TW201503782A - Position detection device, position detection method, program product and method for manufacturing substrate - Google Patents

Abstract

The object of the present invention is to provide a technology capable of properly detecting a stop position of a substrate which is stopped in a conveying portion without a stopper. The position detection device of the present invention comprises a shooting portion, a conveying portion, and a control portion. The conveying portion conveys the substrate along a conveying direction and stops the conveyed substrate. The shooting portion shoots an edge of the conveying direction of the stopped substrate, and the control portion detects the stop position of the substrate according to the edge position of the substrate in the shot image.

Description

Position detecting device, position detecting method, program product, and manufacturing method of substrate Field of invention

The present technology relates to a position detecting device, a position detecting method, a program product, and a method of manufacturing a substrate for detecting a stop position of a substrate.

Background of the invention

Heretofore, mounting systems constructed by arranging various devices for manufacturing substrates in a row have been widely known. A device for mounting a system is known, for example, a screen printing device that prints paste-like solder on a substrate, a printing inspection device that detects a printed state of solder, and a mounting device that mounts an electronic component on a printed substrate. An inspection and inspection device that checks the installation status of electronic components.

In these various devices, first, it is necessary to transport the substrate delivered from the upstream device to stop at the stop target position. Therefore, these devices generally have a transport unit that transports the substrate to stop at the stop target position.

The conveyance unit has, for example, a guide belt that guides one of the substrates from the side, and a conveyor belt that is provided on each of the pair of guides to drive and transport the substrate. In addition, in order to accurately stop the substrate conveyed by the conveyor belt at the stop target position, there is a case where the conveyor is provided with a stopper driven by the actuator (for example, refer to the patent). Document 1).

Advanced technical literature Patent literature

Patent Document 1 Japanese Patent Laid-Open Publication No. 2001-144494 (paragraph [0007], Fig. 12)

Summary of invention

However, when the substrate is stopped by the stopper, the substrate is broken due to the impact when the moving substrate contacts the stopper, and when the electronic component is mounted on the substrate, the position of the electronic component is also deviated.

Therefore, consider stopping the substrate without a stopper. However, at this time, since the position of the substrate is deviated from the stop target position, a technique capable of detecting the stop position of the substrate is required.

In view of the above circumstances, an object of the present technology is to provide a technique for appropriately detecting a stop position of a substrate when the substrate is stopped without a stopper in the transfer portion.

The position detecting device of the present technology includes an imaging unit, a transport unit, and a control unit.

The transport unit transports the substrate in the transport direction and stops the transported substrate.

The control unit captures an edge of the stopped substrate in the transport direction by the imaging unit, depending on the edge of the substrate in the captured image The position of the substrate is detected.

In this position detecting device, the stop position of the substrate can be detected based on the position of the edge of the substrate in the image taken by the imaging unit. Therefore, even when the substrate is stopped without a stopper in the transport portion, the stop position of the substrate can be appropriately detected.

In the above-described position detecting device, the control unit may stop the predicted position at the edge where the edge of the substrate is initially stopped, and the imaging unit may attempt to capture the edge.

Thereby, the edge of the substrate can be appropriately photographed.

The position detecting device may further include a moving mechanism that moves the imaging unit or the substrate in a transport direction to change a relative position of the imaging unit and the stopped substrate in the transport direction.

When the imaging unit is movable, the moving mechanism is a moving mechanism for moving the imaging unit. On the other hand, when the substrate is movable, the transport unit that transports the substrate may have a function as a moving mechanism.

In the above position detecting device, the control unit may correct the edge stop prediction position based on the detected stop position of the substrate.

Thereby, the edge stop prediction position can be corrected to an appropriate position.

In the position detecting device described above, the control unit may stop the predicted position at a different edge depending on the weight of each of the substrates, and capture the edge by the imaging unit.

Thereby, when the weight (type) of the substrate is different, the predicted position can be stopped at the edge, and the edge of the substrate can be appropriately photographed by the imaging unit.

In the position detecting device, the control unit may determine whether an image captured by the imaging unit at the edge stop prediction position is an image including the edge, and when the image does not include the image of the edge, The moving mechanism changes the relative position of the imaging unit and the substrate in the transport direction, and performs a process of retrying the image of the edge by the imaging unit again.

By performing such retry processing, for example, when the edge of the substrate is not detected in the image in which the edge is stopped at the predicted position, the edge of the substrate can be appropriately detected to detect the stop position of the substrate.

In the position detecting device, the control unit may determine that the imaging unit or the substrate is to be moved in accordance with an image captured by the imaging unit at the edge stop prediction position during the retry processing. Direction of direction.

Thereby, in the retry process, it can be determined in which direction the imaging unit or the substrate should be moved. Therefore, the speed until the edge of the substrate is detected can be increased.

In the position detecting device, the control unit may determine whether the imaging unit is present at a position corresponding to the substrate, based on an image captured by the imaging unit at the edge stop prediction position, in the retry processing. According to the determination result, it is determined that the imaging unit or the substrate is moved in the direction of the transport direction.

Thereby, it can be appropriately determined where the imaging unit or the substrate should be followed. Move in one direction.

In the above position detecting device, the control unit may repeat the retry processing until the edge is detected.

In the position detecting device, the edge to be imaged by the imaging unit may be an edge on the end side in the transport direction, and the control unit may determine that the imaging unit exists at a position corresponding to the substrate. The imaging unit moves in a direction in which the substrate is transferred, or moves the substrate in a reverse direction in a direction in which the substrate is transferred.

Thereby, the imaging unit can appropriately photograph the edge of the front end side of the substrate.

In the position detecting device, the control unit may move the imaging unit in a direction opposite to a direction in which the substrate is transported when the imaging unit is not present at a position corresponding to the substrate, or may transfer the substrate to the substrate. The direction of the substrate moves.

Thereby, the imaging unit can appropriately photograph the edge of the front end side of the substrate.

In the above-described position detecting device, the edge to be imaged by the imaging unit may be an edge on the rear end side in the transport direction, and the control unit may cause the photographing unit to detect the image capturing unit at a position corresponding to the substrate. The portion moves in the opposite direction of the direction in which the substrate is transferred, or moves the substrate in a direction in which the substrate is transferred.

Thereby, the imaging unit can appropriately photograph the edge of the end side after the substrate.

In the position detecting device, the control unit may determine When the imaging unit does not exist at a position corresponding to the substrate, the imaging unit is moved in a direction in which the imaging unit is transported, or the substrate is moved in a reverse direction in a direction in which the substrate is transported.

Thereby, the imaging unit can appropriately photograph the edge of the end side after the substrate.

In the position detecting device, the control unit may output a position to manually change the relative position of the imaging unit and the substrate in the transport direction when the retry processing fails, and to use the position of the imaging unit and the edge. The display signal of the position alignment guide screen.

Thereby, the operator can operate the instruction screen to guide the position of the substrate to the position detecting device by aligning the position of the imaging portion with the position of the edge of the substrate.

The position detecting device further includes a memory portion that stores a stop target position of the substrate.

In this case, the control unit may switch between the first mode and the second mode, wherein the imaging unit captures the edge, and detects a stop position of the substrate according to the position of the edge, and the second mode is not executed. The processing unit detects the edge and detects the stop position of the substrate based on the position of the edge, and the stop target position of the substrate stored in the memory unit is used as the stop position of the substrate.

In the second mode, since the photographing of the edge of the substrate and the detection of the stop position of the substrate depending on the position of the edge are omitted, the processing can be speeded up.

In the position detecting device, the control unit may determine the stop of each of the substrates detected based on the position of the edge in the first mode. Whether the deviation of the position is equal to or lower than a predetermined threshold, and when the deviation is equal to or less than the predetermined threshold, the first mode is switched to the second mode.

Thereby, the first mode can be switched to the second mode at an appropriate timing.

In the position detecting device, the control unit may complement the stop target position of the substrate stored in the memory unit in the second mode in accordance with the stop position of the substrate detected in the first mode.

Thereby, the stop target position of the substrate used in the second mode described above can be appropriately compensated.

The position detecting method of the present technology includes a step of transporting the substrate in the transport direction.

The substrate to be transferred is stopped.

The edge of the substrate that has been stopped in the transport direction is imaged by the imaging unit.

The stop position of the substrate is detected based on the position of the edge of the substrate in the captured image.

The program product of the present technology loads a program by a computer, and causes the position detecting device to execute the following program commands: (1) transporting the substrate in the transport direction; (2) stopping the transported substrate; (3) shooting The portion of the substrate that has been stopped is photographed at the edge of the transport direction; and (4) the stop position of the substrate is detected based on the position of the edge of the substrate in the captured image.

The method for manufacturing a substrate of the present technology includes a step of transporting the substrate in the transport direction.

The substrate to be transferred is stopped.

The substrate is stopped at the edge of the transport direction by the imaging unit.

The stop position of the substrate is detected based on the position of the edge of the substrate in the captured image.

The processing required to manufacture the substrate is performed on the substrate present at the detected stop position.

The processing required for the production of the substrate is, for example, a process of printing solder on a substrate, a process of inspecting a substrate on which solder is printed, a process of mounting an electronic component on a substrate, and a process of inspecting a substrate on which an electronic component is mounted.

As described above, according to the present technology, it is possible to provide a technique for appropriately detecting the stop position of the substrate when the substrate is stopped without a stopper in the transport unit.

