CN104159410B - The manufacturing method of position detecting device, method for detecting position and substrate - Google Patents

The manufacturing method of position detecting device, method for detecting position and substrate Download PDF

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Publication number
CN104159410B
CN104159410B CN201410201259.2A CN201410201259A CN104159410B CN 104159410 B CN104159410 B CN 104159410B CN 201410201259 A CN201410201259 A CN 201410201259A CN 104159410 B CN104159410 B CN 104159410B
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substrate
edge
shoot part
control unit
stopping
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CN104159410A (en
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有动隆
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Juki Corp
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Juki Corp
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  • Supply And Installment Of Electrical Components (AREA)
  • Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
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Abstract

In the case that present invention offer one kind not utilizing retainer for example in delivery section and substrate is made to stop, the technology of the stop position of substrate can be suitably detected.Position detecting device involved by this technology has shoot part, delivery section and control unit.The delivery section makes the substrate just conveyed stop along conveying direction conveying substrate.The control unit shoots the edge on the conveying direction of the substrate of stopping using the shoot part, based on the marginal position of the substrate in the image taken, is detected to the stop position of the substrate.

Description

The manufacturing method of position detecting device, method for detecting position and substrate
Technical field
This technology be related to a kind of position detecting device that the stop position to substrate is detected, method for detecting position, with And the manufacturing method of substrate.
Background technology
Currently, by the various devices for manufacturing substrate it is in-line the installation system that arranges and constitute it is well known.Make For the device used in installation system, for example, the known silk-screen printing device that cream solder is printed on substrate, to solder It is printing inspection apparatus that printing state is checked, the mounting device that electronic unit is installed on the substrate for be printed with solder, right The installation check device etc. that the installation condition of electronic unit is checked.
In above-mentioned various devices, first of all, it is necessary to be conveyed to transmitting the substrate come from the device of upstream side, and make it Stop stopping target location.Therefore, above-mentioned apparatus usually has for conveying substrate and the substrate is made to stop target location The delivery section of stopping.
Delivery section for example comprising：A pair of of guide portion guides substrate from side；And conveyer belt, it is separately positioned on one To in guide portion, the conveying substrate by driving of the conveyer belt.In addition, in order to make the substrate conveyed by conveyer belt stop mesh Accurately stop at cursor position, is arranged sometimes by the retainer of the drivings such as actuator (for example, referring to following patents in delivery section Document 1).
Patent document 1：Japanese Unexamined Patent Publication 2001-144494 bulletins (paragraph [0007], Figure 12)
It, may be due to when the substrate that is just moving be contacted with retainer but if making substrate stop using retainer It collides and makes substrate damage, in addition, in the case where being equipped with electronic unit on substrate, it is also possible to make the position of the electronic unit It sets and shifts.
Accordingly, it is considered to not utilize retainer and substrate is made to stop.But in the case, the position phase of substrate may be made It shifts for stopping target location, it is therefore desirable to be able to the technology being detected to the stop position of substrate.
Invention content
In view of the foregoing, the purpose of this technology is, provide it is a kind of do not utilize retainer for example in delivery section and In the case of so that substrate is stopped, the technology of the stop position of substrate can be suitably detected.
Position detecting device involved by this technology has shoot part, delivery section and control unit.The delivery section is along defeated Direction conveying substrate is sent, the substrate just conveyed is made to stop.The control unit is using the shoot part to the base of stopping Edge on the conveying direction of plate is shot, based on the marginal position of the substrate in the image taken, to the base The stop position of plate is detected.
In the position in detection device, based on the marginal position of the substrate in the image taken by shoot part, to substrate Stop position be detected.Therefore, in the case of so that substrate is stopped even if not utilizing retainer for example in delivery section The stop position of substrate can suitably be detected.
In above-mentioned position detecting device, the control unit can also utilize institute initially at Edge-stopping desired position It states shoot part to attempt to shoot the edge, which is the position envisioned the edge of the substrate and stopped.
Thus, it is possible to suitably shoot the edge of substrate.
Above-mentioned position detecting device can also also have mobile mechanism, the mobile mechanism to make the shoot part or the base Plate is moved along conveying direction, so that the relative position of the shoot part and the substrate of stopping on the conveying direction Variation.
In the case where making the mode of shoot part movement, mobile mechanism is the mobile mechanism for making shoot part move.Separately On the one hand, in the case where making the mode of substrate movement, the delivery section of conveying substrate can also have the work(as mobile mechanism Energy.
In above-mentioned position detecting device, the control unit can also based on the stop position of the substrate detected, The Edge-stopping desired position is corrected.
Thus, it is possible to which Edge-stopping desired position is corrected to position appropriate.
In above-mentioned position detecting device, the control unit may correspond to the weight of each substrate, in difference Edge-stopping desired position at, the edge is shot using the shoot part.
Even if, can also be at Edge-stopping desired position as a result, in the case of the weight of substrate (type) difference, profit Suitably the edge of substrate is shot with shoot part.
In above-mentioned position detecting device, the control unit can also at the Edge-stopping desired position by described Whether the image that shoot part takes is to be judged comprising the image including the edge, is not comprising described in described image In the case of image including edge, execution is following to retry processing, that is, makes the shoot part and institute using the mobile mechanism The relative position variation on the conveying direction of substrate is stated, attempts to shoot the edge again using the shoot part.
Processing is retried by the way that execution is this, even if not examined in the image to be taken at Edge-stopping desired position In the case of the edge for measuring substrate, suitably the edge of substrate can also be detected, the stop position of substrate is carried out Detection.
In above-mentioned position detecting device, the control unit can also it is described retry processing when, based at the edge Stop the image being taken by the shoot part at desired position, to the shoot part or institute should be made on the conveying direction The direction for stating substrate movement is judged.
It, can be to that next should make shoot part or substrate are sentenced to which direction movement as a result, in retrying processing It is fixed.It is thus possible to improve the speed until detecting the edge of substrate.
In above-mentioned position detecting device, the control unit can also it is described retry processing when, based at the edge Stop the image being taken by the shoot part at desired position, the shoot part whether there is in corresponding with the substrate Judged at position, it is corresponding with judgement result, to the shoot part or the substrate should be made on the conveying direction Mobile direction is judged.
Thus, it is possible to suitably judge that shoot part or substrate should next moved to which direction.
In above-mentioned position detecting device, the control unit can also be repeated until detecting the edge It is described to retry processing.
In above-mentioned position detecting device, become the edge of the reference object of the shoot part, is on the conveying direction Front end side edge,
The control unit can also be determined as the case where shoot part is present at position corresponding with the substrate Under, so that the shoot part is moved to the direction for conveying the substrate, alternatively, making the substrate to the direction with the conveying substrate Opposite direction movement.
Thus, it is possible to suitably shoot the edge of substrate front end side using shoot part.
In above-mentioned position detecting device, the control unit can also be determined as the shoot part be not present in it is described In the case of at the corresponding position of substrate, the shoot part is made to be moved in the opposite direction to the side for conveying the substrate, or Person makes the substrate be moved to the direction for conveying the substrate.
Thus, it is possible to suitably shoot the edge of substrate front end side using shoot part.
In above-mentioned position detecting device, become the edge of the reference object of the shoot part, is on the conveying direction Rear end side edge,
The control unit can also be determined as the case where shoot part is present at position corresponding with the substrate Under, so that the shoot part is moved in the opposite direction to the side for conveying the substrate, alternatively, making the substrate to described in conveying It moves in the direction of substrate.
Thus, it is possible to suitably shoot the edge of substrate rear end side using shoot part.
In above-mentioned position detecting device, the control unit can also be determined as the shoot part be not present in it is described In the case of at the corresponding position of substrate, the shoot part is set to be moved to the direction for conveying the substrate, alternatively, making the substrate It is moved in the opposite direction to the side for conveying the substrate.
Thus, it is possible to suitably shoot the edge of substrate rear end side using shoot part.
In above-mentioned position detecting device, the control unit can also it is described retry processing failure in the case of, output The display signal of teaching picture, the teaching picture are used for the conveying side by making the shoot part and the substrate manually Upward relative position variation, the position of position and the edge to the shoot part carry out aligned in position.
Operating personnel are by operating teaching picture as a result, the marginal position of position and substrate to shoot part into Row aligned in position, so as to carry out teaching to the position of substrate on position detecting device.
Above-mentioned position detecting device can also also have the storage part stored to the stopping target location of the substrate.
In the case, the control unit can also switch over the 1st pattern and the 2nd pattern, in the 1st pattern, The edge is shot using the shoot part, based on the position at the edge, the stop position of the substrate is carried out Detection, in the 2nd pattern, is not executed and is shot to the edge using the shoot part and based on the position at the edge It sets to the processing that the stop position of the substrate is detected, but the substrate being stored in the storage part is stopped Only stop position of the target location as the substrate.
In the 2nd pattern, due to the substrate stop position that the shooting to substrate edges is omitted and is carried out based on marginal position The detection set, so processing becomes faster.
In above-mentioned position detecting device, the control unit can also be in the 1st pattern, to based on the edge Whether position and the deviation of the stop position of each substrate that detects are judged less than or equal to defined threshold, in the deviation In the case of less than or equal to the defined threshold, by the 1st pattern to the 2nd pattern switching.
Thus, it is possible to timing appropriate by the 1st pattern switching for the 2nd pattern.
In above-mentioned position detecting device, the control unit can also be based on described in detecting in the 1st pattern The stop position of substrate, to the stopping target of the substrate being used in the 2nd pattern, being stored in the storage part Position is corrected.
Thus, it is possible to which suitably the stopping target location of the substrate to being used under above-mentioned 2nd pattern is corrected.
The step of method for detecting position involved by this technology includes along conveying direction conveying substrate.
The substrate just conveyed is set to stop.
The edge on the conveying direction of the substrate of stopping is shot using shoot part.
Based on the marginal position of the substrate in the image taken, the stop position of the substrate is detected.
The step of manufacturing method of substrate involved by this technology includes along conveying direction conveying substrate.
The substrate just conveyed is set to stop.
