KR20140134239A - Device and method for detecting position, and method of manufacturing substrate - Google Patents

Abstract

The present invention provides technology capable of properly detecting a stop position of a substrate, for example, when the substrate is stopped without a stopper in regard to a returning part. A position detecting device relating to the technology includes a photographing part, the returning part, and a control part. The returning part returns the substrate in a return direction and stops the returned substrate. The control part photographs an edge in the return direction of the stopped substrate by the photographing part and detects the stop position of the substrate based on a position of the edge of the substrate in the photographed image.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a position detecting device, a position detecting method,

TECHNICAL FIELD [0001] The present invention relates to a position detecting apparatus, a position detecting method, and a substrate manufacturing method for detecting a stop position of a substrate.

2. Description of the Related Art Conventionally, a mounting system in which various devices for manufacturing a substrate are arranged in series is widely known. Examples of the apparatus used in the mounting system include a screen printing apparatus for printing a solder paste in a paste state on a substrate, a printing inspection apparatus for inspecting the printed state of the solder, A mounting apparatus, a mounting inspection apparatus for inspecting the mounting state of electronic components, and the like are known.

In such various apparatuses, it is first necessary to transport the substrate transferred from the apparatus on the upstream side and stop the substrate at the stop target position. Therefore, these apparatuses generally have a carry section for carrying the substrate and stopping it at the stop target position.

The conveying section includes, for example, a pair of guides for guiding the substrate from the side, and a conveyor belt provided on the pair of guides, respectively, for conveying the substrate by the driving. In order to accurately stop the substrate conveyed by the conveyor belt at the stop target position, a stopper driven by an actuator or the like is provided in the carry section (see, for example, Patent Document 1).

Japanese Patent Application Laid-Open No. 2001-144494 (paragraph [0007], Fig. 12)

However, if the substrate is stopped by the stopper, there is a fear that the substrate is broken by the impact when the moving substrate comes into contact with the stopper, and when the electronic part is mounted on the substrate, There is a possibility that the position may be shifted.

Thus, it is considered to stop the substrate without a stopper. In this case, however, there is a fear that the position of the substrate is displaced with respect to the stop target position, and therefore, a technique capable of detecting the stop position of the substrate is required.

In view of the above circumstances, the object of the present invention is to provide a technique capable of properly detecting the stop position of the substrate when stopping the substrate without stopper, for example, in the carry section.

The position detecting apparatus according to the present invention includes an imaging section, a carrying section, and a control section.

The transport section transports the substrate along the transport direction and stops the substrate being transported.

Wherein the controller captures the edge of the stopped substrate in the carrying direction by the imaging section and detects the stop position of the substrate based on the position of the edge of the substrate in the picked- do.

In such a position detection apparatus, the stop position of the substrate is detected based on the position of the edge of the substrate in the image picked up by the image pickup section. Therefore, even when the substrate is stopped without a stopper, for example, in the carry section, the stop position of the substrate can be properly detected.

In the position detecting apparatus, the control section may first attempt to image the edge by the imaging section at a predicted edge stop position where the edge of the substrate is stopped.

As a result, the edge of the substrate can be properly picked up.

The position detecting device may further include a moving mechanism that moves the imaging unit or the substrate along the carrying direction so as to change a relative position of the imaging unit and the stopped substrate in the carrying direction.

In the case where the imaging section is moved, the moving mechanism is a moving mechanism for moving the imaging section. On the other hand, when the substrate is moved, the carrying section for carrying the substrate may have a function as a moving mechanism.

In the position detecting device, the control section may correct the edge stop predicted position based on the detected stop position of the substrate.

This makes it possible to correct the edge stop predicted position to an appropriate position.

In the position detecting apparatus, the control section may image the edge by the imaging section at another edge stop predicted position for each weight of the substrate.

Thereby, even when the weight (kind) of the substrate is different, it is possible to properly pick up the edge of the substrate by the imaging unit at the edge stop expected position.

In the position detection device, the control unit may determine whether the image picked up by the image pickup unit at the edge stop expected position is an image including the edge, and if the image is not an image including the edge , The moving mechanism changes the relative position of the imaging section and the substrate in the carrying direction and retries processing to try to pick up the edge by the imaging section again It is also acceptable.

As the retry processing is executed, even when the edge of the substrate is not detected in the picked-up image at the edge stop expected position, the edge of the substrate can be properly detected to detect the stop position of the substrate.

In the position detection device, the control unit may control, in the retry process, a position in which the image pickup unit or the substrate is to be moved, based on an image picked up by the image pickup unit at the edge stop expected position, It is also possible to determine the direction in the direction of the arrow.

Thus, in the retry processing, it is possible to determine in which direction the imaging unit or the substrate should be moved next. Therefore, it is possible to improve the speed until the edge of the substrate is detected.

In the position detecting device, the control unit may determine whether or not the image pickup unit exists at a position corresponding to the substrate, based on an image picked up by the image pickup unit at the edge stop predicted position at the retry processing And determine the direction in the transport direction in which the image pickup unit or the substrate should be moved in accordance with the determination result.

This makes it possible to appropriately determine in which direction the imaging unit or the substrate should be moved next.

In the position detecting device, the control section may repeat the retry processing until the edge is detected.

In the position detecting device, an edge to be imaged by the imaging unit is an edge on the leading end side in the carrying direction,

The control unit moves the imaging unit in the direction in which the substrate is transported or moves the substrate in the direction opposite to the direction in which the substrate is transported when it is determined that the imaging unit is present at the position corresponding to the substrate, .

Thus, the edge of the front end side of the substrate can appropriately be picked up by the image pickup unit.

The control unit may move the imaging unit in a direction opposite to a direction in which the substrate is transported when it is determined that the imaging unit does not exist at a position corresponding to the substrate, The substrate may be moved in a direction in which the substrate is transported.

Thus, the edge of the front end side of the substrate can appropriately be picked up by the image pickup unit.

In the position detecting device, an edge to be imaged by the imaging unit is an edge at the rear end side in the carrying direction,

Wherein the control unit moves the imaging unit in a direction opposite to a direction in which the substrate is transported when the imaging unit is determined to be present at a position corresponding to the substrate, .

Thus, the edge of the rear end side of the substrate can appropriately be picked up by the image pickup section.

In the above position detecting device, when it is determined that the image pickup unit does not exist at a position corresponding to the substrate, the control unit moves the image pickup unit in the direction in which the substrate is transported, It is also possible to move the substrate in a direction opposite to the direction.

Thus, the edge of the rear end side of the substrate can appropriately be picked up by the image pickup section.

In the position detecting device, when the retry process fails, the control unit manually changes a relative position of the image sensing unit and the substrate in the transport direction, and changes the position of the image sensing unit and the position of the edge It is also possible to output a display signal of a teaching screen for positioning.

Thereby, the operator can teach the position of the substrate with respect to the position detecting device by operating the teaching screen to align the position of the imaging section with the edge of the substrate.

The position detection device may further include a storage section for storing a target position for stopping the substrate.

In this case, the control unit may include a first mode for picking up the edge by the image pickup unit and detecting a stop position of the substrate based on the position of the edge, and a second mode for picking up the edge by the image pickup unit, It is also possible to switch the second mode in which the stop target position of the substrate stored in the storage section is set as the stop position of the substrate without performing the process of detecting the stop position of the substrate based on the position of the edge.

In the second mode, since the imaging of the edge of the substrate and the detection of the substrate stop position based on the position of the edge are omitted, the process is speeded up.

In the position detection device, the control unit may determine whether the deviation of the stop position of each substrate detected based on the position of the edge in the first mode is less than or equal to a predetermined threshold value, The first mode may be switched to the second mode.

Thereby, it is possible to switch the first mode to the second mode at an appropriate timing.

In the above-described position detection device, the control unit corrects the stop target position of the substrate, which is used in the second mode, stored in the storage unit, based on the stop position of the substrate detected in the first mode It is also acceptable.

This makes it possible to appropriately correct the target stop position of the substrate used in the second mode.

The position detection method according to the present invention includes transporting a substrate along a transport direction.

The substrate being transported is stopped.

And the edge of the stopped substrate in the carrying direction is picked up by the image pickup section.

The stop position of the substrate is detected based on the position of the edge of the substrate in the picked-up image.

A manufacturing method of a substrate according to the present invention includes transporting a substrate along a transport direction.

The substrate being transported is stopped.

And the edge of the stopped substrate in the carrying direction is picked up by the image pickup section.

The stop position of the substrate is detected based on the position of the edge of the substrate in the picked-up image.

Processing necessary for manufacturing the substrate is performed on the substrate present at the detected stop position.

The processing required for manufacturing the substrate includes, for example, a process of printing solder on a substrate, a process of inspecting a substrate on which solder is printed, a process of mounting an electronic part on a substrate, a process of inspecting a substrate on which electronic parts are mounted .

As described above, according to this technique, when the substrate is stopped without stopper, for example, in the carry section, a technique capable of properly detecting the stop position of the substrate can be provided.

