JP2014232009A5 - - Google Patents

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Publication number
JP2014232009A5
JP2014232009A5 JP2013111978A JP2013111978A JP2014232009A5 JP 2014232009 A5 JP2014232009 A5 JP 2014232009A5 JP 2013111978 A JP2013111978 A JP 2013111978A JP 2013111978 A JP2013111978 A JP 2013111978A JP 2014232009 A5 JP2014232009 A5 JP 2014232009A5
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JP
Japan
Prior art keywords
lens group
optical system
lens
light
reflecting mirror
Prior art date
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Application number
JP2013111978A
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English (en)
Japanese (ja)
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JP2014232009A (ja
JP6251982B2 (ja
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Priority to JP2013111978A priority Critical patent/JP6251982B2/ja
Priority claimed from JP2013111978A external-priority patent/JP6251982B2/ja
Publication of JP2014232009A publication Critical patent/JP2014232009A/ja
Publication of JP2014232009A5 publication Critical patent/JP2014232009A5/ja
Application granted granted Critical
Publication of JP6251982B2 publication Critical patent/JP6251982B2/ja
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JP2013111978A 2013-05-28 2013-05-28 光学系、および面形状測定装置 Active JP6251982B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013111978A JP6251982B2 (ja) 2013-05-28 2013-05-28 光学系、および面形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013111978A JP6251982B2 (ja) 2013-05-28 2013-05-28 光学系、および面形状測定装置

Publications (3)

Publication Number Publication Date
JP2014232009A JP2014232009A (ja) 2014-12-11
JP2014232009A5 true JP2014232009A5 (enExample) 2016-07-14
JP6251982B2 JP6251982B2 (ja) 2017-12-27

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ID=52125484

Family Applications (1)

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JP2013111978A Active JP6251982B2 (ja) 2013-05-28 2013-05-28 光学系、および面形状測定装置

Country Status (1)

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JP (1) JP6251982B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2017617B1 (en) * 2016-10-13 2018-04-20 Miele & Cie Sterilizer apparatus with measurement chamber having orifice
NL2017616B1 (en) * 2016-10-13 2018-04-20 Miele & Cie Apparatus for detecting condensation and sterilizer with such apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60166913A (ja) * 1983-10-07 1985-08-30 Sankyo Seiki Mfg Co Ltd 等速度走査用高解像力レンズ
US5155554A (en) * 1990-12-20 1992-10-13 General Signal Corporation Large aperture reflective interferometer for measuring convex spherical surfaces
JP3455264B2 (ja) * 1993-12-28 2003-10-14 ペンタックス株式会社 干渉計
JPH11108624A (ja) * 1997-10-03 1999-04-23 Nikon Corp 面形状測定装置および方法、並びに波面収差測定装置および方法
JP2009145724A (ja) * 2007-12-17 2009-07-02 Canon Inc 投影光学系及びそれを有する露光装置

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