JP6059952B2 - 熱変換部材及び熱変換積層体 - Google Patents
熱変換部材及び熱変換積層体 Download PDFInfo
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- JP6059952B2 JP6059952B2 JP2012237295A JP2012237295A JP6059952B2 JP 6059952 B2 JP6059952 B2 JP 6059952B2 JP 2012237295 A JP2012237295 A JP 2012237295A JP 2012237295 A JP2012237295 A JP 2012237295A JP 6059952 B2 JP6059952 B2 JP 6059952B2
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- 238000006243 chemical reaction Methods 0.000 title claims description 90
- 229910052751 metal Inorganic materials 0.000 claims description 33
- 239000002184 metal Substances 0.000 claims description 33
- 239000007769 metal material Substances 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 12
- 239000002131 composite material Substances 0.000 claims description 11
- 229910005347 FeSi Inorganic materials 0.000 claims description 6
- 239000010410 layer Substances 0.000 description 71
- 239000010408 film Substances 0.000 description 44
- 229910005329 FeSi 2 Inorganic materials 0.000 description 41
- 238000010521 absorption reaction Methods 0.000 description 32
- 239000002356 single layer Substances 0.000 description 25
- 230000003287 optical effect Effects 0.000 description 16
- 239000010949 copper Substances 0.000 description 12
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- 238000004544 sputter deposition Methods 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000004332 silver Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000002745 absorbent Effects 0.000 description 3
- 239000002250 absorbent Substances 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical group O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
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- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
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- 229910010293 ceramic material Inorganic materials 0.000 description 1
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- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000005338 heat storage Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- IBBMAWULFFBRKK-UHFFFAOYSA-N picolinamide Chemical compound NC(=O)C1=CC=CC=N1 IBBMAWULFFBRKK-UHFFFAOYSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S70/00—Details of absorbing elements
- F24S70/10—Details of absorbing elements characterised by the absorbing material
- F24S70/12—Details of absorbing elements characterised by the absorbing material made of metallic material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S70/00—Details of absorbing elements
- F24S70/10—Details of absorbing elements characterised by the absorbing material
- F24S70/16—Details of absorbing elements characterised by the absorbing material made of ceramic; made of concrete; made of natural stone
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S70/00—Details of absorbing elements
- F24S70/20—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption
- F24S70/225—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption for spectrally selective absorption
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Ceramic Engineering (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
Description
(1)少なくとも1種の半導体と少なくとも1種の金属材料とのコンポジット材を含む、熱変換部材。
(2)その金属材料が粒子形態である、第(1)項に記載の熱変換部材。
(3)前記半導体がFeSiX(X=0.5〜4)を含む、第(1)項又は第(2)項に記載の熱変換部材。
(4)そのFeSiXのXが2である、第(3)項に記載の熱変換部材。
(5)膜状である、第(1)項から第(4)項のいずれか1項に記載の熱変換部材。
(6)その膜状が1nmから10μmの厚さである、第(5)項に記載の熱変換部材。
(7)少なくとも、第(5)項又は第(6)項に記載の熱変換部材を含む少なくとも1つの層と、金属層とが積層されてなる、熱変換積層体。
(8)少なくとも、金属層と、第(5)項又は第(6)項に記載の熱変換部材を含む少なくとも1つの層と、透明誘電体層とが、この順序で積層されてなる、熱変換積層体。
本発明による熱変換部材は、少なくとも1種の半導体と少なくとも1種の金属材料とのコンポジット材を含むことを特徴とする、熱変換部材である。本発明による熱変換部材は、少なくとも1種の金属材料の含有量(添加率)を調節することによって太陽光の吸収特性を変化させることが可能であるので、光学選択性を向上させて光を熱に効率的に変換することができる。ここで、光学選択性とは、ある波長又はある波長域で反射率等の光学特性が劇的に変化することをいう。
