JP6227337B2 - 光計測装置 - Google Patents

光計測装置 Download PDF

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Publication number
JP6227337B2
JP6227337B2 JP2013187398A JP2013187398A JP6227337B2 JP 6227337 B2 JP6227337 B2 JP 6227337B2 JP 2013187398 A JP2013187398 A JP 2013187398A JP 2013187398 A JP2013187398 A JP 2013187398A JP 6227337 B2 JP6227337 B2 JP 6227337B2
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JP
Japan
Prior art keywords
light
optical
scanning
axis direction
optical axis
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Expired - Fee Related
Application number
JP2013187398A
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English (en)
Japanese (ja)
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JP2014160057A (ja
JP2014160057A5 (enExample
Inventor
賢太郎 大澤
賢太郎 大澤
渡辺　康一
康一 渡辺
大輔 冨田
大輔 冨田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi LG Data Storage Inc
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Hitachi LG Data Storage Inc
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Filing date
Publication date
Application filed by Hitachi LG Data Storage Inc filed Critical Hitachi LG Data Storage Inc
Priority to JP2013187398A priority Critical patent/JP6227337B2/ja
Priority to US14/074,851 priority patent/US9658054B2/en
Priority to CN201310573943.9A priority patent/CN103961056B/zh
Publication of JP2014160057A publication Critical patent/JP2014160057A/ja
Publication of JP2014160057A5 publication Critical patent/JP2014160057A5/ja
Application granted granted Critical
Publication of JP6227337B2 publication Critical patent/JP6227337B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/35—Mechanical variable delay line
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/65—Spatial scanning object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2013187398A 2013-01-24 2013-09-10 光計測装置 Expired - Fee Related JP6227337B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013187398A JP6227337B2 (ja) 2013-01-24 2013-09-10 光計測装置
US14/074,851 US9658054B2 (en) 2013-01-24 2013-11-08 Optical measuring apparatus
CN201310573943.9A CN103961056B (zh) 2013-01-24 2013-11-15 光测量装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013011408 2013-01-24
JP2013011408 2013-01-24
JP2013187398A JP6227337B2 (ja) 2013-01-24 2013-09-10 光計測装置

Publications (3)

Publication Number Publication Date
JP2014160057A JP2014160057A (ja) 2014-09-04
JP2014160057A5 JP2014160057A5 (enExample) 2016-03-31
JP6227337B2 true JP6227337B2 (ja) 2017-11-08

Family

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Family Applications (1)

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JP2013187398A Expired - Fee Related JP6227337B2 (ja) 2013-01-24 2013-09-10 光計測装置

Country Status (3)

Country Link
US (1) US9658054B2 (enExample)
JP (1) JP6227337B2 (enExample)
CN (1) CN103961056B (enExample)

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JP6188521B2 (ja) * 2013-10-02 2017-08-30 株式会社日立エルジーデータストレージ 光計測装置
JP6227449B2 (ja) * 2014-03-14 2017-11-08 株式会社日立エルジーデータストレージ 光断層観察装置
JP6231958B2 (ja) * 2014-08-20 2017-11-15 株式会社日立エルジーデータストレージ 光画像計測装置
JP6387281B2 (ja) * 2014-10-09 2018-09-05 浜松ホトニクス株式会社 Ｏｃｔ装置用光検出モジュール及びｏｃｔ装置
JP6462432B2 (ja) * 2015-03-11 2019-01-30 株式会社日立エルジーデータストレージ 光計測装置及び光計測方法
JP6523871B2 (ja) * 2015-08-26 2019-06-05 株式会社日立エルジーデータストレージ 光計測装置
JP6559555B2 (ja) 2015-12-02 2019-08-14 株式会社日立エルジーデータストレージ 光計測方法および装置
US10436573B2 (en) * 2015-12-09 2019-10-08 Carl Zeiss Meditec, Inc. Balanced detection systems
JP6666792B2 (ja) * 2016-05-20 2020-03-18 株式会社日立エルジーデータストレージ 光画像計測装置、光画像計測方法
JP2018048899A (ja) 2016-09-21 2018-03-29 株式会社日立製作所 レーザ計測装置及びレーザ超音波装置
JP6720051B2 (ja) * 2016-10-27 2020-07-08 株式会社日立エルジーデータストレージ 光画像計測装置、光画像計測方法
JP6843585B2 (ja) * 2016-10-28 2021-03-17 株式会社日立エルジーデータストレージ 走査型画像計測装置及び走査型画像計測方法
CA3048197A1 (en) * 2016-12-21 2018-06-28 Acucela Inc. Miniaturized mobile, low cost optical coherence tomography system for home based ophthalmic applications
JP6805930B2 (ja) * 2017-03-29 2020-12-23 株式会社島津製作所 振動測定装置
JP6826496B2 (ja) * 2017-06-07 2021-02-03 タツタ電線株式会社 光干渉ユニットおよび光干渉測定装置
JP6887350B2 (ja) * 2017-09-06 2021-06-16 株式会社日立製作所 光画像計測装置
JP6404425B2 (ja) * 2017-09-27 2018-10-10 株式会社日立エルジーデータストレージ 光画像計測装置
JP7050282B2 (ja) * 2017-12-22 2022-04-08 株式会社トーメーコーポレーション 光断層画像撮影装置及びそれに用いる光源装置
JP7144822B2 (ja) * 2017-12-22 2022-09-30 株式会社トーメーコーポレーション 光断層画像撮影装置
FR3084489B1 (fr) * 2018-07-26 2020-09-11 Etat Francais Represente Par Le Delegue General Pour Larmement Procede de detection d’au moins un equipement informatique compromis au sein d’un systeme d’information
CN112567196B (zh) * 2018-09-03 2023-07-11 株式会社岛津制作所 干涉仪移动镜位置测定装置和傅里叶变换红外分光光谱仪
CN111609997B (zh) * 2020-05-07 2022-04-19 中国科学院光电技术研究所 一种适用于透射式光学元件光程均匀性测量的检测装置
CN113465884B (zh) * 2021-06-03 2023-06-06 中国科学院空天信息创新研究院 连续激光损伤阈值测试装置
CN115575354B (zh) * 2022-09-23 2025-10-24 中国科学院西安光学精密机械研究所 一种超光滑表面元件的散射特性测量装置及方法

