EP2746876A3 - Herstellungstechniken zur Verbesserung der Druckgleichförmigkeit in anodisch gebundenen Dampfzellen - Google Patents

Herstellungstechniken zur Verbesserung der Druckgleichförmigkeit in anodisch gebundenen Dampfzellen Download PDF

Info

Publication number
EP2746876A3
EP2746876A3 EP13181421.2A EP13181421A EP2746876A3 EP 2746876 A3 EP2746876 A3 EP 2746876A3 EP 13181421 A EP13181421 A EP 13181421A EP 2746876 A3 EP2746876 A3 EP 2746876A3
Authority
EP
European Patent Office
Prior art keywords
wafer
anodically bonded
fabrication techniques
diameter
sacrificial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13181421.2A
Other languages
English (en)
French (fr)
Other versions
EP2746876A2 (de
EP2746876B1 (de
Inventor
Daniel W. Younger
Jeff A. Ridley
Son T. Lu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/662,850 external-priority patent/US8941442B2/en
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of EP2746876A2 publication Critical patent/EP2746876A2/de
Publication of EP2746876A3 publication Critical patent/EP2746876A3/de
Application granted granted Critical
Publication of EP2746876B1 publication Critical patent/EP2746876B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04F—TIME-INTERVAL MEASURING
    • G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/14—Apparatus for producing preselected time intervals for use as timing standards using atomic clocks
    • G04F5/145—Apparatus for producing preselected time intervals for use as timing standards using atomic clocks using Coherent Population Trapping

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Ecology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Ceramic Products (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
EP13181421.2A 2012-10-29 2013-08-22 Herstellungstechniken zur Verbesserung der Druckgleichförmigkeit in anodisch gebundenen Dampfzellen und Mikroplättchenstruktur dazu Active EP2746876B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/662,850 US8941442B2 (en) 2010-02-04 2012-10-29 Fabrication techniques to enhance pressure uniformity in anodically bonded vapor cells

Publications (3)

Publication Number Publication Date
EP2746876A2 EP2746876A2 (de) 2014-06-25
EP2746876A3 true EP2746876A3 (de) 2018-01-10
EP2746876B1 EP2746876B1 (de) 2019-04-10

Family

ID=49028964

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13181421.2A Active EP2746876B1 (de) 2012-10-29 2013-08-22 Herstellungstechniken zur Verbesserung der Druckgleichförmigkeit in anodisch gebundenen Dampfzellen und Mikroplättchenstruktur dazu

Country Status (3)

Country Link
EP (1) EP2746876B1 (de)
JP (1) JP6198522B2 (de)
CN (1) CN103792838B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6488599B2 (ja) 2014-09-08 2019-03-27 セイコーエプソン株式会社 量子干渉装置、原子セルの製造方法および電子機器
JP6852377B2 (ja) * 2016-12-12 2021-03-31 株式会社村田製作所 原子発振器および電子機器
CN107128871B (zh) * 2017-05-10 2019-04-05 中国电子科技集团公司第四十九研究所 一种基于mems原子芯片的物理封装件及其封装方法
US10544039B2 (en) * 2017-09-08 2020-01-28 Texas Instruments Incorporated Methods for depositing a measured amount of a species in a sealed cavity
JP2019165332A (ja) * 2018-03-19 2019-09-26 株式会社リコー 電子デバイスおよび原子発振器
JP7232510B2 (ja) * 2019-01-31 2023-03-03 国立研究開発法人情報通信研究機構 量子光学装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1591846A2 (de) * 2004-04-26 2005-11-02 Northrop Grumman Corporation Mittelschicht für Matrizeanordnung mit einem alkalimetalgefüllten Hohlraum
US20060022761A1 (en) * 2004-07-16 2006-02-02 Abeles Joseph H Chip-scale atomic clock (CSAC) and method for making same
JP2009212416A (ja) * 2008-03-06 2009-09-17 Epson Toyocom Corp ガスセルの製造方法及びガスセル
JP2009215099A (ja) * 2008-03-10 2009-09-24 Konica Minolta Holdings Inc 陽極接合方法及び液滴吐出ヘッドの製造方法
EP2362281A2 (de) * 2010-02-04 2011-08-31 Honeywell International Inc. Herstellungstechniken zur Verbesserung der Druckgleichförmigkeit in anodisch gebundenen Dampfzellen

