JP6198522B2 - 陽極接合された蒸気セル内で圧力の均一性を高める製作技法 - Google Patents

陽極接合された蒸気セル内で圧力の均一性を高める製作技法 Download PDF

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JP6198522B2
JP6198522B2 JP2013175327A JP2013175327A JP6198522B2 JP 6198522 B2 JP6198522 B2 JP 6198522B2 JP 2013175327 A JP2013175327 A JP 2013175327A JP 2013175327 A JP2013175327 A JP 2013175327A JP 6198522 B2 JP6198522 B2 JP 6198522B2
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wafer
vapor cell
diameter
sacrificial
die
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Japanese (ja)
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JP2014088308A (ja
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ダニエル・ダブリュー・ヤングナー
ジェフ・エイ・リドリー
ソン・ティー・ル
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Honeywell International Inc
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Honeywell International Inc
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Priority claimed from US13/662,850 external-priority patent/US8941442B2/en
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    • G—PHYSICS
    • G04—HOROLOGY
    • G04F—TIME-INTERVAL MEASURING
    • G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/14—Apparatus for producing preselected time intervals for use as timing standards using atomic clocks
    • G04F5/145—Apparatus for producing preselected time intervals for use as timing standards using atomic clocks using Coherent Population Trapping

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  • Life Sciences & Earth Sciences (AREA)
  • Ecology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Ceramic Products (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
JP2013175327A 2012-10-29 2013-08-27 陽極接合された蒸気セル内で圧力の均一性を高める製作技法 Active JP6198522B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/662,850 US8941442B2 (en) 2010-02-04 2012-10-29 Fabrication techniques to enhance pressure uniformity in anodically bonded vapor cells
US13/662,850 2012-10-29

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JP2014088308A JP2014088308A (ja) 2014-05-15
JP6198522B2 true JP6198522B2 (ja) 2017-09-20

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EP (1) EP2746876B1 (de)
JP (1) JP6198522B2 (de)
CN (1) CN103792838B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6488599B2 (ja) 2014-09-08 2019-03-27 セイコーエプソン株式会社 量子干渉装置、原子セルの製造方法および電子機器
JP6852377B2 (ja) * 2016-12-12 2021-03-31 株式会社村田製作所 原子発振器および電子機器
CN107128871B (zh) * 2017-05-10 2019-04-05 中国电子科技集团公司第四十九研究所 一种基于mems原子芯片的物理封装件及其封装方法
US10544039B2 (en) * 2017-09-08 2020-01-28 Texas Instruments Incorporated Methods for depositing a measured amount of a species in a sealed cavity
JP2019165332A (ja) * 2018-03-19 2019-09-26 株式会社リコー 電子デバイスおよび原子発振器
JP7232510B2 (ja) * 2019-01-31 2023-03-03 国立研究開発法人情報通信研究機構 量子光学装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005016965A (ja) * 2003-06-23 2005-01-20 Sumitomo Precision Prod Co Ltd パッケージおよびその製造方法、ならびに振動ジャイロおよびその製造方法
US7400207B2 (en) * 2004-01-06 2008-07-15 Sarnoff Corporation Anodically bonded cell, method for making same and systems incorporating same
US7292111B2 (en) * 2004-04-26 2007-11-06 Northrop Grumman Corporation Middle layer of die structure that comprises a cavity that holds an alkali metal
US20060022761A1 (en) * 2004-07-16 2006-02-02 Abeles Joseph H Chip-scale atomic clock (CSAC) and method for making same
JP5121493B2 (ja) * 2008-02-21 2013-01-16 セイコーインスツル株式会社 圧電振動子の製造方法
JP2009212416A (ja) * 2008-03-06 2009-09-17 Epson Toyocom Corp ガスセルの製造方法及びガスセル
JP2009215099A (ja) * 2008-03-10 2009-09-24 Konica Minolta Holdings Inc 陽極接合方法及び液滴吐出ヘッドの製造方法
CN101407372B (zh) * 2008-11-07 2011-01-12 清华大学 一种原子蒸气泡的制作方法
CN101598772B (zh) * 2009-06-26 2011-12-07 中北大学 微型原子蒸汽泡制作方法
JP5421690B2 (ja) * 2009-08-12 2014-02-19 セイコーインスツル株式会社 パッケージの製造方法
US20110187464A1 (en) * 2010-02-04 2011-08-04 Honeywell International Inc. Apparatus and methods for alkali vapor cells
US8299860B2 (en) * 2010-02-04 2012-10-30 Honeywell International Inc. Fabrication techniques to enhance pressure uniformity in anodically bonded vapor cells
US8242851B2 (en) * 2010-02-04 2012-08-14 Honeywell International Inc. Processes for stabilizing a VCSEL in a chip-scale atomic clock
JP2012191138A (ja) * 2011-03-14 2012-10-04 Seiko Epson Corp ガスセルユニット、原子発振器および電子装置

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Publication number Publication date
JP2014088308A (ja) 2014-05-15
EP2746876B1 (de) 2019-04-10
CN103792838A (zh) 2014-05-14
CN103792838B (zh) 2017-08-11
EP2746876A3 (de) 2018-01-10
EP2746876A2 (de) 2014-06-25

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