JP6241915B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP6241915B2 JP6241915B2 JP2013159688A JP2013159688A JP6241915B2 JP 6241915 B2 JP6241915 B2 JP 6241915B2 JP 2013159688 A JP2013159688 A JP 2013159688A JP 2013159688 A JP2013159688 A JP 2013159688A JP 6241915 B2 JP6241915 B2 JP 6241915B2
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- insulating film
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- 238000004519 manufacturing process Methods 0.000 title claims description 14
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 23
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 22
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 22
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
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- 238000007254 oxidation reaction Methods 0.000 description 28
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- 150000004767 nitrides Chemical class 0.000 description 23
- 229910052760 oxygen Inorganic materials 0.000 description 16
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 15
- 239000001301 oxygen Substances 0.000 description 15
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 13
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- 238000005259 measurement Methods 0.000 description 11
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- 239000011229 interlayer Substances 0.000 description 5
- 238000005121 nitriding Methods 0.000 description 5
- 229910010271 silicon carbide Inorganic materials 0.000 description 5
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- 238000010521 absorption reaction Methods 0.000 description 2
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 description 2
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- 229910018557 Si O Inorganic materials 0.000 description 1
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- AUCDRFABNLOFRE-UHFFFAOYSA-N alumane;indium Chemical compound [AlH3].[In] AUCDRFABNLOFRE-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
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- 238000002474 experimental method Methods 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
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- 229910052759 nickel Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
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- 230000035945 sensitivity Effects 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000005533 two-dimensional electron gas Effects 0.000 description 1
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
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Description
オゾン濃度:10%〜100%(残りは酸素)
圧力 :0.1Torr〜10Torr
温度 :150℃〜350℃
処理時間 :1分〜5分
なお、オゾン濃度は、30%〜100%が好ましく、50%〜100%がより好ましい。圧力は、1torr〜8torrが好ましく、3torr〜5torrがより好ましい。温度は、200℃〜300℃が好ましく、220℃〜280℃がより好ましい。処理時間は、2分〜4分が好ましく、2.5分〜3.5分がより好ましい。また、酸化処理を行う前に、絶縁膜22の表面をイソプロピルアルコール(IPA)に浸して洗浄する前処理を行ってもよい。IPAに浸す時間は、例えば5分とすることができる。
酸素濃度:3%〜100%(残りは窒素)
圧力 :0.03Torr〜5Torr
RF電力:50W〜800W
温度 :25℃〜350℃
処理時間:1分〜10分
なお、酸素濃度は、30%〜100%が好ましく、50%〜100%がより好ましい。圧力は、0.5torr〜3torrが好ましく、1torr〜2torrがより好ましい。RF電力は、200W〜600Wが好ましく、300W〜500Wがより好ましい。温度は、25℃〜200℃が好ましく、25℃〜100℃がより好ましい。処理時間は、2分〜8分が好ましく、3分〜5分がより好ましい。
オゾン濃度:50%(残りは酸素)
圧力 :3Torr
温度 :250℃
処理時間 :3分
酸素プラズマに曝すことによる酸化処理は、以下の条件を用いて行った。
酸素濃度:100%
圧力 :1Torr
RF電力:400W
温度 :25℃
処理時間:3分
オゾン濃度:50%(残りは酸素)
圧力 :3Torr
温度 :250℃
処理時間 :3分
また、比較のために、絶縁膜22の表面に対して酸化処理を行っていない点を除いて、実施例1と同じ方法で製造した比較例1に対しても、絶縁膜22に対するドライエッチングで形成されたパターンを測長用SEMで測定した。
窒素濃度:100%
圧力 :0.03Torr〜5Torr
RF電力:50W〜800W
温度 :25℃〜350℃
処理時間:1分〜10分