1 is a view showing a mounting system for manufacturing a substrate.
2 is a perspective view showing a testing apparatus to which a position detecting apparatus according to the present technology is applied.
Fig. 3 is a view of the inspection apparatus viewed from the transport direction of the substrate.
4 is a view showing the positions of a deceleration sensor and a stop sensor of the inspection apparatus.
5 is a block diagram showing an inspection apparatus.
6 is a flowchart showing the processing of the inspection apparatus.
7 is a flowchart showing the processing of the inspection apparatus.
8 is a flowchart showing the processing of the inspection apparatus.
9 is a flowchart showing the processing of the inspection apparatus.
10 is a diagram showing the relationship between the imaging range of the imaging unit arranged at the anticipated stop position of the edge and the stop position of the substrate.
11 is a diagram showing the positional relationship between the imaging range of the imaging unit and the edge at the front end side of the substrate when the imaging unit is moved from the edge stop expected position.
12 is a diagram showing an example of an alarm screen displayed on the display unit.
13 is a diagram showing an example of a teaching screen displayed on the display unit.
14 is a flowchart showing the processing of the inspection apparatus according to another embodiment.
15 is a flowchart showing processing in the second mode.
16 is a flowchart showing processing in the second mode.

Hereinafter, embodiments of the present technology will be described with reference to the drawings.

≪ First Embodiment >

1 is a view showing a mounting system 100 for manufacturing a substrate 1. Fig.

1, the mounting system 100 includes a screen printing apparatus 101, a printing inspection apparatus 102a, a mounting apparatus 103, a mounting inspection apparatus 102b, a reflow furnace A reflow furnace 104, a cleaning / drying apparatus 105, and a final inspection apparatus 102c. The mounting system 100 is also provided with a control device 106 that collectively controls these various devices. Various devices of the mounting system 100 are connected to each other so as to be able to communicate with each other through a communication cable.

The control device 106 is, for example, a personal computer (PC), and has a control section 5, an input section 8, a display section 7, and the like.

The screen printing apparatus 101 has a screen on which an opening is formed at a position corresponding to the print pattern, a supply unit for supplying solder in a paste state on the screen, and a squeegee for sliding on the screen. The screen printing apparatus 101 also includes a transport section for transporting the substrate 1 and arranging the substrate 1 at the stop target position, an image pickup section for picking up an alignment mark 3 provided on the substrate 1 and the screen, , And a screen printing device (101).

The screen printing apparatus 101 slides a squeegee on a screen to print solder on the substrate 1 located on the lower side of the screen. Then, the screen printing apparatus 101 transfers the substrate 1 on which the solder is printed to the printing inspection apparatus 102a.

The printing inspection apparatus 102a includes a transfer section for transferring the substrate 1 on which the solder is printed and placing the substrate 1 at the stop target position, an imaging section for imaging the substrate 1 on which the solder is printed, And a control unit for analyzing the substrate 1 two-dimensionally or three-dimensionally and inspecting the printing state of the solder. The printing inspection apparatus 102a transfers the substrate 1 judged as being good in printing condition to the mounting apparatus 103 and discards the substrate 1 judged to be in poor printing state .

The mounting apparatus 103 includes a carrying section for carrying the substrate 1 on which the solder is printed and placing the substrate 1 at the stop target position and an imaging section 31 for taking an image of the alignment mark 3 provided on the substrate 1 Which is mounted on the mounting head). The mounting apparatus 103 includes a supply section that supplies various electronic components such as a resistor, a capacitor, and an inductor, a mounting head that mounts the electronic components supplied from the supply section onto the substrate 1, 103 in a general manner. The mounting apparatus 103 mounts the electronic components on the substrate 1 by the mounting head and then transfers the substrate 1 on which the electronic components are mounted to the mounting inspection apparatus 102b.

The mounting inspection apparatus 102b has a transport section for transporting the substrate 1 on which electronic components are mounted and arranging the substrate 1 at the stop target position and an image pickup section for picking up an image of the substrate 1 on which the electronic components are mounted. The mounting inspection apparatus 102b has a control section for analyzing the mounting state of the electronic component by two-dimensionally or three-dimensionally analyzing the substrate 1 based on the picked-up image. The mounting inspection apparatus 102b transfers the substrate 1 judged as being good in the mounted state to the reflow furnace 104 and discards the substrate 1 judged as being in a poor mounting state .

The reflow furnace 104 melts the solder by reflowing the substrate 1 on which the electronic component is mounted, and connects the electronic component and the wiring provided on the substrate 1 through solder. Then, the reflow furnace 104 transfers the substrate 1 after the reflow process to the cleaning / drying apparatus 105.

The cleaning and drying apparatus 105 cleans the excess component such as flux adhering to the surface of the substrate 1 after the reflow treatment and dries the cleaned substrate 1. Then, the cleaning / drying apparatus 105 transfers the substrate 1 to the final inspection apparatus 102c.

The final inspection apparatus 102c includes a transfer section for transferring the substrate 1 after the reflow process and arranging the substrate 1 at the stop target position, an image pickup section for picking up the substrate 1, Dimensional or three-dimensional analysis of the substrate 1, and final inspection of the substrate 1. The final inspection apparatus 102c transfers the substrate 1 determined to be good in the final inspection to a storage apparatus (not shown), and the substrate 1 judged to be defective in the final inspection is discarded (Or return to retest).

The apparatus for detecting the position of the substrate 1 according to the present technology can be applied to a screen printing apparatus 101, a printing inspection apparatus 102a, a mounting apparatus 103, a mounting inspection apparatus 102b, a final inspection apparatus 102c, Can be applied. Typically, the position detecting apparatus can be applied to any apparatus as long as it is an apparatus for stopping the substrate 1 at the stop target position and executing a process necessary for manufacturing the substrate 1 with respect to the substrate 1. [

Here, the processing required for manufacturing the substrate 1 is, for example, a process of printing solder on the substrate 1, a process of inspecting the substrate 1 on which the solder is printed, A process of inspecting the substrate 1 on which electronic components are mounted, and the like.

Hereinafter, a case where the position detecting apparatus according to the present invention is applied to the inspection apparatus 102 such as the printing inspection apparatus 102a, the mounting inspection apparatus 102b, and the final inspection apparatus 102c is described as an example do.

2 is a perspective view showing the inspection apparatus 102 to which the position detecting apparatus according to the present technology is applied. Fig. 3 is a view showing the inspection apparatus 102 in the transport direction of the substrate 1. Fig. Fig. 4 is a diagram showing the positions of the deceleration sensor 52 and the stop sensor 53 of the inspection apparatus 102. Fig. Fig. 5 is a block diagram showing the inspection apparatus 102. Fig.

As shown in these figures, the inspection apparatus 102 carries the substrate 1 along the carrying direction (X-axis direction) and transfers the substrate 1 being transported (without a stopper) (10). The inspection apparatus 102 also has a backup section 20 for supporting the substrate 1 stopped at the stop target position from below. The inspection apparatus 102 further includes an imaging unit 30 having an illumination unit 32 for irradiating the substrate 1 with light and an imaging unit 31 for imaging the substrate 1 to which light is irradiated, And an imaging unit moving mechanism 40 for moving the imaging unit 30 in the XY directions.

The inspection apparatus 102 further includes a carry-in sensor 51 (see FIG. 5) for detecting the carry-over of the substrate 1 transferred from the apparatus arranged on the upstream side of the inspection apparatus 102, A deceleration sensor 52 and a stop sensor 53 for detecting the passage of the substrate 1 being conveyed. The inspection apparatus 102 has a control section 5, a storage section 6, a display section 7, an input section 8, and a communication section 9.

The position detecting device according to the present invention has at least an image pickup section 31, a carry section 10, and a control section 5. [

The substrate 1 to be inspected by the inspection apparatus 102 has a rectangular shape when seen in plan view and has an edge at the tip side in the transport direction (X-axis direction) of the substrate 1 2a and a rear edge 2b.

A plurality of alignment marks 3 are provided on the substrate 1 (see Fig. 2). In the example shown in Fig. 2, an example in which the alignment mark 3 is provided in the vicinity of the diagonal corner portion of the substrate 1 is shown. 2, a special pattern (a wiring pattern or the like) on the substrate 1 is not limited to the case where a special alignment mark 3 is specifically provided on the substrate 1, 3).

The carry section 10 has two guides 11 for guiding the substrate 1 along the carrying direction so as to sandwich the substrate 1 from both sides. Each of the guides 11 is a plate-shaped member having a long shape in the conveying direction of the substrate 1. On the lower side of each guide 11 are provided a plurality of leg portions 12 for supporting the guide 11 from below. Each guide 11 is attached to a base (not shown) of the inspection apparatus 102 through the leg portion 12.

On the inner side surface of each guide 11, a conveyor belt 13 capable of normal and reverse rotation is provided. The carry section 10 can carry the substrate 1 to the stop target position by driving the conveyor belt 13 or carry out the inspection of the substrate 1. [ A mechanical stopper is not provided for the carry section 10, and the substrate 1 is stopped at the stop target position (or the vicinity thereof) in accordance with the stop of the driving of the conveyor belt 13. [

In the examples shown in Figs. 2 and 4, the target stop position of the substrate 1 is a position near the center in the longitudinal direction of the guide 11. Fig. In the description of Figs. 2 and 4, the substrate 1 is described as being carried in from the right side and taken out to the left side. 2 and 4, the left direction is the direction in which the substrate 1 is transported.