The edge on the conveying direction of the substrate of stopping is shot using shoot part.
Based on the marginal position of the substrate in the image taken, the stop position of the substrate is detected.
To being present in the substrate of the rest position detected, the processing needed for the manufacture of substrate is executed.
Processing needed for the manufacture of so-called substrate, refer to for example on substrate the processing of printing solder, to being printed with solder Substrate checked processing, on substrate install electronic unit processing, the substrate for being equipped with electronic unit is examined The processing etc. looked into.
The effect of invention
As noted above, according to this technology, one kind can be provided and do not utilize retainer for example in delivery section and make substrate In the case of stopping, the technology of the stop position of substrate can be suitably detected.
Description of the drawings
Fig. 1 is the figure for indicating the installation system for manufacturing substrate.
Fig. 2 is the oblique view for indicating the check device using the position detecting device involved by this technology.
Fig. 3 is the figure of the check device from the conveying direction of substrate.
Fig. 4 is the figure for indicating the position of deceleration sensor and stop sensor possessed by check device.
Fig. 5 is the block diagram for indicating check device.
Fig. 6 is the flow chart for the processing for indicating check device.
Fig. 7 is the flow chart for the processing for indicating check device.
Fig. 8 is the flow chart for the processing for indicating check device.
Fig. 9 is the flow chart for the processing for indicating check device.
Figure 10 is to indicate to configure the coverage of the shoot part at Edge-stopping desired position and the stop position of substrate Between relationship figure.
Figure 11 is when indicating that shooting unit is moved from Edge-stopping desired position, before the coverage of shoot part and substrate The figure of position relationship between the edge of end side.
Figure 12 is the figure of an example of the alarm picture for indicating to show on display unit.
Figure 13 is the figure of an example of the teaching picture for indicating to show on display unit.
Figure 14 is the flow chart for the processing for indicating the check device involved by other embodiment.
Figure 15 is the flow chart for the processing for indicating the 2nd pattern.
Figure 16 is the flow chart for the processing for indicating the 2nd pattern.
The explanation of label
1 ... substrate
2 ... edges
5 ... control units
6 ... storage parts
7 ... display units
10 ... delivery sections
11 ... guide portions
13 ... conveyer belts
20 ... support portions
30 ... shooting units
31 ... shoot parts
31a ... coverages
32 ... illumination portions
40 ... shooting unit mobile mechanisms
102 ... check devices
Specific implementation mode
In the following, with reference to attached drawing, the embodiment involved by this technology is illustrated.
The 1st embodiment ＞ of ＜
Fig. 1 is the figure for indicating the installation system 100 for manufacturing substrate 1.
As shown in Figure 1, installation system 100 has silk-screen printing device 101, printing inspection apparatus successively from upstream side 102a, mounting device 103, installation check device 102b, reflow ovens 104, clean dry device 105 and final inspection device 102c.In addition, installation system 100 has the control device 106 being uniformly controlled to above-mentioned various devices.Installation system 100 Possessed various devices are connected via the communications cable in a manner of it can communicate each other.
Control device 106 is, for example, PC (Personal computer), has control unit 5, input unit 8, display unit 7 etc..
Silk-screen printing device 101 has：Silk screen forms opening at position corresponding with printed patterns；Supply unit, Pasta solder is supplied on silk screen；And scraper plate, it is slided on silk screen.In addition, silk-screen printing device 101 has：Conveying Portion, conveying substrate 1, and the substrate 1 configuration is being stopped into target location；Shoot part, to being separately positioned on substrate 1 and silk Online alignment mark 3 is shot；And control unit, silk-screen printing device 101 is uniformly controlled.
Silk-screen printing device 101 makes scraper plate be slided on silk screen, to 1 printing solder of substrate on the downside of silk screen.Then, Silk-screen printing device 101 transmits the substrate 1 for being printed with solder to printing inspection apparatus 102a.
Printing inspection apparatus 102a has：Delivery section, the substrate 1 to being printed with solder convey, and by the substrate 1 Configuration is stopping target location；Shoot part, the substrate 1 to being printed with solder are shot；And control unit, based on bat The image taken the photograph two-dimensionally or three-dimensionally parses substrate 1, checks the printing state of solder.Printing inspection apparatus 102a will be deemed as the good substrate 1 of printing state and be transmitted to mounting device 103, will be deemed as the undesirable substrate of printing state 1 Discarded (or being checked again).
Mounting device 103 has：Delivery section, the substrate 1 to being printed with solder conveys, and the substrate 1 is configured Stopping target location；And shoot part 31 (being generally arranged in mounting head), to alignment mark 3 on substrate 1 is arranged It is shot.In addition, mounting device 103 has：Supply unit, the various electronic units such as supply resistance, capacitor, inductor； Mounting head adsorbs the electronic unit supplied from supply unit, and is installed on substrate 1；And control unit, to installation Device 103 is uniformly controlled.Mounting device 103 will be equipped with electricity after installing electronic unit on substrate 1 using mounting head The substrate 1 of subassembly is transmitted to installation check device 102b.
Installation check device 102b has：Delivery section, the substrate 1 to being equipped with electronic unit convey, and should The configuration of substrate 1 is stopping target location；And shoot part, the substrate 1 to being equipped with electronic unit are shot.In addition, Installation check device 102b has control unit, and the control unit is based on the image taken, two dimension or dimensionally to the progress of substrate 1 Parsing, checks the installation condition of electronic unit.Installation check device 102b will be deemed as the good substrate of installation condition 1 It is transmitted to reflow ovens 104, will be deemed as the undesirable substrate 1 of installation condition and discard (or being checked again).
Reflow ovens 104 make electricity by carrying out reflow treatment to the substrate 1 for being equipped with electronic unit to make solder dissolve The wiring of subassembly and setting on substrate 1 is via solder connection.Then, reflow ovens 104 by the substrate 1 after reflow treatment to washing Net drying device 105 transmits.
Clean dry device 105 by fluxing agent on the surface of the substrate 1 after being attached to reflow treatment etc. it is extra at Divide and clean, and the substrate 1 after cleaning is made to dry.Then, clean dry device 105 by the substrate 1 to final inspection device 102c is transmitted.
Final inspection device 102c has：Delivery section conveys the substrate 1 after reflow treatment, and by the substrate 1 Configuration is stopping target location；Shoot part shoots substrate 1；And control unit, based on the image taken, Two dimension dimensionally parses substrate 1, and final inspection is carried out to substrate 1.Final inspection device 102c will be in most final inspection It is judged as that the substrate 1 of certified products is transmitted to accommodation apparatus is (not shown) in looking into, will be judged as undesirable substrate 1 in final inspection Discarded (or being checked again).
The position detecting device of substrate 1 involved by this technology, such as can be in silk-screen printing device 101, print inspection It is used in device 102a, mounting device 103, installation check device 102b, final inspection device 102c etc..As exemplary, As long as substrate 1 is made to stop target location stopping, and the device of the processing needed for the manufacture of substrate 1 is executed to the substrate 1, then Either which type of device can use position detecting device.
Herein, the processing needed for the manufacture of so-called substrate 1, refer to for example on substrate 1 processing of printing solder, to print Processing that substrate 1 brushed with solder is checked installs the processing of electronic unit on substrate 1, to being equipped with electronic unit The processing etc. that substrate 1 is checked.
In the following, for convenience of description, illustrating the position detecting device involved by this technology being used for as an example Situation in the check devices 102 such as printing inspection apparatus 102a, installation check device 102b, final inspection device 102c.
Fig. 2 is the oblique view for indicating the check device 102 using the position detecting device involved by this technology.Fig. 3 be from The figure of the conveying direction observation check device 102 of substrate 1.Fig. 4 be indicate deceleration sensor 52 possessed by check device 102 with And the figure of the position of stop sensor 53.Fig. 5 is the block diagram for indicating check device 102.
As shown in these figures, check device 102 has delivery section 10, and the delivery section 10 is by substrate 1 along conveying direction (X-axis Direction) conveying, so that the substrate just conveyed 1 (not utilizing retainer) is being stopped target location stopping.In addition, check device 102 With support portion 20, which supports the substrate 1 for having stopped at and having stopped target location from below.In addition, check device 102 have：Shooting unit 30, with illumination portion 32 and shoot part 31, the illumination portion 32 is to 1 irradiation light of substrate, the shoot part 31 pairs of substrates 1 for having irradiated light are shot；And shooting unit mobile mechanism 40, so that shooting unit 30 is moved to the directions XY It is dynamic.
In addition, check device 102 has：Move in sensor 51 (with reference to Fig. 5), to from configuration in check device 102 The device of upstream side transmits the moving in for substrate 1 come and is detected；Deceleration sensor 52 and stop sensor 53, they to by Delivery section 10 convey substrate 1 by being detected.In addition, check device 102 has control unit 5, storage part 6, display unit 7, input unit 8 and communication unit 9.
Position detecting device involved by this technology at least has shoot part 31, delivery section 10 and control unit 5.
As the substrate 1 of the check object of check device 102, such as there is rectangular shape in plan view, there is base The edge 2b of the edge 2a and rear end side of front end side on the conveying direction (X-direction) of plate 1.
In addition, multiple alignment marks 3 are arranged on substrate 1 (with reference to Fig. 2).In the example shown in Fig. 2, showing will be right An example the adjacent corner on the diagonal line of substrate 1 the case where is arranged in fiducial mark note 3.In addition, however it is not limited to as shown in Figure 2 Dedicated alignment mark 3 is particularly set to the situation on substrate 1, it can also be by the predetermined pattern (Wiring pattern on substrate 1 Deng) as the use of alignment mark 3.
Delivery section 10 has 2 guide portions 11, they sandwich substrate 1 from both sides, and substrate 1 is guided along conveying direction. Each guide portion 11 is the plate-shaped member with the longer shape on the conveying direction of substrate 1.In the downside of each guide portion 11, divide It is not provided with multiple foots 12 in supporting guide portion 11 from below.Each guide portion 11 is mounted on check device via the foot 12 On 102 pedestal (not shown).
