JP5976776B2 - Uv処理、化学処理、および堆積のための装置および方法 - Google Patents
Uv処理、化学処理、および堆積のための装置および方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 56
- 239000000126 substance Substances 0.000 title claims description 15
- 230000008021 deposition Effects 0.000 title description 4
- 238000012545 processing Methods 0.000 claims description 136
- 239000007789 gas Substances 0.000 claims description 133
- 238000009826 distribution Methods 0.000 claims description 67
- 239000000758 substrate Substances 0.000 claims description 62
- 230000009977 dual effect Effects 0.000 claims description 21
- 230000005540 biological transmission Effects 0.000 claims description 19
- 238000006884 silylation reaction Methods 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 17
- 238000000576 coating method Methods 0.000 claims description 17
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000003795 chemical substances by application Substances 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 4
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- 239000010980 sapphire Substances 0.000 claims description 3
- 239000012780 transparent material Substances 0.000 claims 1
- 238000003848 UV Light-Curing Methods 0.000 description 15
- 239000010408 film Substances 0.000 description 12
- 238000012993 chemical processing Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 238000011084 recovery Methods 0.000 description 7
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 6
- 229910052736 halogen Inorganic materials 0.000 description 6
- 150000002367 halogens Chemical class 0.000 description 6
- 238000001723 curing Methods 0.000 description 5
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- IJOOHPMOJXWVHK-UHFFFAOYSA-N chlorotrimethylsilane Chemical compound C[Si](C)(C)Cl IJOOHPMOJXWVHK-UHFFFAOYSA-N 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 238000004381 surface treatment Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 229910008051 Si-OH Inorganic materials 0.000 description 2
- 229910006358 Si—OH Inorganic materials 0.000 description 2
- GJWAPAVRQYYSTK-UHFFFAOYSA-N [(dimethyl-$l^{3}-silanyl)amino]-dimethylsilicon Chemical compound C[Si](C)N[Si](C)C GJWAPAVRQYYSTK-UHFFFAOYSA-N 0.000 description 2
- 238000005234 chemical deposition Methods 0.000 description 2
- KWYZNESIGBQHJK-UHFFFAOYSA-N chloro-dimethyl-phenylsilane Chemical compound C[Si](C)(Cl)C1=CC=CC=C1 KWYZNESIGBQHJK-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- LIKFHECYJZWXFJ-UHFFFAOYSA-N dimethyldichlorosilane Chemical compound C[Si](C)(Cl)Cl LIKFHECYJZWXFJ-UHFFFAOYSA-N 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- POPACFLNWGUDSR-UHFFFAOYSA-N methoxy(trimethyl)silane Chemical compound CO[Si](C)(C)C POPACFLNWGUDSR-UHFFFAOYSA-N 0.000 description 2
- 239000005055 methyl trichlorosilane Substances 0.000 description 2
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 2
- 238000003032 molecular docking Methods 0.000 description 2