Each of the guides 11 is formed so that its upper end portion is bent to be bent inside and the upper end portion of the guide 11 is located at the upper end portion of the guide portion 11 when the substrate 1 is moved upward by the backup portion 20. [ So that it can be supported from above. One of the guides 11 of the two guides 11 can move in a direction perpendicular to the conveying direction of the substrate 1 (Y-axis direction). Thereby, the substrate 1 arranged at the stop target position can be clamped from both sides by the two guides 11 and fixed. Thus, the substrate 1 is inspected in a state where the substrate 1 is fixed.

In the example shown in the figure, the number of the carry section 10 is one, but the number of the carry section 10 may be two or more. In this case, each carry section 10 is arranged so as to be parallel to the Y-axis direction.

The carry-in sensor 51 is provided on a carry-in conveyor (not shown) arranged on the upstream side of the carry section 10 and detects the carry-over of the substrate 1 delivered from the upstream side of the inspection apparatus 102. The carry-in sensor 51 is constituted by, for example, a reflection type optical sensor.

The deceleration sensor 52 and the stop sensor 53 are also constituted by, for example, a reflection type optical sensor as in the case of the carry-in sensor 51. [ The deceleration sensor 52 and the stop sensor 53 are arranged at a height corresponding to the height at which the substrate 1 passes through one or both of the guides 11 (see Fig. 4). The stop sensor 53 is disposed at a position where the edge 2a on the tip side of the substrate 1 can be detected when the substrate 1 reaches the position slightly upstream of the stop target position. The deceleration sensor 52 is disposed at a position on the upstream side of about 100 mm from the stop sensor 53, for example.

The deceleration sensor 52 and the stop sensor 53 are switched between "ON" and "OFF" as soon as the edge 2a of the front end side of the substrate 1 passes the position where these sensors are disposed. Therefore, these sensors 52 and 53 can detect that the edge 2 of the front end of the substrate 1 has passed the position corresponding to the sensors 52 and 53.

The driving of the conveyor belt 13 is controlled so that the conveyance speed of the substrate 1 is reduced when the edge 2a of the substrate 1 is detected to pass by the deceleration sensor 52. [ The driving of the conveyor belt 13 is controlled so that the rotation of the conveyor belt 13 is stopped when the passage of the edge 2a of the front end side of the substrate 1 is detected by the stop sensor 53. [

The passage of the edge 2a of the front end side of the substrate 1 is detected by the stop sensor 53 and the rotation of the conveyor belt 13 is stopped so that the substrate 1 does not stop immediately. That is, the substrate 1 advances somewhat in the advancing direction of the substrate 1, and then stops at the stop target position (or its vicinity). In the present technology, since the mechanical stopper is not provided, the substrate 1 can not necessarily stop accurately at the stop target position, and the position where the substrate 1 is stopped is likely to be shifted from the stop target position have.

The distance d between the stop sensor 53 and the edge 2a on the leading end side of the substrate 1 in which the substrate 1 moves in the advancing direction is smaller than the distance d between the substrate 1 and the substrate 1, And the weight (kind). Typically, the larger the weight of the substrate 1, the larger the moving distance d of the substrate 1 becomes. Since the distance d varies depending on the weight (kind) of the substrate 1, the stop target position at which the substrate 1 is stopped varies depending on the weight (kind) of the substrate 1. [

The backup unit 20 has a backup plate 21, a plurality of support pins 22 erected on the backup plate 21 and a plate elevating mechanism 23 for lifting the backup plate 21 up and down.

After the substrate 1 is stopped, the backup unit 20 is moved upward by the plate elevating mechanism 23. [ The substrate 1 is pushed up by the support pins 22 of the backup unit 20 with the upward movement of the backup unit 20, The upper portion and the backup portion 20, and the substrate 1 is positioned in the vertical direction.

The image pickup unit 30 has an image pickup section 31 and an illumination section 32. The illumination unit 32 of the image pickup unit 30 includes a dome member 32a in the form of a dome having an opening formed in the top thereof and a plurality of lights 32b arranged inside the dome member 32a ). The illumination 32b is constituted by, for example, an LED (Light Emitting Diode).

The imaging section 31 is fixed at the position of the opening formed in the dome member 32a on the upper side of the dome member 32a of the illumination section 32 and has an optical axis perpendicular to the inspection surface of the substrate 1 . The imaging section 31 has an imaging element such as a CCD sensor (CCD: Charge Coupled Device) or a CMOS sensor (CMOS: complementary metal oxide semiconductor), and an optical system such as an imaging lens.

The imaging section 31 controls the edge 2 of the substrate 1 (the edge 2a on the tip side in the present embodiment), which is stopped at the stop target position (or the vicinity thereof) under the control of the control section 5, The alignment mark 3 on the substrate 1 is picked up or the inspection surface of the substrate 1 is picked up.

The imaging range 31a of the imaging section 31 is, for example, about 35 mm x 35 mm. When the inspection surface of the substrate 1 is picked up by the image pickup section 31, the image pickup section 31 is moved in the X-axis direction and the Y-axis direction by the image pickup unit moving mechanism 40, The area on the substrate 1 is divided into a plurality of areas and picked up.

In the example shown in the figure, the number of the image pickup units 30 is one, but the number of the image pickup units 30 may be two or more.

The imaging unit moving mechanism 40 moves the imaging unit 30 along the conveying direction (X-axis direction) of the substrate 1 and the direction (Y-axis direction) perpendicular to the conveying direction of the substrate 1. The imaging unit moving mechanism 40 moves the imaging section 31 along the carrying direction to change the relative position in the carrying direction (X-axis direction) between the imaging section 31 and the substrate 1 As shown in Fig. The imaging unit moving mechanism 40 is constituted by, for example, a ball screw driving mechanism, a rack and pinion driving mechanism, or the like.

The control unit 5 is constituted by, for example, a CPU (Central Processing Unit) or the like, and controls each unit of the inspection apparatus 102 in a general manner. The control unit 5 controls the image pickup unit 31 to pick up the edge 2 in the transport direction of the substrate 1 or to pick up the edge 2 of the substrate 1 in the picked- The position of the substrate 1 is detected. The processing of the control unit 5 will be described later in detail.

The storage section 6 has a volatile memory used as a working area of the control section 5 and a nonvolatile memory in which various kinds of data and programs necessary for the processing of the control section 5 are fixedly stored . The various programs may be read from a recording medium such as an optical disk or a semiconductor memory.

In the nonvolatile memory, a table in which the type of the substrate 1, the weight of the substrate 1, the target stop position of the substrate 1, and the estimated edge stop position are associated with each other is stored. Here, the expected edge stop position is a position at which the edge 2 of the substrate 1 is supposed to be stopped when it is assumed that the substrate 1 is stopped at the stop target position. At the edge stop predicted position, a process of attempting to capture an image of the edge 2 of the substrate 1 is executed.

As described above, since the moving distance d of the substrate 1 in the traveling direction after the driving of the conveyor belt 13 is stopped varies depending on the weight (kind) of the substrate 1, The target stop position and the expected edge stop position of the substrate 1 also differ depending on the weight (kind) of the substrate 1. [ Therefore, the type of the substrate 1, the weight of the substrate 1, the stop target position of the substrate 1, and the estimated edge stop position are correlated and tabulated.

The display unit 7 is constituted by, for example, a liquid crystal display, an EL (Electro Luminescence) display or the like. The input unit 8 is constituted by a keyboard, a mouse, a touch sensor, and the like, and inputs various instructions from the operator. The communication unit 9 transmits information to other devices arranged in the mounting system 100 or receives information from other devices.

[Description of operation]

Next, the operation of the inspection apparatus 102 will be described. Figs. 6 to 9 are flowcharts showing the processing of the inspection apparatus 102. Fig.

6, first, the control unit 5 drives the carry-in conveyor to move the substrate 1 delivered from the apparatus arranged on the upstream side of the inspection apparatus 102 into the inspection apparatus 102 (Step 101). Next, the control unit 5 determines whether or not the carry-in of the substrate 1 is detected by the carry-in sensor 51 provided in the carry-in conveyor (step 102).

When the front edge 2a of the substrate 1 passes the front of the loading sensor 51, a detection signal is output from the loading sensor 51. [ The control unit 5 starts driving the conveyor belt 13 of the carry section 10 (step 103) when receiving a detection signal from the carry-in sensor 51 (YES in step 102).

Next, the control unit 5 controls the imaging unit moving mechanism 40 to move the imaging unit 30 to the edge stop expected position (step 104). In addition, the edge stop predicted position differs depending on the weight (kind) of the substrate 1 as described above. Therefore, the control unit 5 reads the predicted edge stop position corresponding to the type of the substrate 1 to be inspected at present from the table, and moves the imaging unit 30 to the predicted edge stop position.

The edge 2 to be imaged may be either the edge 2a on the front end side or the edge 2b on the rear end side. In the present embodiment, however, And the edge 2 is an edge 2a on the leading end side in the carrying direction.

