118).

When the image picked up by the imaging unit 31 after the movement is an image including the edge 2a on the tip side (YES in step 118), the control unit 5 proceeds to step 119. On the other hand, when the image captured by the image pickup unit 31 after the movement is not an image including the edge 2a on the tip side (NO in step 118), the control unit 5 returns to step 112 again and returns to step 112 The subsequent processing is executed. That is, the control unit 5 moves the imaging unit 30 along the conveyance direction, and again, the imaging unit 31 performs a retry process of attempting to capture an image of the edge 2a on the front end side, the edge 2a. Repeat until) is detected (N is the upper limit).

When the edge 2a on the front end side is detected in step 111 or step 118, the control unit 5 adjusts the conveyance direction based on the current position of the imaging unit 30 and the position of the edge 2a in the image. The stop position of the substrate 1 is detected (step 119).

Next, the control unit 5 corrects the predicted edge stop position based on the detected actual stop position of the substrate 1, and stores the corrected edge stop predicted position in the storage unit 6 (table). (Step 120). Further, the control unit 5 also corrects the stop target position of the substrate 1 along with the correction of the edge stop predicted position, and stores the corrected stop target position in the storage unit 6 (table).

For example, when the edge 2a on the tip side is detected in the image captured at the predicted edge stop position (above Fig. 11), but the actual stop position of the substrate 1 is shifted to the right or left from the stop target position. I assume. In this case, the control unit 5 executes a process of shifting the predicted edge stop position to the right or left according to the shift amount. Similarly, the control unit 5 performs a process of shifting the stop target position of the substrate 1 to the right or left.

In addition, for example, when the edge 2a on the tip side is not detected in the captured image at the predicted edge stop position, and the edge 2 is included in the captured image by moving the imaging unit 30 Assume (the center of Fig. 11 and the lower side). In this case, the control unit 5 executes a process of shifting the predicted edge stop position to the right or left according to the amount of shift from the target stop position of the substrate 1. Similarly, the control unit 5 performs a process of shifting the stop target position of the substrate 1 to the right or left.

Alternatively, when the amount of deviation of the stop position of the substrate 1 from the stop target position is too large and exceeds the threshold value, the amount of deviation is determined as the estimated edge stop position and the stop target of the substrate 1 It is okay not to reflect it in the correction of the position.

Next, the control unit 5 calculates the imaging position of the alignment mark 3 provided on the substrate 1 based on the detected stop position of the substrate 1 (step 121), and the imaging unit 30 Is moved to the imaging position of the alignment mark 3 (step 122). Then, the control unit 5 irradiates light to the alignment mark 3 by the illumination 32b of the imaging unit 30, and captures the alignment mark 3 by the imaging unit 31 (step 123). . The control unit 5 typically executes a process of imaging two or more different alignment marks 3 at two or more different positions.

Next, the control unit 5 determines the position of the substrate 1, the inclination around the Z axis of the substrate 1, the size of the substrate 1, etc., based on the images of the two or more alignment marks 3 captured. Recognize (step 124). Next, the control unit 5 inspects the inspection surface of the substrate 1 (step 125). In the inspection of the substrate 1, the control unit 5 moves the imaging unit 30 in the X-axis direction and the Y-axis direction by the imaging unit moving mechanism 40, while the substrate 1 that needs to be inspected An image is captured by dividing the image inspection area into a plurality of circuits. Then, the control unit 5 inspects the substrate 1 by two-dimensionally or three-dimensionally analyzing the substrate 1 based on the captured image.

When the inspection of the substrate 1 is finished, the control unit 5 then moves the guide 11 of one of the transport units 10 along the Y-axis direction to adjust the clamping state of the substrate 1. Release, and move the backup unit 20 downward (step 126). And the control part 5 drives the conveyor belt 13 of the conveyance part 10, and the board|substrate 1 is carried out from the inspection apparatus 102 (step 127).

Next, processing when the number of retry processing exceeds the upper limit value N and the retry processing fails will be described. In step 113 of FIG. 7, when the number of times of the retry process exceeds the upper limit (NO in step 113), the control unit 5 proceeds to step 128 of FIG. 9. In step 128, the control unit 5 outputs a display signal of the alarm screen 15 to display the alarm screen 15 on the display unit 7.

12 is a diagram showing an example of the alarm screen 15. As shown in Fig. 12, on the left side of the alarm screen 15, the date and time the error occurred, the lane where the error occurred (when the transfer unit 10 is 2 or more), an alarm code, and an alarm. Details about is displayed. Further, on the alarm screen 15, on the right side of the screen, candidates that can be assumed as the cause of the occurrence of the error and a countermeasure for solving the error are displayed.

