JP5997235B2 - 複合砥粒とその製造方法と研磨方法と研磨装置 - Google Patents

複合砥粒とその製造方法と研磨方法と研磨装置 Download PDF

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JP5997235B2
JP5997235B2 JP2014238783A JP2014238783A JP5997235B2 JP 5997235 B2 JP5997235 B2 JP 5997235B2 JP 2014238783 A JP2014238783 A JP 2014238783A JP 2014238783 A JP2014238783 A JP 2014238783A JP 5997235 B2 JP5997235 B2 JP 5997235B2
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abrasive
polishing
composite
polished
slurry
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JP2015147922A5 (cg-RX-API-DMAC7.html
JP2015147922A (ja
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俊一 藤本
俊一 藤本
山下　哲二
哲二 山下
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Asahi Kasei Corp
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Asahi Kasei Kogyo KK
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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP2014238783A 2014-11-26 2014-11-26 複合砥粒とその製造方法と研磨方法と研磨装置 Active JP5997235B2 (ja)

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Publication number Priority date Publication date Assignee Title
JP6460090B2 (ja) * 2014-02-27 2019-01-30 堺化学工業株式会社 複合金属酸化物研磨材料の製造方法及び複合金属酸化物研磨材料
JP6458554B2 (ja) * 2015-02-26 2019-01-30 堺化学工業株式会社 複合金属酸化物研磨材料の製造方法及び複合金属酸化物研磨材料
JP6916634B2 (ja) * 2017-02-28 2021-08-11 アサヒ化成工業株式会社 研磨用砥粒
CN110400742B (zh) * 2019-07-29 2020-07-28 北京大唐智创科技有限公司 一种5g通信关键射频芯片材料

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CA2039998A1 (en) * 1990-10-09 1992-04-10 Donald C. Zipperian Mechanochemical polishing abrasive
JPH04176556A (ja) * 1990-11-13 1992-06-24 Daido Steel Co Ltd 磁気研摩方法、磁気研摩用砥粒およびその製造方法
JPH11263968A (ja) * 1998-03-19 1999-09-28 Nec Kansai Ltd 研磨用スラリ及び研磨方法
JP2000265160A (ja) * 1999-03-12 2000-09-26 Sumitomo Osaka Cement Co Ltd 高速鏡面研磨用研磨材
JP4345746B2 (ja) * 1999-11-16 2009-10-14 株式会社デンソー メカノケミカル研磨装置
JP3563017B2 (ja) * 2000-07-19 2004-09-08 ロデール・ニッタ株式会社 研磨組成物、研磨組成物の製造方法及びポリシング方法
JP2003113370A (ja) * 2001-07-30 2003-04-18 Toshiba Corp 化学的機械的研磨用スラリー、半導体装置の製造方法、半導体装置の製造装置、及び化学的機械的研磨用スラリーの取り扱い方法
JP2005081485A (ja) * 2003-09-08 2005-03-31 Tube Systems:Kk 高温メカノケミカル研磨方法と装置
CN101821353A (zh) * 2007-10-05 2010-09-01 圣戈本陶瓷及塑料股份有限公司 用复合浆料抛光蓝宝石
JP5384037B2 (ja) * 2008-06-11 2014-01-08 山口精研工業株式会社 サファイア基板用研磨液組成物、及びサファイア基板の研磨方法
JP2013099831A (ja) * 2011-11-09 2013-05-23 Femutekku:Kk 砥石
JP2013111725A (ja) * 2011-11-30 2013-06-10 Admatechs Co Ltd 研磨材およびその製造方法
JP5860776B2 (ja) * 2012-07-04 2016-02-16 株式会社ノリタケカンパニーリミテド 研磨材の製造方法およびその研磨材の比表面積の調整方法

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