Next, the control unit 5 determines whether or not the substrate 1 is detected by the deceleration sensor 52 (step 105). The detection signal is output from the deceleration sensor 52 when the edge 2a of the front end side of the substrate 1 conveyed by the conveyor belt 13 reaches the front of the deceleration sensor 52. [ When the control unit 5 receives the detection signal from the deceleration sensor 52 (YES in step 105), the control unit 5 decelerates the conveyor belt 13 (step 106).

Next, the control unit 5 determines whether the substrate 1 is detected by the stop sensor 53 (step 107). A detection signal is outputted from the stop sensor 53 when the edge 2a of the front end side of the substrate 1 conveyed by the conveyor belt 13 reaches the front of the stop sensor 53. [ When the control unit 5 receives the detection signal from the stop sensor 53 (YES in step 107), the control unit 5 stops driving the conveyor belt 13 (step 108).

Next, the control section 5 moves the backup section 20 upward to position the substrate 1 in the vertical direction, and then moves one of the guides 11 in the Y-axis direction, The substrate 1 is clamped from both sides by the substrate 11 to fix the substrate 1 (step 109).

Next, the control section 5 turns on the illumination 32b of the imaging unit 30 moved to the edge stop predicted position and controls the imaging section 31 to focus the edge 2a of the front end side of the substrate 1 An image pickup is attempted (step 110).

Here, when the driving of the conveyor belt 13 is stopped in step 108, the substrate 1 does not stop immediately but stops at the stop target position after slightly advancing in the advancing direction. Further, since no mechanical stopper is provided in the present technology, the substrate 1 can not always be stopped exactly at the target stop position, and the position where the substrate 1 is stopped can be shifted from the stop target position .

Basically, it is expected that the amount of shift of the stop position of the substrate 1 with respect to the stop target position is not so large as long as the substrate 1 is of the same type (if the substrate 1 has the same weight). However, for example, in the case where a foreign substance is adhered to the back surface of the substrate 1, such foreign matter causes the substrate 1 to come into contact with the conveyor belt (not shown) when the conveyor belt 13 is stopped, 13), so that the actual stop position of the substrate 1 may deviate significantly in the advancing direction.

Even if the position at which the substrate 1 is stopped deviates from the stop target position and the shift amount is within the image pickup range 31a of the image pickup unit 31, the image pickup unit 31 at the edge stop expected position positions the substrate 1 The edge 2a on the leading end side of the lens barrel 2 can be picked up. In this embodiment, the imaging range 31a is 35 mm x 35 mm. Therefore, when the shift amount of the substrate 1 with respect to the stop target position is within ± 17.5 mm, the image pickup section 31 The edge 2a of the front end side of the substrate 1 can be picked up.

On the other hand, when the shift amount of the substrate 1 with respect to the stop target position exceeds the image pickup range 31a (± 17.5 mm) of the image pickup section 31, the image pickup section 31 at the edge stop expected position positions the substrate 1 can not be picked up.

10 is a diagram showing the relationship between the imaging range 31a of the imaging section 31 disposed at the predicted edge stop position and the stop position of the substrate 1. Fig. 10 shows an example of the case where the edge 2a of the front end side of the substrate 1 is contained in the image pickup range 31a of the image pickup section 31. As shown in Fig. 10, the substrate 1 is stopped over the stop target position, and the edge 2a of the front end side of the substrate 1 enters the imaging range 31a of the imaging section 31 An example of the case in which there is no image is shown. 10, the substrate 1 is stopped before the stop target position, and the edge 2a of the front end side of the substrate 1 is positioned within the image pickup range 31a of the image pickup section 31 An example of the case in which there is no image is shown.

The edge 2 of the substrate 1 can be appropriately positioned even when the edge 2a of the front end side of the substrate 1 can not be picked up by the imaging section 31 at the edge stop expected position in this embodiment A process capable of imaging is executed (retry processing to be described later).

7, when the image pickup section 31 arranged at the predicted edge stop position tries to pick up the edge 2a of the front end side of the substrate 1, the control section 5 next proceeds to step 111 . In step 111, the control unit 5 performs image processing on the image picked up by the image pickup unit 31 at the edge stop expected position, and the image is an image including the edge 2a on the front end side of the substrate 1 Is determined.

When the picked-up image is an image including the edge 2a on the front end side, the image is dark on the left side and the right side on which the substrate 1 is picked up becomes bright, It can be judged whether or not the image includes the edge 2a on the leading end side.

10, when the edge 2a of the front end side of the substrate 1 is contained in the imaging range 31a of the imaging section 31 disposed at the predicted edge stop position, The edge 2a of the front end side of the substrate 1 is included. In this case, since the edge 2 is detected in the image (YES in step 111), the control section 5 proceeds to step 119. [

On the other hand, for example, as shown in the center diagram and the lower diagram in Fig. 10, the edge 2a of the front end side of the substrate 1 in the imaging range 31a of the imaging section 31, The edge 2a of the front end side of the substrate 1 is not included in the image. In this case, since the edge 2 is not detected in the image (NO in step 111), the control section 5 proceeds to step 112. [

In step 112, the control unit 5 executes a process of incrementing the count value for the number of times the retry process is executed. Next, the control unit 5 determines whether the number of times of retry processing is equal to or less than the upper limit value N (step 113).

The retry process is a process in which the imaging unit moving mechanism 40 moves the imaging unit 30 along the carrying direction (X-axis direction) (the relative position in the carrying direction of the imaging unit 31 and the substrate 1 is , And the image pickup section 31 again tries to pick up the image of the edge 2. The upper limit value N of the number of times of retry processing is, for example, two, but is not limited thereto. The value of N may be changeable through the input unit 8 of the inspection apparatus 102 or the input unit of the control apparatus 106, for example.

If the number of times of the retry processing is equal to or smaller than the upper limit value N (YES in step 113), the control section 5 proceeds to the next step 114. In step 114, based on the image (first retry) of the image picked up at the edge stop expected position or the image (second retry after the retry) taken at step 118 described later, the control unit 5 controls the image pickup unit 31 Is present on the substrate 1 (step 114).

For example, in the case of the example shown in the center of Fig. 10, the image picked up by the image pickup section 31 at the edge stop predicted position becomes an image in which a part of the substrate 1 is entirely captured in the image. In this case, since the substrate 1 is illuminated by the light from the illumination 32b, the image picked up at the edge stop expected position becomes a bright image as a whole. In the case of such a bright whole image, the control section 5 determines that the image pickup section 31 is present on the substrate 1 (YES in step 114).

10, the image picked up by the image pickup section 31 at the edge stop predicted position is transmitted to the lower side member (for example, the pair of guides 11 (For example, a base on which the image pickup device is mounted). In this case, since the light by the illumination 32b does not reach the member lower than the substrate 1, the image picked up at the edge stop expected position becomes a dark image as a whole. In the case of such a whole dark image, the control section 5 judges that the image pickup section 31 does not exist on the substrate 1 (NO in step 114).

When it is determined in step 114 that the image pickup unit 31 is present on the substrate 1, the control unit 5 controls the image pickup unit 30 to move on the carry-out side (the substrate 1) (Step 115). On the other hand, if it is determined in step 114 that the image pickup unit 31 is not present on the substrate 1, the control unit 5 controls the image pickup unit 30 to move the image pickup unit 30 on the carry- 1) is conveyed).

That is, in step 114, the control unit 5 determines whether or not the image pickup unit 31 is present on the substrate 1 based on the captured image, and moves the image pickup unit 30 in accordance with the determination result The direction in the conveying direction to be conveyed is determined.

In the first time of the retry processing, the direction in which the image pickup unit 30 is to be moved is determined based on the image picked up at the predicted edge stop position in step 114. [ In the second and subsequent times of the retry processing, the direction in which the image pickup unit 30 is to be moved is determined based on the image picked up at the position shifted from the edge stop predicted position. Here, in the second and subsequent times of the retry processing, the direction in which the image pickup unit 30 is moved is the same as the direction in which the image pickup unit 30 is moved in the previous cycle. Therefore, in the second and subsequent times of the retry processing, it is also possible to omit step 114 for determining in which direction the image pickup unit 30 is to be moved.

11 shows the positional relationship between the imaging range 31a of the imaging section 31 and the edge 2a of the front end side of the substrate 1 when the imaging unit 30 is moved from the edge stop predicted position FIG. 11 shows a state when the image pickup unit 31 is determined to be present on the substrate 1 and the image pickup unit 30 is moved toward the carry-out side. 11 shows a state in which it is determined that the image pickup unit 31 does not exist on the substrate 1 and the image pickup unit 30 is moved toward the carry-in side.

The distance that the image pickup unit 30 is moved along the transport direction is a distance corresponding to the image pickup range 31a of the image pickup unit 31. [ For example, when the imaging range 31a in the carrying direction of the imaging section 31 is 35 mm, the moving distance of the imaging unit 30 is 35 mm. Alternatively, the moving distance of the image pickup unit 30 may be set such that the image pickup range 31a before the movement and the image pickup range 31a after the movement overlap each other. In this case, for example, the overlap amount becomes 5 mm and the moving distance of the image pickup unit 30 becomes 30 mm.