In the example shown in Fig. 12, it can be seen that at 12:24:56 on October 24, 2013, an error occurred due to failure of edge detection recognition in the front lane (carrying unit 10). have. In addition, from the possible cause candidates, there is a possibility that the stop position of the substrate 1 exceeds the imaging range 31a of the imaging unit 31, and that there is a possibility that the image processing has failed in edge detection. Can be seen. In addition, as a countermeasure for solving such an error, return the substrate 1 to the carry-in side and then carry the substrate 1 in again, check the stop position of the substrate 1, or check the parameters of the inspection method (e.g., edge You can see that you can adjust the expected stop position, etc.).

In Fig. 12, a "teaching" button 15a and a "close" button 15b are displayed at the lower position of the alarm screen 15. The "teaching" button 15a is a button for transitioning the display to the teaching screen 16 (see Fig. 13), and the "close" button 15b is a button for closing the alarm screen 15. .

Referring to Fig. 9, after displaying the alarm screen 15 on the screen, the control unit 5 determines whether the "close" button 15b has been selected through the input unit 8 (step 129). When the "close" button 15b is not selected (NO in step 129), the control unit 5 determines whether the "teaching" button 15a has been selected through the input unit 8 (step 130). When the "teaching" button 15a is not selected (NO in step 130), the control unit 5 returns to step 129 and determines whether the "close" button 15b has been selected.

When the "teaching" button 15a is selected (YES in step 130), the control unit 5 outputs a display signal of the teaching screen 16 to display the teaching screen 16 on the display unit 7 (step 131). As a result, the teaching screen 16 is displayed on the display unit 7 instead of the alarm screen 15.

13 is a diagram illustrating an example of the teaching screen 16. Such a teaching screen 16 manually moves the imaging unit 30 in the conveying direction, and the position of the imaging unit 31 and the position of the edge 2a on the tip side are aligned, thereby stopping the substrate 1 This is a screen for teaching the position to the inspection device 102.

In the teaching screen 16, on the left side of the teaching screen 16, an image display area 16a for displaying an image currently being captured by the imaging unit 31 is disposed. In the example shown in FIG. 13, an example in which a part of the left side of the substrate 1 is taken in the position on the right side of the image is shown. At the center position of the image display area 16a in the horizontal direction, one line 16b is disposed in the vertical direction. This line 16b is a line for aligning with the edge 2a on the front end side of the substrate 1.

Further, on the right side of the image display area 16a, a "zoom in" button 16c for zooming in an image, a "zoom out" button 16d for zooming out an image, A "equal magnification" button 16e for displaying an image at the same magnification (same magnification), and a "full screen" button 16f for displaying an image in full screen are arranged.

In the teaching screen 16, on the right side of the teaching screen 16, a four-way button 16g for moving the imaging unit 30 along the X-axis and Y-axis directions is displayed. The four-way button 16g has a "left direction" button 16h, a "right direction" button 16i, a "upward direction" button 16j, and a "downward direction" button 16k. The operator moves the imaging unit 30 along the X-axis direction by operating the ``left'' button 16h and the ``right'' button 16i among the four directional buttons 16g, thereby , The alignment line 16b and the edge 2a on the front end side of the substrate 1 are aligned.

For example, in the example shown in FIG. 13, the operator moves the imaging unit 30 in the right direction by selecting the "right direction" button 16i, whereby the alignment line 16b and the substrate ( Align the edge (2a) on the tip side of 1).

Further, above the four-way button 16g, a "high speed" button 16l and a "low speed" button 16m for switching between the high and low speeds of the moving speed of the imaging unit 30 are displayed. Typically, when the alignment line 16b and the edge 2a on the tip side of the substrate 1 are close, the operator changes the moving speed of the imaging unit 30 from "high speed" to "low speed". Switch to and finely adjust the positioning at low speed.

In the teaching screen 16, a "OK" button 16n and a "cancel" button 16o are displayed at the lower position. The "OK" button 16n is a button for confirming teaching, and the "cancel" button 16o is a button for canceling teaching and returning to the alarm screen 15.

Referring to Fig. 9, when the teaching screen 16 is displayed on the display unit 7, the control unit 5 determines whether the &quot;cancel&quot; button 16o has been selected through the input unit 8 (step 132). When the &quot;cancel&quot; button 16o is selected (YES in step 132), the control unit 5 displays the alarm screen 15 on the display unit 7 instead of the teaching screen 16 (step 128).

When the "cancel" button 16o is not selected (NO in step 132), the control unit 5 determines which of the four-way buttons 16g has been selected through the input unit 8 (step 133). ). When no button has been selected (NO in step 133), the control unit 5 returns to step 132 and determines whether the "cancel" button 16o has been selected.

On the other hand, when any of the four direction buttons 16g is selected (YES in step 133), the control unit 5 moves the imaging unit 30 in the direction corresponding to the button (step 134). As the imaging unit 30 moves, the image displayed in the image display area 16a changes. By such a process, the operator moves the imaging unit 30 by selecting the 4-way button 16g, so that the line 16b for alignment and the edge 2a on the tip side of the substrate 1 Position can be customized.

