JP6058070B2 - 半導体ウェハを清浄化しマイクロエッチングする方法 - Google Patents
半導体ウェハを清浄化しマイクロエッチングする方法 Download PDFInfo
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- JP6058070B2 JP6058070B2 JP2015106341A JP2015106341A JP6058070B2 JP 6058070 B2 JP6058070 B2 JP 6058070B2 JP 2015106341 A JP2015106341 A JP 2015106341A JP 2015106341 A JP2015106341 A JP 2015106341A JP 6058070 B2 JP6058070 B2 JP 6058070B2
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- MGFYIUFZLHCRTH-UHFFFAOYSA-N nitrilotriacetic acid Chemical compound OC(=O)CN(CC(O)=O)CC(O)=O MGFYIUFZLHCRTH-UHFFFAOYSA-N 0.000 description 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920001748 polybutylene Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- RPDAUEIUDPHABB-UHFFFAOYSA-N potassium ethoxide Chemical compound [K+].CC[O-] RPDAUEIUDPHABB-UHFFFAOYSA-N 0.000 description 1
- BDAWXSQJJCIFIK-UHFFFAOYSA-N potassium methoxide Chemical compound [K+].[O-]C BDAWXSQJJCIFIK-UHFFFAOYSA-N 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- QDRKDTQENPPHOJ-UHFFFAOYSA-N sodium ethoxide Chemical compound [Na+].CC[O-] QDRKDTQENPPHOJ-UHFFFAOYSA-N 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- HPWUYZIJILJHNG-UHFFFAOYSA-M tributyl(2-hydroxyethyl)azanium;hydroxide Chemical compound [OH-].CCCC[N+](CCO)(CCCC)CCCC HPWUYZIJILJHNG-UHFFFAOYSA-M 0.000 description 1
- FYFNFZLMMGXBMT-UHFFFAOYSA-M tributyl(ethyl)azanium;hydroxide Chemical compound [OH-].CCCC[N+](CC)(CCCC)CCCC FYFNFZLMMGXBMT-UHFFFAOYSA-M 0.000 description 1
- QVOFCQBZXGLNAA-UHFFFAOYSA-M tributyl(methyl)azanium;hydroxide Chemical compound [OH-].CCCC[N+](C)(CCCC)CCCC QVOFCQBZXGLNAA-UHFFFAOYSA-M 0.000 description 1
- 150000003628 tricarboxylic acids Chemical class 0.000 description 1
- JAJRRCSBKZOLPA-UHFFFAOYSA-M triethyl(methyl)azanium;hydroxide Chemical compound [OH-].CC[N+](C)(CC)CC JAJRRCSBKZOLPA-UHFFFAOYSA-M 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- IJGSGCGKAAXRSC-UHFFFAOYSA-M tris(2-hydroxyethyl)-methylazanium;hydroxide Chemical compound [OH-].OCC[N+](C)(CCO)CCO IJGSGCGKAAXRSC-UHFFFAOYSA-M 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electromagnetism (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Weting (AREA)
- Detergent Compositions (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Description
(1)半導体インゴットが内周刃(inner diameter saw)によって薄く切断されてウェハを得て;
(2)ウェハが水で洗浄されて汚染物質を除去し;並びに
(3)次いで、ウェハが清浄化されて、重金属および粒子を含む汚染物質を除去して、次いで乾燥させられる。
別の形態においては、組成物は、1種以上の水酸化第四級アンモニウムと、1種以上の水酸化アルカリ金属と、1種以上のミッドレンジアルコキシラートとを、無機および有機汚染物質を半導体ウェハから除去しかつ半導体ウェハをマイクロエッチングするのに充分な量で含む。
を有する化合物が挙げられる。
を有する化合物が挙げられる。
を有する化合物が挙げられる。典型的には、mは3〜6の、より典型的には3から5の整数であり、aは3から6の、または例えば、3〜4の整数である。典型的には、Rは−Hであり、Yは−Hである。このようなアルコキシ化グリコールの例はトリプロピレングリコール、テトラプロピレングリコール、ポリプロピレングリコール、トリブチレングリコール、テトラブチレングリコール、ポリブチレングリコール、トリペンチレングリコール、テトラペンチレングリコールおよびポリペンチレングリコールである。
を有する化合物も挙げられる。典型的には、nは3〜5の、より典型的には3〜4の整数である。このようなアルコキシ化グリコールの例は、トリエチレングリコール、テトラエチレングリコールおよびポリエチレングリコールである。
Claims (10)
- a)半導体インゴットを提供し;
b)半導体インゴットを切断して、無機汚染物質および有機汚染物質を含む1以上の半導体ウェハを形成し;並びに、
c)1種以上の水酸化第四級アンモニウムと、1種以上の水酸化アルカリと、1種以上のミッドレンジアルコキシラートとを、汚染物質を除去し、かつ半導体ウェハをマイクロエッチングするのに充分な量で含むアルカリ水溶液を前記半導体ウェハに適用することにより、汚染物質を除去し、かつ半導体ウェハをマイクロエッチングする;ことを含み、水酸化第四級アンモニウムの水酸化アルカリ金属に対する重量比が2:1〜1:2の範囲である、汚染物質を除去し、かつ半導体ウェハをマイクロエッチングする方法。 - 水酸化第四級アンモニウムの水酸化アルカリ金属に対する重量比が1:1である、請求項1に記載の汚染物質を除去し、かつ半導体ウェハをマイクロエッチングする方法。