When the moving range of the imaging unit 30 is exceeded when the imaging unit 30 is moved, the control unit 5 controls the imaging unit 30 to move the imaging unit 30 to the maximum position ).

After moving the image pickup unit 30 to the carry-out side in step 115 or moving the image pickup unit 30 to the carry-in side in step 116, the control unit 5 controls the image pickup unit 31, An image of the edge 2a of the front end side of the substrate 1 is attempted (step 117). Next, the control unit 5 determines whether the captured image is an image including the edge 2a on the leading end side (step 118).

If the image picked up by the moving image pickup unit 31 is an image including the edge 2a on the front end side (YES in step 118), the control unit 5 proceeds to step 119. [ On the other hand, when the image picked up by the image pickup section 31 after the movement is not an image including the edge 2a on the front end side (NO in step 118), the control section 5 again returns to step 112 and proceeds to step 112 And executes the subsequent processing. That is, the control unit 5 moves the imaging unit 30 along the carrying direction and again performs the retry process for attempting to image the edge 2a on the tip side by the imaging unit 31, ) Is detected (N is the upper limit).

When the edge 2a on the leading end side is detected in Step 111 or Step 118, the control unit 5 determines whether or not the edge 2a of the image pickup unit 30 is located in the image- (Step 119).

Next, the control unit 5 corrects the estimated edge stop position based on the detected actual stop position of the substrate 1, and stores the corrected edge stop predicted position in the storage unit 6 (table) (Step 120). The control unit 5 also corrects the target stop position of the substrate 1 in accordance with the correction of the anticipated edge stop position and stores the corrected target stop position in the storage unit 6 (table).

For example, when the edge 2a of the front end side is detected in the image captured at the edge stop expected position (upper side of Fig. 11), and the actual stop position of the substrate 1 is shifted to the right or left from the stop target position . In this case, the control unit 5 performs a process of shifting the predicted edge stop position to the right or left according to the amount of shift. Likewise, the control section 5 executes a process of shifting the target stop position of the substrate 1 to the right or left.

When the edge 2a of the leading end side is not detected in the captured image at the edge stop expected position and the edge 2 is included in the captured image as the image pickup unit 30 is moved (Fig. 11, center and lower side). In this case, the control unit 5 performs a process of shifting the predicted edge stop position to the right or left according to the shift amount of the substrate 1 from the stop target position. Likewise, the control section 5 executes a process of shifting the target stop position of the substrate 1 to the right or left.

Alternatively, when the shift amount of the stop position of the substrate 1 from the stop target position is too large to exceed the threshold value, the control unit 5 sets this shift amount to the edge stop expected position, the stop target of the substrate 1 It is not necessary to reflect this in the correction of the position.

Next, based on the detected stop position of the substrate 1, the control unit 5 calculates an image pickup position of the alignment mark 3 provided on the substrate 1 (step 121) To the imaging position of the alignment mark 3 (step 122). The control unit 5 then irradiates the alignment mark 3 with the light 32b of the image pickup unit 30 and picks up the alignment mark 3 by the image pickup unit 31 (step 123) . The control unit 5 typically executes a process of picking up two or more other alignment marks 3 at two or more different positions.

Next, the control unit 5 determines the position of the substrate 1, the inclination of the substrate 1 about the Z-axis, the size of the substrate 1, etc., based on the images of the two or more alignment marks 3 that have been picked up (Step 124). Next, the control section 5 checks the inspection surface of the substrate 1 (step 125). The control unit 5 moves the imaging unit 30 in the X-axis direction and the Y-axis direction by the imaging unit moving mechanism 40 while moving the substrate 1, The image is divided into a plurality of images. Then, the control unit 5 inspects the substrate 1 by analyzing the substrate 1 two-dimensionally or three-dimensionally based on the captured image.

When the inspection of the substrate 1 is finished, the control unit 5 moves the guide 11 on one side (one side) of the carry section 10 along the Y axis direction to bring the clamped state of the substrate 1 And moves the backup unit 20 downward (step 126). The control unit 5 drives the conveyor belt 13 of the carry section 10 to carry the substrate 1 out of the inspection apparatus 102 (step 127).

Next, the processing when the number of times of the retry processing exceeds the upper limit value (N) and the retry processing fails, will be described. If the number of times of retry processing exceeds the upper limit value at step 113 of FIG. 7 (NO at step 113), the control section 5 proceeds to step 128 of FIG. In step 128, the control unit 5 outputs a display signal of the alarm screen 15 to display the alarm screen 15 on the display unit 7. [

12 is a diagram showing an example of the alarm screen 15. As shown in Fig. 12, on the left side of the alarm screen 15, the date and time at which the error occurred, the lane where the error occurred (when the carry section 10 is two or more) Is displayed. On the right side of the alarm screen 15, candidates that can be assumed as the cause of the error and countermeasures for eliminating the error are displayed.

In the example shown in Fig. 12, it is determined that an error due to the failure of recognition of the edge detection has occurred in the front lane (carry section 10) at 12:24:56 on October 24, have. There is a possibility that the stop position of the substrate 1 exceeds the imaging range 31a of the imaging unit 31 from the presumed candidate of the cause, but there is a possibility that the image processing in the edge detection has failed . As a countermeasure for eliminating such an error, the substrate 1 is brought back to the carry-in side, the substrate 1 is brought back, the stop position of the substrate 1 is confirmed, or the parameters of the inspection method (for example, Stop predicted position, etc.) can be adjusted.

In Fig. 12, a "teaching" button 15a and a "close" button 15b are displayed on the lower side of the alarm screen 15. The "close" button 15b is a button for closing the alarm screen 15 (see FIG. 13), and the "close" button 15b is a button for closing the alarm screen 15 .

9, the control unit 5 displays the alarm screen 15 on the screen, and then determines whether the "close" button 15b has been selected through the input unit 8 (step 129). If the "close" button 15b is not selected (NO in step 129), the control unit 5 determines whether the "teaching" button 15a has been selected through the input unit 8 (step 130). If the "teaching" button 15a is not selected (NO in step 130), the control unit 5 returns to step 129 to determine whether the "close" button 15b has been selected.

When the "teaching" button 15a is selected (YES in step 130), the control unit 5 outputs the display signal of the teaching screen 16 to display the teaching screen 16 on the display unit 7 131). In this way, the teaching screen 16 is displayed on the display unit 7 instead of the alarm screen 15.

Fig. 13 is a diagram showing an example of the teaching screen 16. The teaching screen 16 is used to manually move the imaging unit 30 in the carrying direction to align the position of the imaging unit 31 with the position of the edge 2a on the distal end side, And instructs the inspection apparatus 102 to the position.

On the left side of the teaching screen 16, an image display area 16a for displaying an image currently photographed by the imaging unit 31 is disposed. In the example shown in Fig. 13, an example in which a part of the left side of the substrate 1 is put on the right side position of the image is shown. At the center position in the lateral direction of the image display area 16a, one line 16b is arranged in the vertical direction. This line 16b is a line for aligning the edge 2a of the substrate 1 with the edge 2a.

On the right side of the image display area 16a, there are provided a "zoom in" button 16c for zooming in an image, a "zoom out" button 16d for zooming out an image, Quot; button 16e for displaying images in the same magnification (same magnification), and a " full screen " button 16f for displaying an image on the full screen.

On the right side of the teaching screen 16, a four-direction button 16g for moving the imaging unit 30 along the X-axis and Y-axis directions is displayed. The four-direction button 16g has a "left direction" button 16h, a "right direction" button 16i, an "up direction" button 16j, and a "down" button 16k. The operator moves the imaging unit 30 along the X axis direction by operating the "left direction" button 16h and the "right direction" button 16i, among the four direction buttons 16g, , The alignment line 16b and the edge 2a on the front end side of the substrate 1 are aligned.

For example, in the example shown in Fig. 13, the operator moves the imaging unit 30 in the right direction by selecting the " right direction " button 16i, 1 is aligned with the edge 2a on the leading end side.

A "high-speed" button 16l and a "low-speed" button 16m for switching between the high-speed and low-speed of the moving speed of the image pickup unit 30 are displayed above the four-way button 16g. The operator moves the moving speed of the image pickup unit 30 from "high speed" to "low speed" when the alignment line 16b and the edge 2a of the front end side of the substrate 1 are close to each other So as to perform fine adjustment of positioning at a low speed.

Quot; OK " button 16n and a " cancel " button 16o are displayed at the lower position on the teaching screen 16. The "OK" button 16n is a button for confirming the teaching, and the "Cancel" button 16o is a button for canceling the teaching and returning to the alarm screen 15.

9, when the teaching screen 16 is displayed on the display unit 7, the control unit 5 determines whether the "cancel" button 16o has been selected through the input unit 8 (step 132). If the "cancel" button 16o is selected (YES in step 132), the control unit 5 causes the display unit 7 to display the alarm screen 15 instead of the teaching screen 16 (step 128).

If the "cancel" button 16o is not selected (NO in step 132), the control unit 5 determines which of the four-way button 16g has been selected through the input unit 8 ). If no button is selected (NO in step 133), the control unit 5 returns to step 132 to determine whether the "cancel" button 16o has been selected.