- KAHVZNKZQFSBFW-UHFFFAOYSA-N n-methyl-n-trimethylsilylmethanamine Chemical compound CN(C)[Si](C)(C)C KAHVZNKZQFSBFW-UHFFFAOYSA-N 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 2
- 239000005051 trimethylchlorosilane Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- QULMGWCCKILBTO-UHFFFAOYSA-N n-[dimethylamino(dimethyl)silyl]-n-methylmethanamine Chemical compound CN(C)[Si](C)(C)N(C)C QULMGWCCKILBTO-UHFFFAOYSA-N 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C16/4558—Perforated rings
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
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Description
Claims (14)
- 内容積および上部開口を画定するチャンバ本体と、
前記内容積内に配置された基板支持体と、
前記基板支持体の上に配置されたUV透過ガス分布シャワーヘッドと、
前記UV透過ガス分布シャワーヘッドの上に配置されたUV透過窓であって、前記UV透過ガス分布シャワーヘッドと前記UV透過窓との間にガス容積が形成され、前記ガス容積と前記内容積が前記UV透過ガス分布シャワーヘッドを通って流体連通している、UV透過窓と、
前記UV透過窓の外側に配置されたUVユニットであって、前記UV透過窓および前記UV透過ガス分布シャワーヘッドを通って前記基板支持体の方へUV光を誘導するように構成されるUVユニットと、
前記チャンバ本体の前記上部開口内に配置された締付部材であって、前記締付部材が前記UV透過ガス分布シャワーヘッドと前記UV透過窓との間に配置されて、前記締付部材内にガス流の経路が形成されている締付部材と
を備え、
前記締付部材が上部締付部材および下部締付部材を含み、
前記UV透過ガス分布シャワーヘッドが前記上部締付部材および前記下部締付部材の間に締め付けられており、
前記上部締付部材および前記下部締付部材の間にプレナムが形成され、前記プレナムが前記UV透過ガス分布シャワーヘッドを取り囲むようになっている、処理チャンバ。 - 前記UV透過ガス分布シャワーヘッドが、
実質的にUV透過性の材料から形成される本体と、
前記UV透過ガス分布シャワーヘッドを通って流れる処理ガスへの露出から前記本体を保護するように構成されたコーティングと
を備えている、請求項1に記載の処理チャンバ。 - 前記本体が石英から形成されている、請求項2に記載の処理チャンバ。
- 前記コーティングが酸窒化アルミニウム膜またはサファイアを含んでいる、請求項3に記載の処理チャンバ。
- 前記UV透過窓が、
石英から形成された本体と、
前記ガス容積内の処理ガスへの露出から前記本体を保護するように構成されたコーティングと
を備えている、請求項1に記載の処理チャンバ。 - 前記締付部材が、
リング形状の本体と、
前記リング形状の本体の上部部分から外側に向かって放射状に延びるフランジであって、前記チャンバ本体に結合されたフランジと、
前記リング形状の本体の下部部分から内側に向かって放射状に延びる段部であって、前記段部の上面に前記UV透過ガス分布シャワーヘッドが配置される段部と
を有している、請求項1に記載の処理チャンバ。 - 前記ガス流の経路が、
前記フランジ内に形成された水平スロットであって、前記フランジの外面で開いている水平スロットと、
前記リング形状の本体内に形成された垂直スロットであって、前記水平スロットに上端部で接続された垂直スロットと、
前記リング形状の本体の前記下部部分内に形成されたプレナムであって、前記垂直スロットの下端部が前記プレナムに対して開いている、プレナムと、
前記段部を通って形成された複数のスポーク開孔であって、前記複数の開孔がそれぞれ、前記プレナムに対して開く第1の端部と前記段部の内面に対して開く第2の端部とを有している、複数のスポーク開孔と
を含んでいる、請求項6に記載の処理チャンバ。 - 前記締付部材に結合された入力マニホルドであって、前記入力マニホルドの出口が前記締付部材内に形成された前記ガス流の経路に接続されている、入力マニホルドと、
前記入力マニホルドに接続された遠隔プラズマ源と、
前記入力マニホルドに接続されたガスパネルと
をさらに備える請求項6に記載の処理チャンバ。 - 移送容積を画定する移送チャンバと、
前記移送容積内に配置された基板移送ロボットと、
前記移送チャンバに結合された2重容積処理チャンバと
を備え、前記2重容積処理チャンバが、
請求項1ないし8のいずれか一項に記載の第1の処理チャンバと、
請求項1ないし8のいずれか一項に記載の第2の処理チャンバと
を備える、処理システム。 - 前記第1の処理チャンバ内の流路と第2の処理チャンバ内の流路とが互いの鏡像である、請求項9に記載のシステム。
- 基板を処理する方法であって、
請求項1ないし8のいずれか一項に記載の処理チャンバの内容積内に配置された基板支持体上に基板を受け取ることと、
前記UV透過窓と前記UV透過ガス分布シャワーヘッドとの間に画定されたガス容積から前記UV透過ガス分布シャワーヘッドを通って1つまたは複数の処理ガスを流すことによって、前記基板に化学処理を施すことと、
前記UV透過ガス分布シャワーヘッドおよび前記UV透過窓を通って前記UVユニットから前記基板の方へUVエネルギーを誘導することによって、前記基板を硬化させることと
を含む方法。 - 前記基板に化学処理を施すことが、前記基板上に形成された低誘電率膜に化学処理を施すためにシリル化剤を含む1つまたは複数の処理ガスを流すことを含む、請求項11に記載の方法。
- 前記化学処理と前記硬化とを同時に実行する、請求項12に記載の方法。
- 前記化学処理を前記硬化の前に実行する、請求項12に記載の方法。
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Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105088191B (zh) * | 2009-07-15 | 2018-07-13 | 应用材料公司 | Cvd 腔室的流体控制特征结构 |
KR101896607B1 (ko) * | 2010-10-19 | 2018-09-07 | 어플라이드 머티어리얼스, 인코포레이티드 | 나노큐어 자외선 챔버용 석영 샤워헤드 |
