CN103961056B - 光测量装置 - Google Patents

光测量装置 Download PDF

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Publication number
CN103961056B
CN103961056B CN201310573943.9A CN201310573943A CN103961056B CN 103961056 B CN103961056 B CN 103961056B CN 201310573943 A CN201310573943 A CN 201310573943A CN 103961056 B CN103961056 B CN 103961056B
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CN
China
Prior art keywords
light
optical
light beam
lens
interference
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Expired - Fee Related
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CN201310573943.9A
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English (en)
Chinese (zh)
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CN103961056A (zh
Inventor
大泽贤太郎
渡辺康一
富田大辅
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Hitachi LG Data Storage Inc
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Hlds Light Science And Technology Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/35—Mechanical variable delay line
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/65—Spatial scanning object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN201310573943.9A 2013-01-24 2013-11-15 光测量装置 Expired - Fee Related CN103961056B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2013011408 2013-01-24
JP2013-011408 2013-01-24
JP2013-187398 2013-09-10
JP2013187398A JP6227337B2 (ja) 2013-01-24 2013-09-10 光計測装置

Publications (2)

Publication Number Publication Date
CN103961056A CN103961056A (zh) 2014-08-06
CN103961056B true CN103961056B (zh) 2016-05-04

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Country Status (3)

Country Link
US (1) US9658054B2 (enExample)
JP (1) JP6227337B2 (enExample)
CN (1) CN103961056B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
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CN109459414A (zh) * 2017-09-06 2019-03-12 株式会社日立制作所 光图像计测装置

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JP6188521B2 (ja) * 2013-10-02 2017-08-30 株式会社日立エルジーデータストレージ 光計測装置
JP6227449B2 (ja) * 2014-03-14 2017-11-08 株式会社日立エルジーデータストレージ 光断層観察装置
JP6231958B2 (ja) * 2014-08-20 2017-11-15 株式会社日立エルジーデータストレージ 光画像計測装置
JP6387281B2 (ja) * 2014-10-09 2018-09-05 浜松ホトニクス株式会社 Ｏｃｔ装置用光検出モジュール及びｏｃｔ装置
JP6462432B2 (ja) 2015-03-11 2019-01-30 株式会社日立エルジーデータストレージ 光計測装置及び光計測方法
JP6523871B2 (ja) 2015-08-26 2019-06-05 株式会社日立エルジーデータストレージ 光計測装置
JP6559555B2 (ja) 2015-12-02 2019-08-14 株式会社日立エルジーデータストレージ 光計測方法および装置
WO2017097886A1 (en) * 2015-12-09 2017-06-15 Carl Zeiss Meditec Ag Balanced detection systems
JP6666792B2 (ja) * 2016-05-20 2020-03-18 株式会社日立エルジーデータストレージ 光画像計測装置、光画像計測方法
JP2018048899A (ja) 2016-09-21 2018-03-29 株式会社日立製作所 レーザ計測装置及びレーザ超音波装置
JP6720051B2 (ja) * 2016-10-27 2020-07-08 株式会社日立エルジーデータストレージ 光画像計測装置、光画像計測方法
JP6843585B2 (ja) * 2016-10-28 2021-03-17 株式会社日立エルジーデータストレージ 走査型画像計測装置及び走査型画像計測方法
JP7019700B2 (ja) * 2016-12-21 2022-02-15 アキュセラ インコーポレイテッド 網膜の厚さを測定するための光干渉断層撮影（ｏｃｔ）システム
JP6805930B2 (ja) * 2017-03-29 2020-12-23 株式会社島津製作所 振動測定装置
JP6826496B2 (ja) * 2017-06-07 2021-02-03 タツタ電線株式会社 光干渉ユニットおよび光干渉測定装置
JP6404425B2 (ja) * 2017-09-27 2018-10-10 株式会社日立エルジーデータストレージ 光画像計測装置
JP7050282B2 (ja) * 2017-12-22 2022-04-08 株式会社トーメーコーポレーション 光断層画像撮影装置及びそれに用いる光源装置
JP7144822B2 (ja) * 2017-12-22 2022-09-30 株式会社トーメーコーポレーション 光断層画像撮影装置
FR3084489B1 (fr) * 2018-07-26 2020-09-11 Etat Francais Represente Par Le Delegue General Pour Larmement Procede de detection d’au moins un equipement informatique compromis au sein d’un systeme d’information
JP7099530B2 (ja) * 2018-09-03 2022-07-12 株式会社島津製作所 干渉計移動鏡位置測定装置及びフーリエ変換赤外分光光度計
CN111609997B (zh) * 2020-05-07 2022-04-19 中国科学院光电技术研究所 一种适用于透射式光学元件光程均匀性测量的检测装置
CN113465884B (zh) * 2021-06-03 2023-06-06 中国科学院空天信息创新研究院 连续激光损伤阈值测试装置
CN115575354B (zh) * 2022-09-23 2025-10-24 中国科学院西安光学精密机械研究所 一种超光滑表面元件的散射特性测量装置及方法