なお、圧力は、0.5torr〜3torrが好ましく、1torr〜2torrがより好ましい。RF電力は、200W〜600Wが好ましく、300W〜500Wがより好ましい。温度は、25℃〜200℃が好ましく、25℃〜100℃がより好ましい。処理時間は、2分〜8分が好ましく、3分〜5分がより好ましい。
12 バッファ層
14 電子走行層
16 電子供給層
18 キャップ層
20 窒化物半導体層
22 絶縁膜
24 ソース電極
26 ドレイン電極
28 ゲート電極
30 層間絶縁膜
32 ソース配線
34 ドレイン配線
40、42、52 レジスト膜
46 EBレジスト膜
50 開口
44、54 金属膜
60 前方散乱電子
62 後方散乱電子
64 電子移動
Claims (3)
- 窒化シリコン、酸化シリコン、及び酸窒化シリコンの何れかからなる絶縁膜を形成する工程と、
前記絶縁膜の表面に対して窒化の処理を行う工程と、
前記窒化の処理を行った後、前記絶縁膜の表面に接してレジスト膜を形成する工程と、
前記レジスト膜に対して電子ビームを照射して露光を行う工程と、を具備し、
前記窒化の処理は、窒素濃度100%、圧力0.03torr〜5torr、RF電力50W〜800W、温度25℃〜350℃、処理時間1分〜10分の条件で前記絶縁膜の表面を窒素プラズマに曝すことで行う、半導体装置の製造方法。 - 前記絶縁膜は、窒素に対するシリコンの組成比が0.76以上の窒化シリコンを含む、請求項1に記載の半導体装置の製造方法。
- 前記電子ビームを照射して露光を行う工程は、加速電圧25kV〜50kV、電流値0.01nA〜0.5nA、ドーズ量2μC/cm2〜50μC/cm2の条件で実施される、請求項1または2に記載の半導体装置の製造方法。
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US14/286,281 US9287365B2 (en) | 2013-07-31 | 2014-05-23 | Method of manufacturing semiconductor device |
US15/018,675 US20160155835A1 (en) | 2013-07-31 | 2016-02-08 | Semiconductor device |
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JP6553312B2 (ja) | 2017-01-10 | 2019-07-31 | 住友精化株式会社 | エポキシ樹脂組成物 |
JP2019175913A (ja) * | 2018-03-27 | 2019-10-10 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法 |
JP7367440B2 (ja) * | 2019-10-04 | 2023-10-24 | 住友電気工業株式会社 | 高電子移動度トランジスタの製造方法及び高電子移動度トランジスタ |
JP7439551B2 (ja) * | 2020-02-06 | 2024-02-28 | 住友電気工業株式会社 | 半導体装置の製造方法 |
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JP2601112B2 (ja) * | 1992-11-30 | 1997-04-16 | 日本電気株式会社 | 半導体装置の製造方法 |
JPH06267835A (ja) * | 1993-03-12 | 1994-09-22 | Seiko Instr Inc | 薄膜のパターニング方法 |
JP3342164B2 (ja) * | 1993-04-16 | 2002-11-05 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
JPH0883786A (ja) * | 1994-09-12 | 1996-03-26 | Fujitsu Ltd | 半導体装置の製造方法 |
JP3422580B2 (ja) * | 1994-12-16 | 2003-06-30 | 三菱電機株式会社 | 半導体装置の製造方法 |
JPH1041222A (ja) * | 1996-07-23 | 1998-02-13 | Japan Energy Corp | 半導体装置の製造方法 |
JP2000039717A (ja) | 1998-07-24 | 2000-02-08 | Fujitsu Ltd | レジストパターンの形成方法および半導体装置の製造方法 |
US6686616B1 (en) * | 2000-05-10 | 2004-02-03 | Cree, Inc. | Silicon carbide metal-semiconductor field effect transistors |
JP4083000B2 (ja) * | 2002-12-12 | 2008-04-30 | 東京エレクトロン株式会社 | 絶縁膜の形成方法 |
JP4197277B2 (ja) * | 2003-07-31 | 2008-12-17 | シャープ株式会社 | 半導体装置及びその製造方法 |
US7615774B2 (en) * | 2005-04-29 | 2009-11-10 | Cree.Inc. | Aluminum free group III-nitride based high electron mobility transistors |
US7419892B2 (en) * | 2005-12-13 | 2008-09-02 | Cree, Inc. | Semiconductor devices including implanted regions and protective layers and methods of forming the same |
US7709269B2 (en) * | 2006-01-17 | 2010-05-04 | Cree, Inc. | Methods of fabricating transistors including dielectrically-supported gate electrodes |
US7750370B2 (en) * | 2007-12-20 | 2010-07-06 | Northrop Grumman Space & Mission Systems Corp. | High electron mobility transistor having self-aligned miniature field mitigating plate on a protective dielectric layer |
JP5345328B2 (ja) * | 2008-02-22 | 2013-11-20 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法 |
JP5487631B2 (ja) * | 2009-02-04 | 2014-05-07 | 富士通株式会社 | 化合物半導体装置及びその製造方法 |
JP5531432B2 (ja) * | 2009-03-27 | 2014-06-25 | 富士通株式会社 | 化合物半導体装置及びその製造方法 |
US8357571B2 (en) * | 2010-09-10 | 2013-01-22 | Cree, Inc. | Methods of forming semiconductor contacts |
JP6106908B2 (ja) * | 2012-12-21 | 2017-04-05 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法 |
JP6241915B2 (ja) * | 2013-07-31 | 2017-12-06 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法 |
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