JP6122312B2 - 形状測定機 - Google Patents

形状測定機 Download PDF

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Publication number
JP6122312B2
JP6122312B2 JP2013039485A JP2013039485A JP6122312B2 JP 6122312 B2 JP6122312 B2 JP 6122312B2 JP 2013039485 A JP2013039485 A JP 2013039485A JP 2013039485 A JP2013039485 A JP 2013039485A JP 6122312 B2 JP6122312 B2 JP 6122312B2
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Japan
Prior art keywords
contact
vibration
stylus
stylus holder
displacement
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JP2013039485A
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English (en)
Japanese (ja)
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JP2014167435A5 (enExample
JP2014167435A (ja
Inventor
松宮　貞行
貞行 松宮
日高　和彦
和彦 日高
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Mitutoyo Corp
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Mitutoyo Corp
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Publication date
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Priority to JP2013039485A priority Critical patent/JP6122312B2/ja
Priority to EP14000622.2A priority patent/EP2772722B1/en
Priority to US14/190,452 priority patent/US9285201B2/en
Publication of JP2014167435A publication Critical patent/JP2014167435A/ja
Publication of JP2014167435A5 publication Critical patent/JP2014167435A5/ja
Application granted granted Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G01B3/008—Arrangements for controlling the measuring force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
JP2013039485A 2013-02-28 2013-02-28 形状測定機 Active JP6122312B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013039485A JP6122312B2 (ja) 2013-02-28 2013-02-28 形状測定機
EP14000622.2A EP2772722B1 (en) 2013-02-28 2014-02-21 Form measuring instrument
US14/190,452 US9285201B2 (en) 2013-02-28 2014-02-26 Form measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013039485A JP6122312B2 (ja) 2013-02-28 2013-02-28 形状測定機

Publications (3)

Publication Number Publication Date
JP2014167435A JP2014167435A (ja) 2014-09-11
JP2014167435A5 JP2014167435A5 (enExample) 2016-02-25
JP6122312B2 true JP6122312B2 (ja) 2017-04-26

Family

ID=50179467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013039485A Active JP6122312B2 (ja) 2013-02-28 2013-02-28 形状測定機

Country Status (3)

Country Link
US (1) US9285201B2 (enExample)
EP (1) EP2772722B1 (enExample)
JP (1) JP6122312B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0656535B2 (ja) 1983-12-17 1994-07-27 キヤノン株式会社 定着装置

