JP6018503B2 - 脆性材料シートの分割方法 - Google Patents
脆性材料シートの分割方法 Download PDFInfo
- Publication number
- JP6018503B2 JP6018503B2 JP2012512055A JP2012512055A JP6018503B2 JP 6018503 B2 JP6018503 B2 JP 6018503B2 JP 2012512055 A JP2012512055 A JP 2012512055A JP 2012512055 A JP2012512055 A JP 2012512055A JP 6018503 B2 JP6018503 B2 JP 6018503B2
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- brittle material
- glass
- laser beam
- predetermined path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/09—Severing cooled glass by thermal shock
- C03B33/091—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/0215—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the ribbon being in a substantially vertical plane
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/0235—Ribbons
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/04—Cutting or splitting in curves, especially for making spectacle lenses
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/09—Severing cooled glass by thermal shock
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/52—Ceramics
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T225/00—Severing by tearing or breaking
- Y10T225/30—Breaking or tearing apparatus
- Y10T225/304—Including means to apply thermal shock to work
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Laser Beam Processing (AREA)
Description
ここで、ρはガラスの密度、cpはガラスの比熱、κはガラスの熱伝導率、そしてdはガラスの厚さである。
10 ガラスシート
10a、10b 分割シート
12 レーザビーム
13 第2面
17 全厚クラック
20 既定経路
Claims (15)
- 脆性材料の薄いシートを分割する方法において、
前記脆弱材料のシートの第1面に最初の傷を形成するステップであって、前記第1面と対向する第2面との間の厚さが1mm以下であるステップ、
前記最初の傷をレーザビームで照射し、前記最初の傷の箇所でおよびそこから前進されて前記脆弱材料のシートの第1面および第2面に交差して伝播する全厚クラックを形成するステップ、
前記全厚クラックを既定経路に沿っておよび前記脆弱材料のシートの全厚を通して伝播させ、前記第1面および第2面に交差させて前記脆性材料シートを少なくとも2つの脆性材料分割シートに分割するよう、前記レーザビームを前記既定経路に沿って前記第1面上に1回または複数回通過させるステップ、
を含み、さらに、
前記レーザビームが、細長い形状に形作られ、前記既定経路に沿って前記全厚クラックを伝播する際に前記材料中の熱伝導のバランスを取り過熱を防ぎ、
前記全厚クラックが、前記細長い形状に形作られた前記レーザビームにより、前記脆性材料シートを強制流体冷却することなく伝播されることを特徴とする方法。 - 前記脆性材料シートと接触する周囲雰囲気の熱伝導率が、0.024W/m/Kより大きいことを特徴とする請求項1記載の方法。
- 前記レーザビームが、9μmから11μmの間の波長を有することを特徴とする請求項1記載の方法。
- 前記通過させるステップ中、前記既定経路に垂直な張力を外部から加えるステップをさらに含むことを特徴とする請求項1記載の方法。
- 前記通過させるステップが、前記既定経路に沿って1回通過させるものであることを特徴とする請求項1記載の方法。
- 前記通過させるステップが、前記既定経路上を複数回通過させるものであることを特徴とする請求項1記載の方法。
- 前記脆性材料シートの少なくとも1部が、スプール上に配置されていることを特徴とする請求項1記載の方法。
- 前記全厚クラックが、前記複数回通過させた後にのみ、前記既定経路に沿って伝播されることを特徴とする請求項6記載の方法。
- 前記脆性材料シートが、第1のスプールから第2のスプールへと巻き付けられることを特徴とする請求項1記載の方法。
- 前記スプールを互いに離すように移動し、前記既定経路に垂直に伸長する前記脆性材料シートに張力を加えるステップをさらに含む、請求項9記載の方法。
- 前記脆性材料シートが、該脆性材料シート上に堆積された薄膜を含むものであることを特徴とする請求項1記載の方法。
- 前記少なくとも2つの脆性材料分割シートの少なくとも一方の上に、誘電体または半導体材料を堆積する工程をさらに含むことを特徴とする請求項1記載の方法。
- 前記既定経路が閉じた経路であることを特徴とする請求項1記載の方法。
- 前記既定経路が閉ループ経路であり、前記レーザビームの開始および終了位置がいずれも前記閉ループ経路上に位置することを特徴とする請求項1記載の方法。
- 前記脆性材料シートが、ダウンドロープロセス中に生じるガラスリボンを含み、前記レーザビームを、前記ガラスリボンのエッジ部を前記ガラスリボンの別の部分から分離するよう通過させることを特徴とする請求項1記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/469,794 | 2009-05-21 | ||
US12/469,794 US8269138B2 (en) | 2009-05-21 | 2009-05-21 | Method for separating a sheet of brittle material |
PCT/US2010/035715 WO2010135616A2 (en) | 2009-05-21 | 2010-05-21 | Method for separating a sheet of brittle material |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012527400A JP2012527400A (ja) | 2012-11-08 |
JP2012527400A5 JP2012527400A5 (ja) | 2013-05-30 |
JP6018503B2 true JP6018503B2 (ja) | 2016-11-02 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2012512055A Expired - Fee Related JP6018503B2 (ja) | 2009-05-21 | 2010-05-21 | 脆性材料シートの分割方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8269138B2 (ja) |
EP (1) | EP2432616B1 (ja) |
JP (1) | JP6018503B2 (ja) |
KR (1) | KR101581992B1 (ja) |
CN (1) | CN102458754B (ja) |
TW (1) | TWI415811B (ja) |
WO (1) | WO2010135616A2 (ja) |
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-
2009
- 2009-05-21 US US12/469,794 patent/US8269138B2/en active Active
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2010
- 2010-05-20 TW TW99116134A patent/TWI415811B/zh not_active IP Right Cessation
- 2010-05-21 KR KR1020117029957A patent/KR101581992B1/ko active IP Right Grant
- 2010-05-21 JP JP2012512055A patent/JP6018503B2/ja not_active Expired - Fee Related
- 2010-05-21 EP EP10778445.6A patent/EP2432616B1/en not_active Not-in-force
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EP2432616A4 (en) | 2015-02-11 |
EP2432616B1 (en) | 2018-02-28 |
KR20120018798A (ko) | 2012-03-05 |
KR101581992B1 (ko) | 2015-12-31 |
TWI415811B (zh) | 2013-11-21 |
JP2012527400A (ja) | 2012-11-08 |
TW201103875A (en) | 2011-02-01 |
US8269138B2 (en) | 2012-09-18 |
CN102458754B (zh) | 2016-04-06 |
CN102458754A (zh) | 2012-05-16 |
EP2432616A2 (en) | 2012-03-28 |
WO2010135616A2 (en) | 2010-11-25 |
US20100294748A1 (en) | 2010-11-25 |
WO2010135616A3 (en) | 2011-02-24 |
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