1‧‧‧Substrate

2‧‧‧ edge

2a‧‧‧Edge of the front side

2b‧‧‧Edge on the back side

3‧‧‧ Correction mark

5‧‧‧Control Department

6‧‧‧Memory Department

7‧‧‧Display Department

8‧‧‧ Input Department

9‧‧‧Communication Department

10‧‧‧Transportation Department

11‧‧‧ Guides

12‧‧‧ feet

13‧‧‧Conveyor belt

15‧‧‧Alarm screen

15a‧‧‧"Guide" button

15b‧‧‧"Close" button

16‧‧‧Guidance screen

16a‧‧‧Image display area

16b‧‧‧ alignment line

16c‧‧‧"Zoom in" button

16d‧‧‧"Zoom out" button

16e‧‧‧"Equivalent" button

16f‧‧‧"Full Screen" button

16g‧‧‧4 direction button

16h‧‧‧"Left Direction" button

16i‧‧‧"Right Direction" button

16j‧‧‧"Up" button

16k‧‧‧"down direction" button

16l‧‧‧"High Speed" button

16m‧‧‧"Low Speed" button

16n‧‧‧"OK" button

16o‧‧‧"Cancel" button

20‧‧‧Support

21‧‧‧Support plate

22‧‧‧Support pins

23‧‧‧ board lifting mechanism

30‧‧‧ Shooting unit

31‧‧‧Photography Department

31a‧‧‧ Shooting range

32‧‧‧Lighting Department

32a‧‧‧Dome components

32b‧‧‧Lighting

40‧‧‧Photographing unit moving mechanism

51‧‧‧ Moving into the sensor

52‧‧‧Deceleration sensor

53‧‧‧Stop sensor

100‧‧‧Installation system

101‧‧‧ Screen printing device

102‧‧‧Inspection device

102a‧‧‧Printing inspection device

102b‧‧‧Installation inspection device

102c‧‧‧ final inspection device

103‧‧‧Installation device

104‧‧‧Reflow furnace

105‧‧‧Washing and drying equipment

106‧‧‧Control device

d‧‧‧Moving distance

ST101-ST141‧‧‧Steps

ST201-ST207‧‧‧Steps

ST301-ST317‧‧‧Steps

1 is a view showing a mounting system for manufacturing a substrate.

Fig. 2 is a perspective view showing an inspection apparatus to which a position detecting device of the present technology is applied.

Fig. 3 is a view of the inspection device viewed from the transport direction of the substrate.

4 is a view showing the positions of a deceleration sensor and a stop sensor which the inspection apparatus has.

Figure 5 is a block diagram showing the inspection apparatus.

Fig. 6 is a flow chart showing the processing of the inspection apparatus.

Fig. 7 is a flow chart showing the processing of the inspection apparatus.

Fig. 8 is a flow chart showing the processing of the inspection apparatus.

Fig. 9 is a flow chart showing the processing of the inspection apparatus.

FIG. 10 is a view showing a relationship between an imaging range of an imaging unit disposed at an edge stop prediction position and a stop position of a substrate. FIG.

11 is a view showing a positional relationship between an imaging range of an imaging unit and an edge of a front end side of a substrate when the imaging unit is moved from the edge stop prediction position.

FIG. 12 is a view showing an example of an alarm screen displayed on the display unit.

FIG. 13 is a view showing an example of a guidance screen displayed on the display unit.

Fig. 14 is a flow chart showing the processing of the inspection apparatus of another embodiment.

Fig. 15 is a flow chart showing the processing in the second mode.

Fig. 16 is a flow chart showing the processing in the second mode.

Form for implementing the invention

Hereinafter, embodiments of the present technology will be described with reference to the drawings.

First embodiment

FIG. 1 is a diagram showing a mounting system 100 for manufacturing a substrate 1.

As shown in FIG. 1, the mounting system 100 includes a screen printing apparatus 101, a printing inspection apparatus 102a, a mounting apparatus 103, an installation inspection apparatus 102b, a reflow furnace 104, a washing and drying apparatus 105, and a final inspection from the upstream side. Device 102c. Further, the mounting system 100 includes a control device 106 that collectively controls the various devices. The various systems of the mounting system 100 are interconnected by communication cables to be communicable.

The control device 106 is, for example, a PC (Personal computer: personal The computer has a control unit 5, an input unit 8, a display unit 7, and the like.

The screen printing apparatus 101 has a net in which an opening is formed at a position corresponding to a printed pattern, and a squeegee that supplies the cream solder to the supply portion on the net and slides on the net. Further, the screen printing apparatus 101 has a transfer unit that transports the substrate 1 to be placed at the stop target position, and captures an image pickup unit that is provided on the substrate 1 and the alignment indicator 3 of the net, and controls the integrated control of the screen printing apparatus 101. unit.

The screen printing apparatus 101 slides the squeegee on the net while printing the solder on the substrate 1 located on the lower side of the net. Then, the screen printing apparatus 101 delivers the substrate 1 on which the solder is printed to the print inspection apparatus 102a.

The printing inspection apparatus 102a has a conveyance unit that conveys the substrate 1 on which the solder is printed and placed at the stop target position, and an image pickup unit that photographs the substrate 1 on which the solder is printed, and analyzes the substrate 1 in two or three dimensions in accordance with the captured image. A control unit that checks the printing state of the solder. The print inspection device 102a delivers the substrate 1 determined to be in a good printing state to the mounting device 103, and invalidates the substrate 1 determined to be in a bad printing state (or transfers it to the re-inspection).

The mounting device 103 has a transport unit that transports the substrate 1 on which the solder is printed and placed at the stop target position, and an imaging unit 31 (generally provided in the mounting head) that images the adjustment indicator 3 provided on the substrate 1. Further, the mounting device 103 includes a supply unit that supplies various electronic components such as a resistor, a capacitor, and an inductor, a mounting head that sucks and attaches the electronic components supplied from the supply unit to the substrate 1, and a control unit that integrally controls the mounting device 103. . After the mounting device 103 mounts the electronic component on the substrate 1 with the mounting head, the substrate 1 on which the electronic component is mounted is delivered to the mounting inspection device 102b.

The mounting inspection device 102b has a transfer unit that transports the substrate 1 on which the electronic component is mounted and placed at the stop target position, and an image pickup unit that photographs the substrate 1 on which the electronic component is mounted. Further, the mounting inspection device 102b has a control unit that analyzes the substrate 1 in two or three dimensions in accordance with the captured image to check the mounting state of the electronic component. The mounting inspection device 102b delivers the substrate 1 determined to be in a good installation state to the reflow furnace 104, and discards (or transfers to the re-inspection) the substrate 1 determined to be in a poorly mounted state.

In the reflow furnace 104, the substrate 1 on which the electronic component is mounted is subjected to reflow processing to melt the solder, and the electronic component and the wiring provided on the substrate 1 are connected by solder. Then, the reflow furnace 104 delivers the substrate 1 after the reflow process to the washing and drying device 105.

The washing and drying device 105 washes excess components such as flux adhering to the surface of the substrate 1 after the reflow process, and dries the cleaned substrate 1. Further, the washing and drying device 105 delivers the substrate 1 to the final inspection device 102c.

The final inspection device 102c has a substrate 1 that transports the reflow-welded process, and is disposed at a transfer destination of the stop target position, an imaging unit of the imaging substrate 1, and two-dimensional or three-dimensional analysis of the substrate 1 in accordance with the captured image to form the substrate 1. The control department for the final inspection. The final inspection device 102c transfers the substrate 1 determined to be good in the final inspection to the storage device (not shown), and invalidates the substrate 1 that was determined to be defective in the final inspection (or transfers it to the re-inspection).

The position detecting device of the substrate 1 of the present technology can be applied to, for example, the screen printing device 101, the printing inspection device 102a, the mounting device 103, the mounting inspection device 102b, the final inspection device 102c, and the like. Typical as long as the position is checked The measuring device is a device that can stop the substrate 1 at the stop target position and perform the processing required for manufacturing the substrate 1 on the substrate 1. Any device can be applied.

Here, the processing required for manufacturing the substrate 1 is, for example, a process of printing solder on the substrate 1, a process of inspecting the substrate 1 on which the solder is printed, a process of mounting the electronic component on the substrate 1, and inspection of the mounting of the electronic component. Processing of the substrate 1 and the like.

Thereafter, for convenience, the case where the position detecting device of the present invention is applied to the inspection device 102 such as the printing inspection device 102a, the installation inspection device 102b, and the final inspection device 102c will be described as an example.

2 is a perspective view showing an inspection apparatus 102 to which a position detecting device of the present technology is applied. FIG. 3 is a view of the inspection device 102 viewed from the transport direction of the substrate 1. 4 is a view showing the positions of the deceleration sensor 52 and the stop sensor 53 which the inspection device 102 has. FIG. 5 is a block diagram showing the inspection device 102.

As shown in the figures, the inspection apparatus 102 has the transport unit 10 that transports the substrate 1 in the transport direction (X-axis direction) and stops the transported substrate 1 (without the stop) at the stop target position. Further, the inspection device 102 has a support portion 20 that supports the substrate 1 stopped at the stop target position from below. Further, the inspection apparatus 102 includes an imaging unit 30 having an illumination unit 32 that emits light to the substrate 1 and an imaging unit 31 that images the substrate 1 that has irradiated light, and an imaging unit moving mechanism 40 that moves the imaging unit 30 in the XY direction.

In addition, the inspection device 102 has a load-sensing sensor 51 (see FIG. 5) for detecting the loading of the substrate 1 delivered from the device disposed on the upstream side of the inspection device 102, and detecting the reduction of the passage of the substrate 1 conveyed by the transport unit 10. Sensor 52 And stop the sensor 53. Further, the inspection device 102 includes a control unit 5, a storage unit 6, a display unit 7, an input unit 8, and a communication unit 9.