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CN101234015A (zh) * 2006-12-26 2008-08-06 株式会社拓普康 光图像计测装置
WO2010150483A2 (en) * 2009-06-25 2010-12-29 Canon Kabushiki Kaisha Image pickup apparatus and image pickup method using optical coherence tomography
CN102034496A (zh) * 2009-10-02 2011-04-27 日立民用电子株式会社 光信息记录再生装置
CN102670169A (zh) * 2011-03-10 2012-09-19 佳能株式会社 摄像设备及其控制方法
WO2012132339A2 (en) * 2011-03-31 2012-10-04 Canon Kabushiki Kaisha Ophthalmologic apparatus

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JP3602925B2 (ja) * 1995-12-08 2004-12-15 独立行政法人科学技術振興機構 光干渉法による測定対象物の屈折率と厚さの同時測定装置
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HU0800688D0 (en) * 2008-11-17 2009-01-28 Femtonics Kft Multiple free line-scan mode of scanning
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JP5649286B2 (ja) * 2008-12-26 2015-01-07 キヤノン株式会社 光断層撮像装置、被検査物の画像を撮る撮像装置、光断層撮像装置の制御方法及びそのコンピュータプログラム
JP5725697B2 (ja) * 2009-05-11 2015-05-27 キヤノン株式会社 情報処理装置および情報処理方法
JP5610706B2 (ja) * 2009-05-22 2014-10-22 キヤノン株式会社 撮像装置および撮像方法
JP5627260B2 (ja) * 2009-05-22 2014-11-19 キヤノン株式会社 撮像装置および撮像方法
JP5801577B2 (ja) 2010-03-25 2015-10-28 キヤノン株式会社 光断層撮像装置及び光断層撮像装置の制御方法
JP5701660B2 (ja) * 2011-03-31 2015-04-15 株式会社ニデック 眼底撮影装置
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CN101234015A (zh) * 2006-12-26 2008-08-06 株式会社拓普康 光图像计测装置
WO2010150483A2 (en) * 2009-06-25 2010-12-29 Canon Kabushiki Kaisha Image pickup apparatus and image pickup method using optical coherence tomography
CN102034496A (zh) * 2009-10-02 2011-04-27 日立民用电子株式会社 光信息记录再生装置
CN102670169A (zh) * 2011-03-10 2012-09-19 佳能株式会社 摄像设备及其控制方法
WO2012132339A2 (en) * 2011-03-31 2012-10-04 Canon Kabushiki Kaisha Ophthalmologic apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109459414A (zh) * 2017-09-06 2019-03-12 株式会社日立制作所 光图像计测装置

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US20140204388A1 (en) 2014-07-24
CN103961056A (zh) 2014-08-06
JP2014160057A (ja) 2014-09-04
US9658054B2 (en) 2017-05-23
JP6227337B2 (ja) 2017-11-08

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Owner name: HITACHI-LG OPTICAL TECHNOLOGY K.K.

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Effective date: 20140902

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