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US5321501A (en) * 1991-04-29 1994-06-14 Massachusetts Institute Of Technology Method and apparatus for optical imaging with means for controlling the longitudinal range of the sample
JP3602925B2 (ja) * 1995-12-08 2004-12-15 独立行政法人科学技術振興機構 光干渉法による測定対象物の屈折率と厚さの同時測定装置
US7450618B2 (en) * 2001-01-30 2008-11-11 Board Of Trustees Operating Michigan State University Laser system using ultrashort laser pulses
US7697145B2 (en) * 2003-05-28 2010-04-13 Duke University System for fourier domain optical coherence tomography
EP1644720A2 (en) * 2003-06-19 2006-04-12 Massachusetts Institute Of Technology Systems and methods for phase measurements
JP4996917B2 (ja) * 2006-12-26 2012-08-08 株式会社トプコン 光画像計測装置及び光画像計測装置を制御するプログラム
JP5448353B2 (ja) * 2007-05-02 2014-03-19 キヤノン株式会社 光干渉断層計を用いた画像形成方法、及び光干渉断層装置
HU0800688D0 (en) * 2008-11-17 2009-01-28 Femtonics Kft Multiple free line-scan mode of scanning
JP5351976B2 (ja) * 2008-12-09 2013-11-27 ザイゴ コーポレーション 二重グレーチング横方向シアリング波面センサ
JP5649286B2 (ja) * 2008-12-26 2015-01-07 キヤノン株式会社 光断層撮像装置、被検査物の画像を撮る撮像装置、光断層撮像装置の制御方法及びそのコンピュータプログラム
JP5725697B2 (ja) * 2009-05-11 2015-05-27 キヤノン株式会社 情報処理装置および情報処理方法
JP5610706B2 (ja) * 2009-05-22 2014-10-22 キヤノン株式会社 撮像装置および撮像方法
JP5627260B2 (ja) * 2009-05-22 2014-11-19 キヤノン株式会社 撮像装置および撮像方法
JP5306269B2 (ja) * 2009-06-25 2013-10-02 キヤノン株式会社 光干渉断層法を用いる撮像装置及び撮像方法
JP5256161B2 (ja) 2009-10-02 2013-08-07 日立コンシューマエレクトロニクス株式会社 光情報記録再生装置及び情報再生装置
JP5801577B2 (ja) 2010-03-25 2015-10-28 キヤノン株式会社 光断層撮像装置及び光断層撮像装置の制御方法
JP5917004B2 (ja) * 2011-03-10 2016-05-11 キヤノン株式会社 撮像装置及び撮像装置の制御方法
JP5701660B2 (ja) * 2011-03-31 2015-04-15 株式会社ニデック 眼底撮影装置
JP5220155B2 (ja) 2011-03-31 2013-06-26 キヤノン株式会社 眼科装置および眼科装置の制御方法
JP2013146447A (ja) * 2012-01-20 2013-08-01 Canon Inc 撮影装置、画像処理方法、及びプログラム

Also Published As

Publication number Publication date
CN103961056A (zh) 2014-08-06
US9658054B2 (en) 2017-05-23
CN103961056B (zh) 2016-05-04
JP2014160057A (ja) 2014-09-04
US20140204388A1 (en) 2014-07-24

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