The position detecting device of the present technology includes at least an imaging unit 31, a transport unit 10, and a control unit 5.

The substrate 1 to be inspected by the inspection device 102 has, for example, a rectangular shape in plan view, and has an edge 2a on the end side and an edge 2b on the rear end side before the conveyance direction (X-axis direction) of the substrate 1.

Further, a plurality of alignment marks 3 are provided on the substrate 1 (see FIG. 2). In the example shown in FIG. 2, an example of a case where the adjustment indicator 3 is provided in the vicinity of the corner of the diagonal line of the substrate 1 is shown. Further, the present invention is not limited to the case where the correction mark 3 dedicated to the substrate 1 is provided on the substrate 1, and a predetermined pattern (wiring pattern or the like) on the substrate 1 may be used as the alignment mark 3.

The conveyance unit 10 has two guides 11 that clamp the substrate 1 from both sides and guide the substrate 1 in the conveyance direction. Each of the guides 11 is a plate-like member having a shape that is long in the transport direction of the substrate 1. A plurality of leg portions 12 for supporting the guide member 11 from below are provided on the lower side of each of the guide members 11. Each of the guide members 11 is attached to a base (not shown) of the inspection device 102 by the leg portions 12.

A conveyor belt 13 that can rotate forward and backward is provided on each side of the inner side of each of the guide members 11. The transport unit 10 can transport the substrate 1 to the stop target position by the driving of the transport belt 13, or carry out the inspection of the substrate 1 after the inspection. The transport unit 10 is not provided with a mechanical stopper, and the substrate 1 is stopped at the stop target position (or its vicinity) by the stop of the driving of the conveyor belt 13.

In the example shown in FIGS. 2 and 4, the stop target position of the substrate 1 is a position near the center of the longitudinal direction of the guide 11. In addition, in Figure 2 and Figure 4 In the description, the substrate 1 is taken in from the right side and carried out to the left side. That is, in FIGS. 2 and 4, the direction toward the substrate 1 is conveyed to the left.

Each of the guides 11 is formed such that the upper end portion is bent inward, and when the upper end portion of the guide member 11 moves the substrate 1 upward by the support portion 20, the substrate 1 can be supported from above. One of the two guide members 11 is movable in a direction (Y-axis direction) perpendicular to the conveying direction of the substrate 1. Thereby, the substrate 1 disposed at the stop target position can be clamped and fixed from both sides by the two guides 11. Thus, the substrate 1 can be inspected while the substrate 1 is fixed.

In the example shown in the figure, the number of the transport units 10 is one, and the number of the transport units 10 may be two or more. At this time, each of the conveying units 10 is arranged in the Y-axis direction.

The carry-in sensor 51 is provided in a carry-in conveyor (not shown) disposed on the upstream side of the transport unit 10, and detects the carry-in of the substrate 1 delivered from the upstream side of the inspection apparatus 102. The carry-in sensor 51 is constituted by, for example, a reflective photo sensor.

Similarly to the carry-in sensor 51, the deceleration sensor 52 and the stop sensor 53 are configured by, for example, a reflection type photo sensor. The deceleration sensor 52 and the stop sensor 53 are disposed at a height corresponding to the height through which the substrate 1 passes to one or both of the guides 11 (refer to FIG. 4). The stop sensor 53 is disposed to detect the position of the edge 2a on the front end side of the substrate 1 when the substrate 1 reaches a position slightly on the upstream side of the stop target position. The deceleration sensor 52 is disposed, for example, at a position on the upstream side of the stop sensor 53 by a distance of about 100 mm.

The deceleration sensor 52 and the stop sensor 53 are switched on the edge 2a of the front end side of the substrate 1 by the moment when the positions of the sensors are disposed. "" and "close". Thus, the sensors 52, 53 can detect that the edge 2 of the front end of the substrate 1 has passed the position corresponding to the sensors 52, 53.

When the deceleration sensor 52 detects the passage of the edge 2a on the front end side of the substrate 1, the driving of the conveyor belt 13 is controlled to decelerate the conveyance speed of the substrate 1. Further, when the stop sensor 53 detects the passage of the edge 2a on the front end side of the substrate 1, the driving of the conveyor belt 13 is controlled to stop the rotation of the conveyor belt 13.

Further, the stop sensor 53 detects the passage of the edge 2a on the front end side of the substrate 1, and even if the rotation of the conveyor belt 13 is stopped, the substrate 1 does not immediately stop. That is, the substrate 1 is slightly advanced in the traveling direction of the substrate 1, and stops at the stop target position (or its vicinity). Since the mechanical stopper is not provided in the present technology, the substrate 1 does not necessarily stop at the stop target position correctly, and the position at which the substrate 1 is stopped may deviate from the stop target position.

The moving distance d of the substrate 1 in the traveling direction (that is, the distance d between the stop sensor 53 and the edge 2a on the front end side of the substrate 1) is related to the weight (type) of the substrate 1. Typically, the heavier the weight of the substrate 1, the greater the distance d of the substrate 1 is. Further, since the distance d differs depending on the weight (type) of the substrate 1, the stop target position of the stop substrate 1 differs depending on the weight (type) of each of the substrates 1.

The support portion 20 has a support plate 21, a plurality of support pins 22 that are erected on the support plate 21, and a plate lift structure 23 that lifts and lowers the support plate 21.

After the substrate 1 is stopped, the support portion 20 is moved upward by the plate elevating mechanism 23. As the support portion 20 moves upward, the substrate 1 is pushed up by the support pin 22 of the support portion 20, whereby the substrate 1 is sandwiched between the upper end portion of the guide member 11 and the support portion 20, and the substrate can be 1 Position in the up and down direction.

The imaging unit 30 includes an imaging unit 31 and an illumination unit 32. The illumination unit 32 of the imaging unit 30 has a dome-shaped dome member 32a having an opening formed at its top, and a plurality of illuminations 32b disposed inside the dome member 32a. The illumination 32b is configured by, for example, an LED (Light Emitting Diode).

The imaging unit 31 is fixed to the opening of the dome member 32a on the upper side of the dome member 32a of the illumination unit 32, and is disposed such that its optical axis is perpendicular to the inspection surface of the substrate 1. The imaging unit 31 includes an imaging device such as a CCD sensor (Charge Coupled Device) or a CMOS sensor (CMOS: Complementary Metal Oxide Semiconductor), and an optical system such as an imaging lens.

The imaging unit 31 captures the edge 2 of the substrate 1 (in the present embodiment, the edge 2a on the front end side) stopped at the stop target position (or in the vicinity thereof) under the control of the control unit 5, or the correction on the photographing substrate 1. Mark 3, or take the inspection surface of the substrate 1.

The imaging range 31a of the imaging unit 31 is, for example, about 35 mm × 35 mm. When the imaging unit 31 captures the inspection surface of the substrate 1 , the imaging unit 31 moves the imaging unit moving mechanism 40 in the X-axis direction and the Y-axis direction, and divides the area on the substrate 1 to be inspected into several shots.

In the example shown in the figure, the number of the imaging units 30 is one, and the number of the imaging units 30 may be two or more.

The imaging unit moving mechanism 40 moves the imaging unit 30 in the transport direction (X-axis direction) of the substrate 1 and the direction (Y-axis direction) perpendicular to the transport direction of the substrate 1 . This imaging unit moving mechanism 40 has a function as a moving mechanism that moves the imaging unit 31 in the transport direction so that the imaging unit 31 and the imaging unit 31 The relative position of the substrate 1 in the transport direction (X-axis direction) changes. The imaging unit moving mechanism 40 is configured by, for example, a ball screw drive mechanism or a rack and pinion drive mechanism.

The control unit 5 is configured by, for example, a CPU (Central Processing Unit) or the like, and controls each unit of the inspection apparatus 102 in an integrated manner. The control unit 5 controls, for example, the imaging unit 31 to photograph the edge 2 of the substrate 1 in the transport direction, or to detect the stop position of the substrate 1 based on the position of the edge 2 of the substrate 1 in the captured image. The processing of the control unit 5 will be described in detail later.

The memory unit 6 has a non-electrical memory that uses various types of data or programs necessary for processing the electric memory according to the work area of the control unit 5 and the fixed memory control unit 5. The above various programs can also be read from a portable recording medium such as a compact disc or a semiconductor memory.

The memory of the non-electrical memory has a correlation between the type of the substrate 1, the weight of the substrate 1, the stop target position of the substrate 1, and the edge stop prediction position. Here, the edge stop prediction position refers to a position predicted to stop the edge 2 of the substrate 1 when the substrate 1 is assumed to stop at the stop target position. At the edge of which the predicted position is stopped, a process of attempting the photographing of the edge 2 of the substrate 1 can be performed.

As described above, since the moving distance d of the substrate 1 in the traveling direction after the driving of the conveyor belt 13 is stopped differs depending on the weight (type) of each of the substrates 1, the stop target position of the substrate 1 and the edge stop prediction position are also The weight (type) of the substrate 1 is different. Therefore, the type of the substrate 1, the weight of the substrate 1, the stop target position of the substrate 1, and the edge stop prediction position are correlated.

The display unit 7 is configured by, for example, a liquid crystal display, an EL (Electro Luminescence) display, or the like. The input unit 8 is configured by a keyboard, a mouse, a touch sensor, or the like, and inputs various instructions from an operator. The communication unit 9 transmits information to or receives information from other devices disposed in the installation system 100.

Action description

Next, the operation of the inspection device 102 will be described. 6 to 9 are flowcharts showing the processing of the inspection device 102.