When the imaging unit 30 is moved, next, the control unit 5 determines whether the "OK" button 16n has been selected through the input unit 8 (step 135). If the OK button has not been selected (NO in step 135), the control unit 5 returns to step 132 and determines whether the "cancel" button 16o has been selected.

On the other hand, when the "OK" button 16n is selected (YES in step 135), the control unit 5 proceeds to the next step 136. For example, the operator selects the "OK" button 16n after the alignment between the alignment line 16b and the edge 2a on the tip side of the substrate 1 is completed.

When the "OK" button 16n is selected, the control unit 5 calculates the stop position of the substrate 1 in the conveyance direction based on the current position of the imaging unit 30 (step 136). Next, the control unit 5 stores the calculated stop position of the substrate 1 in the storage unit 6 as a teaching result (step 137). Then, the control unit 5 returns to step 128 and causes the alarm screen 15 to be displayed on the display unit 7.

When the "close" button 15b on the alarm screen 15 is selected (YES in step 129), the control unit 5 stores the stop position of the substrate 1 according to the teaching result in the storage unit 6 It is determined whether or not (step 138). When the teaching result is stored in the storage unit 6 (YES in step 138), the control unit 5 determines the imaging position of the alignment mark 3 based on the stop position of the substrate 1 according to the teaching result. Is calculated (step 139).

When the imaging position of the alignment mark 3 is calculated, next, the control unit 5 proceeds to step 122 in FIG. 8 to move the imaging unit 30 to the imaging position of the alignment mark 3. Then, the control unit 5 executes the processing after step 123.

On the other hand, in step 138, when the teaching result is not stored in the storage unit 6 (NO in step 138), the control unit 5 moves one guide 11 of the transfer unit 10 in the Y-axis direction. To release the clamping state of the substrate 1 (step 140). And the control part 5 rotates the conveyor belt 13 reversely, and returns the board|substrate 1 to the carrying-in side (step 141). Thereafter, the control unit 5 returns to step 103, rotates the conveyor belt 13 forward, conveys the substrate 1 toward the conveyance side, and then executes the processing after step 104.

In the description herein, the case where the alarm screen 15 and the teaching screen 16 are displayed on the display unit 7 of the inspection device 102 has been described, but the alarm screen 15 and the teaching screen 16 are controlled. It may be displayed on the display of the device 106. In this case, the control device 106 displays the alarm screen 15 and the teaching screen 16 on the basis of the display signal output from the control unit 5 of the inspection device 102 to the display unit 7 of the control device 106 Mark on

[Action, etc.]

The inspection device 102 (position detection device) according to the present embodiment has, for example, the following effects.

In this embodiment, the stop position of the substrate 1 is detected based on the position of the edge 2 of the substrate 1 in the image picked up by the imaging unit 31. Therefore, even in the case of stopping the substrate 1 without a stopper in the conveying unit 10, it is possible to appropriately detect the stop position of the substrate 1.

In addition, since the image pickup unit 31 attempts to capture the edge 2 at the position where the edge 2 of the substrate 1 is expected to stop, the edge 2 is The edge 2 can be appropriately imaged by the imaging unit 31. In addition, since the edge stop predicted position is set to a different position for each weight (type) of the substrate 1, even when the weight (type) of the substrate 1 is different, the imaging unit 31 at the edge stop predicted position ), the edge 2 of the substrate 1 can be properly imaged.

Further, in the present embodiment, since the edge stop predicted position is corrected based on the detected actual stop position of the substrate 1, the edge stop predicted position can be corrected to an appropriate position.

In addition, in the present embodiment, since the retry process is executed for edge detection, even in the case where the edge 2 of the substrate 1 cannot be imaged by the imaging unit 31 at the predicted edge stop position, The edge 2 of the substrate 1 can be properly imaged.

In addition, in the retry process, it is determined in which direction the imaging unit 30 should be moved in the conveying direction based on the captured image, so when detecting the edge 2 of the substrate 1 You can improve the speed up to.

Moreover, in this embodiment, when the retry process fails, the teaching screen 16 is displayed. Thereby, the operator manipulates the teaching screen 16 and adjusts the position of the imaging unit 31 and the edge 2 of the substrate 1, whereby the position of the substrate 1 with respect to the inspection device 102 You can teach.

<2nd embodiment>

Next, a second embodiment of the present technology will be described. In the description after the second embodiment, the description is omitted or simplified for a member having the same function or configuration as in the first embodiment described above.

In the above-described first embodiment, it has been described that the edges of the substrate 1 are detected for all the substrates 1. On the other hand, in the second embodiment, edge detection of the substrate 1 is omitted when the stop position of the substrate 1 stopped without a stopper is stable. In the second embodiment, since this point is different from that of the first embodiment, this point will be mainly described.

