JP6009193B2 - 真空排気装置 - Google Patents

真空排気装置 Download PDF

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Publication number
JP6009193B2
JP6009193B2 JP2012080559A JP2012080559A JP6009193B2 JP 6009193 B2 JP6009193 B2 JP 6009193B2 JP 2012080559 A JP2012080559 A JP 2012080559A JP 2012080559 A JP2012080559 A JP 2012080559A JP 6009193 B2 JP6009193 B2 JP 6009193B2
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JP
Japan
Prior art keywords
vacuum pump
vacuum
pump
exhaust
vibration
Prior art date
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Active
Application number
JP2012080559A
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English (en)
Japanese (ja)
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JP2013209928A (ja
JP2013209928A5 (ko
Inventor
裕之 川▲崎▼
裕之 川▲崎▼
曽布川　拓司
拓司 曽布川
大山　敦
敦 大山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2012080559A priority Critical patent/JP6009193B2/ja
Priority to US13/849,719 priority patent/US20130259712A1/en
Priority to EP13001550.6A priority patent/EP2644893A3/en
Publication of JP2013209928A publication Critical patent/JP2013209928A/ja
Publication of JP2013209928A5 publication Critical patent/JP2013209928A5/ja
Priority to JP2016179496A priority patent/JP6333908B2/ja
Application granted granted Critical
Publication of JP6009193B2 publication Critical patent/JP6009193B2/ja
Active legal-status Critical Current
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2012080559A 2012-03-30 2012-03-30 真空排気装置 Active JP6009193B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012080559A JP6009193B2 (ja) 2012-03-30 2012-03-30 真空排気装置
US13/849,719 US20130259712A1 (en) 2012-03-30 2013-03-25 Vacuum evacuation apparatus
EP13001550.6A EP2644893A3 (en) 2012-03-30 2013-03-26 Vacuum evacuation apparatus
JP2016179496A JP6333908B2 (ja) 2012-03-30 2016-09-14 真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012080559A JP6009193B2 (ja) 2012-03-30 2012-03-30 真空排気装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2016179496A Division JP6333908B2 (ja) 2012-03-30 2016-09-14 真空排気装置

Publications (3)

Publication Number Publication Date
JP2013209928A JP2013209928A (ja) 2013-10-10
JP2013209928A5 JP2013209928A5 (ko) 2014-11-27
JP6009193B2 true JP6009193B2 (ja) 2016-10-19

Family

ID=48039974

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2012080559A Active JP6009193B2 (ja) 2012-03-30 2012-03-30 真空排気装置
JP2016179496A Active JP6333908B2 (ja) 2012-03-30 2016-09-14 真空排気装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2016179496A Active JP6333908B2 (ja) 2012-03-30 2016-09-14 真空排気装置

Country Status (3)

Country Link
US (1) US20130259712A1 (ko)
EP (1) EP2644893A3 (ko)
JP (2) JP6009193B2 (ko)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013219464A1 (de) * 2013-09-26 2015-03-26 Inficon Gmbh Evakuierung einer Folienkammer
KR101630827B1 (ko) * 2014-06-27 2016-06-15 (주) 씨엠테크 멸균장치의 진공배기 시스템
EP3067567A1 (de) * 2015-03-11 2016-09-14 Pfeiffer Vacuum GmbH Vakuumpumpe
JP6616611B2 (ja) * 2015-07-23 2019-12-04 エドワーズ株式会社 排気システム
FR3042325B1 (fr) * 2015-10-13 2017-11-17 Ifp Energies Now Dispositif d'isolation thermique entre une turbine dont la roue est entrainee en rotation par un fluide chaud et une generatrice electrique avec un rotor accouple a cette roue, notamment pour une turbogeneratrice.
EP3267040B1 (de) * 2016-07-04 2023-12-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP6776971B2 (ja) * 2017-03-27 2020-10-28 株式会社島津製作所 真空ポンプおよびポンプ一体型の電源装置
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
FR3076582B1 (fr) * 2018-01-09 2020-01-24 Pfeiffer Vacuum Pompe a vide de type seche et procede de commande d'un moteur synchrone de pompe a vide
CN108194353B (zh) * 2018-02-02 2019-12-13 中山市天元真空设备技术有限公司 一种成对转子转轴独立的直排大气的多级罗茨干式真空泵
GB2577876B (en) * 2018-10-05 2022-02-16 Edwards Ltd Portable vacuum pump assembly and mass spectrometer
JP2021161917A (ja) * 2020-03-31 2021-10-11 エドワーズ株式会社 真空ポンプおよび真空ポンプの配管構造部
KR102479328B1 (ko) * 2020-12-11 2022-12-19 주식회사 듀얼드론텍 추진력 형성장치 및 이를 이용한 무인비행체
CN113847244A (zh) * 2021-10-14 2021-12-28 四川莱斯特真空科技有限公司 一体式涡轮螺杆组合泵