Referring to Fig. 6, the control unit 5 drives the carry-in conveyor to start the operation of loading the substrate 1 delivered from the device disposed on the upstream side of the inspection device 102 into the inspection device 102 (step 101). Next, the control unit 5 determines whether or not the loading of the substrate 1 is detected by the loading sensor 51 provided in the loading conveyor (step 102).

When the edge 2a on the front end side of the substrate 1 passes in front of the sensor 51, the detection signal is output from the carry-in sensor 51. When the control unit 5 receives the detection signal from the carry-in sensor 51 (YES in step 102), the driving of the transport belt 13 of the transport unit 10 is started (step 103).

Next, the control unit 5 controls the imaging unit moving mechanism 40 to move the imaging unit 30 to the edge stop prediction position (step 104). Further, the edge stop prediction position is different depending on the weight (type) of each of the substrates 1 as described above. Therefore, the control unit 5 reads the edge stop prediction position corresponding to the type of the substrate 1 currently under inspection from the table, and moves the imaging unit 30 to the edge stop prediction position.

Further, the edge 2 as a subject is the front end side edge 2a and In the present embodiment, the edge 2 as the object to be imaged is described as the edge 2a on the front end side in the transport direction.

Next, the control unit 5 determines whether or not the substrate 1 is detected by the deceleration sensor 52 (step 105). When the edge 2a on the front end side of the substrate 1 conveyed by the conveyor belt 13 reaches the front of the deceleration sensor 52, a detection signal is output from the deceleration sensor 52. When the control unit 5 receives the detection signal from the deceleration sensor 52 (YES in step 105), the conveyor belt 13 is decelerated (step 106).

Next, the control unit 5 determines whether or not the substrate 1 is detected by the stop sensor 53 (step 107). When the edge 2a on the front end side of the substrate 1 conveyed by the conveyance belt 13 reaches the front of the stop sensor 53, the detection signal is output from the stop sensor 53. When the control unit 5 receives the detection signal from the stop sensor 53 (YES in step 107), the driving of the conveyor belt 13 is stopped (step 108).

Then, the control unit 5 moves the support portion 20 upward, and after the substrate 1 is positioned in the vertical direction, the guide member 11 is moved in the Y-axis direction, and the substrate 1 is sandwiched by the pair of guide members 11 from both sides. , the substrate 1 is fixed (step 109).

Thereafter, the control unit 5 lights up the illumination 32b of the imaging unit 30 that has moved to the edge stop prediction position, and the imaging unit 31 attempts imaging of the edge 2a on the front end side of the substrate 1 (step 110).

Here, in step 108, when the driving of the conveyor belt 13 is stopped, the substrate 1 is not immediately stopped, but is stopped at the stop target position after slightly advancing in the traveling direction. Further, in the present technique, since the mechanical stopper is not provided, the substrate 1 does not necessarily stop at the stop target position correctly, and the position of the stop substrate 1 may be deviated from the stop target position.

Basically, the stop position of the substrate 1 at the stop target position As long as the amount of deviation is the same type of substrate 1 (substrate 1 having the same weight), it is predicted that the deviation is not too large. However, for example, when a foreign matter adheres to the back surface of the substrate 1, foreign matter, when the conveyor belt 13 is stopped, the substrate 1 slides on the conveyor belt 13, and the actual stop position of the substrate 1 largely deviates in the traveling direction. situation.

Even if the position of the stop substrate 1 is deviated from the stop target position, if the amount of deviation falls within the imaging range 31a of the imaging unit 31, the imaging unit 31 located at the edge stop prediction position can capture the edge 2a on the front end side of the substrate 1. In the present embodiment, since the imaging range 31a is 35 mm × 35 mm, the imaging unit 31 located at the edge stop prediction position can capture the edge of the front end side of the substrate 1 when the amount of deviation of the substrate 1 from the stop target position is within ±17.5 mm. 2a.

On the other hand, when the amount of deviation of the substrate 1 from the stop target position exceeds the imaging range 31a (±17.5 mm) of the imaging unit 31, the edge 2a of the front end side of the substrate 1 cannot be imaged by the imaging unit 31 located at the edge stop prediction position. .

FIG. 10 is a view showing the relationship between the imaging range 31a of the imaging unit 31 disposed at the edge stop prediction position and the stop position of the substrate 1. The figure on the upper side of FIG. 10 shows an example in which the edge 2a on the front end side of the substrate 1 falls within the imaging range 31a of the imaging unit 31. The figure in the center of FIG. 10 shows an example in which the substrate 1 is stopped beyond the stop target position and the edge 2a on the front end side of the substrate 1 does not fall within the imaging range 31a of the imaging unit 31. The diagram on the lower side of FIG. 10 shows an example in which the substrate 1 is stopped in front of the stop target position and the edge 2a on the front end side of the substrate 1 does not fall within the imaging range 31a of the imaging unit 31.

In this embodiment, even if the prediction cannot be stopped at the edge When the imaging unit 31 at the position photographs the edge 2a on the front end side of the substrate 1, the processing of appropriately photographing the edge 2 of the substrate 1 (retry processing to be described later) can be performed.

Referring to Fig. 7, when imaging of the edge 2a on the front end side of the substrate 1 is attempted by the imaging unit 31 disposed at the edge stop prediction position, the control unit 5 then executes step 111. In step 111, the control unit 5 performs image processing on the image captured by the imaging unit 31 at the edge stop prediction position, and determines whether the image is an image including the edge 2a on the front end side of the substrate 1.

When the captured image is an image including the edge 2a on the front end side, since the left side of the image is dark and the right side of the substrate 1 is bright, the control unit 5 can determine whether the image includes the front end side by image processing. The image of the edge 2a.

For example, as shown in the upper side of FIG. 10, when the edge 2a of the front end side of the substrate 1 falls within the imaging range 31a of the imaging section 31 disposed at the edge stop prediction position, the image includes the front end of the substrate 1 The edge 2a of the side. At this time, since the edge 2 is detected in the image (YES in step 111), the control unit 5 proceeds to step 119.

On the other hand, for example, as shown in the center view and the lower side of FIG. 10, the edge 2a on the front end side of the substrate 1 does not fall within the photographing range 31a of the photographing portion 31 disposed at the edge stop prediction position. At the time, the edge 2a on the front end side of the substrate 1 is not included in the image. At this time, since the edge 2 is not detected in the image (NO in step 111), the control unit 5 proceeds to step 112.

At step 112, the control section 5 performs a process of +1 the count value regarding the number of times the retry process is performed. Next, the control unit 5 determines whether or not the number of times of the retry processing is equal to or less than the upper limit value N (step 113).

In the retry processing, the imaging unit moving mechanism 40 moves the imaging unit 30 in the transport direction (X-axis direction) (the relative position of the imaging unit 31 and the substrate 1 in the transport direction is changed), and the imaging unit 31 tries the edge 2 again. The processing of the shooting. The upper limit N of the number of retry processing times is, for example, two times, but is not limited thereto. The value of N can also be changed by, for example, the input unit 8 of the inspection device 102 or the input unit of the control device 106.

When the number of times of the retry processing is equal to or less than the upper limit value N (YES in step 113), the control unit 5 proceeds to the next step 114. In step 114, the control unit 5 determines whether or not the imaging unit 31 exists based on the image captured at the edge stop prediction position (retrying the first time) or the image captured in step 118 (the second time after the retry). On the substrate 1 (step 114).

In the case of the example shown in the center of FIG. 10, the image captured by the imaging unit 31 at the edge stop prediction position is formed as an image of a portion of the substrate 1 that is reflected in the entire image. At this time, since the substrate 1 is illuminated by the illumination from the illumination 32b, the image captured at the edge stop prediction position is formed into an all-bright image. For the entire bright image, the control unit 5 determines that the imaging unit 31 is present on the substrate 1 (YES in step 114).

On the other hand, in the case of the example shown in the lower side of FIG. 10, the image captured by the imaging unit 31 at the edge stop prediction position is formed as a member that reflects the lower side of the substrate 1 (for example, a pair of guides are mounted). Image of 11 base, etc.). At this time, since the light of the illumination 32b is less likely to reach the member on the lower side of the substrate 1, the image taken at the edge stop prediction position is formed into an entire dark image. For the entire dark image, the control unit 5 determines that the imaging unit 31 is not present on the substrate 1 (NO in step 114).

When it is determined in step 114 that the imaging unit 31 is present on the substrate 1, the control unit 5 moves the imaging unit 30 to the carry-out side of the substrate 1 (the direction in which the substrate 1 is transported) (step 115). On the other hand, when it is determined in step 114 that the imaging unit 31 does not exist on the substrate 1, the control unit 5 moves the imaging unit 30 to the loading side of the substrate 1 (the reverse direction of the direction in which the substrate 1 is transported).

In other words, in step 114, the control unit 5 determines whether or not the imaging unit 31 is present on the substrate 1 based on the captured image, and determines the direction in which the imaging unit 30 should be moved in the transport direction in accordance with the determination result.

Further, in the first retry processing, in step 114, the direction in which the imaging unit 30 should be moved is determined based on the image captured at the edge stop prediction position. After the second time of the retry process, the direction in which the imaging unit 30 should be moved is determined based on the image taken at the position where the predicted position is stopped from the edge. Here, after the second time of the retry process, the direction of the moving imaging unit 30 is the same as the direction of the previous moving imaging unit 30. Therefore, after the second time of the retry process, the step 114 of determining which direction the imaging unit 30 is to be moved may be omitted.