The inspection device 102 (position detection device) according to the second embodiment has two modes, and the two modes can be switched. In the first mode, for all the substrates 1, the edge 2 of the substrate 1 is imaged by the imaging unit 31, and the stop position of the substrate 1 is determined based on the position of the edge 2 This is a detection mode. In this first mode, the same processing as in Figs. 6 to 9 described above is executed.

In the second mode, the edge 2 is imaged by the image capturing unit 31, without executing a process of detecting the stop position of the substrate 1 based on the position of the edge 2, and the storage unit 6 In this mode, the target stop position of the substrate 1 stored in is set to the stop position of the substrate 1.

14 is a flow chart showing processing of the inspection device according to the second embodiment. 15 and 16 are flow charts showing processing in the second mode.

In the second embodiment, first, the control unit 5 determines whether or not the current mode is the first mode (step 201). In the initial state, the first mode is executed. If the current mode is the first mode, the control unit 5 executes processing in the first mode (step 202). That is, the control unit 5 captures an image of the edge 2 of the substrate 1 with the imaging unit 31 for all the substrates 1, and the position of the substrate 1 The stop position is detected (see Figs. 6 to 9).

Upon completion of the processing in the first mode, next, the control unit 5 determines whether or not a predetermined condition has been satisfied in the processing in the first mode (step 203). Here, as predetermined conditions, the following (1) and (2) are mentioned.

(1) In an image captured by the imaging unit 31 at an edge stop predicted position, imaging of the edge 2 of the substrate 1 is successively performed a predetermined number of times or more. Here, the predetermined number of times is, for example, three times, but is not limited thereto. The predetermined number of times may be changed through the input unit 8.

(2) The deviation of the stop position of each substrate 1 detected based on the position of the edge 2 of the substrate 1 is less than or equal to a predetermined threshold. Here, the predetermined threshold is, for example, about 1.5 mm, but is not limited thereto. The threshold value may be changed through the input unit 8.

The conditions to be set may be both conditions of (1) and (2), and one of (1) and (2) may be used.

When it is determined that both conditions (or conditions (1) or (2)) shown in (1) and (2) are satisfied (YES in step 203), the control unit 5 sets the first mode to the second mode. The mode is switched (step 204). That is, when the stop position of the substrate 1 stopped without a stopper is stable, the control unit 5 switches the first mode to the second mode. Then, the control unit 5 returns to step 201 and determines whether the current mode is the first mode.

On the other hand, when it is determined that both conditions (or conditions (1) or (2)) shown in (1) and (2) are not satisfied (NO in step 203), the control unit 5 is in the first mode. Does not switch to the second mode, and returns to step 201.

In step 201, when the current mode is the second mode (NO in step 201), the control unit 5 executes processing in the second mode (step 205).

With reference to Figs. 15 and 16, processing in the second mode will be described. When the flow chart in the second mode shown in Fig. 15 is compared with the flow chart in the first mode shown in Fig. 6, steps 304 and 310 are different from steps 104 and 110.

That is, in the first mode, the control unit 5 moves the imaging unit 30 to the predicted edge stop position, and executes a process of attempting to capture the edge 2 of the substrate 1 by the imaging unit 31. (Steps 104 and 110 in Fig. 6). On the other hand, in the second mode, the control unit 5 does not perform a process of imaging the edge 2 of the substrate 1 by the imaging unit 31 by moving the imaging unit 30 to the predicted edge stop position. . In this case, the control unit 5 directly moves the imaging unit 30 to the alignment mark imaging position, and executes a process of imaging the alignment mark 3 by the imaging unit 31 (Fig. 15, step 304). , 310). Further, the control unit 5 executes a process of imaging the other two or more alignment marks 3 at two or more different positions.

When moving the imaging unit 30 to the alignment mark imaging position in step 304, the control unit 5 assumes that the substrate 1 is present at the stop target position stored in the storage unit 6, and the stop target The alignment mark imaging position is calculated from the position. Then, the imaging unit 30 is moved to the alignment mark imaging position.

Here, in the first mode, the stop target position of the substrate 1 is corrected to an appropriate position according to the actual stop position of the substrate 1 detected based on the image picked up by the imaging unit 31. (Figure 8, step 120). Therefore, in the second mode, by calculating the alignment mark imaging position using the stop target position, the alignment mark 3 can be imaged at an appropriate alignment mark imaging position.

Referring to FIG. 16, when the alignment mark 3 is imaged, the control unit 5 next, based on the imaged images of two or more alignment marks 3, the position of the substrate 1 or the substrate 1 ), the inclination around the Z axis, the size of the substrate 1, etc. are recognized (step 311).

Next, the control unit 5 determines whether or not the recognition of the position of the substrate 1 is successful (step 312). When the recognition of the position of the substrate 1 is successful (YES in step 312), the control unit 5 inspects the inspection surface of the substrate 1 (step 313). When the inspection of the substrate 1 is finished, the control unit 5 releases the clamping state of the substrate 1 (step 314), and removes the substrate 1 from the inspection apparatus 102 (step 315).