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005016965A (ja) * 2003-06-23 2005-01-20 Sumitomo Precision Prod Co Ltd パッケージおよびその製造方法、ならびに振動ジャイロおよびその製造方法
US7400207B2 (en) * 2004-01-06 2008-07-15 Sarnoff Corporation Anodically bonded cell, method for making same and systems incorporating same
JP5121493B2 (ja) * 2008-02-21 2013-01-16 セイコーインスツル株式会社 圧電振動子の製造方法
CN101407372B (zh) * 2008-11-07 2011-01-12 清华大学 一种原子蒸气泡的制作方法
CN101598772B (zh) * 2009-06-26 2011-12-07 中北大学 微型原子蒸汽泡制作方法
JP5421690B2 (ja) * 2009-08-12 2014-02-19 セイコーインスツル株式会社 パッケージの製造方法
US20110187464A1 (en) * 2010-02-04 2011-08-04 Honeywell International Inc. Apparatus and methods for alkali vapor cells
US8242851B2 (en) * 2010-02-04 2012-08-14 Honeywell International Inc. Processes for stabilizing a VCSEL in a chip-scale atomic clock
JP2012191138A (ja) * 2011-03-14 2012-10-04 Seiko Epson Corp ガスセルユニット、原子発振器および電子装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1591846A2 (de) * 2004-04-26 2005-11-02 Northrop Grumman Corporation Mittelschicht für Matrizeanordnung mit einem alkalimetalgefüllten Hohlraum
US20060022761A1 (en) * 2004-07-16 2006-02-02 Abeles Joseph H Chip-scale atomic clock (CSAC) and method for making same
JP2009212416A (ja) * 2008-03-06 2009-09-17 Epson Toyocom Corp ガスセルの製造方法及びガスセル
JP2009215099A (ja) * 2008-03-10 2009-09-24 Konica Minolta Holdings Inc 陽極接合方法及び液滴吐出ヘッドの製造方法
EP2362281A2 (de) * 2010-02-04 2011-08-31 Honeywell International Inc. Herstellungstechniken zur Verbesserung der Druckgleichförmigkeit in anodisch gebundenen Dampfzellen

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
DOUAHI A ET AL: "New Vapor Cell Technology for Chip Scale Atomic Clock", FREQUENCY CONTROL SYMPOSIUM, 2007 JOINT WITH THE 21ST EUROPEAN FREQUEN CY AND TIME FORUM. IEEE INTERNATIONAL, IEEE, PI, 1 May 2007 (2007-05-01), pages 58 - 61, XP031137920, ISBN: 978-1-4244-0646-3 *
R F WOHENBUTTEL ET AL: "Low-temperature silicon wafer-to-wafer bonding using gold at eutectic temperature", SENSORS AND ACHCATORS A, vol. 43, 1 January 1994 (1994-01-01), pages 22 - 29, XP055429214 *

Also Published As

Publication number Publication date
CN103792838B (zh) 2017-08-11
EP2746876A2 (de) 2014-06-25
EP2746876B1 (de) 2019-04-10
JP2014088308A (ja) 2014-05-15
JP6198522B2 (ja) 2017-09-20
CN103792838A (zh) 2014-05-14