Side in 11 inside of each guide portion, is respectively set the conveyer belt 13 for capableing of positive and negative rotation.Delivery section 10 can lead to It crosses the driving of the conveyer belt 13 and substrate 1 is delivered to and stops target location, or the substrate 1 after inspection is moved out.Defeated Send be not provided in portion 10 machinery retainer, by stop conveyer belt 13 driving by make substrate 1 stop target location (or Near it) stop.
In Fig. 2 and example shown in Fig. 4, the stopping target location of substrate 1 is set as on the length direction of guide portion 11 Center near position.In addition, in the explanation of Fig. 2 and Fig. 4, the example moving in from right side as substrate 1 and move out to the left Son and illustrate.That is, in Fig. 2 and Fig. 4, left direction is the direction of conveying substrate 1.
Each guide portion 11 is formed as, upper end bending inwardly, and the upper end of guide portion 11 makes base using support portion 20 It, can be from upside supporting substrate 1 when plate 1 is moved upward.A guide portion 11 in 2 guide portions 11, can to substrate 1 The orthogonal direction (Y direction) of conveying direction it is mobile.Thus, it is possible to which stopping will be configured at from both sides using 2 guide portions 11 The substrate 1 of target location is clamped and is fixed.As noted above, substrate 1 is examined in the state of after fixing substrate 1 It looks into.
In example shown in the drawings, show a case that the quantity of delivery section 10 is 1, but the quantity of delivery section 10 2 can be greater than or equal to.In the case, each delivery section 10 is configured to arrange along Y direction.
It moves in sensor 51 and is arranged and be configured at the moving on conveyer (not shown) of upstream side compared with delivery section 10, it is right The moving in for substrate 1 come is transmitted from the upstream side of check device 102 to be detected.Sensor 51 is moved in for example by the light of reflection-type Sensor is constituted.
Deceleration sensor 52 and stop sensor 53 identically as sensor 51 is moved in, such as by the light sensing of reflection-type Device is constituted.On one or 2 guide portions 11, configuration is led to substrate 1 for deceleration sensor 52 and stop sensor 53 The corresponding height of height crossed (with reference to Fig. 4).Stop sensor 53 configures at following positions, that is, reaches and stops in substrate 1 When target location is compared to the slightly position of upstream side, the position that the edge 2a of the front end side of substrate 1 can be detected.Slow down Sensor 52 for example configures at the upstream side position with stop sensor 53 at a distance of 100mm or so.
Deceleration sensor 52 and stop sensor 53,1 front end side of substrate edge 2a by being configured with above-mentioned sensing The moment of the position of device, " on " and "off" are switched over.Therefore, the sensor 52,53 can be to 1 front end of substrate Edge 2 by being detected with the case where sensor 52,53 corresponding position.
Detected using deceleration sensor 52 the edge 2a of 1 front end side of substrate by when, the driving to conveyer belt 13 It is controlled, so that the conveying speed of substrate 1 is slowed down.In addition, on the side for detecting 1 front end side of substrate using stop sensor 53 Edge 2a by when, the driving of conveyer belt 13 is controlled so that conveyer belt 13 rotation stop.
In addition, even if detected using stop sensor 53 the edge 2a of 1 front end side of substrate by by make conveyer belt 13 Rotation stop, substrate 1 will not stop immediately.That is, substrate 1 stops at after the direction of travel to substrate 1 is slightly advanced Only target location (or near it).Due to being not provided with the retainer of machinery in this technique, so substrate 1 is not necessarily accurate Ground is stopping target location stopping, and the stop position of substrate 1 may be from the offset of stopping target location.
Displacement distance d that substrate 1 is advanced to direction of travel (that is, the edge 2a of 1 front end side of stop sensor 53 and substrate it Between the weight (type) of distance d) and substrate 1 have relationship.As typical example, the weight of substrate 1 is heavier, the shifting of substrate 1 Dynamic distance d is bigger.Further, since corresponding with weight (type) of substrate 1, above-mentioned distance d is different, so what substrate 1 stopped It is corresponding and different from the weight (type) of each substrate 1 to stop target location.
Support portion 20 has：Support plate 21；Multiple supporting pins 22, it is upright to be arranged in the support plate 21；And support Plate elevating mechanism 23 makes support plate 21 lift.
After the stopping of substrate 1, support portion 20 is set to be moved upward using support plate elevating mechanism 23.It is upward with support portion 20 The movement of side is accompanied, and the supporting pin 22 of 1 supported portion 20 of substrate jacks up upward, and substrate 1 is sandwiched the upper of guide portion 11 as a result, Between end and support portion 20, substrate 1 is positioned in the up-down direction.
Shooting unit 30 has shoot part 31 and illumination portion 32.The illumination portion 32 of shooting unit 30 has：Domed shape Dome part 32a, at the top of it formed opening；And multiple headlamp 32b, it configures in the inside of dome part 32a.According to Bright lamp 32b is for example made of LED (Light Emitting Diode).
Shoot part 31 is fixed on the opening being set on dome part 32a in the upside of the dome part 32a of illumination portion 32 Position at, the optical axis of the shoot part 31 is configured to, vertical with the check surface of substrate 1.Shoot part 31 has ccd sensor (CCD：Charge Coupled Device) or cmos sensor (CMOS：Complementary Metal Oxide The capturing elements such as Semiconductor)；And the optical systems such as imaging len.
Shoot part 31 is corresponding with the control of control unit 5, in the substrate 1 for stopping target location (or near it) stopping Edge 2 (being in the present embodiment the edge 2a of front end side) shot, and the alignment mark 3 on substrate 1 is clapped It takes the photograph, the check surface of substrate 1 is shot.
The coverage 31a of shoot part 31 is for example set as 35mm × 35mm or so.In the inspection using shoot part 31 to substrate 1 When the face of looking into is shot, shoot part 31 is moved by shooting unit mobile mechanism 40 to X-direction and Y direction on one side, and one The region on substrate 1 that side several times checks needs is shot.
In example shown in the drawings, show a case that the quantity of shooting unit 30 is 1, but the number of shooting unit 30 Amount can also be greater than or equal to 2.
Shooting unit mobile mechanism 40 make shooting unit 30 along the conveying direction (X-direction) of substrate 1 and with substrate 1 The orthogonal direction of conveying direction (Y direction) is mobile.The shooting unit mobile mechanism 40, which is used as, makes shoot part 31 along conveying direction It moves, so that the mobile mechanism of the relative position variation on the conveying direction (X-direction) between shoot part 31 and substrate 1 rises Effect.Shooting unit mobile mechanism 40 is constituted such as by ball screw drive mechanism or rack pinion driving mechanism.
Control unit 5 is constituted such as by CPU (Central Processing Unit), to each section of check device 102 It is uniformly controlled.Control unit 5 for example controls shoot part 31, claps the edge 2 on the conveying direction of substrate 1 It takes the photograph, the position at the edge 2 based on the substrate 1 in the image taken is detected the stop position of substrate 1.For control The processing in portion 5, describes in detail below.
Storage part 6 has：The memory of volatibility, the operation as control unit 5 are used with region；And it is non-volatile Memory, be fixedly stored with various data and program needed for the processing of control unit 5.Above-mentioned various programs can also be from The recording medium of the mobilitys such as CD, semiconductor memory is read in.
In non-volatile memory, it is stored with the type of substrate 1, the weight of substrate 1, the stopping target of substrate 1 Table obtained from position, Edge-stopping desired position are associated.Herein, so-called Edge-stopping desired position refers to estimating In the case that substrate 1 has stopped at stopping target location, it is contemplated that answer stopped position in the edge 2 of substrate 1.Stop at the edge Only desired position executes the processing at the edge 2 for attempting shooting substrate 1.
As noted above, due to stopping the displacement distance d that metacoxal plate 1 is advanced to direction of travel in the driving of conveyer belt 13, It is corresponding and different from the weight (type) of each substrate 1, so the stopping target location of substrate 1 and Edge-stopping desired position Also corresponding and different from the weight of each substrate 1 (type).Therefore, by the type of substrate 1, the weight of substrate 1, substrate 1 Stop target location, Edge-stopping desired position is associated and forms tables of data.
Display unit 7 is constituted such as by liquid crystal display, EL (Electro Luminescence) display.Input unit 8 It is made of keyboard, mouse, touch sensor etc., inputs the various instructions from operating personnel.Communication unit 9 is to configuration in installation system Other devices in system 100 send information, or receive information from other devices.
[action specification]
In the following, being illustrated to the action of check device 102.Fig. 6~9 are the flows for the processing for indicating check device 102 Figure.
With reference to Fig. 6, first, control unit 5 is driven by making to move in conveyer, to start by from configuration in check device Action (the step 101) that the substrate 1 that the device of 102 upstream side transmits is moved in into check device 102.Then, control unit 5 is sentenced It is fixed be arranged on moving in conveyer move in whether sensor 51 detect substrate 1 move in (step 102).
If the edge 2a of 1 front end side of substrate is by moving in the front of sensor 51, from moving in the output inspection of sensor 51 Survey signal.If control unit 5 is received from the detection signal (step 102, yes) for moving in sensor 51, then start delivery section 10 Conveyer belt 13 driving (step 103).
Then, control unit 5 controls shooting unit mobile mechanism 40, and shooting unit 30 is made to envision position to Edge-stopping Set mobile (step 104).In addition, Edge-stopping desired position is as noted above, it is corresponding with weight (type) of each substrate 1 And it is different.Therefore, it is pre- to read Edge-stopping corresponding with the type of substrate 1 of check object is currently become from table for control unit 5 Think position, shooting unit 30 is made to be moved to the Edge-stopping desired position.
In addition, the edge 2 as reference object can be appointing in the edge 2a of the front end side and edge 2b of rear end side What edge 2, but in the present embodiment, to being the edge of the front end side on conveying direction as the edge 2 of reference object The example of 2a illustrates.