On the other hand, when the recognition of the position of the substrate 1 fails (NO in step 312), the control unit 5 proceeds to the next step 316. A case in which recognition of the position of the substrate 1 fails is a case in which the actual stop position of the substrate 1 is shifted from the stop target position of the substrate 1, and the image pickup of the alignment mark 3 fails.

In this case, the control unit 5 moves the imaging unit 30 to the edge stop predicted position (step 316), and the edge 2 of the substrate 1 is moved by the imaging unit 31 at the edge stop predicted position. Image capture is attempted (step 317). Then, the control unit 5 executes the processing after step 111 in FIG. 7. That is, the control unit 5 executes retry processing and the like.

Referring to Fig. 14, when the processing in the second mode is ended, next, the control unit 5 determines whether or not a predetermined condition is satisfied in the processing in the second mode (step 206). Here, as predetermined conditions, the following (1)' and (2)' can be mentioned.

(1)' Failed to recognize the position of the substrate 1 continuously for more than a predetermined number of times (see step 312). Here, the predetermined number of times is, for example, twice, but is not limited thereto. The predetermined number of times may be changed through the input unit 8.

(2)' The number of substrates 1 that failed to recognize the position/the total number of substrates 1 processed in the second mode exceeded a predetermined threshold. Here, the predetermined threshold is, for example, about 5%, but is not limited thereto. The threshold value may be changed through the input unit 8.

The conditions to be set may be both conditions of (1)' and (2)', and one of (1)' and (2)' may be used.

When it is determined that both conditions (or the condition of (1)' or (2)') shown in (1)' and (2)' are satisfied (YES in step 206), the control unit 5 5) switches the second mode to the first mode (step 207). That is, when the stop position of the substrate 1 stopped without a stopper is unstable, the control unit 5 switches the second mode to the first mode.

On the other hand, when it is determined that both conditions (or conditions of (1)' or (2)') shown in (1)' and (2)' are not satisfied (NO in step 206), the control unit 5 , The second mode is not switched to the first mode, and the process returns to step 201.

Also, whether the first mode is always executed or whether the first mode and the second mode are switched may be set through the input unit 8.

[Action, etc.]

The inspection device 102 (position detection device) according to the second embodiment has, for example, the following effects.

In the second embodiment, in the second mode, the processing of imaging the edge 2 by the image pickup unit 31 and detecting the stop position of the substrate 1 based on the position of the edge 2 is omitted. Therefore, the time required for inspection of the substrate 1 can be shortened.

Further, since the first mode is switched to the second mode when the stop position of the substrate 1 stopped without a stopper is stable, the first mode can be switched to the second mode at an appropriate timing. Further, since the second mode is switched to the first mode when the stop position of the substrate 1 which is stopped without a stopper is not stable, the second mode can be switched to the first mode at an appropriate timing.

<Various variations>

In the above description, for convenience, the case where the edge 2a on the front end side of the substrate 1 is an object for image pickup by the imaging unit 31 has been described. However, the edge 2b on the rear end side of the substrate 1 may be the object of the imaging unit 31 to be imaged. In this case, the predicted edge stop position is set to a position corresponding to the edge 2b on the rear end side of the substrate 1. Then, at this position, an image pickup of the edge 2b on the rear end side of the substrate 1 is attempted by the image pickup unit 31.

In addition, when the edge 2a on the front end is to be imaged by the imaging unit 31, and when the edge 2b on the rear end is to be imaged by the imaging unit 31, the retry processing is performed. In this case, the direction in which the imaging unit 30 is moved is reversed.

For example, in step 114 of FIG. 7, when it is determined that the imaging unit 31 is present at a position corresponding to the substrate 1, the control unit 5 transfers the imaging unit 30 to the substrate 1. It is moved to the carry-in side (a direction opposite to the direction in which the substrate 1 is conveyed). On the other hand, when it is determined that the imaging unit 31 is not present at a position corresponding to the substrate 1, the control unit 5 moves the imaging unit 30 to the carrying side of the substrate 1 (substrate 1). In the direction in which it is conveyed).

In the above description, when the relative positions of the imaging section 31 and the substrate 1 in the conveyance direction in the retry process are changed, the case where the imaging section 31 side is moved has been described. However, in the retry processing, as the substrate 1 side is moved, the relative positions of the imaging unit 31 and the substrate 1 in the conveyance direction may change. In this case, with the imaging unit 30 stopped at the edge stop predicted position, the conveyor belt 13 of the conveying unit 10 is driven and the substrate 1 is moved.