KR101884003B1 (ko) * | 2011-03-22 | 2018-07-31 | 어플라이드 머티어리얼스, 인코포레이티드 | 화학 기상 증착 챔버를 위한 라이너 조립체 |
US9512520B2 (en) * | 2011-04-25 | 2016-12-06 | Applied Materials, Inc. | Semiconductor substrate processing system |
TW201403711A (zh) | 2012-07-02 | 2014-01-16 | Applied Materials Inc | 利用氣相化學暴露之低k介電質損傷修復 |
TWI581331B (zh) | 2012-07-13 | 2017-05-01 | 應用材料股份有限公司 | 降低多孔低k膜的介電常數之方法 |
US8872138B2 (en) * | 2013-02-20 | 2014-10-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Gas delivery for uniform film properties at UV curing chamber |
US20140264059A1 (en) * | 2013-03-15 | 2014-09-18 | Applied Materials, Inc. | Light irradiance and thermal measurement in uv and cvd chambers |
US20140262037A1 (en) * | 2013-03-15 | 2014-09-18 | Applied Materials, Inc. | Transparent yttria coated quartz showerhead |
US9252024B2 (en) | 2013-05-17 | 2016-02-02 | Applied Materials, Inc. | Deposition chambers with UV treatment and methods of use |
WO2015100292A1 (en) * | 2013-12-26 | 2015-07-02 | Applied Materials, Inc. | Photo-assisted deposition of flowable films |
US10113236B2 (en) * | 2014-05-14 | 2018-10-30 | Applied Materials, Inc. | Batch curing chamber with gas distribution and individual pumping |
KR102438139B1 (ko) * | 2014-12-22 | 2022-08-29 | 어플라이드 머티어리얼스, 인코포레이티드 | 높은 처리량의 프로세싱 챔버를 위한 프로세스 키트 |
WO2016109063A1 (en) | 2015-01-02 | 2016-07-07 | Applied Materials, Inc. | Processing chamber |
US11333246B2 (en) * | 2015-01-26 | 2022-05-17 | Applied Materials, Inc. | Chamber body design architecture for next generation advanced plasma technology |
US20160314997A1 (en) * | 2015-04-22 | 2016-10-27 | Applied Materials, Inc. | Loadlock apparatus, cooling plate assembly, and electronic device processing systems and methods |
CN104875113B (zh) * | 2015-06-18 | 2017-03-01 | 浙江工商大学 | 一种研磨盘表面自生长的快速修复研磨机构 |
CN109070135A (zh) * | 2016-02-10 | 2018-12-21 | 亮锐有限责任公司 | 在led应用中的硅氧烷树脂的气相固化催化和钝化 |
CN109594061B (zh) * | 2016-05-20 | 2021-02-09 | 应用材料公司 | 用于半导体处理的气体分配喷头 |
KR102204297B1 (ko) * | 2016-12-02 | 2021-01-15 | 어플라이드 머티어리얼스, 인코포레이티드 | 박막 캡슐화 처리 시스템 및 프로세스 키트 |
KR102096700B1 (ko) * | 2017-03-29 | 2020-04-02 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치 및 기판 처리 방법 |
JP6981356B2 (ja) * | 2018-04-24 | 2021-12-15 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法 |
CN214848503U (zh) * | 2018-08-29 | 2021-11-23 | 应用材料公司 | 注入器设备、基板处理设备及在机器可读介质中实现的结构 |
EP3867048B1 (en) * | 2018-10-16 | 2023-03-29 | Transitions Optical, Ltd. | Ultraviolet curing apparatus |
US11117265B2 (en) | 2019-07-12 | 2021-09-14 | Applied Materials, Inc. | Robot for simultaneous substrate transfer |
US11574826B2 (en) | 2019-07-12 | 2023-02-07 | Applied Materials, Inc. | High-density substrate processing systems and methods |
JP2022540607A (ja) | 2019-07-12 | 2022-09-16 | アプライド マテリアルズ インコーポレイテッド | 同時基板移送用ロボット |
EP4268271A1 (en) * | 2020-12-22 | 2023-11-01 | Mattson Technology, Inc. | Workpiece processing apparatus with gas showerhead assembly |
US11448977B1 (en) | 2021-09-24 | 2022-09-20 | Applied Materials, Inc. | Gas distribution plate with UV blocker at the center |