Similar Documents

Publication Publication Date Title
EP2746876A3 (de) Herstellungstechniken zur Verbesserung der Druckgleichförmigkeit in anodisch gebundenen Dampfzellen
EP2579347A3 (de) Piezoelektrische Vorrichtung und Verfahren zur Herstellung einer piezoelektrischen Vorrichtung
EP2372446A3 (de) Elektrochrome Anzeigevorrichtung und Verfahren zu ihrer Herstellung
EP2362281A3 (de) Herstellungstechniken zur Verbesserung der Druckgleichförmigkeit in anodisch gebundenen Dampfzellen
WO2015195178A3 (en) Integration of ex situ fabricated porous polymer monoliths into fluidic chips
EP2712908A3 (de) Phosphorklebefolie, optischer, druckempfindlicher Elementphosphorschicht-Haftkörper und optische Halbleitervorrichtung
EP2866469A3 (de) Akustischer Wandler und Paketmodul damit
EP2680327A3 (de) Mit einer Reflexionsschicht und Phosphorschicht überzogene LED, Herstellungsverfahren dafür, LED-Vorrichtung und Herstellungsverfahren dafür
EP2669501A3 (de) Akustikplatte
EP2509125A3 (de) Elektromechanischer Wandler und Herstellungsverfahren dafür
EP2551940A3 (de) Sekundärbatterie
WO2016068651A3 (ko) 이차전지용 전극, 그의 제조방법, 그를 포함하는 이차전지 및 케이블형 이차전지
EP2439779A3 (de) Transparente Elektrode mit dotiertem Graphen, Verfahren zu ihrer Herstellung und Anzeigevorrichtung und Solarzelle mit der Elektrode
EP3018711A8 (de) Halbleiterbauelement und verfahren zur herstellung des halbleiterbauelements
EP2615656A3 (de) Nanopiezoelektrischer Generator und Herstellungsverfahren dafür
EP2631960A3 (de) Nanopiezoelektrischer Generator und Herstellungsverfahren dafür
EP2824706A3 (de) Adhäsiv gebondete Solarzellenanordnung
EP2680330A3 (de) Mit einer Einkapselungsschicht überzogenes Halbleiterelement, Herstellungsverfahren dafür und Halbleitervorrichtung
EP2913252A3 (de) Befestigungsstruktur für Sonnenbatterien in einem Fahrzeug
EP2629343A3 (de) Thermoelektrisches Umwandlungsmodul und Verfahren zur Herstellung des thermoelektrischen Umwandlungsmoduls
EP2466632A3 (de) Verfahren zur direkten Bindung von Halbleiterstrukturen und gebundene Halbleiterstrukturen, die mit diesen Verfahren gebildet werden
EP2626905A3 (de) Siliciumkarbid-Halbleitervorrichtung und Verfahren zur Herstellung einer Siliciumkarbid-Halbleitervorrichtung
EP2495778A3 (de) Anschlusselektrodenherstellungsverfahren und Verfahren zur Herstellung eines piezoelektrischen/elektrostriktiven Elements damit
EP2682195A3 (de) Kapazitiver Wandler
EP2690198A3 (de) Vorrichtung und Verfahren zur Herstellung einer Graphenanordnung unter Verwendung dieser Vorrichtung

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20130822

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: HONEYWELL INTERNATIONAL INC.

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

RIC1 Information provided on ipc code assigned before grant

Ipc: G04F 5/14 20060101AFI20171201BHEP

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20181016

GRAJ Information related to disapproval of communication of intention to grant by the applicant or resumption of examination proceedings by the epo deleted

Free format text: ORIGINAL CODE: EPIDOSDIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

INTG Intention to grant announced

Effective date: 20190222

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

Ref country code: AT

Ref legal event code: REF

Ref document number: 1119537

Country of ref document: AT

Kind code of ref document: T

Effective date: 20190415

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602013053574

Country of ref document: DE

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20190410

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

REG Reference to a national code

Ref country code: AT

Ref legal event code: MK05

Ref document number: 1119537

Country of ref document: AT

Kind code of ref document: T

Effective date: 20190410

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190710

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190910

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190710

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190711

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190810

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 602013053574

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 602013053574

Country of ref document: DE

26N No opposition filed

Effective date: 20200113

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20190822

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190822

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190831

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190831

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20190831

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190822

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20200303

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190822

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190831

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20130822

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190410

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230525

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20230824

Year of fee payment: 11