In this case, a case where the edge 2a on the front end side becomes an object for image pickup by the imaging unit 31 will be described. In this case, in step 114 of FIG. 7, when it is determined that the image pickup unit 31 is present at a position corresponding to the substrate 1, the control unit 5 controls the conveyor belt 13 of the transfer unit 10. ) Is rotated in reverse to move the substrate 1 to the carrying side (a direction opposite to the direction in which the substrate 1 is conveyed). On the other hand, when it is determined that the imaging unit 31 does not exist at the position corresponding to the substrate 1, the control unit 5 rotates the conveyor belt 13 of the transport unit 10 forward, and the substrate ( 1) is moved to the carrying side (direction in which the substrate 1 is conveyed).

A case in which the edge 2b on the rear end is an object of the image pickup unit 31 will be described. In this case, in step 114 of FIG. 7, when it is determined that the image pickup unit 31 is present at a position corresponding to the substrate 1, the control unit 5 controls the conveyor belt 13 of the transfer unit 10. ) Is rotated forward, and the substrate 1 is moved to the carrying side (the direction in which the substrate 1 is conveyed). On the other hand, when it is determined that the imaging unit 31 does not exist at a position corresponding to the substrate 1, the control unit 5 rotates the conveyor belt 13 of the transport unit 10 in reverse, and the substrate ( 1) is moved to the carry-in side (a direction opposite to the direction in which the substrate 1 is conveyed).

In the retry process, the distance the substrate 1 is moved along the conveyance direction is related to the imaging range 31a of the imaging unit 31. For example, when the imaging range 31a in the conveyance direction of the imaging part 31 is 35 mm, the moving distance of the board|substrate 1 is 35 mm. Alternatively, when overlap is considered, for example, the overlap amount is 5 mm, and the moving distance of the substrate 1 is 30 mm.

In the retry process, when the relative positions of the imaging unit 31 and the substrate 1 in the conveyance direction are changed, both the imaging unit 31 and the substrate 1 may be moved in the conveyance direction.

In the above description, a case where the position detection device according to the present technology is applied to the inspection device 102 has been described. However, the position detection device according to the present technology may be applied to the mounting device 103 and the screen printing device 101. When the position detection device is applied to the mounting device 103, the edge 2 of the substrate 1 is attached to the mounting head movable in the X-axis direction and the Y-axis direction, and the edge 2 of the substrate 1 is It is imaged. Further, when the position detection device is applied to the screen printing device 101, the edge 2 of the substrate 1 is imaged by an image pickup unit for image pickup of an alignment mark, which is movable in the X-axis direction and the Y-axis direction.

As the imaging unit 31 for substrate inspection, the imaging unit for alignment mark imaging, and the like are used as the imaging unit 31 for edge imaging, the conventional imaging unit is used as the imaging unit 31 for edge imaging ( Since it can be used, there is an advantage of realizing cost reduction. However, it is not always necessary to use the existing image pickup unit as the image pickup unit 31 for edge imaging, and a dedicated image pickup unit 31 for image pickup of the edge 2 may be specially installed in the position detection device. Do.

When a dedicated imaging unit 31 for imaging the edge 2 of the substrate 1 is specially installed, the imaging unit 31 is disposed, for example, at a position where the substrate 1 can be imaged from the lower side. do. The imaging unit 31 may be in a form that can be moved in the conveying direction (X-axis direction), or may be a form that is fixed to an edge stop expected position (in particular, the substrate 1 side is moved in the retry process. Form).

In the above description, the case where the target stop position and the predicted edge stop position of the substrate 1 are previously set for each weight (type) of the substrate 1 has been described. However, the stop target position and the edge stop predicted position may not be set in advance for each weight (type) of the substrate 1. For example, as for the stop target position and the edge stop predicted position, a common stop target position and an edge stop predicted position may be initially set for each weight (type) of the substrate 1.

Explain the reason. As described above, in the present technology, the target stop position of the substrate 1 and the predicted edge stop position are corrected based on the actual stop position of the substrate 1. Therefore, for the first time, even if a common edge stop predicted position for each weight (type) of the substrate 1 is used (that is, even if the edge stop predicted position is somewhat inaccurate), when time elapses, the stop target position and the edge stop predicted position Is corrected to an appropriate position for each weight (type) of the substrate 1. Therefore, the stop target position and the edge stop predicted position may not be set in advance for each weight (type) of the substrate 1 (that is, they may be somewhat inaccurate).

The present technology can also adopt the following configuration.

(1) an imaging unit,

A transport unit that transports the substrate along the transport direction and stops the substrate being transported,

A control unit that captures an edge in the transport direction of the stationary substrate by the imaging unit, and detects a stop position of the substrate based on the position of the edge of the substrate in the captured image

Position detection device comprising a.

(2) The position detection device according to (1) above,

The control unit first attempts to capture the edge by the imaging unit at an edge stop predicted position in which the edge of the substrate is expected to stop.

(3) The position detection device according to (2) above,

A position detection apparatus further comprising a movement mechanism for moving the image pickup unit or the substrate along the transport direction in order to change the relative position of the image pickup unit and the stationary substrate in the transport direction.