Family Cites Families (71)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3983039A (en) | 1975-03-03 | 1976-09-28 | Fusion Systems Corporation | Non-symmetrical reflector for ultraviolet curing |
US4135098A (en) | 1976-11-05 | 1979-01-16 | Union Carbide Corporation | Method and apparatus for curing coating materials |
US4411931A (en) | 1982-09-29 | 1983-10-25 | Armstrong World Industries, Inc. | Multiple step UV curing process for providing accurately controlled surface texture |
NL8402124A (nl) | 1984-07-04 | 1986-02-03 | Philips Nv | Inrichting voor het belichten van een uv hardende laag op een draadvormig lichaam. |
US5156820A (en) * | 1989-05-15 | 1992-10-20 | Rapro Technology, Inc. | Reaction chamber with controlled radiant energy heating and distributed reactant flow |
DE3919334A1 (de) | 1989-06-13 | 1990-12-20 | Tetsuhiro Kano | Reflektor fuer eine leuchte |
JPH0435842A (ja) | 1990-05-31 | 1992-02-06 | Brother Ind Ltd | 加工ユニット制御装置 |
US5228206A (en) | 1992-01-15 | 1993-07-20 | Submicron Systems, Inc. | Cluster tool dry cleaning system |
JPH0693454A (ja) * | 1992-05-15 | 1994-04-05 | Mitsubishi Kasei Corp | グロー放電方法及びグロー放電装置 |
DE4318735A1 (de) | 1993-06-05 | 1994-12-08 | Kammann Maschf Werner | UV-Strahler zum Bestrahlen von Druckfarben auf Objekten und Verfahren zum Trocknen von mit Druckfarbe versehenen Objekten |
US6015503A (en) * | 1994-06-14 | 2000-01-18 | Fsi International, Inc. | Method and apparatus for surface conditioning |
US5440137A (en) | 1994-09-06 | 1995-08-08 | Fusion Systems Corporation | Screw mechanism for radiation-curing lamp having an adjustable irradiation area |
US5705232A (en) | 1994-09-20 | 1998-01-06 | Texas Instruments Incorporated | In-situ coat, bake and cure of dielectric material processing system for semiconductor manufacturing |
JP3088970B2 (ja) * | 1996-07-12 | 2000-09-18 | 東京エレクトロン株式会社 | 改質方法及びその装置 |
US5781693A (en) * | 1996-07-24 | 1998-07-14 | Applied Materials, Inc. | Gas introduction showerhead for an RTP chamber with upper and lower transparent plates and gas flow therebetween |
GB2315850B (en) | 1996-08-02 | 2000-10-04 | Spectral Technology Limited | Lamp assembly |
US6152070A (en) * | 1996-11-18 | 2000-11-28 | Applied Materials, Inc. | Tandem process chamber |
US6055927A (en) * | 1997-01-14 | 2000-05-02 | Applied Komatsu Technology, Inc. | Apparatus and method for white powder reduction in silicon nitride deposition using remote plasma source cleaning technology |
AU3364797A (en) | 1997-06-23 | 1998-10-20 | Kamurov, Alexandr Semenovich | Method and device for uv treatment of liquid, air and surface |
US6098637A (en) | 1998-03-03 | 2000-08-08 | Applied Materials, Inc. | In situ cleaning of the surface inside a vacuum processing chamber |
DE19810455C2 (de) | 1998-03-11 | 2000-02-24 | Michael Bisges | Kaltlicht-UV-Bestrahlungsvorrichtung |
GB2336240A (en) | 1998-04-09 | 1999-10-13 | Jenton International Limited | Apparatus for emitting light |