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6122312B2 (ja) * 2013-02-28 2017-04-26 株式会社ミツトヨ 形状測定機
JP6189153B2 (ja) * 2013-09-18 2017-08-30 株式会社ミツトヨ 梃子式測定器
JP6361243B2 (ja) * 2014-04-07 2018-07-25 株式会社ジェイテクト 加工変質検出センサを備える工作機械
JP6282517B2 (ja) * 2014-04-09 2018-02-21 株式会社ミツトヨ 形状測定機
JP6447997B2 (ja) * 2015-02-09 2019-01-09 株式会社ミツトヨ テストインジケータ
CN105018333B (zh) * 2015-08-24 2017-03-08 苏州大学张家港工业技术研究院 一种基于粘滑驱动原理的显微注射机构
JP6680643B2 (ja) * 2016-08-03 2020-04-15 株式会社Ｓｏｋｅｎ 面圧計測装置
RU2659324C1 (ru) * 2017-06-15 2018-06-29 федеральное государственное бюджетное образовательное учреждение высшего образования "Тольяттинский государственный университет" Способ контроля диаметров и формы миниатюрных цилиндрических несимметричных деталей
JP2019100874A (ja) 2017-12-04 2019-06-24 株式会社ミツトヨ 形状測定装置
KR101944080B1 (ko) * 2018-07-24 2019-01-30 황재은 형상측정기
US11150731B2 (en) * 2018-09-28 2021-10-19 Apple Inc. Multi-modal haptic feedback for an electronic device using a single haptic actuator
JP7261560B2 (ja) * 2018-10-31 2023-04-20 株式会社ミツトヨ 表面性状測定方法および表面性状測定装置
KR102180526B1 (ko) * 2019-08-16 2020-11-18 한양대학교 산학협력단 휴대용 표면 측정 장치 및 제어 방법
JP7448323B2 (ja) * 2019-09-06 2024-03-12 株式会社ミツトヨ 粗さ測定機
JPWO2021106075A1 (enExample) * 2019-11-26 2021-06-03
DE102020108406A1 (de) * 2020-03-26 2021-09-30 Carl Zeiss Industrielle Messtechnik Gmbh Taktiler oder/und optischer Abstandssensor, System mit einem solchen Abstandssensor und Verfahren zur Kalibrierung eines solchen Abstandssensors oder eines solchen Systems
TWI731650B (zh) * 2020-04-15 2021-06-21 宏碁股份有限公司 觸控筆、觸控電子裝置與觸控系統
JP7361261B2 (ja) * 2020-05-14 2023-10-16 株式会社東京精密 形状測定機及びその制御方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5343418B2 (enExample) * 1973-09-28 1978-11-20
JPS60161503A (ja) * 1984-02-01 1985-08-23 Tokyo Seimitsu Co Ltd 表面粗さ測定機用検出装置
US5189806A (en) * 1988-12-19 1993-03-02 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
JPH0294050U (enExample) * 1989-01-12 1990-07-26
JP2539998B2 (ja) 1992-10-14 1996-10-02 株式会社ミツトヨ 形状測定機
GB9612383D0 (en) * 1995-12-07 1996-08-14 Rank Taylor Hobson Ltd Surface form measurement
SE9600078L (sv) * 1996-01-09 1997-05-12 Johansson Ab C E Anordning för dimensionsbestämning av tredimensionella mätobjekt
IT1299902B1 (it) * 1998-03-13 2000-04-04 Marposs Spa Testa, apparecchiatura e metodo per il controllo di dimensioni lineari di pezzi meccanici.
JP3992853B2 (ja) * 1998-09-30 2007-10-17 株式会社ミツトヨ 表面追従型測定機
JP2000199710A (ja) * 1999-01-06 2000-07-18 Mitsutoyo Corp タッチ信号プロ―ブの接触部位検出構造
JP3650555B2 (ja) 1999-09-27 2005-05-18 株式会社ミツトヨ タッチセンサ
JP3819250B2 (ja) * 2000-05-15 2006-09-06 株式会社ミツトヨ 加振型接触検出センサ
JP4688400B2 (ja) 2001-12-04 2011-05-25 エスアイアイ・ナノテクノロジー株式会社 走査型プローブ顕微鏡用探針
GB0608998D0 (en) * 2006-05-08 2006-06-14 Renishaw Plc Contact sensing probe
JP5009564B2 (ja) * 2006-07-20 2012-08-22 株式会社ミツトヨ 表面追従型測定器
JP5108619B2 (ja) * 2008-05-15 2012-12-26 株式会社ミツトヨ センサ信号検知回路
JP5297735B2 (ja) * 2008-09-18 2013-09-25 国立大学法人東北大学 接触式変位センサ
JP5451180B2 (ja) * 2009-05-22 2014-03-26 株式会社ミツトヨ 真円度測定機
JP4968600B1 (ja) * 2011-01-13 2012-07-04 株式会社東京精密 真円度測定装置及びその心ずれ量補正方法
JP5754971B2 (ja) * 2011-02-14 2015-07-29 キヤノン株式会社 形状測定装置及び形状測定方法
JP6122312B2 (ja) * 2013-02-28 2017-04-26 株式会社ミツトヨ 形状測定機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0656535B2 (ja) 1983-12-17 1994-07-27 キヤノン株式会社 定着装置

Also Published As

Publication number Publication date
US20140237834A1 (en) 2014-08-28
US9285201B2 (en) 2016-03-15
JP2014167435A (ja) 2014-09-11
EP2772722B1 (en) 2015-09-02
EP2772722A1 (en) 2014-09-03

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