JP2006269673A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- JP2006269673A JP2006269673A JP2005084603A JP2005084603A JP2006269673A JP 2006269673 A JP2006269673 A JP 2006269673A JP 2005084603 A JP2005084603 A JP 2005084603A JP 2005084603 A JP2005084603 A JP 2005084603A JP 2006269673 A JP2006269673 A JP 2006269673A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 39
- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 85
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 85
- 239000010408 film Substances 0.000 claims description 300
- 238000000034 method Methods 0.000 claims description 63
- 239000000758 substrate Substances 0.000 claims description 51
- 238000010438 heat treatment Methods 0.000 claims description 40
- 229910052710 silicon Inorganic materials 0.000 claims description 24
- 230000015572 biosynthetic process Effects 0.000 claims description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 22
- 239000010703 silicon Substances 0.000 claims description 22
- 239000003054 catalyst Substances 0.000 claims description 18
- 238000002230 thermal chemical vapour deposition Methods 0.000 claims description 14
- 238000005530 etching Methods 0.000 claims description 9
- 230000005669 field effect Effects 0.000 claims description 8
- 238000002955 isolation Methods 0.000 claims description 7
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 239000000470 constituent Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 230000006866 deterioration Effects 0.000 abstract description 2
- DYCJFJRCWPVDHY-LSCFUAHRSA-N NBMPR Chemical compound O[C@@H]1[C@H](O)[C@@H](CO)O[C@H]1N1C2=NC=NC(SCC=3C=CC(=CC=3)[N+]([O-])=O)=C2N=C1 DYCJFJRCWPVDHY-LSCFUAHRSA-N 0.000 abstract 2
- 238000004050 hot filament vapor deposition Methods 0.000 description 28
- 239000011229 interlayer Substances 0.000 description 26
- 239000010410 layer Substances 0.000 description 23
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 21
- 229920005591 polysilicon Polymers 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 229910052814 silicon oxide Inorganic materials 0.000 description 16
- 229910052739 hydrogen Inorganic materials 0.000 description 13
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 13
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 12
- 229910021332 silicide Inorganic materials 0.000 description 12
- 229910005883 NiSi Inorganic materials 0.000 description 10
- 239000007789 gas Substances 0.000 description 10
- 239000002994 raw material Substances 0.000 description 9
- 239000003870 refractory metal Substances 0.000 description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 9
- 229910052721 tungsten Inorganic materials 0.000 description 9
- 239000010937 tungsten Substances 0.000 description 9
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 8
- 229910052796 boron Inorganic materials 0.000 description 8
- 239000001257 hydrogen Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 229910019001 CoSi Inorganic materials 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 6
- 229910021529 ammonia Inorganic materials 0.000 description 6
- 229910008484 TiSi Inorganic materials 0.000 description 5
- 238000001312 dry etching Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 5
- 230000002776 aggregation Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 3
- 238000004220 aggregation Methods 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229910015900 BF3 Inorganic materials 0.000 description 2
- 229910004129 HfSiO Inorganic materials 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 229910018999 CoSi2 Inorganic materials 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910018557 Si O Inorganic materials 0.000 description 1
- 229910007991 Si-N Inorganic materials 0.000 description 1
- 229910008051 Si-OH Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910008284 Si—F Inorganic materials 0.000 description 1
- 229910006294 Si—N Inorganic materials 0.000 description 1