(4) As the position detection device according to (2) or (3) above,

The control unit is a position detection device for correcting the predicted edge stop position based on the detected stop position of the substrate.

(5) As the position detection device according to any one of (2) to (4) above,

The control unit, for each weight of the substrate, at a different edge stop predicted position, the position detection device for imaging the edge by the imaging unit.

(6) The position detection device according to (3) above,

The control unit determines whether or not the image captured by the image pickup unit at the edge stop predicted position is an image containing the edge, and if the image is not an image containing the edge, the moving mechanism A position detection device that performs a retry process, which is a process of changing the relative positions of the imaging unit and the substrate in the conveyance direction, and attempting to capture the edge again by the imaging unit.

(7) The position detection device according to (6) above,

The control unit determines, in the retry processing, a direction in the conveyance direction in which the image pickup unit or the substrate is to be moved, based on an image captured by the image pickup unit at the edge stop predicted position.

Position detection device.

(8) As the position detection device according to (7) above,

In the retry processing, the control unit determines whether or not the image pickup unit is at a position corresponding to the substrate based on the image captured by the image pickup unit at the edge stop expected position, and the determination result Accordingly, a position detection device that determines a direction in the conveyance direction in which the imaging unit or the substrate is to be moved.

(9) As the position detection device according to any one of (6) to (8) above,

The control unit repeats the retry process until the edge is detected.

(10) As the position detection device according to (8) above,

The edge to be imaged by the imaging unit is an edge on the tip side in the conveyance direction,

When it is determined that the imaging unit is located at a position corresponding to the substrate, the control unit may move the imaging unit in a direction in which the substrate is transported, or the substrate in a direction opposite to a direction in which the substrate is transported. Position detection device to move.

(11) The position detection device according to (10) above,

When it is determined that the image pickup unit does not exist at a position corresponding to the substrate, the control unit moves the image pickup unit in a direction opposite to a direction in which the substrate is transported, or in a direction in which the substrate is transported. Position detection device for moving the substrate.

(12) As the position detecting device according to (8) above,

The edge to be imaged by the imaging unit is an edge on the rear end side in the conveyance direction,

When it is determined that the image pickup unit is located at a position corresponding to the substrate, the control unit may move the image pickup unit in a direction opposite to a direction in which the substrate is transported, or the substrate in a direction in which the substrate is transported. Position detection device to move.

(13) The position detection device according to (12) above,

When it is determined that the image pickup unit does not exist at a position corresponding to the substrate, the control unit moves the image pickup unit in a direction in which the substrate is transported, or in a direction opposite to a direction in which the substrate is transported. Position detection device for moving the substrate.

(14) As the position detection device according to any one of (6) to (13) above,

When the retry process fails, the control unit manually changes the relative position of the image pickup unit and the substrate in the transport direction, so that the position of the image pickup unit and the position of the edge are aligned. To output an indication signal

Position detection device.

(15) As the position detecting device according to any one of (1) to (14) above,

Further comprising a storage unit for storing the stop target position of the substrate,

The control unit includes a first mode for capturing the edge by the image capturing unit and detecting a stop position of the substrate based on the position of the edge, and capturing the edge by the image capturing unit, and the position of the edge A position inspection apparatus for switching a second mode in which a process of detecting a stop position of the substrate is not performed based on the method, and a target stop position of the substrate stored in the storage unit is a stop position of the substrate.

(16) The position detection device according to (15) above,

In the first mode, the control unit determines whether a deviation of the stop position of each substrate detected based on the position of the edge is less than or equal to a predetermined threshold, and when the deviation is less than or equal to the predetermined threshold, Position inspection device for switching the first mode to a second mode.

(17) The position detecting device according to (15) or (16), wherein the control unit is used in the second mode based on a stop position of the substrate detected in the first mode. A position detection device for correcting the stop target position of the substrate stored in the device.

One; Board
2; edge
5; Control unit
6; Memory
7; Display
10; Conveyance
11; guide
13; Conveyor belt
20; Backup (back-up) section
30; Imaging unit
31; Imaging unit
31a; Imaging range
32; Lighting
40; Imaging unit moving mechanism
102; Inspection device

Claims (19)

