JPS61173072U - - Google Patents

Info

Publication number
JPS61173072U
JPS61173072U JP5549385U JP5549385U JPS61173072U JP S61173072 U JPS61173072 U JP S61173072U JP 5549385 U JP5549385 U JP 5549385U JP 5549385 U JP5549385 U JP 5549385U JP S61173072 U JPS61173072 U JP S61173072U
Authority
JP
Japan
Prior art keywords
corona
voltage
high frequency
test object
detection circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5549385U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5549385U priority Critical patent/JPS61173072U/ja
Publication of JPS61173072U publication Critical patent/JPS61173072U/ja
Pending legal-status Critical Current

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  • Testing Relating To Insulation (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の試験器の構成を略示する回
路図、第２図はこの考案の実施例を示す回路図、
第３図は従来の高周波耐電圧試験器の構成を略示
する回路図である。 １：被試験物、１ａ：変圧器、２：高周波高圧
電源、３：電圧検出回路、４：電圧表示器、５：
導線、６：端子、７：検出コイル、８：電圧調整
器、９：コロナ検出回路、１０：コロナ表示器、
１１：第一の帯域増幅器、１２：高域波器、１
３：第二の帯域増幅器。

Claims (1)

    【実用新案登録請求の範囲】
  1. 高周波高圧電源２に接続されて被試験物に高周
    波高電圧を印加する導線５に、コロナ電流を検出
    する検出コイル７を電磁的に結合し、この検出コ
    イル７にコロナ検出回路９、コロナ表示器１０を
    接続し、被試験物を接続する端子６と並列に電圧
    検出回路３、電圧表示器４を接続して成るコロナ
    検出器を持つ高周波耐電圧試験器。
JP5549385U 1985-04-16 1985-04-16 Pending JPS61173072U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5549385U JPS61173072U (ja) 1985-04-16 1985-04-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5549385U JPS61173072U (ja) 1985-04-16 1985-04-16

Publications (1)

Publication Number Publication Date
JPS61173072U true JPS61173072U (ja) 1986-10-28

Family

ID=30578219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5549385U Pending JPS61173072U (ja) 1985-04-16 1985-04-16

Country Status (1)

Country Link
JP (1) JPS61173072U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014142266A (ja) * 2013-01-24 2014-08-07 Tokyo Electron Ltd 試験装置及びプラズマ処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147075A (en) * 1980-04-18 1981-11-14 Hitachi Ltd Withstand voltage tester

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147075A (en) * 1980-04-18 1981-11-14 Hitachi Ltd Withstand voltage tester

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014142266A (ja) * 2013-01-24 2014-08-07 Tokyo Electron Ltd 試験装置及びプラズマ処理装置
US9673027B2 (en) 2013-01-24 2017-06-06 Tokyo Electron Limited Test apparatus and plasma processing apparatus

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