JP6241381B2 - エピタキシャルシリコンウェーハの製造方法 - Google Patents
エピタキシャルシリコンウェーハの製造方法 Download PDFInfo
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- JP6241381B2 JP6241381B2 JP2014141551A JP2014141551A JP6241381B2 JP 6241381 B2 JP6241381 B2 JP 6241381B2 JP 2014141551 A JP2014141551 A JP 2014141551A JP 2014141551 A JP2014141551 A JP 2014141551A JP 6241381 B2 JP6241381 B2 JP 6241381B2
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 97
- 229910052710 silicon Inorganic materials 0.000 title claims description 97
- 239000010703 silicon Substances 0.000 title claims description 97
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000001301 oxygen Substances 0.000 claims description 97
- 229910052760 oxygen Inorganic materials 0.000 claims description 97
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 96
- 238000010438 heat treatment Methods 0.000 claims description 69
- 238000001556 precipitation Methods 0.000 claims description 29
- 230000001629 suppression Effects 0.000 claims description 23
- 230000014509 gene expression Effects 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 119
- 239000002244 precipitate Substances 0.000 description 44
- 239000010410 layer Substances 0.000 description 26
- 230000007547 defect Effects 0.000 description 24
- 238000000034 method Methods 0.000 description 21
- 239000013078 crystal Substances 0.000 description 20
- 238000011156 evaluation Methods 0.000 description 12
- 238000005247 gettering Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000002776 aggregation Effects 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 2
- 239000005052 trichlorosilane Substances 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
- H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
- H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
- H01L21/3225—Thermally inducing defects using oxygen present in the silicon body for intrinsic gettering
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- H01L21/67248—Temperature monitoring
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/30—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface
- H01L29/32—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface the imperfections being within the semiconductor body
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/203—Controlling or regulating the relationship of pull rate (v) to axial thermal gradient (G)
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/02—Heat treatment
Description
酸素濃度が9×1017atoms/cm3〜16×1017atoms/cm3の範囲にあり、転位クラスターおよびCOPを含まず、かつ酸素析出抑制領域を含むシリコンウェーハに対して、酸素析出物の密度を高くするための熱処理を施す予備熱処理工程と、
前記予備熱処理工程の後、前記シリコンウェーハの表面上にエピタキシャル層を形成するエピタキシャル層形成工程とを含み、
前記予備熱処理工程を実施する前の前記シリコンウェーハの酸素析出抑制領域の割合に基づいて、前記予備熱処理工程での熱処理条件を決定する熱処理条件決定工程をさらに含み、
前記熱処理条件決定工程では、前記予備熱処理工程での熱処理の温度(℃)をTとし、前記シリコンウェーハの半径に対する前記シリコンウェーハ半径方向の酸素析出抑制領域の幅の割合(%)をXとし、前記シリコンウェーハの酸素濃度(atoms/cm 3 )をCoとすると、下記(1)〜(3)の関係式のいずれかを満足するように前記熱処理条件を決定する、エピタキシャルシリコンウェーハの製造方法。
9×10 17 atoms/cm 3 ≦Co<11.5×10 17 atoms/cm 3 の場合:(Co×(100−X)/5.3×10 51 ) (-1/11.29) <T≦800 (1)
11.5×10 17 atoms/cm 3 ≦Co<13.5×10 17 atoms/cm 3 の場合:(Co×(100−X)/5.3×10 51 ) (-1/11.29) <T≦900−(13.5×10 17 −Co)×5×10 -16 (2)
13.5×10 17 atoms/cm 3 ≦Co≦16×10 17 atoms/cm 3 の場合:(Co×(100−X)/5.3×10 51 ) (-1/11.29) <T≦900 (3)
予備熱処理工程で熱処理をするシリコンウェーハは、酸素析出抑制領域と酸素析出促進領域とが混在したものであってもよい。このため、シリコンウェーハを切り出すべきシリコン単結晶の製造時に、制御プロセスマージン幅を広くすることができる。予備熱処理工程で熱処理をするシリコンウェーハは、酸素析出抑制領域のみからなるものであってもよい。
9×1017atoms/cm3≦Co<11.5×1017atoms/cm3の場合:(Co×(100−X)/5.3×1051)(-1/11.29)<T≦800 (1)
11.5×1017atoms/cm3≦Co<13.5×1017atoms/cm3の場合:(Co×(100−X)/5.3×1051)(-1/11.29)<T≦900−(13.5×1017−Co)×5×10-16 (2)