On the other hand, when any of the four directional buttons 16g is selected (YES in step 133), the control unit 5 moves the image pickup unit 30 in the direction corresponding to the button (step 134). As the image pickup unit 30 moves, the image displayed in the image display area 16a changes. By this process, the operator can move the imaging unit 30 by selecting the four-way button 16g, thereby moving the alignment line 16b and the edge 2a of the front end side of the substrate 1 It is possible to align them.

Next, when the imaging unit 30 is moved, the control unit 5 determines whether the "OK" button 16n has been selected through the input unit 8 (step 135). If the OK button is not selected (NO in step 135), the control unit 5 returns to step 132 to determine whether the " cancel " button 16o has been selected.

On the other hand, when the "OK" button 16n is selected (YES in step 135), the control unit 5 proceeds to the next step. For example, the operator selects the " OK " button 16n after the alignment between the alignment line 16b and the edge 2a on the front end side of the substrate 1 is completed.

When the "OK" button 16n is selected, the control unit 5 calculates the stop position of the substrate 1 in the transport direction based on the current position of the image pickup unit 30 (step 136). Next, the control section 5 stores the calculated stop position of the substrate 1 in the storage section 6 as a teaching result (step 137). Then, the control unit 5 returns to step 128 to display the alarm screen 15 on the display unit 7. [

When the " Close " button 15b in the alarm screen 15 is selected (YES in step 129), the control unit 5 stores the stop position of the substrate 1 according to the teaching result in the storage unit 6 (Step 138). If the teaching result is stored in the storage unit 6 (YES in step 138), the control unit 5 sets the imaging position of the alignment mark 3 to the position (Step 139).

The control unit 5 proceeds to step 122 in Fig. 8 to move the image pickup unit 30 to the image pickup position of the alignment mark 3. Then, the image pickup position of the alignment mark 3 is calculated. Then, the control unit 5 executes the processing after step 123.

On the other hand, if the teaching result is not stored in the storage section 6 (NO in step 138), the control section 5 sets one of the guides 11 of the carry section 10 in the Y-axis direction To release the clamped state of the substrate 1 (step 140). Then, the control unit 5 reverses the conveyor belt 13 to return the substrate 1 to the carry-in side (step 141). Thereafter, the control unit 5 returns to step 103 to rotate the conveyor belt 13 in the normal direction to convey the substrate 1 toward the conveying side, and then executes the processing in step 104 and the subsequent steps.

The alarm screen 15 and the teaching screen 16 are displayed on the display unit 7 of the inspection apparatus 102. However, It may be displayed on the display unit of the device 106. In this case, the control device 106 displays the alarm screen 15 and the teaching screen 16 on the display unit 7 of the control device 106 based on the display signal output from the control unit 5 of the inspection device 102. [ .

[Action, etc.]

The inspection apparatus 102 (position detection apparatus) according to the present embodiment has, for example, the following operational effects.

In this embodiment, the stop position of the substrate 1 is detected based on the position of the edge 2 of the substrate 1 in the image picked up by the image pickup section 31. [ Therefore, even in the case where the substrate 1 is stopped without a stopper, for example, in the carry section 10, the stop position of the substrate 1 can be properly detected.

Since the image pickup of the edge 2 is attempted by the image pickup section 31 at the edge stop predicted position which is a position at which the edge 2 of the substrate 1 is supposed to be stopped, The edge 2 can be properly picked up by the image pickup section 31. [ Since the expected position of the edge stop is set at a different position for each weight (kind) of the substrate 1, even if the weight (kind) of the substrate 1 is different, The edge 2 of the substrate 1 can be appropriately picked up by the image pick-up device.

In the present embodiment, since the expected edge stop position is corrected based on the detected actual position of the substrate 1, the predicted edge stop position can be corrected to an appropriate position.

In the present embodiment, since the retry processing is executed for the edge detection, even when the edge 2 of the substrate 1 can not be picked up by the imaging unit 31 at the edge stop expected position, The edge 2 of the substrate 1 can be properly picked up.

In the retry process, it is determined in which direction the image pickup unit 30 should be moved in the transport direction based on the picked-up image. Therefore, when the edge 2 of the substrate 1 is detected Can be improved.

In the present embodiment, the teaching screen 16 is displayed when the retry processing fails. Thereby, the operator operates the teaching screen 16 to align the position of the imaging unit 31 and the edge 2 of the substrate 1, so that the position of the substrate 1 with respect to the inspection apparatus 102 Can be taught.

≪ Second Embodiment >

Next, a second embodiment of the present technology will be described. Second Embodiment In the following description, members having the same functions or configurations as those of the first embodiment described above will be omitted or simplified.

In the first embodiment described above, the edge detection of the substrate 1 is performed on all the substrates 1. However, On the other hand, in the second embodiment, edge detection of the substrate 1 is omitted in the case where the stop position of the substrate 1 stopped without a stopper is stable. This point differs from the first embodiment in the second embodiment, and therefore, this point will be mainly described.

The inspection apparatus 102 (position detecting apparatus) according to the second embodiment has two modes, and these two modes can be switched. In the first mode, the edge 2 of the substrate 1 is picked up by the image pickup section 31 with respect to all the substrates 1, and the stop position of the substrate 1 is set at . In the first mode, the same processes as those in Figs. 6 to 9 are executed.

The second mode is a mode in which the image pickup section 31 picks up the edge 2 and performs processing for detecting the stop position of the substrate 1 based on the position of the edge 2, Is a stop target position of the substrate 1,

Fig. 14 is a flowchart showing the processing of the inspection apparatus according to the second embodiment. 15 and 16 are flowcharts showing the processing in the second mode.

In the second embodiment, first, the control unit 5 determines whether the current mode is the first mode (step 201). In the initial state, the first mode is executed. If the current mode is the first mode, the control unit 5 executes processing in the first mode (step 202). That is to say, the control unit 5 can pick up the edge 2 of the substrate 1 by the imaging unit 31 with respect to all the substrates 1 and detect the edge 2 of the substrate 1 based on the position of the edge 2. [ The stop position is detected (see Figs. 6 to 9).

Upon completion of the processing in the first mode, the control unit 5 determines whether or not the predetermined condition is satisfied in the processing in the first mode (step 203). Here, the following conditions (1) and (2) are given as predetermined conditions.

(1) In the image picked up by the image pickup section 31 at the edge stop predicted position, imaging of the edge 2 of the substrate 1 succeeds a predetermined number of times or more successively. Here, the predetermined number of times is, for example, three times, but is not limited thereto. The predetermined number of times may be changed through the input unit 8.

(2) The deviation of the stop position of each substrate 1 detected based on the position of the edge 2 of the substrate 1 is equal to or less than a predetermined threshold value. Here, the predetermined threshold value is, for example, about 1.5 mm, but is not limited thereto. The threshold value may be changeable through the input unit 8.

The condition to be set may be both conditions of (1) and (2), and it may be either one of (1) and (2).

If the controller 5 determines that both conditions (or conditions (1) and (2) shown in (1) and (2) are satisfied (YES in step 203) Mode (step 204). That is, the control unit 5 switches the first mode to the second mode when the stop position of the substrate 1 stopped with no stopper is stable. Then, the control unit 5 returns to step 201 to determine whether the current mode is the first mode.

On the other hand, when it is determined that both the conditions (1) and (2) (or the conditions (1) or (2)) are not satisfied (NO in step 203), the control unit And returns to step 201 without switching to the second mode.

In step 201, when the current mode is the second mode (NO in step 201), the control unit 5 executes processing in the second mode (step 205).

The processing in the second mode will be described with reference to Figs. 15 and 16. Fig. Comparing the flow chart in the second mode shown in Fig. 15 with the flowchart in the first mode shown in Fig. 6, steps 304 and 310 are different from steps 104 and 110, respectively.

That is, in the first mode, the control unit 5 moves the image pickup unit 30 to the edge stop expected position and performs a process of attempting image pickup of the edge 2 of the substrate 1 by the image pickup unit 31 (Steps 104 and 110 in FIG. 6). On the other hand, in the second mode, the control unit 5 does not execute the process of moving the image pickup unit 30 to the edge stop expected position and picking up the image of the edge 2 of the substrate 1 by the image pickup unit 31 . In this case, the control unit 5 directly moves the imaging unit 30 to the alignment mark imaging position and executes a process of imaging the alignment mark 3 by the imaging unit 31 (Fig. 15, step 304 , 310). In addition, the control unit 5 executes a process of picking up two or more other alignment marks 3 at two or more different positions.

When moving the imaging unit 30 to the alignment mark imaging position in step 304, the control unit 5 determines that the substrate 1 exists at the stop target position stored in the storage unit 6, Position of the alignment mark is calculated from the position. Then, the imaging unit 30 is moved to the alignment mark imaging position.

Here, in the first mode, the stop target position of the substrate 1 is corrected to an appropriate position according to the actual stop position of the substrate 1 detected based on the image picked up by the image pickup section 31 (FIG. 8, step 120). Therefore, in the second mode, by calculating the alignment mark imaging position using the stop target position, the alignment mark 3 can be picked up at the appropriate alignment mark imaging position.