US6284050B1 (en) | 1998-05-18 | 2001-09-04 | Novellus Systems, Inc. | UV exposure for improving properties and adhesion of dielectric polymer films formed by chemical vapor deposition |
US6187133B1 (en) * | 1998-05-29 | 2001-02-13 | Applied Materials, Inc. | Gas manifold for uniform gas distribution and photochemistry |
JP2000218156A (ja) | 1998-11-25 | 2000-08-08 | Hooya Shot Kk | 紫外光照射装置 |
US6331480B1 (en) | 1999-02-18 | 2001-12-18 | Taiwan Semiconductor Manufacturing Company | Method to improve adhesion between an overlying oxide hard mask and an underlying low dielectric constant material |
US7126687B2 (en) | 1999-08-09 | 2006-10-24 | The United States Of America As Represented By The Secretary Of The Army | Method and instrumentation for determining absorption and morphology of individual airborne particles |
US6475930B1 (en) | 2000-01-31 | 2002-11-05 | Motorola, Inc. | UV cure process and tool for low k film formation |
GB2360084B (en) | 2000-03-08 | 2004-04-21 | Nordson Corp | Lamp assembly |
CN1224074C (zh) | 2000-04-07 | 2005-10-19 | 诺德森公司 | 带有灯体冷却系统的微波激励的紫外线灯系统 |
JP4744671B2 (ja) * | 2000-05-22 | 2011-08-10 | 東京エレクトロン株式会社 | 枚葉式処理装置 |
US6614181B1 (en) | 2000-08-23 | 2003-09-02 | Applied Materials, Inc. | UV radiation source for densification of CVD carbon-doped silicon oxide films |
US6566278B1 (en) | 2000-08-24 | 2003-05-20 | Applied Materials Inc. | Method for densification of CVD carbon-doped silicon oxide films through UV irradiation |
US6323601B1 (en) | 2000-09-11 | 2001-11-27 | Nordson Corporation | Reflector for an ultraviolet lamp system |
US6380270B1 (en) | 2000-09-26 | 2002-04-30 | Honeywell International Inc. | Photogenerated nanoporous materials |
US6559460B1 (en) | 2000-10-31 | 2003-05-06 | Nordson Corporation | Ultraviolet lamp system and methods |
GB2407370B (en) | 2001-02-27 | 2005-07-06 | Nordson Corp | Lamp assembly |
US6732451B2 (en) | 2001-04-11 | 2004-05-11 | Intermec Ip Corp. | UV curing module for label printer |
JP4712240B2 (ja) * | 2001-08-01 | 2011-06-29 | 東京エレクトロン株式会社 | 光励起成膜装置及び光励起成膜方法 |
US6756085B2 (en) | 2001-09-14 | 2004-06-29 | Axcelis Technologies, Inc. | Ultraviolet curing processes for advanced low-k materials |
DE10204994B4 (de) | 2002-02-05 | 2006-11-09 | Xtreme Technologies Gmbh | Anordnung zur Überwachung der Energieabstrahlung einer EUV-Strahlungsquelle |
US6717161B1 (en) | 2003-04-30 | 2004-04-06 | Fusion Uv Systems, Inc. | Apparatus and method providing substantially uniform irradiation of surfaces of elongated objects with a high level of irradiance |
WO2005001444A1 (en) | 2003-06-03 | 2005-01-06 | Bayer Healthcare Llc. | Verification device and method for optical inspection machine |
US7425505B2 (en) * | 2003-07-23 | 2008-09-16 | Fsi International, Inc. | Use of silyating agents |
US7326502B2 (en) | 2003-09-18 | 2008-02-05 | Intel Corporation | Multilayer coatings for EUV mask substrates |
US7119904B2 (en) | 2004-01-13 | 2006-10-10 | Thermo Electron Scientific Instruments Corporation | Stabilized infrared source for infrared spectrometers |
