JP6243290B2 - 成膜方法及び成膜装置 - Google Patents
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- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
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- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
- C23C16/45548—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
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- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32899—Multiple chambers, e.g. cluster tools
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Description
前記回転テーブルを回転させることにより前記基板が移動可能な第2の処理領域で、前記基板上に、前記第1の金属元素及び前記第2の金属元素と反応してそれぞれ第1の反応生成物及び第2の反応生成物を生成し得る非金属元素を含む反応ガスをプラズマ化して供給し、前記第1及び第2の金属元素と前記非金属元素とを含む第3の反応生成物を生成する反応ガス供給工程と、を有し、
前記第3の反応生成物に含まれる前記第1の金属元素の混合比率は前記第2の金属元素よりも高く、前記第2の反応生成物の結晶化温度は前記第1の反応生成物の結晶化温度よりも高い。
該処理容器内に設けられ、基板を載置可能な回転テーブルと、
該回転テーブルの上方に、該回転テーブルの回転方向に沿って互いに離間して設けられた第1及び第2の処理領域と、
該第1の処理領域内に、第1の原料ガスを供給するために設けられ、前記基板の上方に配置された第1のガス吐出孔と、前記第1の原料ガスとは異なる種類の第2の原料ガスを前記第1の原料ガスとは個別に供給するために設けられ、前記基板の上方に配置された第2のガス吐出孔と、
前記第2の処理領域内に、前記第1及び第2の原料ガスと反応してそれぞれ第1及び第2の反応生成物を生成し得る反応ガスを供給するために設けられた反応ガス供給部と、
前記反応ガスをプラズマ化するプラズマ発生機構と、を有する。
図1及び図2に示すように、本発明の実施形態に係る成膜装置は、平面形状が概ね円形である真空容器1と、この真空容器1内に設けられ、当該真空容器1の中心に回転中心を有する載置台である回転テーブル2と、を備えている。そして、この成膜装置では、後で詳述するように、例えば直径寸法が300mmサイズのウエハWの表面にALD法により反応生成物を積層して薄膜を成膜すると共に、この薄膜に対してプラズマ改質を行うように構成されている。この時、プラズマ改質を行うにあたって、プラズマによって薄膜の表面が結晶化して粗化ないように成膜プロセスが行われるが、このような成膜プロセスを実現できるように成膜装置が構成されている。以下、成膜装置の各部について詳述する。
次に、上述のような成膜装置を用いた本発明の実施形態に係る成膜方法について説明する。なお、本実施形態に係る成膜方法は、上述の成膜装置による実施に限定されず、他のALD装置や、ガス及び低温プラズマを用いて成膜を行う他の成膜装置にも適用可能であるが、理解の容易のため、上述の成膜装置を用いた成膜方法について説明する。
次に、本発明の実施例に係る成膜方法について説明する。
2 回転テーブル
24 凹部
31、32、33 処理ガスノズル
34 プラズマ発生用ガスノズル
41、42 分離ガスノズル
80 プラズマ発生部
90 筐体
P1、P2 処理領域
D 分離領域
Claims (14)
- 第1の処理領域で、回転テーブル上に載置された基板上に、前記基板の上方に配置された第1のガス吐出孔から第1の金属元素を含む第1の原料ガスを供給し、同時に、前記基板の上方に配置された第2のガス吐出孔から第2の金属元素を含む第2の原料ガスを供給する、第1の原料ガス及び第2の原料ガス供給工程と、
前記回転テーブルを回転させることにより前記基板が移動可能な第2の処理領域で、前記基板上に、前記第1の金属元素及び前記第2の金属元素と反応してそれぞれ第1の反応生成物及び第2の反応生成物を生成し得る非金属元素を含む反応ガスをプラズマ化して供給し、前記第1及び第2の金属元素と前記非金属元素とを含む第3の反応生成物を生成する反応ガス供給工程と、を有し、
前記第3の反応生成物に含まれる前記第1の金属元素の混合比率は前記第2の金属元素よりも高く、前記第2の反応生成物の結晶化温度は前記第1の反応生成物の結晶化温度よりも高い成膜方法。 - 前記第1の反応生成物は、前記第2の反応生成物よりも加工が容易である請求項1に記載の成膜方法。