- 水性アルカリ清浄化およびマイクロエッチング組成物が1種以上のキレート化剤をさらに含む、請求項1に記載の汚染物質を除去し、かつ半導体ウェハをマイクロエッチングする方法。
- 水性アルカリ清浄化およびマイクロエッチング組成物のpHが11以上である、請求項1に記載の汚染物質を除去し、かつ半導体ウェハをマイクロエッチングする方法。
- 無機および有機汚染物質を半導体ウェハから除去し、かつ前記ウェハをマイクロエッチングするのに充分な量の、1種以上の水酸化第四級アンモニウムと、1種以上の水酸化アルカリ金属と、1種以上のミッドレンジアルコキシラートとから本質的になり、水酸化第四級アンモニウムの水酸化アルカリ金属に対する重量比が2:1〜1:2の範囲である、半導体ウェハを清浄化し、かつマイクロエッチングするための組成物。
- アルカリ水溶液が、無機および有機汚染物質を半導体ウェハから除去し、かつ前記ウェハをマイクロエッチングするのに充分な量の、1種以上の水酸化第四級アンモニウムと、1種以上の水酸化アルカリ金属と、1種以上のミッドレンジアルコキシラートとから本質的になる、請求項1〜6のいずれかに記載の汚染物質を除去し、かつ半導体ウェハをマイクロエッチングする方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US27894209P | 2009-10-14 | 2009-10-14 | |
US61/278942 | 2009-10-14 |
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JP2010230666A Division JP2011124546A (ja) | 2009-10-14 | 2010-10-13 | 半導体ウェハを清浄化しマイクロエッチングする方法 |
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JP2015207768A JP2015207768A (ja) | 2015-11-19 |
JP6058070B2 true JP6058070B2 (ja) | 2017-01-11 |
Family
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JP2010230666A Pending JP2011124546A (ja) | 2009-10-14 | 2010-10-13 | 半導体ウェハを清浄化しマイクロエッチングする方法 |
JP2015106341A Expired - Fee Related JP6058070B2 (ja) | 2009-10-14 | 2015-05-26 | 半導体ウェハを清浄化しマイクロエッチングする方法 |
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JP2010230666A Pending JP2011124546A (ja) | 2009-10-14 | 2010-10-13 | 半導体ウェハを清浄化しマイクロエッチングする方法 |
Country Status (7)
Country | Link |
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US (1) | US8722544B2 (ja) |
EP (1) | EP2312618B1 (ja) |
JP (2) | JP2011124546A (ja) |
KR (1) | KR101697997B1 (ja) |
CN (1) | CN102157355B (ja) |
SG (1) | SG170691A1 (ja) |
TW (1) | TWI445806B (ja) |
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JP2012248738A (ja) * | 2011-05-30 | 2012-12-13 | Dai Ichi Kogyo Seiyaku Co Ltd | シリコンウェハ用表面処理剤組成物 |
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CN108550639B (zh) * | 2018-03-21 | 2020-08-21 | 台州市棱智塑业有限公司 | 一种硅异质结太阳能电池界面处理剂及处理方法 |
CN116970446B (zh) * | 2023-09-22 | 2024-01-09 | 山东天岳先进科技股份有限公司 | 碳化硅单晶材料amb覆铜的前处理溶液、产品及应用 |
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-
2010
- 2010-10-13 EP EP10187469.1A patent/EP2312618B1/en not_active Not-in-force
- 2010-10-13 TW TW099134839A patent/TWI445806B/zh not_active IP Right Cessation
- 2010-10-13 SG SG201007502-6A patent/SG170691A1/en unknown
- 2010-10-13 JP JP2010230666A patent/JP2011124546A/ja active Pending
- 2010-10-14 KR KR1020100100527A patent/KR101697997B1/ko not_active Application Discontinuation
- 2010-10-14 CN CN201010602674.0A patent/CN102157355B/zh not_active Expired - Fee Related
- 2010-10-14 US US12/904,609 patent/US8722544B2/en not_active Expired - Fee Related
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- 2015-05-26 JP JP2015106341A patent/JP6058070B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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CN102157355A (zh) | 2011-08-17 |
EP2312618A3 (en) | 2014-03-12 |
TW201132743A (en) | 2011-10-01 |
KR20110040737A (ko) | 2011-04-20 |
EP2312618A2 (en) | 2011-04-20 |
EP2312618B1 (en) | 2016-02-10 |
US20110250762A1 (en) | 2011-10-13 |
JP2011124546A (ja) | 2011-06-23 |
JP2015207768A (ja) | 2015-11-19 |
TWI445806B (zh) | 2014-07-21 |
SG170691A1 (en) | 2011-05-30 |
US8722544B2 (en) | 2014-05-13 |
CN102157355B (zh) | 2014-09-03 |
KR101697997B1 (ko) | 2017-01-19 |
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