JP6114670B2 - 有機エレクトロルミネッセンス表示装置及び有機エレクトロルミネッセンス表示装置の製造方法 - Google Patents

有機エレクトロルミネッセンス表示装置及び有機エレクトロルミネッセンス表示装置の製造方法 Download PDF

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JP6114670B2
JP6114670B2 JP2013194351A JP2013194351A JP6114670B2 JP 6114670 B2 JP6114670 B2 JP 6114670B2 JP 2013194351 A JP2013194351 A JP 2013194351A JP 2013194351 A JP2013194351 A JP 2013194351A JP 6114670 B2 JP6114670 B2 JP 6114670B2
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layer
electrode layer
groove
patterning
forming
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JP2015060750A5 (enExample
JP2015060750A (ja
Inventor
和浩 小高
和浩 小高
佐藤　敏浩
敏浩 佐藤
尚紀 徳田
尚紀 徳田
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Japan Display Inc
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Japan Display Inc
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Priority to US14/489,550 priority patent/US9478594B2/en
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/805—Electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/124—Insulating layers formed between TFT elements and OLED elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H10K71/233—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers by photolithographic etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP2013194351A 2013-09-19 2013-09-19 有機エレクトロルミネッセンス表示装置及び有機エレクトロルミネッセンス表示装置の製造方法 Active JP6114670B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013194351A JP6114670B2 (ja) 2013-09-19 2013-09-19 有機エレクトロルミネッセンス表示装置及び有機エレクトロルミネッセンス表示装置の製造方法
US14/489,550 US9478594B2 (en) 2013-09-19 2014-09-18 Organic electroluminescence display device and method of manufacturing organic electroluminescence display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013194351A JP6114670B2 (ja) 2013-09-19 2013-09-19 有機エレクトロルミネッセンス表示装置及び有機エレクトロルミネッセンス表示装置の製造方法

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JP2015060750A JP2015060750A (ja) 2015-03-30
JP2015060750A5 JP2015060750A5 (enExample) 2016-05-12
JP6114670B2 true JP6114670B2 (ja) 2017-04-12

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US (1) US9478594B2 (enExample)
JP (1) JP6114670B2 (enExample)

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KR102370035B1 (ko) * 2015-02-05 2022-03-07 삼성디스플레이 주식회사 투명 표시 기판, 투명 표시 장치 및 투명 표시 장치의 제조 방법
CN104951594B (zh) * 2015-05-28 2023-07-21 格科微电子（上海）有限公司 集成电路的布线方法以及集成电路结构
KR102455318B1 (ko) * 2015-10-30 2022-10-18 삼성디스플레이 주식회사 유기 발광 표시 장치
JP2018018740A (ja) * 2016-07-29 2018-02-01 株式会社ジャパンディスプレイ 表示装置及び表示装置の製造方法
KR102769206B1 (ko) 2016-12-29 2025-02-20 엘지디스플레이 주식회사 보조 전극을 포함하는 디스플레이 장치
KR102343573B1 (ko) * 2017-05-26 2021-12-28 삼성디스플레이 주식회사 플렉서블 디스플레이 장치
WO2019150503A1 (ja) * 2018-01-31 2019-08-08 シャープ株式会社 表示装置
CN111886925B (zh) * 2018-03-30 2023-06-16 夏普株式会社 显示设备
WO2019187076A1 (ja) * 2018-03-30 2019-10-03 シャープ株式会社 表示デバイス
KR102576994B1 (ko) * 2018-06-28 2023-09-12 삼성디스플레이 주식회사 디스플레이 장치
KR102661469B1 (ko) * 2018-09-11 2024-04-29 삼성디스플레이 주식회사 표시 패널
KR102724703B1 (ko) * 2018-10-23 2024-11-01 삼성디스플레이 주식회사 디스플레이 장치 및 디스플레이 장치를 제조하기 위한 마스크
CN109585682B (zh) * 2018-12-06 2020-09-29 合肥鑫晟光电科技有限公司 一种发光器件的封装方法、封装结构及显示装置
CN113508641B (zh) * 2019-02-27 2024-06-14 夏普株式会社 显示装置
CN110429118A (zh) * 2019-07-31 2019-11-08 云谷（固安）科技有限公司 显示面板及其制备方法和显示装置
CN113497089B (zh) * 2020-03-20 2024-10-29 京东方科技集团股份有限公司 阵列基板及其制备方法、显示装置
CN113594204B (zh) * 2020-04-30 2024-04-02 京东方科技集团股份有限公司 显示基板及其制备方法、显示装置
TWI729862B (zh) * 2020-06-22 2021-06-01 友達光電股份有限公司 有機發光面板及其製作方法
US11835628B2 (en) * 2020-11-02 2023-12-05 Microsoft Technology Licensing, Llc Time-of-flight image sensor
KR20220072017A (ko) * 2020-11-23 2022-06-02 삼성디스플레이 주식회사 표시 장치 및 그 제조 방법
US12243482B2 (en) 2020-12-06 2025-03-04 Semiconductor Energy Laboratory Co., Ltd. Display device and display correction system
US12300126B2 (en) 2020-12-07 2025-05-13 Semiconductor Energy Laboratory Co., Ltd. Display device, manufacturing method thereof, and vehicle
JP2022115080A (ja) 2021-01-27 2022-08-08 株式会社半導体エネルギー研究所 表示装置
WO2022180480A1 (ja) 2021-02-25 2022-09-01 株式会社半導体エネルギー研究所 半導体装置、及び電子機器
CN116868261A (zh) 2021-02-26 2023-10-10 株式会社半导体能源研究所 显示装置及电子设备
US12349538B2 (en) 2021-03-25 2025-07-01 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, display device, light-emitting apparatus, electronic device, and lighting device
US12477918B2 (en) 2021-03-31 2025-11-18 Semiconductor Energy Laboratory Co., Ltd. Display apparatus, display module, electronic device, and method for manufacturing display apparatus
US12245485B2 (en) 2021-04-08 2025-03-04 Semiconductor Energy Laboratory Co., Ltd. Display apparatus including light-emitting device and light-receiving device
KR20230169177A (ko) 2021-04-22 2023-12-15 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
US11815689B2 (en) 2021-04-30 2023-11-14 Semiconductor Energy Laboratory Co., Ltd. Electronic device
US11699391B2 (en) 2021-05-13 2023-07-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display apparatus, and electronic device
US12426474B2 (en) 2021-05-27 2025-09-23 Semiconductor Energy Laboratory Co., Ltd. Display apparatus, method for manufacturing display apparatus, display module, and electronic device
CN115411067A (zh) * 2021-05-27 2022-11-29 京东方科技集团股份有限公司 显示基板及其制备方法、显示装置
US12262623B2 (en) 2021-06-30 2025-03-25 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of display device
WO2023031718A1 (ja) 2021-08-31 2023-03-09 株式会社半導体エネルギー研究所 表示装置、および電子機器
DE112022005825T5 (de) 2021-12-08 2024-09-19 Semiconductor Energy Laboratory Co., Ltd. Elektronisches Gerät
KR20230090639A (ko) * 2021-12-15 2023-06-22 엘지디스플레이 주식회사 전계 발광 표시 장치
KR20240152855A (ko) 2022-02-09 2024-10-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 전자 기기
JP2023179001A (ja) * 2022-06-07 2023-12-19 東京エレクトロン株式会社 基板処理方法及び基板処理装置

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US9478594B2 (en) 2016-10-25
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