13.5×1017atoms/cm3≦Co≦16×1017atoms/cm3の場合:(Co×(100−X)/5.3×1051)(-1/11.29)<T≦900 (3)
上記(1)〜(3)の関係式において、T、XおよびCoの意味は、以下の通りである。
T:予備熱処理工程での熱処理の温度(℃)
X:シリコンウェーハの半径に対するシリコンウェーハ半径方向の酸素析出抑制領域の幅の割合(%)
Co:シリコンウェーハの酸素濃度(atoms/cm3)
チョクラルスキー法により、COPおよび転位クラスターを含まない、直径が約300mmの複数のシリコン単結晶を製造し、これらのシリコン単結晶の各部位から、シリコンウェーハを切り出した。シリコン単結晶の育成に際しては、酸素濃度および酸素析出抑制領域の割合が種々異なるように育成条件を変更した。
(Co×(100−X)/5.3×1051)(-1/11.29)<T≦800 (1)
である。
(Co×(100−X)/5.3×1051)(-1/11.29)<T≦900−(13.5×1017−Co)×5×10-16 (2)
である。
(Co×(100−X)/5.3×1051)(-1/11.29)<T≦900 (3)
である。
Claims (1)
- エピタキシャルシリコンウェーハの製造方法であって、
酸素濃度が9×1017atoms/cm3〜16×1017atoms/cm3の範囲にあり、転位クラスターおよびCOPを含まず、かつ酸素析出抑制領域を含むシリコンウェーハに対して、酸素析出物の密度を高くするための熱処理を施す予備熱処理工程と、
前記予備熱処理工程の後、前記シリコンウェーハの表面上にエピタキシャル層を形成するエピタキシャル層形成工程とを含み、
前記予備熱処理工程を実施する前の前記シリコンウェーハの酸素析出抑制領域の割合に基づいて、前記予備熱処理工程での熱処理条件を決定する熱処理条件決定工程をさらに含み、
前記熱処理条件決定工程では、前記予備熱処理工程での熱処理の温度(℃)をTとし、前記シリコンウェーハの半径に対する前記シリコンウェーハ半径方向の酸素析出抑制領域の幅の割合(%)をXとし、前記シリコンウェーハの酸素濃度(atoms/cm 3 )をCoとすると、下記(1)〜(3)の関係式のいずれかを満足するように前記熱処理条件を決定する、エピタキシャルシリコンウェーハの製造方法。
9×10 17 atoms/cm 3 ≦Co<11.5×10 17 atoms/cm 3 の場合:(Co×(100−X)/5.3×10 51 ) (-1/11.29) <T≦800 (1)
11.5×10 17 atoms/cm 3 ≦Co<13.5×10 17 atoms/cm 3 の場合:(Co×(100−X)/5.3×10 51 ) (-1/11.29) <T≦900−(13.5×10 17 −Co)×5×10 -16 (2)
13.5×10 17 atoms/cm 3 ≦Co≦16×10 17 atoms/cm 3 の場合:(Co×(100−X)/5.3×10 51 ) (-1/11.29) <T≦900 (3)
Priority Applications (5)
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JP2014141551A JP6241381B2 (ja) | 2014-07-09 | 2014-07-09 | エピタキシャルシリコンウェーハの製造方法 |
PCT/JP2015/002157 WO2016006145A1 (ja) | 2014-07-09 | 2015-04-21 | エピタキシャルシリコンウェーハおよびその製造方法 |
KR1020177000133A KR101939129B1 (ko) | 2014-07-09 | 2015-04-21 | 에피택셜 실리콘 웨이퍼의 제조 방법 |
CN201580036994.5A CN106663628B (zh) | 2014-07-09 | 2015-04-21 | 外延硅晶片和其制造方法 |
US15/311,307 US10192754B2 (en) | 2014-07-09 | 2015-04-21 | Epitaxial silicon wafer and method for producing the epitaxial silicon wafer |
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JP2016018927A JP2016018927A (ja) | 2016-02-01 |
JP2016018927A5 JP2016018927A5 (ja) | 2016-11-24 |
JP6241381B2 true JP6241381B2 (ja) | 2017-12-06 |
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CN108505114B (zh) * | 2017-02-28 | 2021-03-05 | 胜高股份有限公司 | 外延生长晶圆及其制造方法 |
KR20200094882A (ko) | 2019-01-30 | 2020-08-10 | 삼성전자주식회사 | 에피택셜 웨이퍼 및 그의 제조 방법 |
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US5994761A (en) | 1997-02-26 | 1999-11-30 | Memc Electronic Materials Spa | Ideal oxygen precipitating silicon wafers and oxygen out-diffusion-less process therefor |
JP4473571B2 (ja) | 2001-07-10 | 2010-06-02 | 信越半導体株式会社 | シリコンウェーハの製造方法 |
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JP2006054350A (ja) * | 2004-08-12 | 2006-02-23 | Komatsu Electronic Metals Co Ltd | 窒素ドープシリコンウェーハとその製造方法 |
US7977216B2 (en) | 2008-09-29 | 2011-07-12 | Magnachip Semiconductor, Ltd. | Silicon wafer and fabrication method thereof |
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JP5515406B2 (ja) | 2009-05-15 | 2014-06-11 | 株式会社Sumco | シリコンウェーハおよびその製造方法 |
KR101461531B1 (ko) | 2010-02-08 | 2014-11-13 | 가부시키가이샤 사무코 | 실리콘 웨이퍼 및 그 제조 방법, 그리고, 반도체 디바이스의 제조 방법 |
JP2011243923A (ja) * | 2010-05-21 | 2011-12-01 | Sumco Corp | シリコンウェーハの製造方法 |
DE102010034002B4 (de) * | 2010-08-11 | 2013-02-21 | Siltronic Ag | Siliciumscheibe und Verfahren zu deren Herstellung |
JP6458551B2 (ja) | 2015-02-25 | 2019-01-30 | 株式会社Sumco | シリコンウェーハの良否判定方法、該方法を用いたシリコンウェーハの製造方法およびシリコンウェーハ |
JP6413952B2 (ja) | 2015-06-26 | 2018-10-31 | 株式会社Sumco | シリコンウェーハの良否判定方法、該方法を用いたシリコンウェーハの製造方法およびシリコンウェーハ |
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