- 229910006358 Si—OH Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- FXNBHOMLWYQFSK-UHFFFAOYSA-N [SiH3][SiH3].Cl.Cl.Cl.Cl.Cl.Cl Chemical compound [SiH3][SiH3].Cl.Cl.Cl.Cl.Cl.Cl FXNBHOMLWYQFSK-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- WIGAYVXYNSVZAV-UHFFFAOYSA-N ac1lavbc Chemical compound [W].[W] WIGAYVXYNSVZAV-UHFFFAOYSA-N 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
- -1 boron fluoride ions Chemical class 0.000 description 1
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 125000001475 halogen functional group Chemical group 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910001449 indium ion Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000012844 infrared spectroscopy analysis Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
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- H01L29/4983—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET with a lateral structure, e.g. a Polysilicon gate with a lateral doping variation or with a lateral composition variation or characterised by the sidewalls being composed of conductive, resistive or dielectric material
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Abstract
【解決手段】 少なくともライナー膜または第2の側壁絶縁膜として、Si−H結合が1×1021cm-3以下のシリコン窒化膜を用いることでp型MOSFETのNBTI寿命を1×109秒に改善でき、半導体集積回路装置の寿命を確保できる。
【選択図】 図2
Description
本実施例では、側壁絶縁膜を熱CVD法で成膜し、ライナー膜をCat−CVD法にて成膜した。本実施例では、サリサイドにNiSiを適用した。
本実施例は、第2の側壁絶縁膜と第1の層間絶縁膜をCat−CVD法で成膜した例である。Cat−CVDの条件は、Si−H結合量が、1×1021cm-3以下となる、基板温度200℃、触媒温度1900℃の条件とした。膜厚は、80nmとした。サリサイドには、NiSiを適用した。
本実施例は、前記本発明の実施形態の内、第1の層間絶縁膜を成膜した後、熱処理を加えることを特徴とする。
本実施例は、実施の形態で説明したゲート電極の材質および構造を変えた例である。
配線の微細化が更に進むと、上述のポリシリコンゲート電極のポリシリコン・シリサイド構造ではゲート電極の抵抗が高くなることが予想され、ポリシリコン・金属構造(図12(a))が検討されている。また、ゲート電極をポリシリコンとしてゲート電極に順バイアス電圧を印加した場合にゲート電極内に空乏層が形成されて、電流駆動能力の劣化させているのを改善するために、ゲート絶縁膜に接するゲート電極を金属とし、その上にポリシリコンを積層した金属・ポリシリコン構造(図12(b))および金属構造(図12(c))のゲート電極も検討されている(図12(c))。
現在、ゲート絶縁膜にシリコン酸化膜・シリコン酸窒化膜より誘電率が高い金属酸化物(以下、酸化物膜、以下、高誘電率膜と称す。)を適用する技術が報告されている。その材料としては、Al2O3、HfO2およびそれにAlやSiを混合させたもの、ZrO2、LaおよびLa系元素(ランタノイド)の酸化物がある。また、上記金属酸化物をアンモニア雰囲気または、アンモニアプラズマにより窒化した高誘電率膜も知られている。本発明では、この高誘電率膜をゲート絶縁膜に適用しても、その効果を得ることができる。なぜなら、NBTI劣化は、基板界面のSi未結合手の発生によるものであり、高誘電率膜のゲート絶縁膜は、シリコン基板との界面にシリコン酸化膜またはシリコン窒化膜が存在する構造で用いられるため、これまで、説明してきた方法によりNBTI劣化を抑制できるためである。
101 素子分離領域
102 n型ウェル
103 ゲート絶縁膜
104 ゲート電極
105 第1の側壁絶縁膜
106 ソース・ドレイン拡張領域
107 第2の側壁絶縁膜
108 ソース・ドレイン領域
109 高融点金属シリサイド
110 第1の層間絶縁膜(ライナー膜)
111 第2の層間絶縁膜
112 窒化チタン膜
113 タングステン
114 配線
801 原料ガス導入口
802 フィラメント
803 基板
900 半導体基板
901 ゲート絶縁膜
902 第1の側壁絶縁膜
903 第2の側壁絶縁膜
904 ポリシリコン層
905 金属層
906 シリコン窒化膜の層
Claims (11)
- 半導体基板上に配置されたMOS型電界効果トランジスタを含む半導体集積回路装置であって、
前記MOS型電界効果トランジスタのゲート電極に接するか、または、薄膜を介して配置された複数の絶縁膜の少なくとも一方の絶縁膜に含有されるSi−H結合量が、1×1021cm-3以下であることを特徴とする半導体集積回路装置。 - 前記薄膜を介して配置される絶縁膜が、前記ゲート電極の側面に形成されたシリコン窒化膜であるか、または、前記ゲート電極に接する絶縁膜が、前記ゲート電極、ソースおよびドレインを覆うシリコン窒化膜であり、少なくとも一方のシリコン窒化膜中に含まれるSi−H結合量が、1×1021cm-3以下の絶縁膜であることを特徴とする請求項1に記載の半導体集積回路装置。
- 半導体基板上形成された素子分離領域により区分された領域にMOS型電界効果トランジスタを形成する半導体集積回路装置の製造方法であって、
前記素子分離領域により区分された領域にゲート絶縁膜を形成する工程と、
ゲート電極を形成する工程と、
ゲート電極の側面に側壁シリコン窒化膜を形成する工程と、
ソース・ドレイン領域を形成する工程と、
その後、シリコン窒化膜を形成する工程とを少なくとも有し、
前記側壁シリコン窒化膜、または、前記シリコン窒化膜の、少なくとも一方のSi−H結合濃度が1×1021cm-3以下になるように形成することを特徴とする半導体集積回路装置の製造方法。 - 前記側壁シリコン窒化膜、または、前記ゲート電極、ソースおよびドレインを覆うシリコン窒化膜の、少なくとも一方は、触媒によって原料ガスを分解することで膜構成粒子を前記半導体基板上に形成されることを特徴とする請求項3に記載の半導体集積回路装置の製造方法。
- 前記触媒の温度が1800℃を越える温度であることを特徴とする請求項4に記載の半導体装置の製造方法。
- 前記半導体基板の温度が450℃以下であることを特徴とする請求項4に記載の半導体集積回路装置の製造方法。
- 前記側壁シリコン窒化膜、または、前記前記ゲート電極、ソースおよびドレインを覆うシリコン窒化膜の成膜後、その成膜温度以上の熱処理温度で熱処理する工程を備えることを特徴とする請求項3に記載の半導体装置の製造方法。
- 前記熱処理温度が、450〜800℃であることを特徴とする請求項7に記載の半導体集積回路装置の製造方法。
- 前記ゲート電極を形成する工程が、
少なくとも金属膜を形成する工程と、
シリコン窒化膜を形成する工程と、
前記シリコン窒化膜層を所望の形状にパターン形成し、前記パターンをマスクとしてエッチングによりゲート電極を形成する工程とからなり、
前記窒化シリコン膜が、触媒によって原料ガスを分解することで膜構成粒子を前記半導体基板上に化学気相成長法により形成されることを特徴とする請求項3に記載の半導体集積回路装置の製造方法。 - 前記ゲート電極を形成する工程が、
少なくとも金属膜を形成する工程と、
シリコン窒化膜を形成する工程と、
前記シリコン窒化膜層を所望の形状にパターン形成し、前記パターンをマスクとしてエッチングによりゲート電極を形成する工程とからなり、
前記窒化膜の形成が、熱CVD法であって、前記成膜温度以上の熱処理温度で熱処理する工程を備えることを特徴とする請求項3に記載の半導体装置の製造方法。 - 前記熱処理が、前記シリコン膜を形成後、前記ゲート電極の形成前あるいは前記ゲート電極形成後に行われることを特徴とする請求項10に記載の半導体集積回路装置の製造方法。
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