FIG. 11 is a view showing a positional relationship between the imaging range 31a of the imaging unit 31 and the edge 2a on the front end side of the substrate 1 when the imaging unit 30 moves from the edge stop prediction position. The figure in the center of FIG. 11 shows a state in which it is determined that the imaging unit 31 is present on the substrate 1 and the imaging unit 30 is moved toward the carry-out side. The diagram on the lower side of FIG. 11 shows a state in which it is determined that the imaging unit 31 does not exist on the substrate 1 and the imaging unit 30 moves toward the loading side.

The distance that moves the imaging unit 30 in the transport direction is the distance corresponding to the imaging range 31a of the imaging unit 31. For example, the imaging unit 31 is moving When the shooting range 31a of the feed direction is 35 mm, the moving distance of the photographing unit 30 is 35 mm. Alternatively, the moving distance of the photographing unit 30 may be set to the photographing range 31a before the overlap movement and the photographing range 31a after the movement. At this time, the amount of overlap is 5 mm, and the moving distance of the photographing unit 30 is 30 mm.

Further, when the imaging unit 30 is moved, when the movable range of the imaging unit 30 is exceeded, the control unit 5 moves the imaging unit 30 to a position where the imaging unit 30 can move the most.

After the imaging unit 30 is moved to the carry-out side in step 115, or after the imaging unit 30 is moved to the carry-in side in step 116, the control unit 5 attempts the edge 2a of the front end side of the substrate 1 with the imaging unit 31 located at the moving position. Shoot (step 117). Next, the control unit 5 determines whether or not the captured image is an image including the edge 2a on the distal end side (step 118).

When the image captured by the moving imaging unit 31 is an image including the edge 2a on the distal end side (YES in step 118), the control unit 5 proceeds to step 119. On the other hand, when the image captured by the moving imaging unit 31 does not include the image of the edge 2a on the front end side (NO in step 118), the control unit 5 returns to step 112 to execute the processing after step 112. In other words, the control unit 5 moves the imaging unit 30 in the transport direction, and repeats the retry process of attempting the imaging of the edge 2a on the distal end side by the imaging unit 31 until the edge 2a is detected (N is the upper limit).

When the edge 2a on the distal end side is detected in step 111 or step 118, the control unit 5 detects the stop position of the substrate 1 in the transport direction based on the position of the current imaging unit 30 and the position of the edge 2a in the image (step 119).

Next, the control unit 5 is based on the detected actual substrate 1 stop. At the stop position, the correction edge stops the predicted position, and the corrected edge stop prediction position is memorized in the memory unit 6 (table) (step 120). Further, the control unit 5 corrects the stop target position of the substrate 1 as the edge stops the correction of the predicted position, and stores the corrected stop target position in the memory unit 6 (table).

For example, assume a case where the front end side edge 2a (upper side of FIG. 11) is detected in the image taken at the edge stop predicted position, but the actual stop position of the substrate 1 is deviated from the stop target position. To the right or left. At this time, the control unit 5 performs a process of shifting the edge stop prediction position to the right or left side in accordance with the amount of deviation. Similarly, the control unit 5 performs a process of shifting the stop target position of the substrate 1 to the right or left side.

Further, for example, a case is assumed in which the edge 2a of the leading end side is not detected in the image taken at the edge stop predicted position, and the image taken by the shooting unit 30 is moved to include the edge 2 (Fig. 11). Central and lower). At this time, the control unit 5 performs a process of shifting the edge stop prediction position to the right or left side in accordance with the amount by which the substrate 1 is displaced from the stop target position. Similarly, the control unit 5 performs a process of shifting the stop target position of the substrate 1 to the right or left side.

Alternatively, when the amount of the stop position of the substrate 1 from the stop target position is excessively large and exceeds the threshold value, the control unit 5 may reflect the deviation amount in the edge stop prediction position and the correction of the stop target position of the substrate 1.

Then, the control unit 5 calculates the imaging position of the alignment indicator 3 provided on the substrate 1 based on the detected stop position of the substrate 1 (step 121), and moves the imaging unit 30 to the imaging position of the alignment indicator 3 (step 122). Next, the control unit 5 illuminates the correction mark 3 with the illumination 32b of the imaging unit 30 to The imaging unit 31 captures the alignment indicator 3 (step 123). The control unit 5 typically performs a process of capturing two or more different alignment indicators 3 at two or more different positions.

Thereafter, the control unit 5 recognizes the position of the substrate 1, the inclination of the substrate 1 about the Z axis, the size of the substrate 1, and the like based on the images of the two or more alignment marks 3 captured (step 124). Next, the control unit 5 checks the inspection surface of the substrate 1 (step 125). In the inspection of the substrate 1, the control unit 5 moves the imaging unit 30 in the X-axis direction and the Y-axis direction by the imaging unit moving mechanism 40, and divides the inspection area on the substrate 1 to be inspected into a plurality of times. Then, the control unit 5 examines the substrate 1 by analyzing the substrate 1 in two or three dimensions in accordance with the captured image.

When the inspection of the substrate 1 is completed, the control unit 5 moves one of the guides 11 of the transport unit 10 in the Y-axis direction to release the sandwiching state of the substrate 1, and moves the support portion 20 downward (step 126). Then, the control unit 5 drives the conveyance belt 13 of the conveyance unit 10 to carry out the substrate 1 from the inspection apparatus 102 (step 127).

Next, the processing when the number of retry processing exceeds the upper limit value N and the retry processing fails is explained. In step 113 of FIG. 7, when the number of retry processing exceeds the upper limit value (NO in step 113), the control unit 5 proceeds to step 128 of FIG. In step 128, the control unit 5 outputs a display signal of the alarm screen 15 to cause the display unit 7 to display the alarm screen 15.

FIG. 12 is a view showing an example of the alarm screen 15. As shown in FIG. 12, on the alarm screen 15, on the left side, the time when the error occurred and the path where the error occurred (when the transfer unit 10 is two or more), the alarm code, and the alarm are displayed. detail. Further, on the alarm screen 15, on the right side, a candidate for a cause that can be assumed to be an error and a countermeasure for solving the error are displayed.

In the example shown in FIG. 12, it is known that at 12:24:56 on October 24, 2013, an error due to the failure of the edge detection is caused in the channel (the transport unit 10) on the front side. Further, from the assumption of the cause, there is a possibility that the stop position of the substrate 1 exceeds the imaging range 31a of the imaging unit 31, or there is a possibility that image processing fails during edge detection. Further, it can be understood that the method for solving this error is to return the substrate 1 to the loading side, then to carry the substrate 1 in, or to confirm the stop position of the substrate 1, or to adjust the parameters of the inspection method (for example, the edge stop prediction position, etc.). .

In Fig. 12, the "Guide" button 15a and the "Close" button 15b are displayed at the lower side of the alarm screen 15. The "Guide" button 15a is a button for shifting the display to the guidance screen 16 (see FIG. 13), and the "Close" button 15b is a button for closing the alarm screen 15.

Referring to Fig. 9, after the alarm screen 15 is displayed on the screen, the control unit 5 determines whether or not the "close" button 15b is selected by the input unit 8 (step 129). When the "close" button 15b is not selected (NO in step 129), the control unit 5 determines whether or not the "guidance" button 15a is selected by the input unit 8 (step 130). When the "guidance" button 15a is not selected (NO in step 130), the control unit 5 returns to step 129 to determine whether or not the "close" button 15b is selected.

When the "guidance" button 15a is selected (YES in step 130), the control unit 5 outputs the display signal of the guidance screen 16, and causes the guidance screen 16 to be displayed on the display unit 7 (step 131). Thereby, the guidance screen 16 is displayed on the display unit 7 instead of the alarm screen 15.

FIG. 13 is a diagram showing an example of the guidance screen 16. The guidance screen 16 manually moves the imaging unit 30 in the transport direction, and aligns the position of the imaging unit 31 with the position of the edge 2a on the distal end side, thereby guiding the inspection device 102 to the stop position of the substrate 1.

In the instruction screen 16, an image display area 16a for displaying an image taken immediately by the imaging unit 31 is disposed on the left side thereof. In the example shown in FIG. 13, an example in which the position on the right side of the image is reflected on one of the left sides of the substrate 1 is displayed. One line 16b is disposed in the vertical direction at a position in the center of the horizontal direction of the image display region 16a. This line 16b is a line for performing alignment with the edge 2a on the front end side of the substrate 1.

Further, on the right side of the image display area 16a, an "enlargement" button 16c for enlarging the image, a "reduction" button 16d for reducing the image, and an "equal magnification" for displaying the image in equal magnification are disposed. The button 16e is a "full screen" button 16f for displaying an image on the full screen.

In the instruction screen 16, a 4-way knob 16g for moving the imaging unit 30 in the X-axis direction and the Y-axis direction is displayed on the right side thereof. The 4 direction button 16g has a "left direction" button 16h, a "right direction" button 16i, an "upward direction" button 16j, and a "down direction" button 16k. The operator can operate the imaging unit 30 in the X-axis direction by operating the 16-g, especially the "left direction" button 16h and the "right direction" button 16i among the 16-direction buttons, thereby aligning the alignment line 16b with the substrate. 1 The edge 2a of the front end side is aligned.

For example, in the example shown in FIG. 13, the operator moves the imaging unit 30 in the right direction by selecting the "right direction" button 16i, whereby the alignment line 16b and the front end side of the substrate 1 can be used. The edge 2a is aligned.

Further, a "high speed" button 16l and a "low speed" button 16m for switching the high speed and low speed of the moving speed of the imaging unit 30 are displayed on the upper side of the four direction button 16g. Typically, when the alignment line 16b and the edge 2a on the front end side of the substrate 1 are close to each other, the operator switches the moving speed of the imaging unit 30 from "high speed" to "low speed", and performs fine adjustment of the alignment at a low speed.