16, the control unit 5 controls the position of the substrate 1 and the position of the substrate 1 (hereinafter referred to as the " substrate 1 ") based on the image of the two or more alignment marks 3, , The size of the substrate 1, and the like (step 311).

Next, the control unit 5 determines whether the recognition of the position of the substrate 1 is successful (step 312). If the position of the substrate 1 is successfully recognized (YES in step 312), the control unit 5 checks the inspection surface of the substrate 1 (step 313). When the inspection of the substrate 1 is finished, the control unit 5 releases the clamped state of the substrate 1 (step 314), and removes the substrate 1 from the inspection apparatus 102 (step 315).

On the other hand, if the recognition of the position of the substrate 1 fails (NO in step 312), the control unit 5 proceeds to the next step 316. [ Failure of recognizing the position of the substrate 1 means that the actual stopping position of the substrate 1 deviates from the stop target position of the substrate 1 and the imaging of the alignment mark 3 fails.

In this case, the control unit 5 moves the imaging unit 30 to the edge stop expected position (step 316), and the image pickup unit 31 at the edge stop predicted position moves the edge 2 of the substrate 1 An imaging is attempted (step 317). Then, the control unit 5 executes the processing after step 111 of Fig. In other words, the control unit 5 executes retry processing and the like.

Referring to Fig. 14, when the processing in the second mode is finished, the control unit 5 next judges whether or not the predetermined condition is satisfied in the processing in the second mode (step 206). Here, as the predetermined conditions, the following (1) 'and (2)' can be mentioned.

(1) " Failure to recognize the position of the substrate 1 continuously over a predetermined number of times (see step 312). Here, the predetermined number of times is, for example, two, but is not limited thereto. The predetermined number of times may be changed through the input unit 8.

The total number of substrates 1 processed in the second mode exceeded a predetermined threshold value because the number of the substrates 1 failed to recognize the position of the second substrate 2 or the number of the substrates 1 processed in the second mode exceeded a predetermined threshold value. Here, the predetermined threshold value may be, for example, about 5%, but is not limited thereto. The threshold value may be changeable through the input unit 8.

The condition to be set may be both conditions of (1) 'and (2)', and it may be any one of (1) 'and (2)'.

If the controller 5 determines that both conditions shown in (1) 'and (2)' (or conditions of (1) 'or (2)') are satisfied (YES in step 206) 5) switches the second mode to the first mode (step 207). That is, the control unit 5 switches the second mode to the first mode when the stop position of the substrate 1 stopped without a stopper is unstable.

On the other hand, when it is determined that neither of the conditions (1) 'and (2)' (or the condition (1) 'or (2)') is satisfied (NO in step 206), the control unit 5 , The process returns to step 201 without switching the second mode to the first mode.

It is also possible to set whether the first mode is always executed or the first mode and the second mode are switched through the input unit 8. [

[Action, etc.]

The inspection apparatus 102 (position detection apparatus) according to the second embodiment has, for example, the following operational effects.

In the second embodiment, in the second mode, the image pickup section 31 picks up the edge 2 and the process of detecting the stop position of the substrate 1 based on the position of the edge 2 is omitted Therefore, the time required for inspection of the substrate 1 can be shortened.

Since the first mode is switched to the second mode when the stop position of the substrate 1 stopped without a stopper is stable, the first mode can be switched to the second mode at an appropriate timing. Further, since the second mode is switched to the first mode when the stop position of the substrate 1 stopped without a stopper is not stabilized, the second mode can be switched to the first mode at an appropriate timing.

<Various Modifications>

In the above description, the case where the edge 2a of the front end side of the substrate 1 is the object of image pickup of the image pickup section 31 has been described for convenience. However, the edge 2b on the rear end side of the substrate 1 may be an image pickup object of the image pickup section 31. [ In this case, the edge stop predicted position is set to the position corresponding to the edge 2b on the rear end side of the substrate 1. [ At this position, imaging of the edge 2b of the rear end side of the substrate 1 by the imaging unit 31 is attempted.

In the case where the edge 2a on the front end side is an object of imaging by the imaging section 31 and the edge 2b on the rear end side is an object of imaging by the imaging section 31, So that the direction in which the image pickup unit 30 is moved is opposite.

For example, when it is determined in step 114 of Fig. 7 that the image pickup unit 31 is present at a position corresponding to the substrate 1, the control unit 5 controls the image pickup unit 30 to be placed on the substrate 1 (Direction opposite to the direction in which the substrate 1 is transported). On the other hand, when it is determined that the image pickup unit 31 does not exist at the position corresponding to the substrate 1, the control unit 5 controls the image pickup unit 30 to move on the carry-out side (substrate 1) In the transport direction).

In the above description, the case where the imaging section 31 is moved when the relative positions of the imaging section 31 and the substrate 1 in the carrying direction are changed in the retry processing has been described. However, in the retry process, as the substrate 1 side is moved, the relative positions of the image pickup unit 31 and the substrate 1 in the transport direction may be changed. In this case, in a state where the image pickup unit 30 is stopped at the edge stop expected position, the conveyor belt 13 of the carry section 10 is driven and the substrate 1 is moved.

In this case, a case where the edge 2a on the leading end side becomes an object of image pickup by the image pickup section 31 will be described. In this case, when it is determined in step 114 of Fig. 7 that the image pickup unit 31 is present at the position corresponding to the substrate 1, the control unit 5 controls the conveyor belt 13 ) To move the substrate 1 on the carry-in side (the direction opposite to the direction in which the substrate 1 is transported). On the other hand, when it is determined that the image pickup unit 31 does not exist at the position corresponding to the substrate 1, the control unit 5 rotates the conveyor belt 13 of the carry unit 10 forward, 1) in the carrying-out side (the direction in which the substrate 1 is transported).

And a case where the edge 2b on the rear end side becomes an object of image pickup by the image pickup section 31 will be described. In this case, when it is determined in step 114 of Fig. 7 that the image pickup unit 31 is present at the position corresponding to the substrate 1, the control unit 5 controls the conveyor belt 13 ) To move the substrate 1 in the carry-out side (the direction in which the substrate 1 is conveyed). On the other hand, when it is determined that the image pickup section 31 does not exist at the position corresponding to the substrate 1, the control section 5 rotates the conveyor belt 13 of the carry section 10 in the reverse direction, 1) is moved on the carry-in side (the direction opposite to the direction in which the substrate 1 is transported).

The distance by which the substrate 1 is moved along the transport direction in the retry process is related to the image pickup range 31a of the image pickup unit 31. [ For example, when the imaging range 31a in the carrying direction of the imaging unit 31 is 35 mm, the moving distance of the substrate 1 is 35 mm. Alternatively, when overlap is taken into consideration, for example, the overlap amount becomes 5 mm and the moving distance of the substrate 1 becomes 30 mm.

Both of the image pickup unit 31 and the substrate 1 may be moved in the transport direction when the relative positions in the transport direction of the image pickup unit 31 and the substrate 1 are changed in the retry process.

In the above description, the case where the position detecting apparatus according to the present technology is applied to the inspection apparatus 102 has been described. However, the position detecting apparatus according to the present invention may be applied to the mounting apparatus 103 and the screen printing apparatus 101. [ When the position detecting device is applied to the mounting apparatus 103, the edge 2 of the substrate 1 is moved by the imaging section for imaging of the alignment mark attached to the mounting head movable in the X-axis direction and the Y- . When the position detecting device is applied to the screen printing apparatus 101, the edge 2 of the substrate 1 is picked up by the imaging section for imaging an alignment mark capable of moving in the X-axis direction and the Y-axis direction.

The imaging section 31 for inspection of the substrate and the imaging section for imaging the alignment mark are used as the imaging section 31 for edge imaging so that the existing imaging section can be used as the imaging section 31 for edge imaging It is advantageous in that cost reduction can be realized. However, the present invention is not limited to the case where the conventional imaging section is used as the imaging section 31 for edge imaging. Even if a dedicated imaging section 31 for imaging the edge 2 is provided specifically in the position detection apparatus Do.

When the imaging section 31 dedicated for imaging the edge 2 of the substrate 1 is specially provided, the imaging section 31 is arranged at a position where the substrate 1 can be picked up from the lower side do. The imaging unit 31 may be movable in the carrying direction (X-axis direction) and may be fixed at the edge stop expected position (particularly, in the retry process, the substrate 1 side is moved Shape).

In the above description, the case where the stop target position and the edge stop predicted position of the substrate 1 are set in advance for each weight (kind) of the substrate 1 has been described. However, the stop target position and the edge stop predicted position do not have to be set in advance for each weight (kind) of the substrate 1. For example, a common stop target position and an edge stop predicted position may be set for each of the weight (kind) of the substrate 1 for the first time at the stop target position and the edge stop predicted position.

Explain why. As described above, in this technique, the stop target position of the substrate 1 and the edge stop predicted position are corrected based on the actual stop position of the substrate 1. [ Therefore, even if a common edge stop predicted position is used for each weight (kind) of the substrate 1 for the first time (i.e., even if the predicted edge stop position is somewhat inaccurate) Is corrected to an appropriate position for each weight (kind) of the substrate 1. [ Therefore, the stop target position and the edge stop predicted position need not be set in advance for each weight (kind) of the substrate 1 (that is, it may be somewhat inaccurate).

