JP6116834B2 - Iv族金属酸化物膜の作製方法 - Google Patents

Iv族金属酸化物膜の作製方法 Download PDF

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JP6116834B2
JP6116834B2 JP2012193841A JP2012193841A JP6116834B2 JP 6116834 B2 JP6116834 B2 JP 6116834B2 JP 2012193841 A JP2012193841 A JP 2012193841A JP 2012193841 A JP2012193841 A JP 2012193841A JP 6116834 B2 JP6116834 B2 JP 6116834B2
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group
film
chn
forming material
tert
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JP2013216560A (ja
JP2013216560A5 (enExample
Inventor
木下 智之
智之 木下
宏平 岩永
宏平 岩永
貴裕 川畑
貴裕 川畑
憲昭 大島
憲昭 大島
聡里 平井
聡里 平井
美徳 原田
美徳 原田
一喜 新井
一喜 新井
賢一 多田
賢一 多田
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Sagami Chemical Research Institute
Tosoh Corp
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Sagami Chemical Research Institute
Tosoh Corp
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  • Inorganic Compounds Of Heavy Metals (AREA)
  • Silicon Compounds (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP2012193841A 2011-09-05 2012-09-04 Iv族金属酸化物膜の作製方法 Active JP6116834B2 (ja)

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JP2012193841A JP6116834B2 (ja) 2011-09-05 2012-09-04 Iv族金属酸化物膜の作製方法

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP2011192739 2011-09-05
JP2011192739 2011-09-05
JP2011218284 2011-09-30
JP2011218284 2011-09-30
JP2012026203 2012-02-09
JP2012026203 2012-02-09
JP2012058232 2012-03-15
JP2012058232 2012-03-15
JP2012193841A JP6116834B2 (ja) 2011-09-05 2012-09-04 Iv族金属酸化物膜の作製方法

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JP2013216560A JP2013216560A (ja) 2013-10-24
JP2013216560A5 JP2013216560A5 (enExample) 2015-10-08
JP6116834B2 true JP6116834B2 (ja) 2017-04-19

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Publication number Priority date Publication date Assignee Title
JP6213173B2 (ja) * 2013-11-14 2017-10-18 東ソー株式会社 チタン酸化物膜の製造方法及びチタン酸化物膜

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4585256B2 (ja) * 2004-09-06 2010-11-24 日本曹達株式会社 チタン化合物の微粒子を含む分散体の製造方法
JP2006096577A (ja) * 2004-09-28 2006-04-13 Tokyo Institute Of Technology 金属酸化物膜、金属酸化物膜の製造方法および成形品
JP5537986B2 (ja) * 2010-02-18 2014-07-02 住友化学株式会社 アモルファス酸化チタン分散液およびその製造方法

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