JP6251982B2 - 光学系、および面形状測定装置 - Google Patents

光学系、および面形状測定装置 Download PDF

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JP6251982B2
JP6251982B2 JP2013111978A JP2013111978A JP6251982B2 JP 6251982 B2 JP6251982 B2 JP 6251982B2 JP 2013111978 A JP2013111978 A JP 2013111978A JP 2013111978 A JP2013111978 A JP 2013111978A JP 6251982 B2 JP6251982 B2 JP 6251982B2
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lens
light
optical system
lens group
interferometer
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JP2014232009A5 (enExample
JP2014232009A (ja
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聡 川戸
聡 川戸
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Nikon Corp
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Nikon Corp
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  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2013111978A 2013-05-28 2013-05-28 光学系、および面形状測定装置 Active JP6251982B2 (ja)

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JP2013111978A JP6251982B2 (ja) 2013-05-28 2013-05-28 光学系、および面形状測定装置

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JP2013111978A JP6251982B2 (ja) 2013-05-28 2013-05-28 光学系、および面形状測定装置

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JP2014232009A JP2014232009A (ja) 2014-12-11
JP2014232009A5 JP2014232009A5 (enExample) 2016-07-14
JP6251982B2 true JP6251982B2 (ja) 2017-12-27

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2017617B1 (en) * 2016-10-13 2018-04-20 Miele & Cie Sterilizer apparatus with measurement chamber having orifice
NL2017616B1 (en) * 2016-10-13 2018-04-20 Miele & Cie Apparatus for detecting condensation and sterilizer with such apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60166913A (ja) * 1983-10-07 1985-08-30 Sankyo Seiki Mfg Co Ltd 等速度走査用高解像力レンズ
US5155554A (en) * 1990-12-20 1992-10-13 General Signal Corporation Large aperture reflective interferometer for measuring convex spherical surfaces
JP3455264B2 (ja) * 1993-12-28 2003-10-14 ペンタックス株式会社 干渉計
JPH11108624A (ja) * 1997-10-03 1999-04-23 Nikon Corp 面形状測定装置および方法、並びに波面収差測定装置および方法
JP2009145724A (ja) * 2007-12-17 2009-07-02 Canon Inc 投影光学系及びそれを有する露光装置

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