Then, control unit 5 judges whether deceleration sensor 52 detects 1 (step 105) of substrate.If defeated by conveyer belt 13 The edge 2a of the front end side of the substrate 1 sent reaches the front of deceleration sensor 52, then exports detection signal from deceleration sensor 52. If control unit 5 receives the detection signal (step 105, yes) from deceleration sensor 52, then make the deceleration (step of conveyer belt 13 106)。
Then, control unit 5 judges whether stop sensor 53 detects 1 (step 107) of substrate.If defeated by conveyer belt 13 The edge 2a of the front end side of the substrate 1 sent reaches the front of stop sensor 53, then exports detection signal from stop sensor 53. If control unit 5 receives the detection signal (step 107, yes) from stop sensor 53, then the driving of conveyer belt 13 is made to stop Only (step 108).
Then, control unit 5 makes support portion 20 be moved upward, after being positioned in the up-down direction to substrate 1, by making One guide portion 11 is moved to Y direction, so that, from both sides clamping substrate 1, substrate 1 is fixed (step using a pair of of guide portion 11 It is rapid 109).
Then, control unit 5 makes the headlamp 32b lightings for the shooting unit 30 for being moved to Edge-stopping desired position, utilizes Shoot part 31 attempts the edge 2a (steps 110) of 1 front end side of shooting substrate.
Herein, when the driving of conveyer belt 13 being made to stop in step 108, substrate 1 will not stop immediately, and to traveling Direction stops at after slightly advancing stops target location.Further, since it is not provided with the retainer of machinery in this technique, so Substrate 1 is not necessarily accurately stopping target location stopping, and the stop position of substrate 1 may be deviated from target location is stopped.
Substantially, if it is same kind of substrate 1 (weight identical substrate 1), then substrate 1 is envisioned relative to stopping mesh The stop position offset of cursor position is not more big changes.But such as the case where the back side of substrate 1 is attached with foreign matter Under, when conveyer belt 13 stops, so that substrate 1 is slided on conveyer belt 13 due to the foreign matter, sometimes the practical stop position of substrate 1 It sets and significantly deviates in the direction of travel.
Even if the stop position of substrate 1 is deviated from target location is stopped, as long as its offset falls the shooting in shoot part 31 In range 31a, then the edge 2a of 1 front end side of substrate can also be carried out using the shoot part 31 positioned at Edge-stopping desired position Shooting.In the present embodiment, since coverage 31a is set as 35mm × 35mm, as long as so substrate 1 is relative to stopping target The offset of position is ± 17.5mm, then also the shoot part 31 positioned at Edge-stopping desired position can be utilized to 1 front end of substrate The edge 2a of side is shot.
On the other hand, in substrate 1 relative to coverage 31a of the offset more than shoot part 31 for stopping target location In the case of (± 17.5mm), the edge for being located at the shoot part 31 of Edge-stopping desired position to 1 front end side of substrate can not be utilized 2a is shot.
Figure 10 is the coverage 31a of shoot part 31 and the stopping for substrate 1 for indicating to configure at Edge-stopping desired position Stop bit set between relationship figure.In the figure of upside in Fig. 10, shows that the edge 2a of the front end side of substrate 1 is fallen and shooting One example of the situation in the coverage 31a in portion 31.In the figure in center in Fig. 10, show that substrate 1 is more than to stop Target location and stop, the edge 2a of 1 front end side of substrate does not fall within one of the situation in the coverage 31a of shoot part 31 Example.In the figure of downside in Fig. 10, show that substrate 1 stops in the front side for stopping target location, the side of 1 front end side of substrate Edge 2a does not fall within an example of the situation in the coverage 31a of shoot part 31.
In the present embodiment, can not utilize the shoot part 31 positioned at Edge-stopping desired position to 1 front end side of substrate Edge 2a shot in the case of, execute can suitably shoot substrate 1 edge 2 processing it is (aftermentioned to retry place Reason).
With reference to Fig. 7, if attempting 1 front end side of shooting substrate using shoot part 31 of the configuration at Edge-stopping desired position Edge 2a, then next, control unit 5 execute step 111.In step 111, control unit 5 is in Edge-stopping desired position Whether place carries out image procossing by the image that shoot part 31 takes, be that the edge 2a comprising 1 front end side of substrate exists to the image Interior image is judged.
In the case of the image including the image taken is the edge 2a comprising front end side, due to left in the images Side is dark, and the right side for showing substrate 1 is bright, so whether control unit 5 can be comprising front end to the image by image procossing Image including the edge 2a of side is judged.
For example, shown in figure on the upside of Figure 10, the edge 2a in 1 front end side of substrate, which is fallen, envisions position being configured at Edge-stopping In the case of setting in the coverage 31a of the shoot part 31 at place, the edge 2a of 1 front end side of substrate is included in image.In this feelings Under condition, due to detecting edge 2 (step 111, yes) in image, so control unit 5 enters step 119.
On the other hand, such as shown in the figure in the centers Figure 10 and the figure of downside, the edge 2a in 1 front end side of substrate is not fallen In the case of in the coverage 31a for the shoot part 31 being configured at Edge-stopping desired position, base is not included in image The edge 2a of the front end side of plate 1.In the case, due to not detecting edge 2 (step 111, no) in image, so control Portion 5 processed enters step 112.
In step 112, control unit 5 executes following processing, that is, makes to retry the relevant count value of number of processing with execution +1.Then, control unit 5 is to retrying whether number of processing less than or equal to upper limit value N is judged (step 113).
It is so-called to retry processing, refer to making shooting unit 30 along conveying direction (X-axis side using shooting unit mobile mechanism 40 To) mobile (making the relative position variation of shoot part 31 and substrate 1 in the conveying direction), and shoot part 31 is utilized to attempt to clap again Take the photograph the processing at edge 2.The upper limit value N for retrying number of processes is for example set as 2 times, and but it is not limited to this.The value of N for example can also be The value that can be changed via the input unit 8 of check device 102 or the input unit of control device 106.
In the case where retrying number of processing less than or equal to upper limit value N (step 113, yes), control unit 5 enters next A step 114.In step 114, control unit 5 is based on the image (the 1st time retry) taken at Edge-stopping desired position, Or the image (the 2nd time and the 2nd time later retry) taken in subsequent steps 118, shoot part 31 whether there is Judged (step 114) above substrate 1.
For example, in the case of example shown in the figure entreated in Fig. 10, by shoot part 31 at Edge-stopping desired position The image taken becomes the image for showing a part for substrate 1 on the whole in image.In the case, due to using come Substrate 1 is irradiated from the light of headlamp 32b, so the image taken at Edge-stopping desired position is integrally formed brighter figure Picture.In the case of this entirety brighter image, control unit 5 is judged as (step 114, shoot part 31 is present in 1 top of substrate It is).
On the other hand, such as shown in the figure on the downside of Figure 10 in the case of example, at Edge-stopping desired position by The image that shoot part 31 takes becomes and takes the component for being located at downside compared with substrate 1 (for example, carrying a pair of of guide portion 11 pedestal etc.) image.In the case, it is located at compared with substrate 1 since the headlamp 32b light sent out is hardly reached The component of downside, so the image taken at Edge-stopping desired position, is integrally formed dark image.In this entirety In the case of dark image, control unit 5 is judged as that shoot part 31 is not present in 1 top (step 114, no) of substrate.
In the case of being determined as that shoot part 31 is present in 1 top of substrate in step 114, control unit 5 makes shooting unit 30 (step 115) is moved to the side (direction of conveying substrate 1) that moves out of substrate 1.On the other hand, it is judged to shooting in step 114 In the case that portion 31 is not present in 1 top of substrate, control unit 5 makes shooting unit 30 move in side (with conveying substrate 1 to substrate 1 Side in the opposite direction) it is mobile.
That is, in step 114, control unit 5 whether there is above substrate 1 shoot part 31 based on the image taken Judged, it is corresponding with judgement result, the direction that shooting unit 30 should in the conveying direction moved is judged.
In addition, in the 1st time retries processing, in step 114, based on the figure taken at Edge-stopping desired position Picture, judgement should make the direction that shooting unit 30 moves.The 2nd time and the 2nd time it is later retry processing, based on stopping from edge The image only taken at the position after desired position movement, determination should make the direction that shooting unit 30 moves.Herein, 2 times and the 2nd time later to retry in processing, the moving direction phase of the moving direction of shooting unit 30 and a preceding shooting unit 30 Together.Accordingly it is also possible to the 2nd time and the 2nd time it is later retry processing, omit for judging to make shooting unit 30 to which side To mobile step 114.
Figure 11 is when indicating that shooting unit 30 is moved from Edge-stopping desired position, the coverage 31a of shoot part 31 The figure of position relationship between the edge 2a of 1 front end side of substrate.In the figure entreated in fig. 11, shows and be determined as shoot part 31 It is present in 1 top of substrate, makes shooting unit 30 to the case where moving out when side is moved.In the figure on the downside of Figure 11, judgement is shown It is not present in 1 top of substrate for shoot part 31, makes shooting unit 30 to the case where moving in when side is moved.
The distance that shooting unit 30 is moved along conveying direction is set as distance corresponding with the coverage 31a of shoot part 31. For example, in the case where the coverage 31a on the conveying direction of shoot part 31 is 35mm, by the displacement distance of shooting unit 30 It is set as 35mm.Alternatively, the displacement distance of shooting unit 30 can also be set as, after the coverage 31a and movement before movement Coverage 31a overlappings.In the case, such as by lap it is set as 5mm, the displacement distance of shooting unit 30 is set as 30mm。
In addition, in the case where making shooting unit 30 move, more than the movable range of shooting unit 30, control Portion 5 processed enables the highest distance position movement that shooting unit 30 is moved to shooting unit 30.
Make in step 115 shooting unit 30 to move out side movement after, alternatively, make in step 116 shooting unit 30 to After moving in side movement, control unit 5 attempts the edge of 1 front end side of shooting substrate using the shoot part 31 at the position after being located at movement 2a (steps 117).Then, whether control unit 5 is that image including the edge 2a comprising front end side carries out to the image that takes Judge (step 118).
