JP6143430B2 - バイアス補正機能を備えた振動型ジャイロ - Google Patents

バイアス補正機能を備えた振動型ジャイロ Download PDF

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Publication number
JP6143430B2
JP6143430B2 JP2012205750A JP2012205750A JP6143430B2 JP 6143430 B2 JP6143430 B2 JP 6143430B2 JP 2012205750 A JP2012205750 A JP 2012205750A JP 2012205750 A JP2012205750 A JP 2012205750A JP 6143430 B2 JP6143430 B2 JP 6143430B2
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comb
drive
vibration
correction
driving
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Japanese (ja)
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JP2013253958A5 (https=
JP2013253958A (ja
Inventor
番　政広
政広 番
明高 内村
明高 内村
修治 中下
修治 中下
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Mitsubishi Precision Co Ltd
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Mitsubishi Precision Co Ltd
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Priority to JP2012205750A priority Critical patent/JP6143430B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2012205750A 2012-05-08 2012-09-19 バイアス補正機能を備えた振動型ジャイロ Expired - Fee Related JP6143430B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012205750A JP6143430B2 (ja) 2012-05-08 2012-09-19 バイアス補正機能を備えた振動型ジャイロ
US13/759,929 US9074889B2 (en) 2012-05-08 2013-02-05 Vibration gyro having bias correcting function

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012106638 2012-05-08
JP2012106638 2012-05-08
JP2012205750A JP6143430B2 (ja) 2012-05-08 2012-09-19 バイアス補正機能を備えた振動型ジャイロ

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JP2013253958A JP2013253958A (ja) 2013-12-19
JP2013253958A5 JP2013253958A5 (https=) 2015-04-30
JP6143430B2 true JP6143430B2 (ja) 2017-06-07

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US (1) US9074889B2 (https=)
JP (1) JP6143430B2 (https=)

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US20160102978A1 (en) * 2014-10-14 2016-04-14 Richtek Technology Corporation Rotation velocity sensor and method for sensing rotation velocity
US10234476B2 (en) 2015-05-20 2019-03-19 Google Llc Extracting inertial information from nonlinear periodic signals
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US10390038B2 (en) 2016-02-17 2019-08-20 Telefonaktiebolaget Lm Ericsson (Publ) Methods and devices for encoding and decoding video pictures using a denoised reference picture
ITUA20161498A1 (it) * 2016-03-09 2017-09-09 St Microelectronics Srl Struttura di rilevamento micromeccanica di un dispositivo sensore mems, in particolare di un giroscopio mems, con migliorate caratteristiche di azionamento
JP6370832B2 (ja) * 2016-05-06 2018-08-08 矢崎総業株式会社 電圧センサ
US10234477B2 (en) 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer
JP6660849B2 (ja) 2016-08-04 2020-03-11 三菱プレシジョン株式会社 バイアス補正機能を有する振動型ジャイロ、及び振動型ジャイロの使用方法
JP6546576B2 (ja) * 2016-10-11 2019-07-17 矢崎総業株式会社 電圧センサ
JP6819216B2 (ja) 2016-10-26 2021-01-27 セイコーエプソン株式会社 ジャイロセンサー、ジャイロセンサーの製造方法、電子機器および移動体
CN106500732A (zh) * 2016-12-22 2017-03-15 四川纳杰微电子技术有限公司 一种微机械陀螺仪正交误差补偿结构
CN106595712A (zh) * 2016-12-22 2017-04-26 四川纳杰微电子技术有限公司 一种新型微机械陀螺仪正交误差补偿结构
GB2561886B (en) * 2017-04-27 2022-10-19 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer
GB2561889B (en) * 2017-04-27 2022-10-12 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with electrostatic control of proof mass
IT201700099412A1 (it) * 2017-09-05 2019-03-05 St Microelectronics Srl Giroscopio mems con regolazione del mismatch fra la frequenza di pilotaggio e la frequenza di rilevamento
GB2567479B (en) * 2017-10-13 2022-04-06 Atlantic Inertial Systems Ltd Angular rate sensors
CN107796383B (zh) * 2017-10-17 2021-03-23 西北工业大学 芯片级旋转调制式mems硅微机械陀螺
CN109931959B (zh) * 2019-03-27 2023-03-31 河海大学常州校区 硅微陀螺仪正交误差校正方法
KR102438344B1 (ko) * 2019-10-14 2022-09-01 세메스 주식회사 웨이퍼형 센서 유닛 및 웨이퍼형 센서 유닛의 제조 방법
US12160084B2 (en) 2019-10-15 2024-12-03 Texas Instruments Incorporated MEMS-based phase spatial light modulating architecture
US12339437B2 (en) * 2019-12-12 2025-06-24 Texas Instruments Incorporated Bias voltage adjustment for a phase light modulator
US12012327B2 (en) 2020-03-12 2024-06-18 Honeywell International Inc. Methods for vibration immunity to suppress bias errors in sensor devices
CN111536993B (zh) * 2020-04-29 2022-01-07 中国人民解放军国防科技大学 一种振动陀螺电极角度误差的辨识与补偿方法及系统
CN111879303B (zh) * 2020-06-16 2022-04-05 深迪半导体(绍兴)有限公司 电容式mems陀螺仪及其加快起振速度的方法
CN114076593B (zh) * 2020-08-19 2025-06-27 塔莱斯公司 改进的惯性传感器
CN112097751B (zh) * 2020-09-02 2025-04-04 美新半导体(天津)有限公司 一种解耦式双框架微陀螺
CN113607153B (zh) * 2021-08-30 2022-11-01 武汉大学 一种两轴mems圆环陀螺仪及其制备封装方法
EP4467928B1 (en) * 2023-05-22 2026-03-25 Murata Manufacturing Co., Ltd. Symmetric differential transducer
JP7844403B2 (ja) * 2023-08-29 2026-04-13 株式会社東芝 センサ、センサシステム及び電子装置
CN117146791B (zh) * 2023-10-30 2024-02-23 北京晨晶电子有限公司 一种微机械石英音叉陀螺及电子设备

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US20130298670A1 (en) 2013-11-14
US9074889B2 (en) 2015-07-07
JP2013253958A (ja) 2013-12-19

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