In the instruction screen 16, the "OK" button 16n and the "Cancel" button 16o are displayed at the lower side. The "OK" button 16n is a button for determining the guidance, and the "Cancel" button 16o is a button for returning to the alarm screen 15 for canceling the guidance.

Referring to Fig. 9, when the control unit 5 causes the display unit 7 to display the guidance screen 16, it is determined whether or not the "cancel" button 16o is selected by the input unit 8 (step 132). When the "Cancel" button 16o is selected (YES in step 132), the control unit 5 causes the display unit 7 to display the alarm screen 15 instead of the guidance screen 16 (step 128).

When the "Cancel" button 16o is not selected (NO in step 132), the control unit 5 determines whether or not any one of the four-direction buttons 16g is selected by the input unit 8 (step 133). When none of the buttons is selected (NO in step 133), the control unit 5 returns to step 132 to determine whether or not the "cancel" button 16o is selected.

On the other hand, when any one of the four direction buttons 16g is selected (YES in step 133), the control unit 5 causes the imaging unit 30 to move in the direction corresponding to the button (step 134). As the photographing unit 30 moves, the image displayed on the image display area 16a changes. With this processing, the operator can select the 4-way button 16g to move the photographing unit 30, and align the alignment line 16b with the edge 2a on the front end side of the substrate 1.

When the imaging unit 30 is moved, the control unit 5 next determines whether or not the "OK" button 16n is selected by the input unit 8 (step 135). When not selected OK When the button is pressed (NO in step 135), the control unit 5 returns to step 132 to determine whether or not the "cancel" button 16o is selected.

On the other hand, when the "OK" button 16n is selected (YES in step 135), the control unit 5 proceeds to the next step 136. For example, after the alignment of the alignment line 16b with the edge 2a on the front end side of the substrate 1, the operator selects the "OK" button 16n.

When the "OK" button 16n is selected, the control unit 5 calculates the stop position of the substrate 1 in the transport direction based on the position of the current imaging unit 30 (step 136). Next, the control unit 5 stores the calculated stop position of the substrate 1 as a result of the guidance in the memory unit 6 (step 137). Then, the control unit 5 returns to step 128 to cause the display unit 7 to display the alarm screen 15.

When the "close" button 15b of the alarm screen 15 is selected (YES in step 129), the control unit 5 determines whether or not the stop position of the substrate 1 of the guidance result is stored in the memory unit 6 (step 138). When the result of the guidance is stored in the memory unit 6 (YES in step 138), the control unit 5 calculates the imaging position of the alignment indicator 3 based on the stop position of the substrate 1 as a result of the guidance (step 139).

When the shooting position of the adjustment indicator 3 is calculated, the control unit 5 proceeds to step 122 of FIG. 8 to move the imaging unit 30 to the shooting position of the adjustment mark 3. Then, the control section 5 performs the processing after step 123.

On the other hand, in step 138, when the result of the guidance is not stored in the memory unit 6 (NO in step 138), the control unit 5 moves one of the guides 11 of the transport unit 10 in the Y-axis direction to release the clip of the substrate 1. Live state (step 140). Then, the control unit 5 reversely rotates the conveyor belt 13 to return the substrate 1 to the carry-in side (step 141). Thereafter, the control unit 5 returns to step 103 to rotate the conveyor belt 13 forward. After the substrate 1 is transported to the transport side, the processing after step 104 is performed.

In the above description, the case where the display unit 7 of the inspection device 102 displays the alarm screen 15 and the guidance screen 16 has been described, and the alarm screen 15 and the guidance screen 16 may be displayed on the display unit of the control device 106. At this time, the control device 106 causes the display unit 7 of the control device 106 to display the alarm screen 15 and the guidance screen 16 in accordance with the display signal output from the control unit 5 of the inspection device 102.

Function

The inspection device 102 (position detecting device) of the present embodiment can exhibit, for example, the following effects.

In the present embodiment, the stop position of the substrate 1 is detected based on the position of the edge 2 of the substrate 1 in the image captured by the imaging unit 31. Therefore, even when the transport unit 10 stops the substrate 1 without a stopper, for example, the stop position of the substrate 1 can be appropriately detected.

Since the predicted position is stopped at the edge of the position where the edge 2 of the substrate 1 is stopped, the imaging unit 31 attempts the imaging of the edge 2, so that the imaging unit 31 can appropriately capture the edge 2 of the substrate 1. Further, since the edge stop prediction position is set at a position different depending on the weight (type) of each of the substrates 1, even when the weight (type) of the substrate 1 is different, the predicted position can be stopped at the edge and the image capturing unit 31 can appropriately photograph the position. The edge 2 of the substrate 1.

Further, in the present embodiment, since the corrected edge stop prediction position is corrected based on the detected stop position of the substrate 1, the edge stop prediction position can be corrected to an appropriate position.

Further, in the present embodiment, since the retry processing is performed on the edge detection, even if it is not possible to take the image by the imaging unit 31 at the edge stop prediction position. When the edge 2 of the substrate 1 is taken, the edge 2 of the substrate 1 can also be appropriately photographed.

Further, in the retry process, it is determined in which direction the imaging unit 30 is to be moved in the transport direction based on the captured image, so that the speed until the edge 2 of the substrate 1 is detected can be improved.

Further, in the present embodiment, when the retry processing fails, the guidance screen 16 is displayed. Thereby, the operator operates the instruction screen 16 to align the position of the imaging unit 31 with the position of the edge 2 of the substrate 1, and can instruct the inspection apparatus 102 to position the substrate 1.

Second embodiment

Next, a second embodiment of the present technology will be described. In the following description of the second embodiment, members having the same functions or configurations as those of the above-described first embodiment will be omitted or simplified.

In the first embodiment described above, the edge detection of the substrate 1 is described for all the substrates 1. On the other hand, in the second embodiment, when the stop position of the substrate 1 stopped without the stopper is stabilized, the edge detection of the substrate 1 can be omitted. In the second embodiment, since this point is different from the first embodiment, the point will be mainly described.

The inspection apparatus 102 (position detecting apparatus) of the second embodiment has two modes, and these two modes can be switched. The first mode is a mode in which the edge 2 of the substrate 1 is imaged by the imaging unit 31 on all of the substrates 1 and the stop position of the substrate 1 is detected in accordance with the position of the edge 2. In the first mode, the same processing as that of Figs. 6 to 9 described above is executed.

In the second mode, the process of detecting the edge 2 by the imaging unit 31 and detecting the stop position of the substrate 1 according to the position of the edge 2 is not performed, but will be memorized in the memory. The stop target position of the substrate 1 of the portion 6 serves as the stop position of the substrate 1.

Fig. 14 is a flow chart showing the processing of the inspection apparatus of the second embodiment. 15 and 16 are flowcharts showing the processing in the second mode.

In the second embodiment, first, the control unit 5 determines whether or not the current mode is the first mode (step 201). In the initial state, the first mode is executed. When the current mode is the first mode, the control unit 5 executes the processing in the first mode (step 202). That is, the control unit 5 photographs the edge 2 of the substrate 1 with the imaging unit 31 on all the substrates 1, and detects the stop position of the substrate 1 in accordance with the position of the edge 2 (see FIGS. 6 to 9).

When the processing in the first mode is completed, the control unit 5 next determines whether or not the predetermined condition is satisfied in the processing of the first mode (step 203). Here, the predetermined conditions are as follows (1) and (2).

(1) In the image in which the imaging unit 31 captures the image at the edge stop prediction position, the edge 2 of the substrate 1 is successfully captured for a predetermined number of times or more. Here, the predetermined number of times is, for example, three times, but is not limited thereto. This predetermined number of times can also be changed by the input unit 8.

(2) The deviation of the stop position of each of the substrates 1 detected based on the position of the edge 2 of the substrate 1 is equal to or less than a predetermined threshold. Here, the predetermined threshold value is, for example, about 1.5 mm, but is not limited thereto. This threshold can also be changed by the input unit 8.

The conditions set may be the conditions of both (1) and (2), or may be one of (1) and (2).

When the control unit 5 determines that the conditions (or conditions of (1) or (2)) shown in (1) and (2) are satisfied (YES in step 203), the first mode is switched to The second mode (step 204). In other words, when the stop position of the substrate 1 stopped without the stopper is stabilized, the control unit 5 switches the first mode to the second mode. Moreover, the control unit 5 returns to step 201 and determines whether or not the current mode is the first mode.

On the other hand, when it is determined that the condition (or the condition of (1) or (2)) shown in (1) or (2) is not satisfied (NO in step 203), the control unit 5 does not set the first The mode is switched to the second mode, and the process returns to step 201.

In step 201, when the current mode is the second mode (NO in step 201), the control unit 5 executes the processing in the second mode (step 205).

The processing in the second mode will be described with reference to Figs. 15 and 16 . Comparing the flowchart of the second mode shown in FIG. 15 with the flowchart of the first mode shown in FIG. 6, steps 304 and 310 are different from steps 104 and 110.

That is, in the first mode, the control unit 5 performs a process of moving the imaging unit 30 to the edge stop prediction position and attempting the imaging of the edge 2 of the substrate 1 by the imaging unit 31 (steps 104 and 110 of FIG. 6). On the other hand, in the second mode, the control unit 5 does not perform the process of moving the shooting unit 30 to the edge stop prediction position and capturing the edge 2 of the substrate 1 with the imaging unit 31. At this time, the control unit 5 performs a process of moving the imaging unit 30 directly to the adjustment target imaging position and capturing the alignment indicator 3 by the imaging unit 31 (FIG. 15, steps 304 and 310). Further, the control unit 5 executes a process of capturing two or more different alignment indicators 3 at two or more different positions.

