JP6099995B2 - 試験装置 - Google Patents
試験装置 Download PDFInfo
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- JP6099995B2 JP6099995B2 JP2013010968A JP2013010968A JP6099995B2 JP 6099995 B2 JP6099995 B2 JP 6099995B2 JP 2013010968 A JP2013010968 A JP 2013010968A JP 2013010968 A JP2013010968 A JP 2013010968A JP 6099995 B2 JP6099995 B2 JP 6099995B2
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- 238000012360 testing method Methods 0.000 title claims description 218
- 238000012545 processing Methods 0.000 claims description 51
- 238000001514 detection method Methods 0.000 claims description 16
- 230000001939 inductive effect Effects 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 6
- 230000002441 reversible effect Effects 0.000 claims description 5
- 230000001902 propagating effect Effects 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims description 3
- 230000003321 amplification Effects 0.000 claims description 2
- 238000013459 approach Methods 0.000 claims description 2
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 2
- 230000004044 response Effects 0.000 claims description 2
- 230000015556 catabolic process Effects 0.000 description 24
- 238000010438 heat treatment Methods 0.000 description 15
- 239000004065 semiconductor Substances 0.000 description 14
- 239000004020 conductor Substances 0.000 description 11
- 238000005259 measurement Methods 0.000 description 10
- 150000002500 ions Chemical class 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 238000001020 plasma etching Methods 0.000 description 8
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 239000003507 refrigerant Substances 0.000 description 6
- 238000012546 transfer Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 239000003989 dielectric material Substances 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000002847 impedance measurement Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 1
- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 description 1
- 238000013142 basic testing Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000001976 improved effect Effects 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
Description
ただし、インダクタンス成分が大きい被試験体を測定する場合には、印加時および印加終了時に生ずる突入電流のオーバーシュートが発生することもあるので、そのような突入電流のオーバーシュートを回避するには菱形波がより適している。
[試験装置(実施形態1)の構成]
[試験装置(実施形態1)の作用]
RL=G/(G2+B2) ・・・・・(1)
CA=(G2+B2)/ωB ・・・・・(2)
ただし、G=1/ρ、B=ω(C2+CUT)である。
[試験装置(実施形態2)の構成]
[試験装置(実施形態2)の作用]
[プラズマ処理装置の構成]
[他の実施形態又は変形例]
12 基準波形発生器
14 整合器
16 オシロスコープ
18 操作パネル
20 主制御部
32 電圧センサ
34 電流センサ
40 チャンバ
42 サセプタ
58,60 高周波電源
62 マッチングユニット
68 静電チャック
84(IN),84(IN) フィルタユニット
120 主制御部
122 操作パネル
124 基準波形発生器
140 電圧センサ
Claims (10)
- 容量性または誘導性のインピーダンスを有する被試験体について前記インピーダンスの高周波電圧依存性を試験するための試験装置であって、
一定周波数の高周波を可変のエンベロープで出力する高周波電源部と、
時間軸上の一定区間で菱形のエンベロープ波形を有する高周波パルスを出力するように前記高周波電源部を制御する制御部と、
前記高周波電源部と前記被試験体との間でインピーダンスの整合をとる整合部と、
前記高周波電源部からの前記高周波パルスに応じて前記被試験体にかかる高周波電圧のエンベロープ波形をモニタするモニタ部と
を有する試験装置。 - 前記モニタ部は、オシロスコープを有する、請求項1に記載の試験装置。
- 前記モニタ部は、
前記被試験体にかかる前記高周波電圧のエンベロープを検出し、前記高周波電圧のエンベロープを表わすエンベロープ検出信号を発生する電圧センサと、
前記エンベロープ検出信号に基づいて、前記高周波電圧のエンベロープ波形を表示する表示部と
を有する、請求項1に記載の試験装置。 - 前記モニタ部は、
前記被試験体にかかる前記高周波電圧のエンベロープを検出し、前記高周波電圧のエンベロープを表わすエンベロープ検出信号を発生する電圧センサと、
前記エンベロープ検出信号に基づいて、前記高周波電圧のエンベロープが時間軸上の前記一定区間で逆テーパ状に増大するときの傾きに屈曲があるか否かを信号処理によって判定する信号処理部と
を有する、請求項1に記載の試験装置。 - 前記信号処理部は、前記高周波電圧のエンベロープの傾きに屈曲があると判定したときは、その屈曲点の電圧値を前記被試験体の高周波耐電圧と決定する、請求項4に記載の試験装置。
- 前記制御部は、前記高周波パルスのエンベロープ波形を規定する基準波形信号を発生する基準波形発生器を有し、
前記高周波電源部は、前記高周波を一定のパワーで発振出力する高周波発振器と、前記高周波発振器からの前記高周波を所望のパワーまで増大させる高周波パワーアンプと、前記基準波形発生器からの前記基準波形信号に応じて前記高周波パワーアンプの利得を可変に制御する電源制御部とを有する、
請求項1〜5のいずれか一項に記載の試験装置。 - 前記高周波電源部は、前記高周波パワーアンプと前記整合部との間の高周波伝送ライン上に設けられ、前記高周波伝送ライン上を順方向に伝搬する進行波の電圧を表わす進行波検出信号を出力する方向性結合器を有し、
前記電源制御部は、前記方向性結合器からの前記進行波検出信号を前記基準波形信号と比較して、比較誤差を零に近づけるように前記高周波パワーアンプの利得を可変に制御する、
請求項6に記載の試験装置。 - 前記高周波電源部は、前記高周波パワーアンプと前記整合部との間の高周波伝送ライン上に設けられ、前記高周波伝送ライン上を逆方向に伝搬する反射波の電圧またはパワーを表わす反射波検出信号を出力する方向性結合器を有し、
前記電源制御部は、前記方向性結合器からの前記反射波検出信号に基づいて、前記反射波の電圧またはパワーが所定の閾値を超えたときは直ちに前記高周波パワーアンプの増幅動作を止める、
請求項6に記載の試験装置。 - 前記整合器内のすべての可変リアクタンスは、前記試験の間、その試験に先立つ同調操作により前記高周波電源部と前記被試験体との間で同調状態が確立したときの値に固定される、請求項8に記載の試験装置。
- 前記整合器は、前記高周波電源部の出力インピーダンスをZ RF ,前記被試験体のインピーダンスをZ UT とすると、前記高周波パルスの電圧をおおよそ(Z UT /Z RF ) 1/2 倍に昇圧する、請求項1〜9のいずれか一項に記載の試験装置。
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JP2013010968A JP6099995B2 (ja) | 2013-01-24 | 2013-01-24 | 試験装置 |
US14/161,538 US9673027B2 (en) | 2013-01-24 | 2014-01-22 | Test apparatus and plasma processing apparatus |
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JP2013010968A JP6099995B2 (ja) | 2013-01-24 | 2013-01-24 | 試験装置 |
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JP2014142266A JP2014142266A (ja) | 2014-08-07 |
JP6099995B2 true JP6099995B2 (ja) | 2017-03-22 |
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JP5165993B2 (ja) | 2007-10-18 | 2013-03-21 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US8040068B2 (en) * | 2009-02-05 | 2011-10-18 | Mks Instruments, Inc. | Radio frequency power control system |
JP5053323B2 (ja) * | 2009-05-07 | 2012-10-17 | 山本ビニター株式会社 | 誘電加熱用高周波電源装置 |
JP5839921B2 (ja) * | 2011-09-30 | 2016-01-06 | 株式会社ダイヘン | 高周波電源装置 |
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2013
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