JP2013216560A5 - - Google Patents
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- Publication number
- JP2013216560A5 JP2013216560A5 JP2012193841A JP2012193841A JP2013216560A5 JP 2013216560 A5 JP2013216560 A5 JP 2013216560A5 JP 2012193841 A JP2012193841 A JP 2012193841A JP 2012193841 A JP2012193841 A JP 2012193841A JP 2013216560 A5 JP2013216560 A5 JP 2013216560A5
- Authority
- JP
- Japan
- Prior art keywords
- forming material
- film
- alcohol
- material solution
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims 3
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical group COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 claims 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000003960 organic solvent Substances 0.000 claims 2
- 125000004430 oxygen atom Chemical group O* 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000011282 treatment Methods 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 125000003158 alcohol group Chemical group 0.000 claims 1
- 125000004429 atom Chemical group 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012193841A JP6116834B2 (ja) | 2011-09-05 | 2012-09-04 | Ｉｖ族金属酸化物膜の作製方法 |
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011192739 | 2011-09-05 | ||
| JP2011192739 | 2011-09-05 | ||
| JP2011218284 | 2011-09-30 | ||
| JP2011218284 | 2011-09-30 | ||
| JP2012026203 | 2012-02-09 | ||
| JP2012026203 | 2012-02-09 | ||
| JP2012058232 | 2012-03-15 | ||
| JP2012058232 | 2012-03-15 | ||
| JP2012193841A JP6116834B2 (ja) | 2011-09-05 | 2012-09-04 | Ｉｖ族金属酸化物膜の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013216560A JP2013216560A (ja) | 2013-10-24 |
| JP2013216560A5 true JP2013216560A5 (enExample) | 2015-10-08 |
| JP6116834B2 JP6116834B2 (ja) | 2017-04-19 |
Family
ID=49589149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012193841A Active JP6116834B2 (ja) | 2011-09-05 | 2012-09-04 | Ｉｖ族金属酸化物膜の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6116834B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6213173B2 (ja) * | 2013-11-14 | 2017-10-18 | 東ソー株式会社 | チタン酸化物膜の製造方法及びチタン酸化物膜 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4585256B2 (ja) * | 2004-09-06 | 2010-11-24 | 日本曹達株式会社 | チタン化合物の微粒子を含む分散体の製造方法 |
| JP2006096577A (ja) * | 2004-09-28 | 2006-04-13 | Tokyo Institute Of Technology | 金属酸化物膜、金属酸化物膜の製造方法および成形品 |
| JP5537986B2 (ja) * | 2010-02-18 | 2014-07-02 | 住友化学株式会社 | アモルファス酸化チタン分散液およびその製造方法 |
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2012
- 2012-09-04 JP JP2012193841A patent/JP6116834B2/ja active Active