In step 304, when the imaging unit 30 is moved to the adjustment target imaging position, the control unit 5 regards that the substrate 1 exists in the stop target position stored in the memory unit 6, and calculates the correction mark imaging position from the stop target position. Then, the photographing unit 30 is moved to the correction mark shooting position.

Here, in the first mode, the stop target position of the substrate 1 is corrected to an appropriate position based on the actual stop position of the substrate 1 detected by the image captured by the imaging unit 31 (FIG. 8, step 120). . Therefore, in the second mode, by using the stop target position, the correction mark shooting position is calculated, and the adjustment mark 3 can be photographed with appropriate adjustment of the shooting position.

Referring to Fig. 16, when the alignment indicator 3 is photographed, the control unit 5 then recognizes the position of the substrate 1, the tilt of the substrate 1 about the Z-axis, and the substrate 1 based on the images of the two or more alignment marks 3 captured. The size and the like (step 311).

Next, the control unit 5 determines whether or not the identification of the position of the substrate 1 is successful (step 312). When the identification of the position of the substrate 1 is successful (YES in step 312), the control unit 5 checks the inspection surface of the substrate 1 (step 313). When the inspection of the substrate 1 is completed, the control unit 5 releases the sandwiched state of the substrate 1 (step 314), and carries the substrate 1 out of the inspection device 102 (step 315).

On the other hand, when the identification of the position of the substrate 1 fails (NO in step 312), the control unit 5 proceeds to the next step 316. The failure of the identification of the position of the substrate 1 means that the actual stop position of the substrate 1 deviates from the stop target position of the substrate 1, and the photographing failure of the alignment mark 3 or the like is performed.

At this time, the control unit 5 moves the imaging unit 30 to the edge stop prediction position (step 316), and attempts the imaging of the edge 2 of the substrate 1 by the imaging unit 31 located at the edge stop prediction position (step 317). Then, the control section 5 executes the processing after step 111 of FIG. That is, the control unit 5 performs a retry process or the like.

Referring to Fig. 14, when the processing of the second mode is completed, next, in the processing of the second mode, the control unit 5 determines whether or not the predetermined condition is satisfied (step 206). Here, the predetermined conditions are exemplified by the following (1)' and (2)'.

(1) The identification of the position of the substrate 1 is repeated for a predetermined number of times or more (refer to step 312). Here, the predetermined number of times is, for example, two times, but is not limited thereto. This predetermined number of times can also be changed by the input unit 8.

(2) The number of the substrates 1 in which the identification of the position has failed / the total number of the substrates 1 processed in the second mode exceeds a predetermined threshold. Here, the predetermined threshold value is, for example, about 5%, but is not limited thereto. This threshold can also be changed by the input unit 8.

The conditions for setting may be either (1)' and (2)', or may be conditions of one of (1)' and (2)'.

When the control unit 5 determines that the condition (or the condition of (1)' or (2)') of both (1)' and (2)' is satisfied (YES in step 206), the control unit 5 The 2 mode is switched to the first mode (step 207). In other words, when the stop position of the substrate 1 stopped without the stopper is unstable, the control unit 5 switches the second mode to the first mode.

On the other hand, when it is determined that the condition (or the condition of (1)' or (2)') of both (1)' and (2)' is not satisfied (NO of step 206), the control section 5 The second mode is not switched to the first mode, and the process returns to step 201.

Further, it is also possible to set whether or not to execute the first mode and whether to switch between the first mode and the second mode by the input unit 8.

Function

The inspection apparatus 102 (position detection position) of the second embodiment can exhibit the following effects.

In the second embodiment, in the second mode, the edge 2 is imaged by the imaging unit 31, and the stop position of the detection substrate 1 is omitted depending on the position of the edge 2. Since the processing is performed, the time required for the inspection of the substrate 1 can be shortened.

Further, since the first mode is switched to the second mode when the stop position of the substrate 1 stopped without the stopper is stabilized, the first mode can be switched to the second mode at an appropriate timing. Further, since the second mode can be switched to the first mode when the stop position of the substrate 1 stopped without the stopper is unstable, the second mode can be switched to the first mode at an appropriate timing.

Various variants

In the above description, for the sake of convenience, the case where the edge 2a on the front end side of the substrate 1 is the object of imaging by the imaging unit 31 will be described. However, the edge 2b on the rear end side of the substrate 1 can also be used as a subject of imaging by the imaging unit 31. At this time, the edge stop prediction position is set at a position corresponding to the edge 2b on the rear end side of the substrate 1. Further, at this position, the imaging unit 31 attempts imaging of the edge 2b on the rear side of the substrate 1.

Further, when the edge 2a on the distal end side is the subject of imaging by the imaging unit 31 and the edge 2b on the rear end side as the subject of imaging by the imaging unit 31, the direction of the moving imaging unit 30 is reversed in the retry process.

For example, in step 114 of FIG. 7, when it is determined that the imaging unit 31 exists at a position corresponding to the substrate 1, the control unit 5 moves the imaging unit 30 to the loading side of the substrate 1 (the reverse direction of the substrate 1) . On the other hand, when it is determined that the imaging unit 31 does not exist at the position corresponding to the substrate 1, the control unit 5 moves the imaging unit 30 to the carry-out side of the substrate 1 (the direction in which the substrate 1 is transported).

In the above description, the case where the imaging unit 31 and the substrate 1 are moved in the conveyance direction during the retry process is described. However, it is also possible to take a picture by moving the substrate 1 in the retry process. The relative position of the portion 31 and the substrate 1 in the transport direction changes. At this time, in a state where the imaging unit 30 stops at the edge stop prediction position, the transport belt 13 of the transport unit 10 is driven to move the substrate 1.

At this time, the case where the edge 2a on the front end side is the object of the imaging of the imaging unit 31 will be described. At this time, when it is determined in step 114 of FIG. 7 that the imaging unit 31 is present at the position corresponding to the substrate 1, the control unit 5 reversely rotates the conveyor belt 13 of the transport unit 10, and moves the substrate 1 to the loading side (transport substrate 1) The direction of the reverse). On the other hand, when it is determined that the imaging unit 31 does not exist at the position corresponding to the substrate 1, the control unit 5 rotates the conveyor belt 13 of the transport unit 10 to move the substrate 1 to the carry-out side (the direction in which the substrate 1 is transported).

The case where the edge 2b of the rear end side is the object of the imaging of the imaging unit 31 will be described. At this time, when it is determined that the imaging unit 31 is present at the position corresponding to the substrate 1 in the step 114 of FIG. 7, the control unit 5 rotates the transport belt 13 of the transport unit 10 to move the substrate 1 to the carry-out side (transport substrate). 1 direction). On the other hand, when it is determined that the imaging unit 31 does not exist at the position corresponding to the substrate 1, the control unit 5 reversely rotates the transport belt 13 of the transport unit 10, and moves the substrate 1 to the carry-in side (the reverse direction of the transport substrate 1) ).

The distance in which the substrate 1 is moved in the transport direction during the retry process is related to the imaging range 31a of the imaging unit 31. For example, when the imaging range 31a of the imaging unit 31 in the transport direction is 35 mm, the moving distance of the substrate 1 is 35 mm. Alternatively, when overlapping is considered, for example, the amount of overlap is 5 mm, and the moving distance of the substrate 1 is 30 mm.

In the retry process, when the relative positions of the imaging unit 31 and the substrate 1 in the transport direction are changed, both the imaging unit 31 and the substrate 1 can be transported. Move to.

In the above description, the case where the position detecting device of the present technology is applied to the inspection device 102 has been described. However, the position detecting device of the present technology can also be applied to the mounting device 103 and the screen printing device 101. When the position detecting device is applied to the mounting device 103, the edge 2 of the substrate 1 is photographed by the photographing portion for photographing which is mounted on the mounting head movable in the X-axis direction and the Y-axis direction. Further, when the position detecting device is applied to the screen printing apparatus 101, the edge 2 of the substrate 1 is imaged by the imaging unit that can be moved in the X-axis direction and the Y-axis direction.

By using the substrate inspection imaging unit 31, the alignment indicator imaging unit, and the like as the edge imaging imaging unit 31, the existing imaging unit can be used as the imaging unit 31 for edge imaging, thereby achieving cost savings. The advantages of deletion. However, it is not necessary to use the existing imaging unit as the edge imaging imaging unit 31, and the dedicated imaging unit 31 for imaging the edge 2 may be provided in particular to the position detecting device.

In particular, when the dedicated imaging unit 31 for capturing the edge 2 of the substrate 1 is provided, the imaging unit 31 can be disposed, for example, at a position where the substrate 1 is imaged from the lower side. The imaging unit 31 may be in a form of moving in the transport direction (X-axis direction) or in a form of being fixed at the edge stop prediction position (especially in the case of retrying the moving substrate 1).

In the above description, the case where the stop target position of the substrate 1 and the edge stop predicted position are set in advance according to the weight (type) of each substrate 1 has been described. However, the stop target position and the edge stop prediction position may not be set in advance according to the weight (type) of each of the substrates 1. For example, stop The target position and the edge stop prediction position may be initially set to the stop target position and the edge stop predicted position common to the weight (type) of each of the substrates 1.