The image taken by the shoot part 31 after movement be comprising front end side edge 2a including image the case where Under (step 118, yes), control unit 5 enters step 119.On the other hand, the image taken by the shoot part 31 after movement not It is (step 118, no) in the case of the image including the edge 2a comprising front end side, control unit 5 again returns to step 112, hold Row step 112 and the later processing of step 112.That is, control unit 5, until detecting edge 2a, being repeated makes shooting list Member 30 is moved along conveying direction, and using the processing that retries of the edge 2a of the trial shooting of shoot part 31 front end side, (N is upper again Limit).
In the case of detecting the edge 2a of front end side in step 111 or step 118, control unit 5 is based on current The position of shooting unit 30 and the position of the edge 2a in image, examine the stop position of the substrate 1 on conveying direction Survey (step 119).
Then, actual stop position of the control unit 5 based on the substrate 1 detected carries out school to Edge-stopping desired position Just, the Edge-stopping desired position after correction is stored into (step 120) into storage part 6 (table).In addition, envisioning with Edge-stopping The correction of position is accompanied, and control unit 5 is also corrected the stopping target location of substrate 1, by the stopping target position after the correction Set the storage into storage part 6 (table).
For example, it is assumed that detecting edge 2a (Figure 11 of front end side in the image taken at Edge-stopping desired position Upside), but the actual stop position of substrate 1 is from stopping target location to the right or the case where offset has occurred for left side.Herein In the case of, control unit 5 executes the processing for making Edge-stopping desired position to the right or left side is moved corresponding with the offset. In the same manner, the execution of control unit 5 makes the stopping target location of substrate 1 to the right or the processing of left side movement.
In addition, for example, it is assumed that not detecting the side of front end side in the image taken at Edge-stopping desired position Edge 2a, the case where in the image that takes by making shooting unit 30 move comprising edge 2 (centers Figure 11 and downside). In the case, control unit 5 executes following processing, that is, and it is corresponding relative to the offset of target location is stopped with substrate 1, make Edge-stopping desired position is to the right or left side is moved.In the same manner, control unit 5 execute make the stopping target location of substrate 1 to The processing of right side or left side movement.
Alternatively, control unit 5 is excessive relative to the offset for stopping target location in the stop position of substrate 1 and is more than threshold value In the case of, it can not also be anti-into the correction of the stopping target location of Edge-stopping desired position, substrate 1 by the offset It reflects.
Then, stop position of the control unit 5 based on the substrate 1 detected, to the alignment mark 3 that is arranged on substrate 1 Camera site is calculated (step 121), and shooting unit 30 is made to move (step 122) to the camera site of alignment mark 3.So Afterwards, control unit 5 is shot to 3 irradiation light of alignment mark, and using shoot part 31 to fiducial mark using the headlamp 32b of shooting unit 30 Remember 3 (steps 123).As typical example, control unit 5 executes at the different location more than or equal to 2 to being more than or waiting In the processing that 2 different alignment marks 3 are shot.
Then, control unit 5 is based on the image more than or equal to 2 alignment marks 3 taken, position, base to substrate 1 (step 124) is identified in the inclination about the z axis of plate 1, the size etc. of substrate 1.Then, control unit 5 to the check surface of substrate 1 into Row checks (step 125).In the inspection of substrate 1, control unit 5 makes shooting unit 30 using shooting unit mobile mechanism 40 on one side It is moved to X-direction and Y direction, the inspection area on substrate 1 checked several times needs on one side is shot.So Afterwards, control unit 5 is by based on the image taken, two dimension or is dimensionally parsed to substrate 1, to be carried out to substrate 1 It checks.
If the inspection of substrate 1 terminates, next, control unit 5 makes a guide portion 11 of delivery section 10 along Y direction It is mobile, the clamped condition to substrate 1 is released, support portion 20 is made to move (step 126) downwards.Then, control unit 5 makes delivery section 10 conveyer belt 13 drives, and substrate 1 is moved out (step 127) from check device 102.
In the following, being more than upper limit value N to retrying number of processing, processing when retrying processing failure illustrates.Fig. 7's In step 113, it is more than the step of control unit 5 enters Fig. 9 in the case of upper limit value (step 113, no) to retry number of processing 128.In step 128, control unit 5 exports the display signal of alarm picture 15, and display unit 7 is made to show alarm picture 15.
Figure 12 is the figure for an example for indicating alarm picture 15.As shown in figure 12, the left side in alarm picture 15 is aobvious Show：There is a situation where the date and time of mistake, the transport path (delivery section 10 is greater than or equal to 2) that mistake occurs, alarms Code and detailed content about alarm.In addition, being shown on the right side of alarm picture 15：It can be estimated as mistake and original occurs The candidate item of cause and for eliminate mistake processing method.
It is found that 24 dividing 56 seconds at the 12 of on October 24th, 2013, the transport road in front side in the example shown in Figure 12 Mistake caused by the recognition failures by edge detection has occurred in diameter (delivery section 10).In addition, according to the candidate item of presumption reason It is found that the stop position of possible substrate 1 has been more than the coverage 31a of shoot part 31, or may be in edge detection at image Reason failure.In addition we know, as the processing method for eliminating the mistake, if make substrate 1 to move in side return after again Substrate 1 is moved in, the stop position of substrate 1 is confirmed, and to the parameter of inspection method (for example, Edge-stopping desired position Deng) be adjusted.
In fig. 12, " teaching " button 15a and the Close button 15b are shown in the position of 15 downside of alarm picture." show Religion " button 15a is the button for making display be redirected to teaching picture 16 (referring to Fig.1 3), and the Close button 15b is for closing Close the button of alarm picture 15.
With reference to Fig. 9, whether control unit 5 is after so that alarm picture 15 is shown on picture, to the Close button 15b via defeated Enter portion 8 and (step 129) is judged by selection.There is no selected (step 129, no), control in the Close button 15b Whether portion 5 processed via input unit 8 is judged (step 130) to " teaching " button 15a by selection.Do not have in " teaching " button 15a Have it is selected in the case of (step 130, no), 5 return to step 129 of control unit, to the Close button 15b whether by selection carry out Judgement.
In " teaching " button 15a selected (step 130, yes), the display of 5 output learning picture 16 of control unit Signal makes display unit 7 show 16 (step 131) of teaching picture.It substitutes alarm picture 15 as a result, and shows on display unit 7 Teach picture 16.
Figure 13 is the figure for an example for indicating teaching picture 16.The teaching picture 16 is for by making shooting list manually Member 30 is moved to conveying direction, and the position of the edge 2a of position and front end side to shoot part 31 carries out aligned in position, thus The picture of the stop position of teaching substrate 1 in check device 102.
In the left side of teaching picture 16, it is configured to show the image display area of the image by 31 current shooting of shoot part 16a.In the example shown in Figure 13, show a case that the position on the right side of image shows the part in 1 left side of substrate One example.In the lateral central position of image display area 16a, 1 line 16b is configured along longitudinal direction.Line 16b is to be used for The line of aligned in position is carried out with the edge 2a of the front end side of substrate 1.
In addition, being configured on the right side of image display area 16a：" amplification " button 16c, is used to make image magnification；" contracting It is small " button 16d, it is used to make image down；" corresponding multiple " button 16e, for showing image to correspond to multiple；And it is " whole A picture " button 16f is used to show image on entire picture.
4 arrow button 16g are shown on the right side of teaching picture 16, this 4 arrow button 16g are for making shooting unit 30 It is moved along X-axis and Y direction.4 arrow button 16g have " left direction " button 16h, " right direction " button 16i, " upper direction " Button 16j, " lower direction " button 16k.Operating personnel pass through to being especially " left direction " button in this 4 arrow button 16g 16h, " right direction " button 16i are operated, to make shooting unit 30 be moved along X-direction, as a result, to aligned in position The edge 2a of 1 front end side line 16b and substrate carries out aligned in position.
For example, in the example shown in Figure 13, operating personnel are by selecting " right direction " button 16i, to make 30 right direction of shooting unit moves, and carries out position to the edge 2a of 1 front end side the line 16b of aligned in position and substrate as a result, Alignment.
In addition, in the upside of 4 arrow button 16g, show the high speed of the movement speed for switching shooting unit 30 with And " high speed " the button 16l and " low speed " button 16m of low speed.As typical example, in the line 16b for making aligned in position and When the edge 2a of 1 front end side of substrate is close, the movement speed of shooting unit 30 is switched to " low speed " by operating personnel from " high speed ", The micro-adjustment of aligned in position is carried out with low speed.
" determination " button 16n and the " Cancel " button 16o are shown in the position of 16 downside of teaching picture." determination " button 16n It is the button for determining teaching, the " Cancel " button 16o is for cancelling teaching and returning to the button of alarm picture 15.
With reference to Fig. 9, whether control unit 5 is after so that display unit 7 is shown teaching picture 16, to the " Cancel " button 16o via defeated Enter portion 8 and (step 132) is judged by selection.In the " Cancel " button 16o selected (step 132, yes), control unit 5 make display unit 7 show alarm picture 15 and substitute 16 (step 128) of teaching picture.
Do not have in the " Cancel " button 16o selected (step 132, no), control unit 5 is to 4 arrow button 16g In some button whether via input unit 8 (step 133) is judged by selection.It is all not selected in which button In the case of (step 133, no), whether 5 return to step 132 of control unit judged by selection the " Cancel " button 16o.
On the other hand, some button in 4 arrow button 16g is selected (step 133, yes), control Portion 5 processed makes shooting unit 30 move (step 134) to direction corresponding with the button.Movement with shooting unit 30 is accompanied, The image change shown on image display area 16a.By this processing, operating personnel are by carrying out 4 arrow button 16g Selection, so as to make shooting unit 30 move, the edge 2a of the front end side of line 16b and substrate 1 to aligned in position is carried out Aligned in position.
If make shooting unit 30 move, next, control unit 5 to " determination " button 16n whether via 8 quilt of input unit Selection is judged (step 135).There is no selected (step 135, no), the return step of control unit 5 in confirming button Rapid 132, whether the " Cancel " button 16o is judged by selection.
