JP6248786B2 - 窒化物半導体素子およびその製造方法 - Google Patents
窒化物半導体素子およびその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 183
- 150000004767 nitrides Chemical class 0.000 title claims description 126
- 238000004519 manufacturing process Methods 0.000 title claims description 35
- 239000000758 substrate Substances 0.000 claims description 106
- 229910052594 sapphire Inorganic materials 0.000 claims description 95
- 239000010980 sapphire Substances 0.000 claims description 95
- 238000000034 method Methods 0.000 claims description 40
- 238000005530 etching Methods 0.000 claims description 39
- 238000001039 wet etching Methods 0.000 claims description 10
- 238000001312 dry etching Methods 0.000 claims description 8
- 241000217377 Amblema plicata Species 0.000 claims description 5
- 238000002360 preparation method Methods 0.000 claims description 4
- 239000013078 crystal Substances 0.000 description 72
- 206010053759 Growth retardation Diseases 0.000 description 9
- 230000000694 effects Effects 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- -1 BCl 3 Inorganic materials 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- XPPKVPWEQAFLFU-UHFFFAOYSA-N diphosphoric acid Chemical compound OP(O)(=O)OP(O)(O)=O XPPKVPWEQAFLFU-UHFFFAOYSA-N 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 229940005657 pyrophosphoric acid Drugs 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/0242—Crystalline insulating materials
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/02428—Structure
- H01L21/0243—Surface structure
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02658—Pretreatments
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/12—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a stress relaxation structure, e.g. buffer layer
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
Description
前記サファイア基板の、底面が円形状であり先端が三角錐状である前記凸部が形成された面上に設けられた窒化物半導体からなる半導体層と、を備える構成である。
本発明の実施形態に係る窒化物半導体素子の構成について、図1〜図3を参照しながら説明する。窒化物半導体素子1は、例えばLEDであり、図1に示すように、窒化物半導体素子用基板であるサファイア基板10と、バッファ層20と、半導体層30とが積層された構造を備えている。
以下、本発明の実施形態に係る窒化物半導体素子1の製造方法について、図4および図5を参照しながら説明する。なお、以下では、窒化物半導体素子1がLEDである場合の製造方法を説明する。
10 サファイア基板(窒化物半導体素子用基板)
10a 基板上面(結晶成長面)
11 凸部
111 下凸部
112 上凸部
112a 傾斜面(結晶成長抑制面)
20 バッファ層
30 半導体層
30a 窒化物半導体
31 n型半導体層
32 活性層
33 p型半導体層
40 n電極
50 透明電極
60 p電極
M マスク
SC サファイア結晶
Claims (7)
- サファイア基板のc面側の表面にマスクを設けてドライエッチングすることで、底面が円形状の凸部を複数形成する第1エッチング工程と、
前記凸部が形成された前記サファイア基板をウェットエッチングすることで、前記凸部の底面を円形状に維持したまま先端を三角錐状に形成する第2エッチング工程と、
前記サファイア基板の、底面が円形状であり先端が三角錐状である前記凸部が形成された側の面上に窒化物半導体からなる半導体層を成長させる半導体層成長工程と、
を含む窒化物半導体素子の製造方法。 - 前記第2エッチング工程は、前記凸部のうち三角錐状に形成される部分である上凸部の高さが前記凸部全体の高さの10%以上を占めるように、前記サファイア基板をウェットエッチングする請求項1に記載の窒化物半導体素子の製造方法。
- 前記第1エッチング工程は、前記凸部の形状が円錐状またはドーム状になるようにドライエッチングする請求項1または請求項2に記載の窒化物半導体素子の製造方法。
- 底面が円形状で先端は頂点から3つの稜線が伸びた三角錐状であり、かつ前記稜線は上面視においてm軸方向に伸びている凸部を、c面側の表面に複数形成したサファイア基板を準備する基板準備工程と、
前記サファイア基板の、底面が円形状であり先端が三角錐状である前記凸部が形成された側の面上に窒化物半導体からなる半導体層を成長させる半導体層成長工程と、
を含む窒化物半導体素子の製造方法。 - 前記半導体層成長工程の前に、前記サファイア基板の前記凸部が形成された側の面上にバッファ層を形成するバッファ層形成工程を行う請求項1から請求項4のいずれか一項に記載の窒化物半導体素子の製造方法。
- c面側の表面に、底面が円形状であり、先端は頂点から3つの稜線が伸びた三角錐状であり、かつ前記稜線は上面視においてm軸方向に伸びている凸部が複数形成されたサファイア基板と、
前記サファイア基板の、底面が円形状であり先端が三角錐状である前記凸部が形成された面上に設けられた窒化物半導体からなる半導体層と、
を備える窒化物半導体素子。 - 前記凸部のうち前記稜線が存在する部分である上凸部の高さは、前記凸部全体の高さの10%以上を占める請求項6に記載の窒化物半導体素子。
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JP2014091993A JP6248786B2 (ja) | 2014-04-25 | 2014-04-25 | 窒化物半導体素子およびその製造方法 |
US14/694,792 US9525105B2 (en) | 2014-04-25 | 2015-04-23 | Nitride semiconductor element and method for manufacturing the same |
US15/349,584 US9859465B2 (en) | 2014-04-25 | 2016-11-11 | Nitride semiconductor element and method for manufacturing the same |
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JP6248786B2 (ja) * | 2014-04-25 | 2017-12-20 | 日亜化学工業株式会社 | 窒化物半導体素子およびその製造方法 |
JP6415909B2 (ja) * | 2014-09-17 | 2018-10-31 | 住友化学株式会社 | 窒化物半導体テンプレートの製造方法 |
JP6436694B2 (ja) * | 2014-09-17 | 2018-12-12 | 住友化学株式会社 | 窒化物半導体テンプレートの製造方法 |
JP6375890B2 (ja) * | 2014-11-18 | 2018-08-22 | 日亜化学工業株式会社 | 窒化物半導体素子及びその製造方法 |
JP6245239B2 (ja) * | 2015-09-11 | 2017-12-13 | 日亜化学工業株式会社 | 半導体レーザ素子の製造方法 |
CN115351886A (zh) * | 2015-10-16 | 2022-11-18 | 圣戈本陶瓷及塑料股份有限公司 | 具有复杂几何形状的透明陶瓷和其制造方法 |
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US20190103267A1 (en) * | 2017-09-29 | 2019-04-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor substrate and method of manufacturing thereof |
JP2019176124A (ja) * | 2018-03-26 | 2019-10-10 | 日亜化学工業株式会社 | 半導体装置の製造方法、及び、半導体装置 |
US10600825B2 (en) * | 2018-05-21 | 2020-03-24 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Manufacturing method for TFT array substrate and TFT array substrate |
CN113921662B (zh) * | 2021-09-29 | 2024-03-12 | 广东中图半导体科技股份有限公司 | 一种图形化复合衬底、制备方法及led外延片 |
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US9859465B2 (en) | 2018-01-02 |
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