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752396A (en) * 1980-09-16 1982-03-27 Toshiba Corp Speed control device of induction motor
JPS6022496A (ja) * 1983-07-15 1985-02-04 Mayekawa Mfg Co Ltd 交流電動機の高効率運転速度制御方式
JPS6028298U (ja) * 1983-07-30 1985-02-26 株式会社島津製作所 タ−ボ分子ポンプ
JPS60204997A (ja) 1984-03-28 1985-10-16 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPS60247075A (ja) * 1984-05-21 1985-12-06 Hitachi Ltd 真空ポンプ装置
JPH01277698A (ja) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk 複合型真空ポンプ
US5219269A (en) * 1988-07-13 1993-06-15 Osaka Vacuum, Ltd. Vacuum pump
JPH0725632Y2 (ja) * 1988-09-20 1995-06-07 日本フェローフルイディクス株式会社 真空排気系の流量検出装置
JP2680156B2 (ja) 1990-02-15 1997-11-19 株式会社日立製作所 真空ポンプ
JPH0596580U (ja) * 1992-05-29 1993-12-27 三菱重工業株式会社 防振装置
JP3776467B2 (ja) * 1994-06-28 2006-05-17 株式会社日立製作所 排気系ネットワーク
JPH1140094A (ja) 1997-07-18 1999-02-12 Hitachi Ltd 真空装置の排気システムおよび排気方法
IT1297347B1 (it) * 1997-12-24 1999-09-01 Varian Spa Pompa da vuoto.
JP3856576B2 (ja) 1998-10-27 2006-12-13 独立行政法人 日本原子力研究開発機構 核融合炉の排気装置
JP2000220467A (ja) * 1999-01-28 2000-08-08 Tokai Rubber Ind Ltd 低吸水・低吸油性防音材
JP2002147386A (ja) 2000-11-16 2002-05-22 Shimadzu Corp ターボ分子ポンプによる排気装置
JP2002168192A (ja) * 2000-12-01 2002-06-14 Seiko Instruments Inc 真空ポンプ
JP4147042B2 (ja) * 2002-03-12 2008-09-10 エドワーズ株式会社 真空ポンプ
JP2004100594A (ja) * 2002-09-10 2004-04-02 Toyota Industries Corp 真空ポンプ装置
JP2005114083A (ja) * 2003-10-09 2005-04-28 Ebara Corp 真空チャンバの除振システム
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
EP1533530B1 (en) * 2003-11-18 2006-04-26 VARIAN S.p.A. Vacuum pump provided with vibration damper
JP4703279B2 (ja) * 2004-06-25 2011-06-15 株式会社大阪真空機器製作所 複合分子ポンプの断熱構造
US7140847B2 (en) * 2004-08-11 2006-11-28 The Boc Group, Inc. Integrated high vacuum pumping system
JP4543920B2 (ja) * 2004-12-22 2010-09-15 株式会社デンソー 熱機関の廃熱利用装置
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
JP4782788B2 (ja) * 2005-07-28 2011-09-28 京セラ株式会社 試料保持具とこれを用いた試料吸着装置およびこれを用いた試料処理方法
JP5009634B2 (ja) * 2006-01-31 2012-08-22 株式会社荏原製作所 真空ポンプユニット
KR101303173B1 (ko) * 2006-01-31 2013-09-09 가부시키가이샤 에바라 세이사꾸쇼 진공펌프유닛
JP2007231938A (ja) * 2006-02-06 2007-09-13 Boc Edwards Kk 真空装置、真空装置における水蒸気分圧の急速低減方法、ロードロックチャンバー内の水蒸気分圧の上昇防止方法、および、真空装置用真空ポンプ
DE102009037010A1 (de) * 2009-08-11 2011-02-17 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem

Also Published As

Publication number Publication date
US20130259712A1 (en) 2013-10-03
JP2013209928A (ja) 2013-10-10
JP6333908B2 (ja) 2018-05-30
JP2016205405A (ja) 2016-12-08
EP2644893A2 (en) 2013-10-02
EP2644893A3 (en) 2017-08-23

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