JP6121765B2 - 試料保持具 - Google Patents

試料保持具 Download PDF

Info

Publication number
JP6121765B2
JP6121765B2 JP2013061176A JP2013061176A JP6121765B2 JP 6121765 B2 JP6121765 B2 JP 6121765B2 JP 2013061176 A JP2013061176 A JP 2013061176A JP 2013061176 A JP2013061176 A JP 2013061176A JP 6121765 B2 JP6121765 B2 JP 6121765B2
Authority
JP
Japan
Prior art keywords
flow path
sample holder
sample
heat medium
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013061176A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014187214A5 (enExample
JP2014187214A (ja
Inventor
潔 小関
潔 小関
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2013061176A priority Critical patent/JP6121765B2/ja
Publication of JP2014187214A publication Critical patent/JP2014187214A/ja
Publication of JP2014187214A5 publication Critical patent/JP2014187214A5/ja
Application granted granted Critical
Publication of JP6121765B2 publication Critical patent/JP6121765B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2013061176A 2013-03-23 2013-03-23 試料保持具 Active JP6121765B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013061176A JP6121765B2 (ja) 2013-03-23 2013-03-23 試料保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013061176A JP6121765B2 (ja) 2013-03-23 2013-03-23 試料保持具

Publications (3)

Publication Number Publication Date
JP2014187214A JP2014187214A (ja) 2014-10-02
JP2014187214A5 JP2014187214A5 (enExample) 2015-07-30
JP6121765B2 true JP6121765B2 (ja) 2017-04-26

Family

ID=51834472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013061176A Active JP6121765B2 (ja) 2013-03-23 2013-03-23 試料保持具

Country Status (1)

Country Link
JP (1) JP6121765B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7338675B2 (ja) * 2021-12-24 2023-09-05 住友大阪セメント株式会社 静電チャック部材、静電チャック装置、および静電チャック部材の製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03108737A (ja) * 1989-05-24 1991-05-08 Toto Ltd 冷媒流路を備えた静電チャック及びその製造方法
SE515132C2 (sv) * 2000-06-15 2001-06-11 Sven Melker Nilsson Anordning vid värme-/fuktväxlare med turbulensalstrare
JP4350607B2 (ja) * 2004-07-23 2009-10-21 シャープ株式会社 プリント配線板の製造方法
US7578337B2 (en) * 2005-04-14 2009-08-25 United States Thermoelectric Consortium Heat dissipating device
JP2009094138A (ja) * 2007-10-04 2009-04-30 Sei Hybrid Kk ウエハ保持体および半導体製造装置
US9441523B2 (en) * 2008-04-18 2016-09-13 Sven Melker Nilsson Channel system with internal flow director and turbulence generator
JP5210706B2 (ja) * 2008-05-09 2013-06-12 株式会社日立ハイテクノロジーズ プラズマ処理装置及びプラズマ処理方法
JP5093161B2 (ja) * 2009-03-12 2012-12-05 三菱電機株式会社 ヒートシンク
JP5916603B2 (ja) * 2010-04-28 2016-05-11 株式会社豊田自動織機 放熱装置および半導体装置

Also Published As

Publication number Publication date
JP2014187214A (ja) 2014-10-02

Similar Documents

Publication Publication Date Title
JP6240028B2 (ja) 試料保持具
CN111684574B (zh) 静电卡盘装置及静电卡盘装置的制造方法
CN108780774B (zh) 静电吸盘
JP5811513B2 (ja) 静電チャック
CN112514046B (zh) 静电卡盘装置及静电卡盘装置的制造方法
CN110620075B (zh) 静电夹盘及基板固定装置
JP6432474B2 (ja) 静電チャック
CN111480222A (zh) 静电卡盘装置及静电卡盘装置的制造方法
CN105489541B (zh) 半导体制造装置用部件及其制造方法
CN106716608A (zh) 具有独立隔离的加热器区域的晶片载体
TW201916246A (zh) 靜電夾頭至鋁基座組態之黏合結構
WO2006001425A1 (ja) 静電チャック
WO2013051713A1 (ja) 試料保持具
WO2017026206A1 (ja) ヒータユニット
JP4540407B2 (ja) 静電チャック
JP6027140B2 (ja) 試料保持具
JP6050505B2 (ja) 試料保持具
JP6121765B2 (ja) 試料保持具
JP6139249B2 (ja) 試料保持具
JP2021176192A (ja) 流路構造体および半導体製造装置
JP2000286331A (ja) ウエハ支持部材
JP6122323B2 (ja) 試料保持具
JP6154248B2 (ja) 流路部材およびこれを用いた熱交換器ならびに半導体製造装置
TW202503962A (zh) 靜電夾頭
JP2025087812A (ja) 静電チャック

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150615

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20151116

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20161020

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20161027

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20161221

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170228

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170330

R150 Certificate of patent or registration of utility model

Ref document number: 6121765

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150