On the other hand, in " determination " button 16n selected (step 135, yes), control unit 5 enters next Step 136.For example, aligned in position of the operating personnel between the edge 2a of 1 front end side line 16b and substrate of aligned in position is complete Cheng Hou selects " determination " button 16n.
If selecting " determination " button 16n, position of the control unit 5 based on current shooting unit 30 calculates conveying side Stop position (the step 136) of upward substrate 1.Then, control unit 5 is using the stop position of calculated substrate 1 as teaching As a result (step 137) is stored into storage part 6.Then, 5 return to step 128 of control unit makes display unit 7 show alarm picture 15.
The Close button 15b selected (step 129, yes) in alarm picture 15, control unit 5 is to conduct Whether the stop position of the substrate 1 of teaching result, which has been stored in storage part 6, is judged (step 138).Teaching result In the case of being stored in storage part 6 (step 138, yes), stop position of the control unit 5 based on the substrate 1 as teaching result, Calculate the camera site (step 139) of alignment mark 3.
If calculating the camera site of alignment mark 3, next, control unit 5 enters the step 122 of Fig. 8, make shooting Unit 30 is moved to the camera site of alignment mark 3.Then, control unit 5 executes step 123 and the later processing of step 123.
On the other hand, in step 138, in the case that teaching result is not stored in storage part 6 (step 138, no), Control unit 5 makes a guide portion 11 of delivery section 10 be moved to Y direction, releases the clamped condition (step 140) of substrate 1.So Afterwards, control unit 5 makes conveyer belt 13 reversely rotate, and the return of substrate 1 is made to move in side (step 141).Then, 5 return to step of control unit 103, so that conveyer belt 13 is rotated in the forward direction, after being conveyed substrate 1 to conveyor side, executes step 104 and step 104 is later Processing.
In illustration herein, for by alarm picture 15 and teaching picture 16 on the display unit 7 of check device 102 The case where display, is illustrated, but alarm picture 15 and teaching picture 16 can also be on the display units of control device 106 Display.In the case, control device 106 makes alarm draw based on the display signal exported from the control unit 5 of check device 102 Face 15 and teaching picture 16 are shown on the display unit 7 of control device 106.
[effect etc.]
Check device 102 (position detecting device) involved by present embodiment has example function and effect described as follows.
In the present embodiment, the position at the edge 2 based on the substrate 1 in the image taken by shoot part 31, to base The stop position of plate 1 is detected.Therefore, the feelings for making substrate 1 stop even if not utilizing retainer for example in delivery section 10 Under condition, suitably the stop position of substrate 1 can also be detected.
In addition, by the position i.e. Edge-stopping desired position that the edge 2 of anticipation substrate 1 is stopped, shooting is utilized Attempt shooting edge 2 in portion 31, it is possible to the edge 2 of substrate 1 is suitably shot using shoot part 31.In addition, since edge stops Only desired position correspond to each substrate 1 weight (type) and be set as different positions, so even if substrate 1 weight In the case that (type) is different, the side of substrate 1 can also be suitably shot using shoot part 31 at Edge-stopping desired position Edge 2.
In addition, in the present embodiment, it is pre- to Edge-stopping due to the actual stop position based on the substrate 1 detected Think that position is corrected, it is possible to which Edge-stopping desired position is corrected to position appropriate.
In addition, in the present embodiment, processing is retried due to being directed to edge detection execution, so even if using positioned at side In the case that shoot part 31 at edge stopping desired position can not shoot the edge 2 of substrate 1, can also suitably it shoot The edge 2 of substrate 1.
In addition, due to that shooting unit 30 should be made on conveying direction based on the image taken, judgement in retrying processing The movement of which direction, it is possible to improve the speed until detecting the edge 2 of substrate 1.
In addition, in the present embodiment, when retrying processing failure, display teaching picture 16.Operating personnel pass through as a result, Teaching picture 16 is operated, the position at the edge 2 of position and substrate 1 to shoot part 31 carries out aligned in position, so as to To carry out teaching to the position of substrate 1 in check device 102.
The 2nd embodiment ＞ of ＜
In the following, the 2nd embodiment to this technology illustrates.Saying after the 2nd embodiment and the 2nd embodiment In bright, for function identical with above first embodiment either structure component omit or simplify explanation.
In above first embodiment, the example that whole substrates 1 are carried out with the edge detection of substrate 1 is illustrated.Another party , in the case where the stop position of substrate 1 for not utilizing retainer and stopping is stablized, substrate is omitted in the 2nd embodiment in face 1 edge detection.In the 2nd embodiment, this point is different from the 1st embodiment, therefore is said centered on this point It is bright.
Check device 102 (position detecting device) involved by 2nd embodiment has 2 patterns, can be to this 2 moulds Formula switches over.1st pattern is, for whole substrates 1, the edge 2 of substrate 1, the position based on edge 2 to be shot using shoot part 31 It sets and the stop position of substrate 1 is detected.In the 1st pattern, processing identical with above-mentioned Fig. 6~Fig. 9 is executed.
2nd pattern is not execute to shoot edge 2, stop position of the position based on edge 2 to substrate 1 using shoot part 31 The processing being detected is set, and the stopping target location of the substrate in storage part 61 will be stored in as the stop position of substrate 1.
Figure 14 is the flow chart for the processing for indicating the check device involved by the 2nd embodiment.Figure 15 and Figure 16 is to indicate The flow chart of the processing of 2nd pattern.
In the 2nd embodiment, first, whether control unit 5 is that the 1st pattern is judged (step 201) to present mode. In the initial state, the 1st pattern is executed.In the case where present mode is 1 pattern, control unit 5 executes the processing of the 1st pattern (step 202).That is, control unit 5 is directed to whole substrates 1, the edge 2 of substrate 1, the position based on edge 2 are shot using shoot part 31 It sets and the stop position of substrate 1 is detected (with reference to Fig. 6~Fig. 9).
If the processing of the 1st pattern terminates, next, whether control unit 5 in the processing of the 1st pattern to meeting regulation Condition judged (step 203).Herein, it as defined condition, can enumerate following (1) and (2).
(1) in the image taken by shoot part 31 at Edge-stopping desired position, the shooting to the edge 2 of substrate 1 Continuously succeeded with being greater than or equal to stipulated number.Herein, above-mentioned stipulated number is for example set as 3 times, and but it is not limited to this. It can be set as, which can change via input unit 8.
(2) position based on the edge 2 of substrate 1 and the deviation of the stop position of each substrate 1 detected, are less than or equal to Defined threshold.Herein, it is specified that threshold value is for example set as 1.5mm or so, but it is not limited to this.It can also be set as, which can It is changed via input unit 8.
The condition of setting can be (1) and (2) the two conditions, can also be a condition in (1) and (2).
Control unit 5 is in the case where being judged as meeting 2 condition (alternatively, conditions of (1) or (2)) shown in (1) and (2) (step 203, yes), by the 1st pattern to the 2nd pattern switching (step 204).That is, control unit 5 stops not utilizing retainer In the case that the stop position of substrate 1 is stablized, by the 1st pattern to the 2nd pattern switching.Then, 5 return to step 201 of control unit is right Whether present mode is that the 1st pattern is judged.
On the other hand, in the feelings for being judged as being unsatisfactory for 2 conditions (alternatively, condition of (1) or (2)) shown in (1) and (2) Under condition (step 203, no), control unit 5 is not by the 1st pattern to the 2nd pattern switching, return to step 201.
In step 201, present mode is in the case of the 2nd pattern (step 201, no), and control unit 5 executes the 2nd pattern Processing (step 205).
5 and Figure 16 referring to Fig.1 illustrates the processing of the 2nd pattern.If by the stream under the 2nd pattern shown in figure 15 Flow chart under journey figure and the 1st pattern shown in fig. 6 is compared, then step 304,310 from step 104,110 different.
That is, in the 1st pattern, control unit 5 executes following processing, that is, makes shooting unit 30 to Edge-stopping desired position It is mobile, the edge 2 step 104 of Fig. 6 (, 110) of shooting substrate 1 is attempted using shoot part 31.On the other hand, in the 2nd pattern, Control unit 5 does not execute following processing, that is, so that shooting unit 30 is moved to Edge-stopping desired position, using shoot part 31 to base The edge 2 of plate 1 is shot.In the case, control unit 5 executes following processing, that is, directly makes shooting unit 30 to fiducial mark Remember camera site movement, alignment mark 3 (Figure 15, step 304,310) are shot using shoot part 31.In addition, control unit 5 executes At different location more than or equal to 2, processing that the different alignment marks 3 more than or equal to 2 are shot.
When shooting unit 30 being made to be moved to alignment mark camera site in step 304, control unit 5 is thought be stored in There are substrates 1 for stopping target location in storage portion 6, and alignment mark camera site is calculated according to the stopping target location.Then, Shooting unit 30 is set to be moved to alignment mark camera site.
Herein, in the 1st pattern, the stopping target location of substrate 1, with based on the image taken by shoot part 31 And the actual stop position of the substrate 1 detected is corresponding, and it is corrected as position appropriate (Fig. 8, step 120).Therefore, exist In 2nd pattern, alignment mark camera site is calculated by using the stopping target location, so as in alignment mark appropriate Shot location shoots alignment mark 3.
Referring to Fig.1 6, if shot to alignment mark 3, next, control unit 5 is based on being more than of taking or waits In the image of 2 alignment marks 3, the size etc. of the position of substrate 1, the inclination about the z axis of substrate 1, substrate 1 is identified (step 311).
Then, control unit 5 identifies whether successfully to be judged (step 312) to the position of substrate 1.In the position of substrate 1 In the case of identifying successfully (step 312, yes), control unit 5 is checked (step 313) to the check surface of substrate 1.If substrate 1 inspection terminates, then control unit 5 releases the clamped condition (step 314) of substrate 1, and substrate 1 is moved out (step from check device 102 It is rapid 315).
On the other hand, in the case of the position recognition failures of substrate 1 (step 312, no), control unit 5 enters next Step 316.The case where position recognition failures of so-called substrate 1 refers to the actual stop position of substrate 1 from the stopping mesh of substrate 1 Cursor position deviates, the case where failing to the shooting of alignment mark 3 etc..