本発明による熱変換積層体は、本発明による膜状の熱変換部材を含む少なくとも1つの層と、金属層とが積層されてなることを特徴とし、金属層と、本発明による膜状の熱変換部材を含む少なくとも1つの層とが、この順序で積層されてもよいし、その順序とは逆の順序で積層されてもよい。
熱変換部材の吸収特性評価を、実施例1〜3及び比較例1を用いて実施した。
本発明による熱変換部材の吸収特性評価を、Ag−FeSi2メタセミ単層膜を用いて実施をした。メタセミは、「Metal(金属)+Semiconductor(半導体)=MetaSemi(メタセミ)」の意味である。
室温状態の石英基板に、FeSi2とAg(銀)とを同時にスパッタリングすることによって成膜した。成膜後、真空炉中で温度800℃以下で1時間アニールした。Ag(銀)の添加率別に2種類(4.0vol%、8.6vol%)のAg−FeSi2メタセミの試料を作製した。
本発明による熱変換部材の吸収特性評価を、Mo−FeSi2メタセミ単層膜を用いて実施をした。
温度700℃以下に加熱した石英基板に、FeSi2とMo(モリブテン)とを同時にスパッタリングすることによって成膜した。Mo(モリブテン)の添加率別に2種類(4.2vol%、9.4vol%)のMo−FeSi2メタセミの試料を作製した。
本発明による熱変換部材の吸収特性評価を、Cu−FeSi2メタセミ単層膜を用いて実施をした。
温度700℃以下に加熱した石英基板に、FeSi2とCu(銅)とを同時にスパッタリングすることによって成膜した。Cu(銅)の添加率(8.1vol%)のCu−FeSi2メタセミの試料を作製した。
FeSi2単層膜の吸収特性を評価した。
温度700℃以下に加熱した石英基板に、FeSi2をスパッタリングすることによって成膜した。FeSi2の試料を作製した。
図2を参照すると、Ag(銀)の添加率が増加するにしたがって(0vol%→4.0vol%→8.6vol%)、吸収特性曲線が長波長側へシフトすることが理解できる。これにより、Ag−FeSi2メタセミ単層膜は、Ag(銀)材料の含有量(添加率)を調節することによって太陽光の吸収特性を変化させることができるので、光学選択性を向上させて光を熱に効率的に変換することができる。
本発明による積層体の特性を評価した。
11 透明誘電体層
12 熱変換部材を含む層(光吸収層)
13 金属層
121 金属微粒子
122 半導体
Claims (8)
- 太陽光を吸収して熱に変換する熱変換部材であって、少なくとも1種の半導体と少なくとも1種の金属材料とのコンポジット材を含み、前記半導体中に前記金属材料が内包されて分散されており、
前記金属材料が粒子形態である、
前記熱変換部材。 - 前記金属材料が、Ag材料、Mo材料、及びCu材料のいずれかである、請求項1に記載の熱変換部材。
- 前記半導体がFeSiX(X=0.5〜4)を含む、請求項1又は2に記載の熱変換部材。
- 前記FeSiXのXが2である、請求項3に記載の熱変換部材。
- 膜状である、請求項1から4のいずれか1項に記載の熱変換部材。
- 前記膜状が1nmから10μmの厚さである、請求項5に記載の熱変換部材。
- 少なくとも、請求項5又は6に記載の熱変換部材を含む少なくとも1つの層と、金属層とが積層されてなる、熱変換積層体。
- 少なくとも、金属層と、請求項5又は6に記載の熱変換部材を含む少なくとも1つの層と、透明誘電体層とが、この順序で積層されてなる、熱変換積層体。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012237295A JP6059952B2 (ja) | 2012-10-26 | 2012-10-26 | 熱変換部材及び熱変換積層体 |
ES13848280T ES2868097T3 (es) | 2012-10-26 | 2013-10-11 | Uso del miembro de conversión de calor a luz |
CN201380055454.2A CN104755854A (zh) | 2012-10-26 | 2013-10-11 | 热转换构件和热转换层叠体 |
EP13848280.7A EP2913604B1 (en) | 2012-10-26 | 2013-10-11 | Use of heat-to-light conversion member |
PCT/JP2013/077828 WO2014065141A1 (ja) | 2012-10-26 | 2013-10-11 | 熱変換部材及び熱変換積層体 |
US14/437,570 US20150300695A1 (en) | 2012-10-26 | 2013-10-11 | Heat conversion member and heat conversion laminate |
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JP2012237295A JP6059952B2 (ja) | 2012-10-26 | 2012-10-26 | 熱変換部材及び熱変換積層体 |
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JP2014085099A JP2014085099A (ja) | 2014-05-12 |
JP2014085099A5 JP2014085099A5 (ja) | 2015-06-11 |
JP6059952B2 true JP6059952B2 (ja) | 2017-01-11 |
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JP2012237295A Expired - Fee Related JP6059952B2 (ja) | 2012-10-26 | 2012-10-26 | 熱変換部材及び熱変換積層体 |
Country Status (6)
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US (1) | US20150300695A1 (ja) |
EP (1) | EP2913604B1 (ja) |
JP (1) | JP6059952B2 (ja) |
CN (1) | CN104755854A (ja) |
ES (1) | ES2868097T3 (ja) |
WO (1) | WO2014065141A1 (ja) |
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JP5896889B2 (ja) * | 2012-12-07 | 2016-03-30 | 株式会社豊田自動織機 | 光学選択膜 |
WO2017072711A1 (en) * | 2015-10-30 | 2017-05-04 | Rioglass Solar Systems Ltd. | Method for the deposition of functional layers suitable for heat receiver tubes |
CN108292904A (zh) * | 2015-11-05 | 2018-07-17 | 新日铁住金株式会社 | 热光转换部件 |
JP6521176B2 (ja) | 2016-03-31 | 2019-05-29 | 日本製鉄株式会社 | 熱光変換部材 |
JP2018174657A (ja) * | 2017-03-31 | 2018-11-08 | 国立大学法人横浜国立大学 | エネルギー変換装置及びその製造方法 |
CN110887022A (zh) * | 2018-09-10 | 2020-03-17 | 深圳光峰科技股份有限公司 | 波长转换装置及光源系统 |
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JP2014085099A (ja) | 2014-05-12 |
EP2913604A4 (en) | 2016-06-22 |
WO2014065141A1 (ja) | 2014-05-01 |
EP2913604A1 (en) | 2015-09-02 |
CN104755854A (zh) | 2015-07-01 |
US20150300695A1 (en) | 2015-10-22 |
EP2913604B1 (en) | 2021-04-21 |
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