With the imaging unit,
A transport unit that transports the substrate along the transport direction and stops the substrate being transported,
A moving mechanism for moving the image pickup unit or the substrate along a transport direction in order to change the relative position of the image pickup unit and the stationary substrate in the transport direction;
An edge in the transport direction of the stationary substrate is imaged by the imaging unit, and based on the position of the edge of the substrate in the captured image, the stop position of the substrate is detected, and first, An image that attempts to capture the edge by the image pickup unit at a predicted edge stop position where the edge is expected to stop, and the image captured by the image pickup unit at the predicted edge stop position includes the edge It is determined whether or not, and when the image is not an image including the edge, the relative position of the image pickup unit and the substrate in the conveyance direction is changed by the moving mechanism, and again, by the image pickup unit. A retry process, which is a process that attempts to capture the edge, is executed, and in the retry process, the imaging unit or the substrate is moved based on the image captured by the imaging unit at the predicted edge stop position. Control unit that determines the direction in the conveying direction to be made
Position detection device comprising a. The method of claim 1,
The control unit corrects the predicted edge stop position based on the detected stop position of the substrate.
Position detection device. The method of claim 1,
The control unit, for each weight of the substrate, at a different edge stop predicted position, to image the edge by the imaging unit
Position detection device. The method of claim 1,
In the retry process, the control unit determines whether or not the image pickup unit is at a position corresponding to the substrate based on the image captured by the image pickup unit at the edge stop predicted position, and the determination result Accordingly, determining a direction in the conveyance direction in which the image pickup unit or the substrate is to be moved
Position detection device. The method of claim 1,
The control unit repeats the retry process until the edge is detected.
Position detection device. The method of claim 4,
The edge to be imaged by the imaging unit is an edge on the tip side in the conveyance direction,
When it is determined that the imaging unit is located at a position corresponding to the substrate, the control unit may move the imaging unit in a direction in which the substrate is transported, or the substrate in a direction opposite to a direction in which the substrate is transported. Moving
Position detection device. The method of claim 6,
When it is determined that the image pickup unit does not exist at a position corresponding to the substrate, the control unit moves the image pickup unit in a direction opposite to a direction in which the substrate is transported, or in a direction in which the substrate is transported. Moving the substrate
Position detection device. The method of claim 4,
The edge to be imaged by the imaging unit is an edge on the rear end side in the conveyance direction,
When it is determined that the image pickup unit is located at a position corresponding to the substrate, the control unit may move the image pickup unit in a direction opposite to a direction in which the substrate is transported, or the substrate in a direction in which the substrate is transported. Moving
Position detection device. The method of claim 8,
When it is determined that the image pickup unit does not exist at a position corresponding to the substrate, the control unit moves the image pickup unit in a direction in which the substrate is transported, or in a direction opposite to a direction in which the substrate is transported. Moving the substrate
Position detection device. The method of claim 1,
When the retry process fails, the control unit manually changes the relative position of the image pickup unit and the substrate in the conveyance direction, and teaches the position of the image pickup unit and the edge. ) To output the display signal on the screen
Position detection device. The method of claim 1,
Further comprising a storage unit for storing the stop target position of the substrate,
The control unit includes a first mode for capturing the edge by the image capturing unit and detecting a stop position of the substrate based on the position of the edge, and capturing the edge by the image capturing unit, and the position of the edge To switch the second mode in which the process of detecting the stop position of the substrate is not executed and the target stop position of the substrate stored in the storage unit is the stop position of the substrate.
Position detection device. The method of claim 11,
In the first mode, the control unit determines whether a deviation of the stop position of each substrate detected based on the position of the edge is less than or equal to a predetermined threshold, and when the deviation is less than or equal to the predetermined threshold, Switching the first mode to the second mode
Position detection device. The method of claim 11,
The control unit corrects the stop target position of the substrate stored in the storage unit, used in the second mode, based on the stop position of the substrate detected in the first mode.
Position detection device. Conveying the substrate along the conveying direction,
Stopping the substrate being conveyed,
The edge in the conveyance direction of the stationary substrate is imaged by an imaging unit,
Based on the position of the edge of the substrate in the captured image, the stop position of the substrate is detected,
First, at the edge stop predicted position at which the edge of the substrate is stopped, the imaging unit attempts to capture the edge,
At the edge stop predicted position, it is determined whether the image captured by the image pickup unit is an image containing the edge, and when the image is not an image containing the edge, the image pickup unit and the A retry process, which is a process of attempting to image the edge by changing the relative position of the substrate in the conveyance direction, is again performed by the imaging unit,
In the retry process, based on the image captured by the imaging unit at the edge stop predicted position, determining a direction in the conveyance direction in which the imaging unit or the substrate should be moved
Position detection method. Conveying the substrate along the conveying direction,
Stopping the substrate being conveyed,
The edge in the conveyance direction of the stationary substrate is imaged by an imaging unit,
Based on the position of the edge of the substrate in the captured image, the stop position of the substrate is detected,
With respect to the substrate present at the detected stop position, a predetermined process for manufacturing the substrate is performed,
First, at an edge stop predicted position at which the edge of the substrate is stopped, the imaging unit attempts to capture the edge,
At the edge stop predicted position, it is determined whether the image captured by the image pickup unit is an image containing the edge, and when the image is not an image containing the edge, the image pickup unit and the A retry process, which is a process of attempting to image the edge by changing the relative position of the substrate in the conveyance direction, is again performed by the imaging unit,
In the retry process, based on the image captured by the imaging unit at the edge stop predicted position, determining a direction in the conveyance direction in which the imaging unit or the substrate should be moved
Substrate manufacturing method. delete delete delete delete

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