JP6251661B2 - 超音波トランスデューサ、その製造方法、超音波トランスデューサアレイ及び超音波検査装置 - Google Patents

超音波トランスデューサ、その製造方法、超音波トランスデューサアレイ及び超音波検査装置 Download PDF

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JP6251661B2
JP6251661B2 JP2014196805A JP2014196805A JP6251661B2 JP 6251661 B2 JP6251661 B2 JP 6251661B2 JP 2014196805 A JP2014196805 A JP 2014196805A JP 2014196805 A JP2014196805 A JP 2014196805A JP 6251661 B2 JP6251661 B2 JP 6251661B2
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Japan
Prior art keywords
substrate
insulating film
film
ultrasonic transducer
ultrasonic
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JP2014196805A
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English (en)
Japanese (ja)
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JP2016072661A5 (enExample
JP2016072661A (ja
Inventor
俊太郎 町田
俊太郎 町田
龍崎　大介
大介 龍崎
永田　達也
達也 永田
尚昭 山下
尚昭 山下
裕子 花岡
裕子 花岡
吉村　保廣
保廣 吉村
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Hitachi Ltd
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Hitachi Ltd
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Priority to JP2014196805A priority Critical patent/JP6251661B2/ja
Priority to US15/513,588 priority patent/US10603689B2/en
Priority to PCT/JP2015/062135 priority patent/WO2016047186A1/ja
Publication of JP2016072661A publication Critical patent/JP2016072661A/ja
Publication of JP2016072661A5 publication Critical patent/JP2016072661A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/043—Analysing solids in the interior, e.g. by shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
    • A61B8/4461—Features of the scanning mechanism, e.g. for moving the transducer within the housing of the probe
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/023—Solids
    • G01N2291/0232—Glass, ceramics, concrete or stone
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/106—Number of transducers one or more transducer arrays
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor

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  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Pressure Sensors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Micromachines (AREA)
JP2014196805A 2014-09-26 2014-09-26 超音波トランスデューサ、その製造方法、超音波トランスデューサアレイ及び超音波検査装置 Active JP6251661B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014196805A JP6251661B2 (ja) 2014-09-26 2014-09-26 超音波トランスデューサ、その製造方法、超音波トランスデューサアレイ及び超音波検査装置
US15/513,588 US10603689B2 (en) 2014-09-26 2015-04-21 Ultrasonic transducer, method for making same, ultrasonic transducer array, and ultrasonic test apparatus
PCT/JP2015/062135 WO2016047186A1 (ja) 2014-09-26 2015-04-21 超音波トランスデューサ、その製造方法、超音波トランスデューサアレイ及び超音波検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014196805A JP6251661B2 (ja) 2014-09-26 2014-09-26 超音波トランスデューサ、その製造方法、超音波トランスデューサアレイ及び超音波検査装置

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JP2016072661A JP2016072661A (ja) 2016-05-09
JP2016072661A5 JP2016072661A5 (enExample) 2016-11-17
JP6251661B2 true JP6251661B2 (ja) 2017-12-20

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US (1) US10603689B2 (enExample)
JP (1) JP6251661B2 (enExample)
WO (1) WO2016047186A1 (enExample)

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JP2017226036A (ja) * 2016-06-22 2017-12-28 株式会社日立製作所 デバイス製造方法およびデバイス製造装置
US11047979B2 (en) * 2016-07-27 2021-06-29 Sound Technology Inc. Ultrasound transducer array
JP6606034B2 (ja) 2016-08-24 2019-11-13 株式会社日立製作所 容量検出型超音波トランスデューサおよびそれを備えた超音波撮像装置
JP6763731B2 (ja) * 2016-09-28 2020-09-30 株式会社日立製作所 超音波トランスデューサ、その製造方法および超音波撮像装置
JP2018106048A (ja) * 2016-12-27 2018-07-05 大日本印刷株式会社 構造体および構造体を用いた回折格子
WO2018235415A1 (ja) * 2017-06-21 2018-12-27 パナソニックＩｐマネジメント株式会社 物理量センサ
JP6904814B2 (ja) * 2017-06-30 2021-07-21 キヤノン株式会社 中空構造体の製造方法、及び中空構造体
JP6807420B2 (ja) 2019-02-21 2021-01-06 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 半導体装置の製造方法、基板処理装置およびプログラム
US11684951B2 (en) * 2019-08-08 2023-06-27 Bfly Operations, Inc. Micromachined ultrasonic transducer devices having truncated circle shaped cavities
CN111203375B (zh) * 2019-12-31 2021-04-27 瑞声声学科技(深圳)有限公司 换能器及其制作方法
CN111711905B (zh) * 2020-06-24 2021-08-17 歌尔微电子有限公司 微型麦克风防尘装置及mems麦克风
CN112871612A (zh) * 2020-12-19 2021-06-01 复旦大学 具有多压电层的压电微机械超声换能器
US20240304422A1 (en) * 2021-01-14 2024-09-12 Applied Materials, Inc. Plasma processing with independent temperature control
KR102594029B1 (ko) * 2021-04-29 2023-10-25 (주)샘씨엔에스 공간 변환기 및 이의 제조 방법
KR102575738B1 (ko) * 2021-04-29 2023-09-06 (주)샘씨엔에스 공간 변환기 및 이의 제조 방법
AU2024233743A1 (en) * 2023-03-07 2025-09-18 Orchard Ultrasound Innovation, Llc Capacitive micromachined ultrasonic transducer and manufacturing methods thereof

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JP5438983B2 (ja) 2008-02-08 2014-03-12 株式会社東芝 超音波プローブ及び超音波診断装置
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US10603689B2 (en) 2020-03-31
JP2016072661A (ja) 2016-05-09
US20170291192A1 (en) 2017-10-12
WO2016047186A1 (ja) 2016-03-31

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