JP2014187214A5 - - Google Patents

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Publication number
JP2014187214A5
JP2014187214A5 JP2013061176A JP2013061176A JP2014187214A5 JP 2014187214 A5 JP2014187214 A5 JP 2014187214A5 JP 2013061176 A JP2013061176 A JP 2013061176A JP 2013061176 A JP2013061176 A JP 2013061176A JP 2014187214 A5 JP2014187214 A5 JP 2014187214A5
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Japan
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holder according
convex portion
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traveling direction
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JP2013061176A
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English (en)
Japanese (ja)
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JP2014187214A (ja
JP6121765B2 (ja
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Publication of JP2014187214A5 publication Critical patent/JP2014187214A5/ja
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JP2013061176A 2013-03-23 2013-03-23 試料保持具 Active JP6121765B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013061176A JP6121765B2 (ja) 2013-03-23 2013-03-23 試料保持具

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Application Number Priority Date Filing Date Title
JP2013061176A JP6121765B2 (ja) 2013-03-23 2013-03-23 試料保持具

Publications (3)

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JP2014187214A JP2014187214A (ja) 2014-10-02
JP2014187214A5 true JP2014187214A5 (enExample) 2015-07-30
JP6121765B2 JP6121765B2 (ja) 2017-04-26

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JP2013061176A Active JP6121765B2 (ja) 2013-03-23 2013-03-23 試料保持具

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7338675B2 (ja) * 2021-12-24 2023-09-05 住友大阪セメント株式会社 静電チャック部材、静電チャック装置、および静電チャック部材の製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03108737A (ja) * 1989-05-24 1991-05-08 Toto Ltd 冷媒流路を備えた静電チャック及びその製造方法
SE515132C2 (sv) * 2000-06-15 2001-06-11 Sven Melker Nilsson Anordning vid värme-/fuktväxlare med turbulensalstrare
JP4350607B2 (ja) * 2004-07-23 2009-10-21 シャープ株式会社 プリント配線板の製造方法
US7578337B2 (en) * 2005-04-14 2009-08-25 United States Thermoelectric Consortium Heat dissipating device
JP2009094138A (ja) * 2007-10-04 2009-04-30 Sei Hybrid Kk ウエハ保持体および半導体製造装置
US9441523B2 (en) * 2008-04-18 2016-09-13 Sven Melker Nilsson Channel system with internal flow director and turbulence generator
JP5210706B2 (ja) * 2008-05-09 2013-06-12 株式会社日立ハイテクノロジーズ プラズマ処理装置及びプラズマ処理方法
JP5093161B2 (ja) * 2009-03-12 2012-12-05 三菱電機株式会社 ヒートシンク
JP5916603B2 (ja) * 2010-04-28 2016-05-11 株式会社豊田自動織機 放熱装置および半導体装置

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