JP6209799B2 - フリップチップ実装用チップ保持ツール及びフリップチップ実装方法 - Google Patents
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- JP6209799B2 JP6209799B2 JP2015523888A JP2015523888A JP6209799B2 JP 6209799 B2 JP6209799 B2 JP 6209799B2 JP 2015523888 A JP2015523888 A JP 2015523888A JP 2015523888 A JP2015523888 A JP 2015523888A JP 6209799 B2 JP6209799 B2 JP 6209799B2
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
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- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
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- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
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- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/75252—Means for applying energy, e.g. heating means in the upper part of the bonding apparatus, e.g. in the bonding head
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- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/753—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/75301—Bonding head
- H01L2224/75314—Auxiliary members on the pressing surface
- H01L2224/75318—Shape of the auxiliary member
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- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/757—Means for aligning
- H01L2224/75743—Suction holding means
- H01L2224/75745—Suction holding means in the upper part of the bonding apparatus, e.g. in the bonding head
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- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
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- H01L2224/7598—Apparatus for connecting with bump connectors or layer connectors specially adapted for batch processes
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- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/818—Bonding techniques
- H01L2224/81801—Soldering or alloying
- H01L2224/81815—Reflow soldering
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
- H01L2224/83855—Hardening the adhesive by curing, i.e. thermosetting
- H01L2224/83862—Heat curing
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/921—Connecting a surface with connectors of different types
- H01L2224/9211—Parallel connecting processes
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Wire Bonding (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
Description
Claims (2)
- ヒータの下面に固定され、前記ヒータの前記下面と略同一の大きさである接続面を有する基体部と、
前記基体部の表面から突出し、その先端面に半導体チップを保持するチップ保持台と、を有するフリップチップ実装用のチップ保持ツールであって、
前記チップ保持台は、前記基体部に加わる垂直荷重の中心線が前記チップ保持台の前記先端面を貫通する位置に配置され、かつ、その前記位置が前記基体部に対してX方向及びY方向にオフセットされており、
前記チップ保持台のオフセット量は、それぞれ前記基体部のX方向及びY方向の長さの1/2から半導体チップの実装チップの1/2を差し引いた長さよりも長い、かつ、前記チップ保持台のオフセット量は、前記チップ保持台の幅の1/2よりも短いチップ保持ツール。 - フリップチップ実装方法であって、
ヒータの下面に固定され、前記ヒータの前記下面と略同一の大きさである接続面を有する基体部と、前記基体部に加わる垂直荷重の中心線がチップ保持台の先端面を貫通する位置に配置され、かつ、その前記位置が前記基体部に対してオフセットされ、先端面に半導体チップを保持するように前記基体部の表面から突出したチップ保持台と、を有し、前記チップ保持台のオフセット量は、それぞれ前記基体部のX方向及びY方向の長さの1/2から半導体チップの実装チップの1/2を差し引いた長さよりも長い、かつ、前記チップ保持台のオフセット量は、前記チップ保持台の幅の1/2よりも短いチップ保持ツールをフリップチップ実装装置にセットする工程と、
前記チップ保持台のオフセット側に向かって半導体チップの実装と基板に対する前記チップ保持ツールの相対位置を前記半導体チップの実装ピッチ分だけ移動させることを交互に繰り返し、前記基板に複数の半導体チップを実装する実装工程と、
を有し、基板に複数の半導体チップを実装するフリップチップ実装方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013133321 | 2013-06-26 | ||
JP2013133321 | 2013-06-26 | ||
PCT/JP2014/057664 WO2014208150A1 (ja) | 2013-06-26 | 2014-03-20 | フリップチップ実装用チップ保持ツール及びフリップチップ実装方法 |
Publications (2)
Publication Number | Publication Date |
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JPWO2014208150A1 JPWO2014208150A1 (ja) | 2017-02-23 |
JP6209799B2 true JP6209799B2 (ja) | 2017-10-18 |
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Application Number | Title | Priority Date | Filing Date |
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JP2015523888A Active JP6209799B2 (ja) | 2013-06-26 | 2014-03-20 | フリップチップ実装用チップ保持ツール及びフリップチップ実装方法 |
Country Status (6)
Country | Link |
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JP (1) | JP6209799B2 (ja) |
KR (1) | KR101693209B1 (ja) |
CN (1) | CN104704622B (ja) |
SG (1) | SG11201510605QA (ja) |
TW (1) | TWI531013B (ja) |
WO (1) | WO2014208150A1 (ja) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
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US3256465A (en) * | 1962-06-08 | 1966-06-14 | Signetics Corp | Semiconductor device assembly with true metallurgical bonds |
US4875614A (en) * | 1988-10-31 | 1989-10-24 | International Business Machines Corporation | Alignment device |
JP2002016091A (ja) | 2000-06-29 | 2002-01-18 | Kyocera Corp | 接触加熱装置 |
JP4299469B2 (ja) * | 2001-01-23 | 2009-07-22 | パナソニック株式会社 | 超音波接合装置 |
JP2005150446A (ja) | 2003-11-17 | 2005-06-09 | Matsushita Electric Ind Co Ltd | 電子部品の製造方法 |
JP4539454B2 (ja) * | 2005-06-20 | 2010-09-08 | パナソニック株式会社 | 電子部品の熱圧着ツールおよび電子部品の実装装置ならびに実装方法 |
KR100899942B1 (ko) * | 2007-05-31 | 2009-05-28 | 미래산업 주식회사 | 테스트 핸들러, 그를 이용한 반도체 소자 제조방법, 및테스트트레이 이송방법 |
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2013
- 2013-12-20 TW TW102147340A patent/TWI531013B/zh active
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2014
- 2014-03-20 CN CN201480002661.6A patent/CN104704622B/zh active Active
- 2014-03-20 WO PCT/JP2014/057664 patent/WO2014208150A1/ja active Application Filing
- 2014-03-20 KR KR1020157009324A patent/KR101693209B1/ko active IP Right Grant
- 2014-03-20 JP JP2015523888A patent/JP6209799B2/ja active Active
- 2014-03-20 SG SG11201510605QA patent/SG11201510605QA/en unknown
Also Published As
Publication number | Publication date |
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JPWO2014208150A1 (ja) | 2017-02-23 |
WO2014208150A1 (ja) | 2014-12-31 |
CN104704622A (zh) | 2015-06-10 |
KR20150053992A (ko) | 2015-05-19 |
TWI531013B (zh) | 2016-04-21 |
SG11201510605QA (en) | 2016-01-28 |
CN104704622B (zh) | 2017-10-27 |
TW201501221A (zh) | 2015-01-01 |
KR101693209B1 (ko) | 2017-01-17 |
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