JP6116488B2 - 塊状端子を備える半導体パッケージ - Google Patents
塊状端子を備える半導体パッケージ Download PDFInfo
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- JP6116488B2 JP6116488B2 JP2013555572A JP2013555572A JP6116488B2 JP 6116488 B2 JP6116488 B2 JP 6116488B2 JP 2013555572 A JP2013555572 A JP 2013555572A JP 2013555572 A JP2013555572 A JP 2013555572A JP 6116488 B2 JP6116488 B2 JP 6116488B2
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- metal
- layer
- pad
- bondable
- sintered
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- 239000004065 semiconductor Substances 0.000 title claims description 43
- 229910052751 metal Inorganic materials 0.000 claims description 114
- 239000002184 metal Substances 0.000 claims description 113
- 238000000034 method Methods 0.000 claims description 94
- 229910000679 solder Inorganic materials 0.000 claims description 54
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 41
- 239000010949 copper Substances 0.000 claims description 39
- 229910052709 silver Inorganic materials 0.000 claims description 39
- 239000004332 silver Substances 0.000 claims description 39
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 37
- 229910052802 copper Inorganic materials 0.000 claims description 36
- 239000002245 particle Substances 0.000 claims description 25
- 150000001875 compounds Chemical class 0.000 claims description 24
- 239000002105 nanoparticle Substances 0.000 claims description 21
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 20
- 229910045601 alloy Inorganic materials 0.000 claims description 18
- 239000000956 alloy Substances 0.000 claims description 18
- 239000007787 solid Substances 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 239000011859 microparticle Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 13
- 238000005245 sintering Methods 0.000 claims description 13
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 10
- 229910052759 nickel Inorganic materials 0.000 claims description 10
- 239000004033 plastic Substances 0.000 claims description 10
- 238000007639 printing Methods 0.000 claims description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 9
- 229910052737 gold Inorganic materials 0.000 claims description 9
- 239000010931 gold Substances 0.000 claims description 9
- 229920000642 polymer Polymers 0.000 claims description 9
- 238000007650 screen-printing Methods 0.000 claims description 9
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 claims description 7
- 239000002082 metal nanoparticle Substances 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 5
- 229910052763 palladium Inorganic materials 0.000 claims description 5
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910052793 cadmium Inorganic materials 0.000 claims description 3
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims description 3
- 229910017052 cobalt Inorganic materials 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
- 229910052703 rhodium Inorganic materials 0.000 claims description 3
- 239000010948 rhodium Substances 0.000 claims description 3
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 239000011701 zinc Substances 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- 239000004809 Teflon Substances 0.000 claims description 2
- 229920006362 Teflon® Polymers 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 239000002861 polymer material Substances 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 238000009958 sewing Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 54
- 239000002923 metal particle Substances 0.000 description 13
- 230000008021 deposition Effects 0.000 description 8
- 239000007788 liquid Substances 0.000 description 8
- 238000000465 moulding Methods 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000005538 encapsulation Methods 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 238000007373 indentation Methods 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 239000012876 carrier material Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 229910001092 metal group alloy Inorganic materials 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 238000001721 transfer moulding Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 241000212941 Glehnia Species 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000004320 controlled atmosphere Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000008240 homogeneous mixture Substances 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002991 molded plastic Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4821—Flat leads, e.g. lead frames with or without insulating supports
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/568—Temporary substrate used as encapsulation process aid
