JP6130221B2 - 固体撮像装置、および電子機器 - Google Patents
固体撮像装置、および電子機器 Download PDFInfo
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- JP6130221B2 JP6130221B2 JP2013109636A JP2013109636A JP6130221B2 JP 6130221 B2 JP6130221 B2 JP 6130221B2 JP 2013109636 A JP2013109636 A JP 2013109636A JP 2013109636 A JP2013109636 A JP 2013109636A JP 6130221 B2 JP6130221 B2 JP 6130221B2
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F39/182—Colour image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F39/186—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors having arrangements for blooming suppression
- H10F39/1865—Overflow drain structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8053—Colour filters
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8057—Optical shielding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
- H10F39/8063—Microlenses
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
- H10F39/8067—Reflectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/807—Pixel isolation structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/811—Interconnections
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Color Television Image Signal Generators (AREA)
Priority Applications (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013109636A JP6130221B2 (ja) | 2013-05-24 | 2013-05-24 | 固体撮像装置、および電子機器 |
| CN201610970914.XA CN106847843B (zh) | 2013-05-24 | 2014-05-16 | 成像装置和电子设备 |
| US14/279,632 US9570501B2 (en) | 2013-05-24 | 2014-05-16 | Sold-state imaging device and electronic apparatus |
| CN201410208812.5A CN104183611B (zh) | 2013-05-24 | 2014-05-16 | 固态成像装置和电子设备 |
| US15/084,912 US10319769B2 (en) | 2013-05-24 | 2016-03-30 | Solid-state imaging device and electronic apparatus |
| US15/449,662 US9893106B2 (en) | 2013-05-24 | 2017-03-03 | Solid-state imaging device and electronic apparatus |
| US15/850,947 US10615207B2 (en) | 2013-05-24 | 2017-12-21 | Solid-state imaging device and electronic apparatus |
| US16/818,080 US11271025B2 (en) | 2013-05-24 | 2020-03-13 | Solid-state imaging device and electronic apparatus |
| US17/216,102 US11569286B2 (en) | 2013-05-24 | 2021-03-29 | Solid-state imaging device and electronic apparatus |
| US18/145,221 US11894406B2 (en) | 2013-05-24 | 2022-12-22 | Solid-state imaging device and electronic apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013109636A JP6130221B2 (ja) | 2013-05-24 | 2013-05-24 | 固体撮像装置、および電子機器 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016211987A Division JP6316902B2 (ja) | 2016-10-28 | 2016-10-28 | 固体撮像装置、および電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014229810A JP2014229810A (ja) | 2014-12-08 |
| JP2014229810A5 JP2014229810A5 (enExample) | 2016-02-25 |
| JP6130221B2 true JP6130221B2 (ja) | 2017-05-17 |
Family
ID=51934844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013109636A Active JP6130221B2 (ja) | 2013-05-24 | 2013-05-24 | 固体撮像装置、および電子機器 |
Country Status (3)
| Country | Link |
|---|---|
| US (7) | US9570501B2 (enExample) |
| JP (1) | JP6130221B2 (enExample) |
| CN (2) | CN104183611B (enExample) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6130221B2 (ja) | 2013-05-24 | 2017-05-17 | ソニー株式会社 | 固体撮像装置、および電子機器 |
| JP6303803B2 (ja) | 2013-07-03 | 2018-04-04 | ソニー株式会社 | 固体撮像装置およびその製造方法 |
| JP2015076475A (ja) * | 2013-10-08 | 2015-04-20 | ソニー株式会社 | 固体撮像装置およびその製造方法、並びに電子機器 |
| KR102309883B1 (ko) * | 2014-08-29 | 2021-10-06 | 삼성전자주식회사 | 광전 변환 소자 및 이를 포함하는 이미지 센서 |
| JP6339032B2 (ja) * | 2015-02-19 | 2018-06-06 | 東京エレクトロン株式会社 | 遮光体を含む光学装置の製造方法、および記憶媒体 |
| WO2016136502A1 (ja) * | 2015-02-26 | 2016-09-01 | ソニー株式会社 | 固体撮像素子、および電子装置 |
| JP2017005111A (ja) * | 2015-06-10 | 2017-01-05 | ソニー株式会社 | 固体撮像装置及び電子機器 |
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| JP6754157B2 (ja) * | 2015-10-26 | 2020-09-09 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置 |
| TWI731017B (zh) * | 2016-01-27 | 2021-06-21 | 日商新力股份有限公司 | 固體攝像元件及電子機器 |
| JP2017168566A (ja) * | 2016-03-15 | 2017-09-21 | ソニー株式会社 | 固体撮像素子、および電子機器 |
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| US9105546B2 (en) * | 2012-09-19 | 2015-08-11 | Semiconductor Components Industries, Llc | Imaging systems with backside illuminated near infrared imaging pixels |
| JP6130221B2 (ja) * | 2013-05-24 | 2017-05-17 | ソニー株式会社 | 固体撮像装置、および電子機器 |
| US9209320B1 (en) * | 2014-08-07 | 2015-12-08 | Omnivision Technologies, Inc. | Method of fabricating a single photon avalanche diode imaging sensor |
| KR102546550B1 (ko) * | 2016-06-24 | 2023-06-23 | 에스케이하이닉스 주식회사 | 딥 트렌치들 내의 전달 게이트들을 갖는 이미지 센서 |
| JP2018006443A (ja) * | 2016-06-29 | 2018-01-11 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| JP2019086070A (ja) | 2017-11-06 | 2019-06-06 | 株式会社Soken | コネクティングロッド |
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| US20170179171A1 (en) | 2017-06-22 |
| US11271025B2 (en) | 2022-03-08 |
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| US20160211304A1 (en) | 2016-07-21 |
| US9570501B2 (en) | 2017-02-14 |
| CN104183611B (zh) | 2019-05-10 |
| US11569286B2 (en) | 2023-01-31 |
| JP2014229810A (ja) | 2014-12-08 |
| US10615207B2 (en) | 2020-04-07 |
| US20180138216A1 (en) | 2018-05-17 |
| CN104183611A (zh) | 2014-12-03 |
| US9893106B2 (en) | 2018-02-13 |
| US20210217789A1 (en) | 2021-07-15 |
| US20200212084A1 (en) | 2020-07-02 |
| CN106847843A (zh) | 2017-06-13 |
| US20230126548A1 (en) | 2023-04-27 |
| US10319769B2 (en) | 2019-06-11 |
| US11894406B2 (en) | 2024-02-06 |
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