In the case, control unit 5 makes shooting unit 30 move (step 316) to Edge-stopping desired position, utilizes position Shoot part 31 at Edge-stopping desired position attempts the 2 (step 317) of edge of shooting substrate 1.Then, control unit 5 executes The step 111 of Fig. 7 and its later processing.That is, the execution of control unit 5 retries processing etc..
Referring to Fig.1 4, if the processing of the 2nd pattern terminates, next, control unit 5 to being in the processing of the 2nd pattern Condition is judged (step 206) as defined in no satisfaction.Herein, as defined condition, enumerate following (1) ' and (2) '.
(1) ' the position identification of substrate 1 is continuously failed with being greater than or equal to stipulated number (with reference to step 312).At this In, above-mentioned stipulated number is for example set as 2 times, and but it is not limited to this.It can also be set as, which can be via input unit 8 And it changes.
(2) ' " the piece number of the substrate 1 of position recognition failures/with the sum of the substrate 1 of the 2nd mode treatment " it has been more than regulation Threshold value.Herein, it is specified that threshold value is for example set as 5% or so, but it is not limited to this.It can also be set as, which can be via defeated Enter portion 8 and changes.
A condition during the condition of setting can be (1) ' and (2) ' the two conditions, can also be (1) ' and (2) '.
Control unit 5 be judged as meeting 2 conditions shown in (1) ' and (2) ' (alternatively, (1) ' or (2) ' condition) feelings Under condition (step 206, yes), control unit 5 is by the 2nd pattern to the 1st pattern switching (step 207).That is, control unit 5 is not utilizing only Dynamic device and the stop position of substrate 1 that stops it is unstable in the case of, by the 2nd pattern to the 1st pattern switching.
On the other hand, be judged as being unsatisfactory for (1) ' and (2) ' shown in 2 conditions (alternatively, (1) ' or (2) ' condition) In the case of (step 206, no), control unit 5 is not by the 2nd pattern to the 1st pattern switching, return to step 201.
In addition it is also possible to be set as, can via input unit 8 to be execute always the 1st pattern or the 1st pattern of switching and 2nd pattern is set.
[effect etc.]
Check device 102 (position detecting device) involved by 2nd embodiment has example function and effect described as follows.
In the 2nd embodiment, edge 2 is shot using shoot part 31 due under the 2nd pattern, omitting, and be based on edge 2 Position processing that the stop position of substrate 1 is detected, it is possible to shorten the time spent by the inspection of substrate 1.
In addition, in the case of due to stablizing in the stop position of substrate 1 for not utilizing retainer and stopping, by the 1st pattern It is switched to the 2nd pattern, it is possible to timing appropriate by the 1st pattern to the 2nd pattern switching.In addition, due to not utilizing only Dynamic device and the stop position of substrate 1 that stops it is unstable in the case of, be the 1st pattern by the 2nd pattern switching, it is possible to suitable When timing by the 2nd pattern to the 1st pattern switching.
＜ various modifications examples ＞
In the above description, for convenience of description, and for using the edge 2a of 1 front end side of substrate as shoot part 31 The case where reference object, is illustrated.But it is also possible to using the edge 2b of the rear end side of substrate 1 as the shooting of shoot part 31 Object.In the case, Edge-stopping desired position is set at position corresponding with the edge 2b of the rear end side of substrate 1.So Afterwards, at this location, the edge 2b of the rear end side of shooting substrate 1 is attempted using shoot part 31.
In addition, in the case where the edge 2a of front end side becomes the reference object of shoot part 31 and on the side of rear end side In the case that edge 2b becomes the reference object of shoot part 31, in retrying processing, the moving direction of shooting unit 30 is opposite.
For example, in the step 114 of Fig. 7, it is determined as the case where shoot part 31 is present at position corresponding with substrate 1 Under, control unit 5 make shooting unit 30 to substrate 1 to move in side mobile (in the opposite direction with the side of conveying substrate 1).Another party Face, in the case where being determined as that shoot part 31 is not present at position corresponding with substrate 1, control unit 5 make shooting unit 30 to Substrate 1 moves out side (direction of conveying substrate 1) movement.
In the above description, opposite on the conveying direction of shoot part 31 and substrate 1 for making in retrying processing When change in location, make 31 side of shoot part move the case where be illustrated.But it is also possible to by making substrate in retrying processing 1 side is moved, to make the relative position on the conveying direction of shoot part 31 and substrate 1 change.In the case, single in shooting It in the state that member 30 stops at Edge-stopping desired position, is driven by the conveyer belt 13 of delivery section 10, substrate 1 is made to move.
In this case, the case where becoming the reference object of shoot part 31 to the edge 2a of front end side, illustrates.Herein In the case of, in the case of being determined as that shoot part 31 is present at position corresponding with substrate 1 in the step 114 of Fig. 7, control Portion 5 makes the conveyer belt 13 of delivery section 10 reversely rotate, and makes substrate 1 to moving in side (in the opposite direction with the side of conveying substrate 1) It is mobile.On the other hand, in the case where being determined as that shoot part 31 is not present at position corresponding with substrate 1, control unit 5 makes defeated It send the conveyer belt 13 in portion 10 to rotate in the forward direction, keeps substrate 1 mobile to side (direction of conveying substrate 1) is moved out.
The case where becoming the reference object of shoot part 31 to the edge 2b of rear end side, illustrates.In the case, in Fig. 7 Step 114 in, in the case of being determined as that shoot part 31 is present at position corresponding with substrate 1, control unit 5 makes delivery section 10 Conveyer belt 13 rotate in the forward direction, keep substrate 1 mobile to side (direction of conveying substrate 1) is moved out.On the other hand, it is being judged to shooting In the case that portion 31 is not located at position corresponding with substrate 1, control unit 5 makes the conveyer belt 13 of delivery section 10 reversely rotate, and makes Substrate 1 is mobile (in the opposite direction with the side of conveying substrate 1) to side is moved in.
The distance that substrate 1 is moved along conveying direction in retrying processing, has relationship with the coverage 31a of shoot part 31. For example, in the case where the coverage 31a on the conveying direction of shoot part 31 is 35mm, the displacement distance of substrate 1 is set as 35mm.Alternatively, in the case where considering to be overlapped, such as lap is set as 5mm, and the displacement distance of substrate 1 is set as 30mm.
In retrying processing, can also when the relative position on the conveying direction for making shoot part 31 and substrate 1 changes, Both shoot part 31 and substrate 1 is set to move in the conveying direction.
In the above description, for the feelings being used for the position detecting device involved by this technology in check device 102 Condition is illustrated.But the position detecting device involved by this technology can also be in mounting device 103, silk-screen printing device It is used in 101.By position detecting device in mounting device 103, using mounted on can to X-direction with And in the mounting head of Y direction movement, shoot part that alignment mark is for shooting, the edge 2 of substrate 1 is shot.In addition, By position detecting device in silk-screen printing device 101, using can be moved to X-direction and Y direction The shoot part dynamic, alignment mark is for shooting shoots the edge 2 of substrate 1.
It is for shooting as edge by by shoot part 31, the alignment mark of inspecting substrate shoot part etc. for shooting Shoot part 31 uses, and so as to use the existing shoot part shoot part 31 for shooting as edge, therefore, having can The advantages that cost of implementation reduces.But, it is not essential however to the existing shoot part shoot part 31 for shooting as edge is used, Dedicated shoot part 31 for shooting edge 2 can also be particularly set on position detecting device.
In the case of dedicated shoot part 31 that the edge 2 for shooting substrate 1 is particularly arranged, by the shoot part 31 Such as configure can from downside shoot substrate 1 position at.The shoot part 31 can also be can be to conveying direction (X-axis side To) mobile mode, can also be the mode at Edge-stopping desired position that is fixed on (particularly, makes base in retrying processing In the case of the mode of 1 side of plate movement).
In the above description, it illustrates the weight (type) corresponding to each substrate 1 and presets the stopping of substrate 1 The case where target location, Edge-stopping desired position.But stopping target location, Edge-stopping desired position can not also be right It should be preset in the weight (type) of each substrate 1.For example, for stopping target location, Edge-stopping desired position, The shared stopping target location of the weight (type) for each substrate 1, Edge-stopping desired position can initially set up.
Its reason is illustrated.As noted above, in this technique, the actual stop position based on substrate 1, to substrate 1 stopping target location, Edge-stopping desired position are corrected.Therefore, even if assuming initially use for each substrate 1 The all shared Edge-stopping desired position (that is, even if assuming that Edge-stopping desired position is slightly incorrect) of weight (type), As long as by the time, then stop target location, Edge-stopping desired position is corrected corresponding to the weight (type) of each substrate 1 For position appropriate.Therefore, stop target location, Edge-stopping desired position can not also correspond to the weight of each substrate 1 (type) is preset (that is, can also be slightly inaccurate).
This technology can also use structure below.
(1) a kind of position detecting device, has：
Shoot part；
Substrate is conveyed along conveying direction, the substrate just conveyed is made to stop by delivery section；And
Control unit shoots the edge on the conveying direction of the substrate of stopping using the shoot part, base In the marginal position of the substrate in the image taken, the stop position of the substrate is detected.
(2) according to above-mentioned (1) described in position detecting device, wherein
The control unit initially at Edge-stopping desired position, is attempted to shoot the edge using the shoot part, should Edge-stopping desired position is the position envisioned the edge of the substrate and stopped.
(3) according to above-mentioned (2) described in position detecting device, wherein
Also there is mobile mechanism, the mobile mechanism shoot part or the substrate to be made to be moved along conveying direction, so that The shoot part and stopping substrate relative position variation on the conveying direction.
(4) according to above-mentioned (2) or (3) described in position detecting device, wherein
Stop position of the control unit based on the substrate detected carries out school to the Edge-stopping desired position Just.
(5) position detecting device recorded in any one of above-mentioned (2)~(4), wherein
The weight that the control unit corresponds to each substrate utilizes institute at different Edge-stopping desired positions Shoot part is stated to shoot the edge.