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- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49579—Lead-frames or other flat leads characterised by the materials of the lead frames or layers thereon
- H01L23/49582—Metallic layers on lead frames
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/2919—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/45124—Aluminium (Al) as principal constituent
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45147—Copper (Cu) as principal constituent
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- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
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- H01L2224/48505—Material at the bonding interface
- H01L2224/48599—Principal constituent of the connecting portion of the wire connector being Gold (Au)
- H01L2224/486—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48638—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
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Description
Claims (19)
- 半導体デバイスであって、
直方体のプラスチックパッケージであって、前記パッケージの1つの側が第2の端子を囲む第1の端子を有し、前記第1の端子が第2の端子からギャップによって間隔を空けられている、前記直方体のプラスチックパッケージ、
を含み、
前記第1の端子が、塊状構造を有する固体銅ストライプと、銀と混合されたはんだの被覆に溶接される外部表面と、粒子状構造を有する銀の層に接する内部表面とを含み、
前記第2の端子が、塊状構造を有する銅の層と、銀と混合されたはんだの被覆に溶接される外部表面と、半導体チップが接着される内部表面とを含む、半導体デバイス。 - 請求項1に記載のデバイスであって、
前記半導体チップを前記第1の端子の焼結された銀ナノ粒子の層にボンディングするワイヤと、
チップとワイヤとを封入し、前記第1の端子と第2の端子との間のギャップを充填するポリマー化合物と、
を更に含む、デバイス。 - 半導体デバイスを製造するための方法であって、
焼結されたボンディング可能及びはんだ付け可能な金属の第1の層をキャリアストリップ上に形成することであって、前記第1の層が第1のパッドと第2のパッドとにパターニングされ、第1のパッドのセットが各第2のパッドを囲み、前記第1のパッドが第2のパッドからギャップによって間隔を空けられる、前記形成することと、
前記第1のパッドと前記第2のパッドとの焼結されたボンディング可能及びはんだ付け可能な金属の前記第1の層上に垂直に、塊状金属のパターニングされた層を形成することと、
前記第1のパッドの前記塊状金属の層上に垂直に、焼結されたボンディング可能及びはんだ付け可能な金属の第2の層を形成することと、
各第2のパッドの前記塊状金属層上に端子を有する半導体チップを接着して取り付けることと、
を含む、方法。 - 請求項3に記載の方法であって、
各チップの前記端子から前記第1のパッドのそれぞれのセットのボンディング可能及びはんだ付け可能な金属の前記第2の層までの前記ギャップにわたってボンディングワイヤをわたすことと、
チップとワイヤとをポリマー化合物内に封入し、同時に前記化合物によって前記ギャップを充填し、その後前記化合物を硬化させることと、
前記第1及び第2のパッドの前記第1の層と、前記第1及び第2のパッドの間の前記ギャップ内の前記硬化された化合物とから前記キャリアストリップを分離することであって、それにより、アセンブルされたチップの硬化されたボードの表面を露出させる、前記分離することと、
を更に含む、方法。 - 請求項4に記載の方法であって、
前記分離することの後、前記第1及び第2のパッドの前記露出された第1の層をはんだ合金で被覆して、その後前記はんだ合金をリフローし、それにより、前記第1の層の前記はんだ付け可能な金属を前記はんだ合金に溶かし、前記合金を塊状金属の前記層と連結すること、を更に含む、方法。 - 請求項5に記載の方法であって、
囲んでいる第1のパッドのそれぞれのセットを伴う各第2のパッドを封入された半導体デバイスとして単体化するために、前記硬化されたボードをソーイングすることを更に含む、方法。 - 請求項3に記載の方法であって、
前記ボンディング可能及びはんだ付け可能な金属が、銀、金、ニッケル及びパラジウムを含むグループから選択される、方法。 - 請求項3に記載の方法であって、
前記塊状金属が、銅、銀、亜鉛、ニッケル、インジウム、カドミウム、コバルト、ロジウム、高温はんだ及び金属充填接着剤を含むグループから選択される、方法。 - 請求項3に記載の方法であって、
焼結されたボンディング可能及びはんだ付け可能な金属の第1の層を形成することが、
キャリアのストリップ上にボンディング可能及びはんだ付け可能な金属のナノ粒子を含むペーストを堆積することであって、前記堆積されたペーストが第1及び第2のパッドにパターニングされ、第1のパッドのセットが各第2のパッドを囲み、前記第1のパッドが前記第2のパッドからギャップによって間隔を空けられる、前記堆積することと、
ボンディング可能及びはんだ付け可能な金属の固体層のパッドを作成するために、前記ナノ粒子を焼結することと、
を含む、方法。 - 請求項9に記載の方法であって、
堆積することが、インクジェット、ステンシル印刷、スクリーン印刷及びニードルディスペンスを含むグループから選択される、方法。 - 請求項9に記載の方法であって、
焼結することが、250℃から400℃の範囲内の温度を含む、方法。 - 請求項3に記載の方法であって、
塊状金属の層を形成することが、
ボンディング可能及びはんだ付け可能な金属の焼結されたナノ粒子の前記パッドにマスクを整合することと、
前記第1及び第2のパッドの焼結されたナノ粒子の前記パッド上に金属マイクロ粒子と金属ナノ粒子との混合物を含むペーストを堆積することと、
前記マスクを除去することと、
ボンディング可能及びはんだ付け可能な金属の焼結された粒子の前記パッド上にスタックされた塊状構造の固体層をつくるために、前記金属マイクロ粒子及びナノ粒子を焼結することと、
を含む、方法。 - 請求項12に記載の方法であって、
堆積することが、ステンシル印刷、スクリーン印刷、インクジェット及びニードルディスペンスを含むグループから選択される、方法。 - 請求項12に記載の方法であって、
焼結することが、250℃から400℃の範囲内の温度を含む、方法。 - 請求項3に記載の方法であって、
焼結されたボンディング可能及びはんだ付け可能な金属の第2の層を形成することが、
前記第1のパッドの塊状金属の前記パッド上にボンディング可能及びはんだ付け可能な金属のナノ粒子を含むペーストを堆積することと、
塊状金属の前記層上にスタックされたボンディング可能及びはんだ付け可能な金属の固体層を作成するために、前記ナノ粒子を焼結することと、
を含む、方法。 - 請求項15に記載の方法であって、
堆積することが、インクジェット、ステンシル印刷、スクリーン印刷及びニードルディスペンスを含むグループから選択される、方法。 - 請求項15に記載の方法であって、
焼結することが、250℃から400℃の範囲内の温度を含む、方法。 - 請求項3に記載の方法であって、
前記キャリアストリップが、小孔のない、乾燥した、非酸化性の材料で作られる、方法。 - 請求項18に記載の方法であって、
前記キャリアストリップが、テフロン(登録商標)、ポリマー材料、ポリマー被覆された金属、ステンレス鋼、セラミック、銅、クロムめっきされた銅、ニッケルめっきされた銅及びAlloy42TMのような鉄ニッケル合金のグループから選択される、方法。
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US201161445630P | 2011-02-23 | 2011-02-23 | |
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US13/351,579 US8643165B2 (en) | 2011-02-23 | 2012-01-17 | Semiconductor device having agglomerate terminals |
US13/351,579 | 2012-01-17 | ||
PCT/US2012/026378 WO2012116218A2 (en) | 2011-02-23 | 2012-02-23 | Semiconductor packages with agglomerate terminals |
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JP (1) | JP6116488B2 (ja) |
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US20180047588A1 (en) * | 2015-05-04 | 2018-02-15 | Eoplex Limited | Lead carrier structure and packages formed therefrom without die attach pads |
US10727085B2 (en) * | 2015-12-30 | 2020-07-28 | Texas Instruments Incorporated | Printed adhesion deposition to mitigate integrated circuit package delamination |
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