JP6106908B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP6106908B2 JP6106908B2 JP2012279752A JP2012279752A JP6106908B2 JP 6106908 B2 JP6106908 B2 JP 6106908B2 JP 2012279752 A JP2012279752 A JP 2012279752A JP 2012279752 A JP2012279752 A JP 2012279752A JP 6106908 B2 JP6106908 B2 JP 6106908B2
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- Prior art keywords
- silicon nitride
- nitride film
- film
- semiconductor device
- heat treatment
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- 239000004065 semiconductor Substances 0.000 title claims description 66
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 101
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 101
- 150000004767 nitrides Chemical class 0.000 claims description 40
- 238000010438 heat treatment Methods 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 31
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 239000011669 selenium Substances 0.000 claims description 14
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- 229920002120 photoresistant polymer Polymers 0.000 claims description 11
- 229910052731 fluorine Inorganic materials 0.000 claims description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 238000005468 ion implantation Methods 0.000 claims description 8
- 238000009792 diffusion process Methods 0.000 claims description 7
- 229910052698 phosphorus Inorganic materials 0.000 claims description 7
- 229910052717 sulfur Inorganic materials 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052711 selenium Inorganic materials 0.000 claims description 5
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 4
- 239000011737 fluorine Substances 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 3
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 3
- 239000011574 phosphorus Substances 0.000 claims description 3
- 239000011593 sulfur Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 15
- 238000009832 plasma treatment Methods 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 238000012545 processing Methods 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 229910018557 Si O Inorganic materials 0.000 description 9
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 229910002601 GaN Inorganic materials 0.000 description 7
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 238000003795 desorption Methods 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000009616 inductively coupled plasma Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910007991 Si-N Inorganic materials 0.000 description 4
- 229910006294 Si—N Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 230000005669 field effect Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- 238000001157 Fourier transform infrared spectrum Methods 0.000 description 2
- 229910008045 Si-Si Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910006411 Si—Si Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910001195 gallium oxide Inorganic materials 0.000 description 2
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- -1 InN Chemical compound 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 150000001875 compounds Chemical group 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000700 radioactive tracer Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000005533 two-dimensional electron gas Effects 0.000 description 1
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Description
窒化シリコン膜26の成膜条件例を以下に示す。
成膜装置:平行平板型プラズマCVD装置
基板温度:250℃
成膜ガス:SiH4、NH3、N2、He
ガス流量:SiH4:4sccm、NH3:2sccm、N2:200sccm、He:800sccm
圧力 :1.0Torr
パワー :75Watts
膜厚 :20nm
上記条件により、窒化シリコン膜26の屈折率は、約2.35となる。
プラズマ処理の処理条件の例を以下に示す。(プラズマ処理は、窒化シリコン膜26を成膜した装置から取り出し下記CCP法で実施される)
処理装置:平行平板電極構造(CCP法:Capacitively Coupled Plasma)
温度 :室温
ガス :O2またはN2
ガス流量:100sccm
圧力 :0.5Torr
パワー :100Watts
時間 :3分
処理装置:誘導結合型構造(ICP法:Inductively Coupled Plasma)
温度 :室温
ガス :O2またはN2
ガス流量:100sccm
圧力 :5Pa
ICPパワー:700Watts
バイアスパワー:30Watts
時間 :3分
サンプルA:GaN層上に窒化シリコン膜26を形成した直後のサンプル
サンプルB:サンプルAを熱処理せずにOを用いプラズマ処理したサンプル
サンプルC:サンプルAを熱処理した後Oを用いプラズマ処理したサンプル
20 窒化物半導体層
22 ソース電極
24 ドレイン電極
26 窒化シリコン膜
28 ゲート電極
30 絶縁膜
32 ソース配線
34 ドレイン配線
Claims (5)
- 窒化物半導体上にオーミック接触するソース電極およびドレイン電極からなる電極を形成する工程と、
前記窒化物半導体の表面に接触し、2.2以上の屈折率を有する窒化シリコン膜を形成する工程と、
前記窒化シリコン膜を形成する工程の後、前記窒化物半導体および前記窒化シリコン膜に対し前記窒化シリコン膜の成膜温度から50℃以上かつ400℃以下の温度範囲で熱処理を実施する工程と、
前記熱処理を実施する工程の後、前記窒化シリコン膜に酸素、窒素、弗素、燐、硫黄およびセレンの少なくとも一つからなる元素を導入する工程と、
前記元素を導入する工程の後、前記窒化物半導体上に形成されたフォトレジストをマスクとして利用し、前記窒化シリコン膜に開口を形成する工程と、
前記開口内の前記窒化物半導体上にゲート電極を形成する工程と、
前記元素を導入する工程の後、前記窒化シリコン膜上に、2.2より小さい屈折率を有する窒化シリコンからなる保護膜を形成する工程と、
を含み、
前記ソース電極と前記ゲート電極との間および前記ゲート電極とドレイン電極との間における前記元素が導入された前記窒化シリコン膜および前記保護膜は、前記窒化物半導体上に残存してなることを特徴とする半導体装置の製造方法。 - 前記元素は、酸素、窒素またはフッ素であり、前記元素を含むプラズマに曝す工程により前記窒化シリコン膜に導入されることを特徴とする請求項1記載の半導体装置の製造方法。
- 前記熱処理を実施する工程は、前記窒化シリコン膜の成膜温度より100℃以上高い温度で実施されることを特徴とする請求項1または2記載の半導体装置の製造方法。
- 前記熱処理を実施する工程は、前記窒化シリコン膜の成膜温度より200℃以上高い温度で実施される請求項3記載の半導体装置の製造方法。
- 前記元素は、前記元素をイオン注入する工程、および前記元素を熱拡散する工程の何れかにより前記窒化シリコン膜に導入されることを特徴とする請求項1記載の半導体装置の製造方法。
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