(6) according to above-mentioned (3) described in position detecting device, wherein
Whether the control unit is packet to the image taken by the shoot part at the Edge-stopping desired position Judged containing the image including the edge, in the case of the image including described image is not comprising the edge, is held Row is following to retry processing, that is, on the conveying direction for making the shoot part and the substrate using the mobile mechanism Relative position changes, and attempts to shoot the edge again using the shoot part.
(7) according to above-mentioned (6) described in position detecting device, wherein
The control unit retries processing described, based on being clapped by the shoot part at the Edge-stopping desired position The image taken the photograph judges the direction that the shoot part or the substrate should on the conveying direction moved.
(8) according to above-mentioned (7) described in position detecting device, wherein
The control unit retries processing described, based on being clapped by the shoot part at the Edge-stopping desired position The image taken the photograph whether there is the shoot part and judge at position corresponding with the substrate, with judgement result phase It is corresponding, the direction that the shoot part or the substrate should on the conveying direction moved is judged.
(9) position detecting device recorded in any one of above-mentioned (6)~(8), wherein
The control unit is repeated until detecting the edge and described retries processing.
(10) according to above-mentioned (8) described in position detecting device, wherein
It is the edge of the front end side on the conveying direction as the edge of the reference object of the shoot part,
The control unit makes institute in the case where being determined as that the shoot part is present at position corresponding with the substrate It states shoot part to move to the direction for conveying the substrate, alternatively, making the substrate to opposite with the direction of substrate is conveyed It moves in direction.
(11) according to above-mentioned (10) described in position detecting device, wherein
The control unit makes in the case where being determined as that the shoot part is not present at position corresponding with the substrate The shoot part moves in the opposite direction to the side for conveying the substrate, alternatively, making the substrate to the conveying substrate Direction movement.
(12) according to above-mentioned (8) described in position detecting device, wherein
It is the edge of the rear end side on the conveying direction as the edge of the reference object of the shoot part,
The control unit makes institute in the case where being determined as that the shoot part is present at position corresponding with the substrate It states shoot part to move in the opposite direction to the side for conveying the substrate, alternatively, making the substrate to the conveying substrate It moves in direction.
(13) according to above-mentioned (12) described in position detecting device, wherein
The control unit makes in the case where being determined as that the shoot part is not present at position corresponding with the substrate The shoot part is moved to the direction for conveying the substrate, alternatively, making the substrate to opposite with the direction of substrate is conveyed Direction movement.
(14) position detecting device recorded in any one of above-mentioned (6)~(13), wherein
The control unit it is described retry processing failure in the case of, the display signal of output learning picture, the teaching draw Face is used for by manually changing the relative position on the conveying direction of the shoot part and the substrate, to the bat The position of the position and the edge of taking the photograph portion carries out aligned in position.
(15) position detecting device recorded in any one of above-mentioned (1)~(14), wherein
Also there is the storage part stored to the stopping target location of the substrate,
The 1st pattern of the control unit pair and the 2nd pattern switch over, in the 1st pattern, using the shoot part to institute It states edge to be shot, based on the position at the edge, the stop position of the substrate is detected, in the 2nd pattern, Do not execute the edge is shot using the shoot part and the position based on the edge and to the stopping of the substrate The processing that position is detected, but using the stopping target location for the substrate being stored in the storage part as the base The stop position of plate.
(16) according to above-mentioned (15) described in position detecting device, wherein
The control unit is in the 1st pattern, the stopping of each substrate detected to the position based on the edge Whether the deviation of position is judged less than or equal to defined threshold, is less than or equal to the feelings of the defined threshold in the deviation Under condition, by the 1st pattern to the 2nd pattern switching.
(17) according to above-mentioned (15) or (16) described in position detecting device, wherein
Stop position of the control unit based on the substrate detected in the 1st pattern, in the 2nd mould The stopping target location of the substrate being used in formula, being stored in the storage part is corrected.

Claims (15)

1. a kind of position detecting device, has：
Shoot part；
Substrate is conveyed along conveying direction, the substrate just conveyed is made to stop by delivery section；
Mobile mechanism makes the shoot part or the substrate be moved along conveying direction, so that the shoot part and stopping The relative position variation of the substrate only on the conveying direction；And
Control unit shoots the edge on the conveying direction of the substrate of stopping using the shoot part, based on bat The marginal position of the substrate in the image taken the photograph, is detected the stop position of the substrate, and the control unit is initial At Edge-stopping desired position, attempt to shoot the edge using the shoot part, which is anticipation The position that the edge of the substrate is stopped, the control unit at the Edge-stopping desired position by the shoot part to being clapped Whether the image taken the photograph is to be judged comprising the image including the edge, including described image is not comprising the edge Image in the case of, execute and following retry processing, that is, make the shoot part and the substrate using the mobile mechanism Relative position variation on the conveying direction is attempted to shoot the edge again using the shoot part, and the control unit exists It is described to retry in processing, based on the image taken by the shoot part at the Edge-stopping desired position, to described On conveying direction the direction that the shoot part or the substrate move should be judged.
2. position detecting device according to claim 1, wherein
Stop position of the control unit based on the substrate detected is corrected the Edge-stopping desired position.
3. position detecting device according to claim 1, wherein
The weight that the control unit corresponds to each substrate utilizes the bat at different Edge-stopping desired positions Portion is taken the photograph to shoot the edge.
4. position detecting device according to claim 1, wherein
The control unit retries processing described, based on being taken by the shoot part at the Edge-stopping desired position Image, the shoot part whether there is and judge at position corresponding with the substrate, it is corresponding with judgement result, The direction that the shoot part or the substrate should on the conveying direction moved is judged.
5. position detecting device according to claim 1, wherein
The control unit is repeated until detecting the edge and described retries processing.
6. position detecting device according to claim 4, wherein
It is the edge of the front end side on the conveying direction as the edge of the reference object of the shoot part,
The control unit makes the bat in the case where being determined as that the shoot part is present at position corresponding with the substrate Portion is taken the photograph to move to the direction for conveying the substrate, alternatively, make the substrate to convey the side of the substrate in the opposite direction It is mobile.
7. position detecting device according to claim 6, wherein
The control unit makes described in the case where being determined as that the shoot part is not present at position corresponding with the substrate Shoot part moves in the opposite direction to the side for conveying the substrate, alternatively, making the substrate to the side for conveying the substrate To movement.
8. position detecting device according to claim 4, wherein
It is the edge of the rear end side on the conveying direction as the edge of the reference object of the shoot part,
The control unit makes the bat in the case where being determined as that the shoot part is present at position corresponding with the substrate It takes the photograph portion to move in the opposite direction to the side for conveying the substrate, alternatively, making the substrate to the direction for conveying the substrate It is mobile.
9. position detecting device according to claim 8, wherein
The control unit makes described in the case where being determined as that the shoot part is not present at position corresponding with the substrate Shoot part is moved to the direction for conveying the substrate, alternatively, making the substrate to the side opposite with the direction of substrate is conveyed To movement.
10. position detecting device according to claim 1, wherein
The control unit it is described retry processing failure in the case of, the display signal of output learning picture, the teaching picture use In the relative position variation on the conveying direction by making the shoot part and the substrate manually, to the shoot part Position and the edge position carry out aligned in position.
11. position detecting device according to claim 1, wherein
Also there is the storage part stored to the stopping target location of the substrate,
The 1st pattern of the control unit pair and the 2nd pattern switch over, in the 1st pattern, using the shoot part to the side Edge is shot, and based on the position at the edge, is detected to the stop position of the substrate, in the 2nd pattern, is not held Row the edge is shot using the shoot part and the position based on the edge and to the stop position of the substrate The processing being detected, but using the stopping target location for the substrate being stored in the storage part as the substrate Stop position.
12. position detecting device according to claim 11, wherein
The control unit is in the 1st pattern, the stop position of each substrate detected to the position based on the edge Deviation whether judged less than or equal to defined threshold, the deviation be less than or equal to the defined threshold the case where Under, by the 1st pattern to the 2nd pattern switching.
13. position detecting device according to claim 11, wherein
Stop position of the control unit based on the substrate detected in the 1st pattern, in the 2nd pattern The stopping target location of the substrate using, being stored in the storage part is corrected.
14. a kind of method for detecting position, in the method,
Along conveying direction conveying substrate,
The substrate just conveyed is set to stop,
The edge on the conveying direction of the substrate of stopping is shot using shoot part, based in the image taken The marginal position of the substrate is detected the stop position of the substrate,
Initially at Edge-stopping desired position, attempt to shoot the edge using the shoot part, which envisions position It is the position envisioned the edge of the substrate and stopped to set,
Whether it is comprising including the edge to the image taken by the shoot part at the Edge-stopping desired position Image judged, in the case where described image is not comprising image including the edge, execute it is following retries processing, That is, change the relative position on the conveying direction of the shoot part and the substrate using mobile mechanism, it is sharp again It is attempted to shoot the edge with the shoot part,
Processing is retried described, it is based on the image taken by the shoot part at the Edge-stopping desired position, right The direction that the shoot part or the substrate move should on the conveying direction judged.
15. a kind of manufacturing method of substrate, in this manufacturing method,
Along conveying direction conveying substrate,
The substrate just conveyed is set to stop,
The edge on the conveying direction of the substrate of stopping is shot using shoot part, based in the image taken The marginal position of the substrate is detected the stop position of the substrate,
To being present in the substrate of the rest position detected, the processing needed for the manufacture of substrate is executed,
Initially at Edge-stopping desired position, attempt to shoot the edge using the shoot part, which envisions position It is the position envisioned the edge of the substrate and stopped to set,
Whether it is comprising including the edge to the image taken by the shoot part at the Edge-stopping desired position Image judged, in the case where described image is not comprising image including the edge, execute it is following retries processing, That is, change the relative position on the conveying direction of the shoot part and the substrate using mobile mechanism, it is sharp again It is attempted to shoot the edge with the shoot part,
Processing is retried described, it is based on the image taken by the shoot part at the Edge-stopping desired position, right The direction that the shoot part or the substrate move should on the conveying direction judged.
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