JP6106755B2 - 組込み保護ダイオードを備えるオプトエレクトロニクスコンポーネントおよびその製造方法 - Google Patents
組込み保護ダイオードを備えるオプトエレクトロニクスコンポーネントおよびその製造方法 Download PDFInfo
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- JP6106755B2 JP6106755B2 JP2015536098A JP2015536098A JP6106755B2 JP 6106755 B2 JP6106755 B2 JP 6106755B2 JP 2015536098 A JP2015536098 A JP 2015536098A JP 2015536098 A JP2015536098 A JP 2015536098A JP 6106755 B2 JP6106755 B2 JP 6106755B2
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- optoelectronic component
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- protection diode
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- 230000005693 optoelectronics Effects 0.000 title claims description 100
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 89
- 238000000034 method Methods 0.000 claims description 41
- 230000001681 protective effect Effects 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 19
- 229920002120 photoresistant polymer Polymers 0.000 claims description 14
- 239000002131 composite material Substances 0.000 claims description 13
- 230000005670 electromagnetic radiation Effects 0.000 claims description 6
- 238000005245 sintering Methods 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 238000000465 moulding Methods 0.000 claims description 4
- 238000005476 soldering Methods 0.000 claims description 4
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- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
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- 238000006243 chemical reaction Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
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- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
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Description
2 第2処理状態
3 第3処理状態
4 第4処理状態
5 第5処理状態
6 第6処理状態
7 第7処理状態
8 第8処理状態
10 オプトエレクトロニクスコンポーネント
20 オプトエレクトロニクスコンポーネント
100 半導体チップ
101 出射面
110 基板
120 エピタキシャル層
121 裏側面
122 表側面
130 第1コンタクト部(p型)
131 第1シード層
135 第2コンタクト部(n型)
136 第2シード層
140 保護ダイオード
141 第1端子
142 第2端子
145 端子面
150 フォトレジスト
151 ウェブ部
152 開口部
153 高さ
160 第1ピン
165 第2ピン
170 成形体
200 ウェハコンポジット
Claims (16)
- 第1電気コンタクト部(130)および第2電気コンタクト部(135)が配置された第1の面(121)を備えるオプトエレクトロニクス半導体チップ(100)を備える、オプトエレクトロニクスコンポーネント(10,20)であって、
前記第1の面(121)は、成形体(170)に隣接し、
第1ピン(160)および第2ピン(165)が前記成形体(170)に埋設されかつ前記第1コンタクト部(130)および前記第2コンタクト部(135)に電気接続され、
保護ダイオード(140)が前記成形体(170)に埋設されかつ前記第1コンタクト部(130)および前記第2コンタクト部(135)に電気接続され、
前記第1ピン(160)および前記第2ピン(165)がガルバニック成長により形成され、
前記保護ダイオード(140)は、少なくとも部分的に前記第1ピン(160)および前記第2ピン(165)に埋設された、
オプトエレクトロニクスコンポーネント(10,20)。 - 前記成形体(170)の一部は、前記半導体チップ(100)に面する側の前記保護ダイオード(140)上に配設されるとともに、
前記成形体(170)の他の一部は、前記半導体チップ(100)から離間する側の前記保護ダイオード(140)上に配設される
請求項1に記載のオプトエレクトロニクスコンポーネント(10,20)。 - 前記保護ダイオード(140)は、第1端子(141)および第2端子(142)を備え、
前記第1端子(141)および前記第2端子(142)は、前記半導体チップ(100)の前記第1の面(121)に対向する、
請求項1または2に記載のオプトエレクトロニクスコンポーネント(10)。 - 前記保護ダイオード(140)は、第1端子(141)および第2端子(142)を備え、
前記第1端子(141)および前記第2端子(142)は、前記半導体チップ(100)の前記第1の面(121)とは反対側に配置された、
請求項1または2に記載のオプトエレクトロニクスコンポーネント(20)。 - 前記第1ピン(160)および前記第2ピン(165)は、銅を含む、
請求項1〜4のいずれか一項に記載のオプトエレクトロニクスコンポーネント(10,20)。 - 前記成形体(170)は、プラスチックを含む、
請求項1〜5のいずれか一項に記載のオプトエレクトロニクスコンポーネント(10,20)。 - 前記半導体チップ(100)は、前記第1の面(121)とは反対側の第2の面(122)を備え、
前記半導体チップ(100)は、前記第2の面(122)を通して電磁放射を出射するように具現化された、
請求項1〜6のいずれか一項に記載のオプトエレクトロニクスコンポーネント(10,20)。 - − 第1電気コンタクト部(130)および第2電気コンタクト部(135)が配置された第1の面(121)を備えるオプトエレクトロニクス半導体チップ(100)を設けるステップと、
− 前記第1コンタクト部(130)および前記第2コンタクト部(135)に保護ダイオード(140)を配置するステップと、