The present technique may adopt the following configuration.

(1)

A transfer section for transferring the substrate along the transfer direction and stopping the substrate being transferred,

A control section for detecting the stop position of the substrate based on the position of the edge of the substrate in the picked-up image,

And the position detecting device.

(2) The position detecting device according to (1)

Wherein the control section first tries to pick up the edge by the imaging section at an edge stop predicted position where the edge of the substrate is expected to be stopped for the first time.

(3) The position detecting device according to (2)

Further comprising a moving mechanism that moves the imaging unit or the substrate along a carrying direction to change a relative position of the imaging unit and the stopped substrate in the carrying direction.

(4) The position detecting device according to (2) or (3)

And the control section corrects the edge stop predicted position based on the detected stop position of the substrate.

(5) The position detecting device according to any one of (2) to (4) above,

Wherein the control section picks up the edge by the image pickup section at a different expected edge stop position for each weight of the substrate.

(6) The position detecting device according to (3)

Wherein the control unit judges whether the image picked up by the image pickup unit at the edge stop expected position is an image including the edge, and when the image is not an image including the edge, Wherein the control unit changes the relative position of the imaging unit and the substrate in the transport direction and retries the retry processing which is a processing of again attempting to capture the edge by the imaging unit.

(7) The position detecting device according to (6)

The control unit determines the direction in the transport direction in which the image pickup unit or the substrate should be moved based on the image picked up by the image pickup unit at the edge stop predicted position in the retry process

Position detecting device.

(8) The position detecting device according to (7)

Wherein the control unit judges whether or not the image pickup unit is present at a position corresponding to the substrate based on an image picked up by the image pickup unit at the edge stop predicted position in the retry processing, And determines a direction in the carrying direction in which the imaging unit or the substrate should be moved.

(9) The position detecting device according to any one of (6) to (8)

And the control section repeats the retry processing until the edge is detected.

(10) The position detecting device according to (8)

Wherein an edge to be imaged by the imaging unit is an edge on the leading end side in the carrying direction,

The control unit moves the imaging unit in the direction in which the substrate is transported or moves the substrate in the direction opposite to the direction in which the substrate is transported when it is determined that the imaging unit is present at the position corresponding to the substrate, To the position detecting device.

(11) The position detecting device according to (10)

Wherein the control unit moves the imaging unit in a direction opposite to a direction in which the substrate is transported when the imaging unit is determined not to be present at a position corresponding to the substrate or moves the imaging unit in the direction in which the substrate is transported A position detecting device for moving a substrate.

(12) The position detecting device according to (8)

Wherein an edge to be imaged by the imaging unit is an edge at a rear end side in the carrying direction,

Wherein the control unit moves the imaging unit in a direction opposite to a direction in which the substrate is transported when the imaging unit is determined to be present at a position corresponding to the substrate, To the position detecting device.

(13) The position detecting device according to (12)

Wherein the control unit moves the imaging unit in a direction in which the substrate is transported when the imaging unit is determined not to be present at a position corresponding to the substrate or moves the imaging unit in the direction opposite to the direction in which the substrate is transported A position detecting device for moving a substrate.

(14) The position detecting device according to any one of (6) to (13)

Wherein the control unit changes the relative position in the transport direction of the image sensing unit and the substrate by manually changing the position of the image sensing unit and the position of the edge when the retry process fails, Outputting a display signal

Position detecting device.

(15) The position detecting device according to any one of (1) to (14) above,

And a storage unit for storing a target stop position of the substrate,

Wherein the control unit includes a first mode for picking up the edge by the imaging unit and detecting a stop position of the substrate based on the position of the edge, and a second mode for picking up the edge by the image pickup unit, And switches the second mode in which the stop target position of the substrate stored in the storage section is set to the stop position of the substrate without performing the process of detecting the stop position of the substrate based on the position of the substrate.

(16) The position detecting device according to (15)

Wherein the control unit judges whether or not the deviation of the stop position of each substrate detected based on the position of the edge in the first mode is equal to or less than a predetermined threshold value, And switches the first mode to the second mode.

(17) The position detection device according to (15) or (16) above, wherein the control unit controls the position of the substrate, which is used in the second mode, based on a stop position of the substrate detected in the first mode, And corrects the stop target position of the substrate stored in the memory.

One; Board
2; edge
5; The control unit
6; The storage unit
7; Display portion
10; [0050]
11; guide
13; Conveyor belt
20; The back-up unit
30; The imaging unit
31; The image-
31a; Imaging range
32; Illumination unit
40; The imaging unit moving mechanism
102; Inspection device

Claims (19)

An image pickup section,
A transfer section for transferring the substrate along the transfer direction and stopping the substrate being transferred,
A control section for detecting the stop position of the substrate based on the position of the edge of the substrate in the picked-up image,
And the position detecting device. The method according to claim 1,
Wherein the control section first tries to pick up the edge by the imaging section at an edge stop predicted position where the edge of the substrate is expected to be stopped for the first time. 3. The method of claim 2,
Further comprising a moving mechanism that moves the imaging unit or the substrate along a carrying direction to change a relative position of the imaging unit and the stopped substrate in the carrying direction. 3. The method of claim 2,
The control unit corrects the edge stop predicted position based on the detected stop position of the substrate
Position detecting device. 3. The method of claim 2,
Wherein the control unit controls the image pickup unit to pick up the edge by the weight of the substrate at a different expected edge stop position
Position detecting device. The method of claim 3,
Wherein the control unit judges whether the image picked up by the image pickup unit at the edge stop expected position is an image including the edge, and when the image is not an image including the edge, A retry process which is a process of changing the relative position of the image pickup unit and the substrate in the transport direction and again attempting to capture the edge by the image pickup unit
Position detecting device. The method according to claim 6,
The control unit determines the direction in the transport direction in which the image pickup unit or the substrate should be moved based on the image picked up by the image pickup unit at the edge stop predicted position in the retry process
Position detecting device. 8. The method of claim 7,
Wherein the control unit judges whether or not the image pickup unit is present at a position corresponding to the substrate based on an image picked up by the image pickup unit at the edge stop predicted position in the retry processing, Thus, the direction in the carrying direction in which the imaging section or the substrate is to be moved is determined
Position detecting device. The method according to claim 6,
And the control section repeats the retry processing until the edge is detected. 9. The method of claim 8,
Wherein an edge to be imaged by the imaging unit is an edge on the leading end side in the carrying direction,
The control unit moves the imaging unit in the direction in which the substrate is transported or moves the substrate in the direction opposite to the direction in which the substrate is transported when it is determined that the imaging unit is present at the position corresponding to the substrate, To the position detecting device. 11. The method of claim 10,
Wherein the control unit moves the imaging unit in a direction opposite to a direction in which the substrate is transported when the imaging unit is determined not to be present at a position corresponding to the substrate or moves the imaging unit in the direction in which the substrate is transported A position detecting device for moving a substrate. 9. The method of claim 8,
Wherein an edge to be imaged by the imaging unit is an edge at a rear end side in the carrying direction,
Wherein the control unit moves the imaging unit in a direction opposite to a direction in which the substrate is transported when the imaging unit is determined to be present at a position corresponding to the substrate, To move
Position detecting device. 13. The method of claim 12,
Wherein the control unit moves the imaging unit in a direction in which the substrate is transported when the imaging unit is determined not to be present at a position corresponding to the substrate or moves the imaging unit in the direction opposite to the direction in which the substrate is transported A position detecting device for moving a substrate. The method according to claim 6,
Wherein the control unit changes the relative position in the transport direction of the image sensing unit and the substrate by manually changing the position of the image sensing unit and the position of the edge when the retry process fails, ) Outputting a display signal of a screen. The method according to claim 1,
And a storage unit for storing a target stop position of the substrate,
Wherein the control unit includes a first mode for picking up the edge by the imaging unit and detecting a stop position of the substrate based on the position of the edge, and a second mode for picking up the edge by the image pickup unit, And switches the second mode in which the stop target position of the substrate stored in the storage section is set to the stop position of the substrate without performing the process of detecting the stop position of the substrate based on the position of the substrate. 16. The method of claim 15,
Wherein the control unit judges whether or not the deviation of the stop position of each substrate detected based on the position of the edge in the first mode is equal to or less than a predetermined threshold value, And switches the first mode to the second mode. 16. The method of claim 15,
Wherein the control section corrects the stop target position of the substrate to be used in the second mode and stored in the storage section based on the stop position of the substrate detected in the first mode. The substrate is transported along the transport direction,
The substrate being transported is stopped,
An image pick-up unit picks up an edge in the transport direction of the stationary substrate,
And a stop position of the substrate is detected based on a position of the edge of the substrate in the captured image. The substrate is transported along the transport direction,
The substrate being transported is stopped,
An image pick-up unit picks up an edge in the transport direction of the stationary substrate,
Detecting a stop position of the substrate based on a position of the edge of the substrate in the picked-up image,
And performing processing necessary for manufacturing the substrate with respect to the substrate existing at the detected stop position.

Images