Explain this reason. As described above, in the present technology, the stop target position of the substrate 1 and the edge stop predicted position are corrected in accordance with the actual stop position of the substrate 1. Therefore, initially, even if the edge which is common to the weight (type) of each substrate 1 is used to stop the predicted position (that is, even if the edge stop prediction position is slightly incorrect), the weight of each substrate 1 can be used as time passes. ), the stop target position and the edge stop prediction position are corrected to an appropriate position. Therefore, the stop target position and the edge stop predicted position may not be set in advance (that is, may be slightly incorrect) depending on the weight (type) of each substrate 1.

The present technology can also adopt the following structure.

(1) A position detecting device including an imaging unit; a conveying unit that transports a substrate in a conveying direction to stop the conveyed substrate; and a control unit that images the stopped substrate by the imaging unit The edge of the direction detects the stop position of the substrate based on the position of the edge of the substrate in the captured image.

(2) The position detecting device according to (1) above, wherein the control unit stops the predicted position at the edge which is initially predicted to stop at the edge of the substrate, and attempts the imaging of the edge by the imaging unit.

(3) The position detecting device according to (2) above, further comprising: a moving mechanism that moves the imaging unit or the substrate in a transport direction to cause the imaging unit and the stopped substrate to be transported The relative position of the direction changes.

(4) The position detecting device according to (2) or (3) above, wherein the control unit corrects the edge stop prediction position in accordance with the detected stop position of the substrate.

(5) The position detecting device according to any one of (2) to (4), wherein the control unit stops the predicted position at a different edge depending on the weight of each of the substrates, and the edge is captured by the imaging unit.

(6) The position detecting device according to (3) above, wherein the control unit determines whether an image captured by the imaging unit at the edge stop prediction position is an image including the edge, and the image does not include the edge In the case of the image, the moving mechanism changes the relative position of the imaging unit and the substrate in the transport direction, and performs a process of retrying the image of the edge by the imaging unit.

(7) The position detecting device according to (6), wherein the control unit determines that the imaging unit or the substrate should be moved in accordance with an image captured by the imaging unit at the edge stop prediction position in the retry processing. It is in the direction of the aforementioned transport direction.

(8) The position detecting device according to the above (7), wherein, in the retry processing, the control unit determines whether the imaging unit is present in accordance with an image captured by the imaging unit at the edge stop prediction position. According to the determination result, the position of the substrate is determined such that the imaging unit or the substrate is moved in the direction of the transport direction.

(9) The position detecting device according to any one of the above (6), wherein the control unit repeatedly performs the retry process until the edge is detected.

(10) The position detecting device according to (8) above, wherein the photographing unit is used as the photographing unit The edge of the object to be imaged is an edge on the end side in the transport direction, and the control unit moves the imaging unit in a direction in which the substrate is transported when determining that the imaging unit is present at a position corresponding to the substrate, or The substrate moves in the opposite direction to the direction in which the substrate is transferred.

(11) The position detecting device according to (10), wherein the control unit causes the imaging unit to move in a reverse direction of a direction in which the substrate is transported when determining that the imaging unit does not exist at a position corresponding to the substrate, or The substrate moves in a direction in which the substrate is transferred.

(12) The position detecting device according to the above (8), wherein the edge to be imaged by the imaging unit is an edge of the rear end side in the transport direction, and the control unit determines that the imaging unit exists at a position corresponding to the substrate At the time, the imaging unit is moved in the opposite direction to the direction in which the substrate is transported, or the substrate is moved in the direction in which the substrate is transferred.

(13) The position detecting device according to (12), wherein the control unit moves the imaging unit in a direction in which the substrate is transported when the imaging unit is determined not to exist at a position corresponding to the substrate, or causes the substrate to be The reverse movement of the direction in which the substrate is transferred.

(14) The position detecting device according to any one of (6), wherein the control unit outputs a manual change in a relative position of the imaging unit and the substrate in the transport direction when the retry processing fails. And a display signal for guiding the screen for aligning the position of the imaging unit with the position of the edge.

(15) The position detecting device according to any one of the above (1), further comprising: a memory unit that stores a stop target position of the substrate, the control unit The first mode and the second mode are switchable, wherein the image is captured by the imaging unit, and a stop position of the substrate is detected based on a position of the edge, and the second mode is not to perform imaging of the edge by the imaging unit And detecting the stop position of the substrate according to the position of the edge, and stopping the target position of the substrate stored in the memory unit as the stop position of the substrate.

(16) The position detecting device according to (15), wherein the control unit determines, in the first mode, whether a deviation of a stop position of each substrate detected based on a position of the edge is equal to or less than a predetermined threshold, and the deviation is When the predetermined threshold is equal to or lower than the predetermined threshold, the first mode is switched to the second mode.

(17) The position detecting device according to (15) or (16), wherein the control unit is used in the second mode and stored in the memory according to the stop position of the substrate detected in the first mode. The stop target position of the aforementioned substrate.

ST101-ST110‧‧‧Steps

Claims (20)

A position detecting device includes: an imaging unit that transports a substrate in a transport direction and stops the transported substrate; and a control unit that photographs an edge of the stopped substrate in a transport direction by the imaging unit The stop position of the substrate is detected based on the position of the edge of the substrate in the captured image. The position detecting device according to claim 1, wherein the control unit stops the predicted position at the edge which is initially predicted to stop at the edge of the substrate, and attempts the imaging of the edge by the imaging unit. The position detecting device according to claim 2, further comprising: a moving mechanism that moves the imaging unit or the substrate in a transport direction to change a relative position of the imaging unit and the stopped substrate in the transport direction. The position detecting device of claim 2, wherein the control unit corrects the edge stop prediction position based on the detected stop position of the substrate. The position detecting device of claim 2, wherein the control unit stops the predicted position at a different edge depending on the weight of each of the substrates, and the edge is captured by the imaging unit. The position detecting device of claim 3, wherein the control unit determines whether an image captured by the imaging unit at the edge stop prediction position is In the image including the edge, when the image does not include the image of the edge, the relative position of the imaging unit and the substrate in the transport direction is changed by the moving mechanism, and the imaging unit is again attempted by the imaging unit. Processing of the edge of the shot, that is, retry processing. The position detecting device according to claim 6, wherein the control unit determines, in the retry processing, that the imaging unit or the substrate is to be moved by the image captured by the imaging unit at the edge stop prediction position Direction of direction. The position detecting device according to claim 7, wherein the control unit determines, in the retry processing, whether the imaging unit exists at a position corresponding to the substrate, based on an image captured by the imaging unit at the edge stop prediction position. According to the determination result, it is determined that the imaging unit or the substrate is moved in the direction of the transport direction. The position detecting device of claim 6, wherein the control unit repeatedly performs the retry processing until the edge is detected. The position detecting device according to claim 8, wherein the edge to be imaged by the imaging unit is an edge on the end side in the transport direction, and the control unit determines that the imaging unit exists at a position corresponding to the substrate. The imaging unit moves in a direction in which the substrate is transferred, or moves the substrate in a reverse direction in a direction in which the substrate is transferred. The position detecting position of the request item 10, wherein the control unit determines that the imaging unit does not exist at a position corresponding to the substrate, moves the imaging unit in a direction opposite to a direction in which the substrate is transported, or transports the substrate The direction of the aforementioned substrate moves. The position detecting device according to claim 8, wherein the edge to be imaged by the imaging unit is an edge of the rear end side in the transport direction, and the control unit determines that the imaging unit exists at a position corresponding to the substrate The imaging unit moves in the opposite direction to the direction in which the substrate is transferred, or moves the substrate in a direction in which the substrate is transferred. The position detecting device according to claim 12, wherein the control unit moves the imaging unit in a direction in which the substrate is transported when the imaging unit is not present at a position corresponding to the substrate, or causes the substrate to transport the substrate The reverse direction of the direction. The position detecting device according to claim 6, wherein the control unit outputs a manual change between a position of the imaging unit and the substrate in the transport direction when the retry processing fails, and the position of the imaging unit and the edge are changed. The display signal of the guidance screen of the position alignment. The position detecting device according to claim 1, further comprising: a memory unit that stores a stop target position of the substrate, wherein the control unit switches between the first mode and the second mode, wherein the first mode captures the edge by the imaging unit. Detecting a stop position of the substrate according to a position of the edge, wherein the second mode is not performing a process of capturing the edge by the imaging unit and detecting a stop position of the substrate according to a position of the edge, and storing the memory in the memory unit The stop target position of the substrate is used as the stop position of the substrate. The position detecting device according to claim 15, wherein the control unit determines whether the deviation of the stop position of each of the substrates detected based on the position of the edge is equal to or less than a predetermined threshold in the first mode, and the deviation is When the predetermined threshold is equal to or lower than the predetermined threshold, the first mode is switched to the second mode. The position detecting device of claim 15, wherein the control unit compensates for a stop target position of the substrate stored in the second mode and is stored in the memory unit in accordance with a stop position of the substrate detected in the first mode . A position detecting method for transporting a substrate in a transport direction to stop the transported substrate, and then photographing the edge of the stopped substrate in the transport direction by an imaging unit, depending on the substrate in the captured image The position of the edge detects the stop position of the aforementioned substrate. A program product, by means of a computer, loads a program, and causes the position detecting device to execute the following program commands: (1) transporting the substrate in the transport direction; (2) stopping the transported substrate; (3) taking the image portion Shooting the edge of the substrate that has been stopped in the transport direction; (4) detecting the stop position of the substrate based on the position of the edge of the substrate in the captured image. A method of manufacturing a substrate, wherein the substrate is transported in a transport direction to stop the transported substrate, and then the image of the stopped substrate is photographed at an edge of the transport direction by the imaging unit, and the substrate is used in the captured image. The position of the edge is detected, the stop position of the substrate is detected, and the processing required for manufacturing the substrate is performed on the substrate existing at the detected stop position.