− 前記第1電気コンタクト部(130)上に第1ピン(160)をガルバニック成長させ、前記第2電気コンタクト部(135)上に第2ピン(165)をガルバニック成長させ、前記保護ダイオード(140)を、少なくとも部分的に前記第1ピン(160)および前記第2ピン(165)に埋設するステップと、
− 前記第1ピン(160)、前記第2ピン(165)、および前記保護ダイオード(140)を成形体(170)に埋設するステップと、
を含む、オプトエレクトロニクスコンポーネント(10,20)の製造方法。 - − 前記半導体チップ(100)の基板(110)を前記半導体チップ(100)のエピタキシャル層(120)から分離するさらなるステップが実行される、
請求項8に記載の方法。 - 前記保護ダイオード(140)は、接着、焼結、またははんだ付けによって、前記第1コンタクト部(130)および前記2コンタクト部(135)に配置される、
請求項8または9に記載の方法。 - 前記保護ダイオード(140)の電気端子(141,142)が前記第1の面(121)に対向するように、前記保護ダイオード(140)は配置される、
請求項8〜10のいずれか一項に記載の方法。 - 前記保護ダイオード(140)の電気端子(141,142)が前記第1の面(121)とは反対側に配置されるように、前記保護ダイオード(140)は配置される、
請求項8〜11のいずれか一項に記載の方法。 - 前記保護ダイオード(140)は、少なくとも部分的に前記第1ピン(160)および/または前記第2ピン(165)に埋設される、
請求項8〜12のいずれか一項に記載の方法。 - 前記ガルバニック成長前に、フォトレジスト(150)を前記第1の面(121)に配置しかつ構造化し、
前記ガルバニック成長後に、前記フォトレジスト(150)は除去される、
請求項8〜13のいずれか一項に記載の方法。 - 前記成形体(170)は、成形法によって形成される、
請求項8〜14のいずれか一項に記載の方法。 - 前記半導体チップ(100)は、少なくとも1つのさらなる半導体チップ(100)とともにウェハコンポジット(200)内に設けられ、
前記半導体チップ(100)は、前記第1ピン(160)、前記第2ピン(165)、および前記保護ダイオード(140)が前記成形体(170)内に埋設された後、前記ウェハコンポジット(200)から切り離される、
請求項8〜15のいずれか一項に記載の方法。
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DE102012218457.0A DE102012218457A1 (de) | 2012-10-10 | 2012-10-10 | Optoelektronisches bauelement und verfahren zu seiner herstellung |
DE102012218457.0 | 2012-10-10 | ||
PCT/EP2013/070944 WO2014056911A1 (de) | 2012-10-10 | 2013-10-08 | Optoelektronisches bauelement mit integrierter schutzdiode und verfahren zu seiner herstellung |
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US (2) | US9653440B2 (ja) |
JP (1) | JP6106755B2 (ja) |
KR (1) | KR102086188B1 (ja) |
CN (1) | CN104704632B (ja) |
DE (2) | DE102012218457A1 (ja) |
WO (1) | WO2014056911A1 (ja) |
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DE102013111496A1 (de) | 2013-10-18 | 2015-04-23 | Osram Opto Semiconductors Gmbh | Verfahren zum Herstellen von optoelektronischen Halbleiterbauelementen und optoelektronisches Halbleiterbauelement |
JP6413631B2 (ja) * | 2014-10-28 | 2018-10-31 | 日亜化学工業株式会社 | 発光装置及び発光装置の製造方法 |
DE102015100575A1 (de) | 2015-01-15 | 2016-07-21 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung einer Mehrzahl von optoelektronischen Halbleiterbauelementen und optoelektronisches Halbleiterbauelement |
DE102015111574A1 (de) * | 2015-07-16 | 2017-01-19 | Osram Opto Semiconductors Gmbh | Optoelektronische Anordnung sowie Verfahren zur Herstellung einer optoelektronischen Anordnung |
DE102015112280A1 (de) | 2015-07-28 | 2017-02-02 | Osram Opto Semiconductors Gmbh | Bauelement mit einem metallischen Träger und Verfahren zur Herstellung von Bauelementen |
DE102019127731A1 (de) * | 2019-10-15 | 2021-04-15 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zur herstellung einer vielzahl von halbleiterbauelementen, halbleiterbauelement und halbleiterbauteil mit einem solchen halbleiterbauelement |
DE102021118706A1 (de) | 2021-07-20 | 2023-01-26 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronischer halbleiterchip und herstellungsverfahren |
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DE102012218457A1 (de) | 2014-04-10 |
US20170221869A1 (en) | 2017-08-03 |
CN104704632A (zh) | 2015-06-10 |
KR102086188B1 (ko) | 2020-03-06 |
US20150294961A1 (en) | 2015-10-15 |
DE112013004960A5 (de) | 2015-06-25 |
CN104704632B (zh) | 2017-11-24 |
US9653440B2 (en) | 2017-05-16 |
DE112013004960B4 (de) | 2021-08-19 |
KR20150066538A (ko) | 2015-06-16 |
JP2015532539A (ja) | 2015-11-09 |
US10586788B2 (en) | 2020-03-10 |
WO2014056911A1 (de) | 2014-04-17 |
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