- 前記加工は、エッチング加工である請求項2に記載の成膜方法。
- 前記非金属元素は、酸素、窒素、臭素、炭素のいずれか1つである請求項1乃至3のいずれか一項に記載の成膜方法。
- 前記基板は、前記第1の反応生成物の結晶化温度よりも低い所定の基板温度に設定されている請求項1乃至4のいずれか一項に記載の成膜方法。
- 前記第2の金属元素は、プラズマ化により前記第1の反応生成物の結晶化温度が実質的に低下しても、前記所定の基板温度で前記第3の反応生成物が結晶化しない元素が選択される請求項5に記載の成膜方法。
- 前記回転テーブルは連続的に回転し、前記第1の処理領域で行われる前記第1の原料ガス及び前記第2の原料ガス供給工程と、前記第2の処理領域で行われる前記反応ガス供給工程が連続的に交互に繰り返される請求項1乃至6のいずれか一項に記載の成膜方法。
- 前記第1の処理領域と前記第2の処理領域は、前記回転テーブルの回転方向に沿って離間して設けられるとともに、前記第1の処理領域と前記第2の処理領域との間に不活性ガスを供給可能な分離領域が設けられ、
前記第1の原料ガス及び前記第2の原料ガス供給工程と前記反応ガス供給工程との間に、前記基板上に前記不活性ガスを供給する分離工程が更に設けられる請求項7に記載の成膜方法。 - 前記第1の原料ガスと前記第2の原料ガスは、第1及び第2のガスノズルに設けられた前記第1及び第2のガス吐出孔から個別に供給される請求項1乃至8のいずれか一項に記載の成膜方法。
- 前記第1の原料ガスはTiを含むTiCl4ガスであり、前記第2の原料ガスはAlを含むTMAガスであり、前記反応ガスは酸化ガスである請求項1乃至9のいずれか一項に記載の成膜方法。
- 前記第3の反応生成物は、パターニング用のハードマスクとして利用可能である請求項1乃至10のいずれか一項に記載の成膜方法。
- 処理容器と、
該処理容器内に設けられ、基板を載置可能な回転テーブルと、
該回転テーブルの上方に、該回転テーブルの回転方向に沿って互いに離間して設けられた第1及び第2の処理領域と、
該第1の処理領域内に、第1の原料ガスを供給するために設けられ、前記基板の上方に配置された第1のガス吐出孔と、前記第1の原料ガスとは異なる種類の第2の原料ガスを前記第1の原料ガスとは個別に供給するために設けられ、前記基板の上方に配置された第2のガス吐出孔と、
前記第2の処理領域内に、前記第1及び第2の原料ガスと反応してそれぞれ第1及び第2の反応生成物を生成し得る反応ガスを供給するために設けられた反応ガス供給部と、
前記反応ガスをプラズマ化するプラズマ発生機構と、を有する成膜装置。 - 前記第1及び第2のガス吐出孔は、第1及び第2の原料ガスノズルに設けられており、
該第1及び第2の原料ガスノズルは、前記第1及び第2の原料ガスを供給するのに適したノズル形状を各々有する請求項12に記載の成膜装置。 - 前記第1及び第2の原料ガスノズルは、ノズル孔の大きさ、配置及び分布密度の少なくとも1つが異なる請求項13に記載の成膜装置。
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JP2014094683A JP6243290B2 (ja) | 2014-05-01 | 2014-05-01 | 成膜方法及び成膜装置 |
KR1020150057175A KR101933260B1 (ko) | 2014-05-01 | 2015-04-23 | 성막 방법 및 성막 장치 |
US14/694,200 US9551068B2 (en) | 2014-05-01 | 2015-04-23 | Film forming method and film forming apparatus |
TW104113631A TWI611042B (zh) | 2014-05-01 | 2015-04-29 | 成膜方法及成膜裝置 |
CN201510217188.XA CN105039929B (zh) | 2014-05-01 | 2015-04-30 | 成膜方法和成膜装置 |
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DE102015118215A1 (de) * | 2014-11-28 | 2016-06-02 | Aixtron Se | Substrathaltevorrichtung mit vereinzelten Tragvorsprüngen zur Auflage des Substrates |
JP6545094B2 (ja) * | 2015-12-17 | 2019-07-17 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
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