JP2013245372A5 - - Google Patents
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- Publication number
- JP2013245372A5 JP2013245372A5 JP2012119256A JP2012119256A JP2013245372A5 JP 2013245372 A5 JP2013245372 A5 JP 2013245372A5 JP 2012119256 A JP2012119256 A JP 2012119256A JP 2012119256 A JP2012119256 A JP 2012119256A JP 2013245372 A5 JP2013245372 A5 JP 2013245372A5
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- vapor deposition
- organic compound
- producing
- wall surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 claims 9
- 150000002894 organic compounds Chemical class 0.000 claims 7
- 238000004519 manufacturing process Methods 0.000 claims 5
- 230000008020 evaporation Effects 0.000 claims 3
- 238000001704 evaporation Methods 0.000 claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 125000003118 aryl group Chemical group 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
- 238000009736 wetting Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012119256A JP5921955B2 (ja) | 2012-05-25 | 2012-05-25 | 蒸着用ルツボの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012119256A JP5921955B2 (ja) | 2012-05-25 | 2012-05-25 | 蒸着用ルツボの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013245372A JP2013245372A (ja) | 2013-12-09 |
| JP2013245372A5 true JP2013245372A5 (enExample) | 2015-06-11 |
| JP5921955B2 JP5921955B2 (ja) | 2016-05-24 |
Family
ID=49845393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012119256A Expired - Fee Related JP5921955B2 (ja) | 2012-05-25 | 2012-05-25 | 蒸着用ルツボの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5921955B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015168880A (ja) * | 2014-03-11 | 2015-09-28 | 株式会社半導体エネルギー研究所 | るつぼ及び蒸着装置 |
| JP6957442B2 (ja) * | 2018-11-30 | 2021-11-02 | 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ | 半導体装置の製造方法、基板処理方法、基板処理装置、およびプログラム |
| WO2020178924A1 (ja) * | 2019-03-01 | 2020-09-10 | シャープ株式会社 | 蒸着装置および表示装置の製造方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62270491A (ja) * | 1986-05-15 | 1987-11-24 | Seitetsu Kagaku Co Ltd | サセプタ−の製造方法 |
| JPH01131012A (ja) * | 1987-11-17 | 1989-05-23 | Idemitsu Kosan Co Ltd | 炭素質膜の製造方法 |
| JP2911949B2 (ja) * | 1990-03-06 | 1999-06-28 | 花王株式会社 | 熱分解炭素皮膜の生成方法 |
| JP3215978B2 (ja) * | 1990-11-30 | 2001-10-09 | 日清紡績株式会社 | ガラス状炭素被覆体の製造方法 |
| JPH0797263A (ja) * | 1993-09-28 | 1995-04-11 | Nisshinbo Ind Inc | 黒鉛容器及びその製造方法 |
| GB2294532B (en) * | 1994-10-27 | 1998-12-09 | Sharp Kk | Use of a Crucible |
| JP4153713B2 (ja) * | 2002-04-01 | 2008-09-24 | 株式会社アルバック | 蒸発源及びこれを用いた薄膜形成装置 |
| JP2009231810A (ja) * | 2008-02-26 | 2009-10-08 | Denso Corp | 半導体カーボン膜、半導体素子、及び半導体カーボン膜の製造方法 |
| JP5467909B2 (ja) * | 2010-03-26 | 2014-04-09 | 日本碍子株式会社 | 炭素膜の製造方法 |
-
2012
- 2012-05-25 JP JP2012119256A patent/JP5921955B2/ja not_active Expired - Fee Related
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