JP4312063B2 (ja) * | 2004-01-21 | 2009-08-12 | 日本エー・エス・エム株式会社 | 薄膜製造装置及びその方法 |
US7164144B2 (en) | 2004-03-10 | 2007-01-16 | Cymer Inc. | EUV light source |
US7148480B2 (en) * | 2004-07-14 | 2006-12-12 | The Regents Of The University Of California | Polycrystalline optical window materials from nanoceramics |
US7077547B2 (en) | 2004-07-29 | 2006-07-18 | Nordson Corporation | Shuttered lamp assembly and method of cooling the lamp assembly |
DE102004038592A1 (de) | 2004-08-06 | 2006-03-16 | Ist Metz Gmbh | Bestrahlungsaggregat |
JP2006134974A (ja) | 2004-11-04 | 2006-05-25 | Canon Inc | 露光装置、判定方法及びデバイス製造方法 |
US20060249175A1 (en) | 2005-05-09 | 2006-11-09 | Applied Materials, Inc. | High efficiency UV curing system |
US20060251827A1 (en) | 2005-05-09 | 2006-11-09 | Applied Materials, Inc. | Tandem uv chamber for curing dielectric materials |
US7777198B2 (en) | 2005-05-09 | 2010-08-17 | Applied Materials, Inc. | Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation |
US7566891B2 (en) | 2006-03-17 | 2009-07-28 | Applied Materials, Inc. | Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors |
SG136078A1 (en) | 2006-03-17 | 2007-10-29 | Applied Materials Inc | Uv cure system |
US7692171B2 (en) | 2006-03-17 | 2010-04-06 | Andrzei Kaszuba | Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors |
US7446058B2 (en) * | 2006-05-25 | 2008-11-04 | International Business Machines Corporation | Adhesion enhancement for metal/dielectric interface |
US20070289534A1 (en) * | 2006-05-30 | 2007-12-20 | Applied Materials, Inc. | Process chamber for dielectric gapfill |
US20070287091A1 (en) | 2006-06-12 | 2007-12-13 | Jacobo Victor M | System and method for exposing electronic substrates to UV light |
US20070298167A1 (en) | 2006-06-26 | 2007-12-27 | Applied Materials, Inc. | Ozone abatement in a re-circulating cooling system |
US20070295012A1 (en) | 2006-06-26 | 2007-12-27 | Applied Materials, Inc. | Nitrogen enriched cooling air module for uv curing system |
JP5258241B2 (ja) * | 2006-09-19 | 2013-08-07 | 日本エー・エス・エム株式会社 | Uv照射チャンバーをクリーニングする方法 |
KR20080027009A (ko) | 2006-09-22 | 2008-03-26 | 에이에스엠지니텍코리아 주식회사 | 원자층 증착 장치 및 그를 이용한 다층막 증착 방법 |
US7501292B2 (en) * | 2007-07-19 | 2009-03-10 | Asm Japan K.K. | Method for managing UV irradiation for curing semiconductor substrate |
US20090277587A1 (en) * | 2008-05-09 | 2009-11-12 | Applied Materials, Inc. | Flowable dielectric equipment and processes |
US20090305515A1 (en) * | 2008-06-06 | 2009-12-10 | Dustin Ho | Method and apparatus for uv curing with water vapor |
JP4708465B2 (ja) * | 2008-10-21 | 2011-06-22 | 東京エレクトロン株式会社 | 半導体装置の製造方法及び半導体装置の製造装置 |
US8216640B2 (en) * | 2009-09-25 | 2012-07-10 | Hermes-Epitek Corporation | Method of making showerhead for semiconductor processing apparatus |
US9364871B2 (en) | 2012-08-23 | 2016-06-14 | Applied Materials, Inc. | Method and hardware for cleaning UV chambers |
-
2012
- 2012-04-05 JP JP2014503984A patent/JP5976776B2/ja active Active
- 2012-04-05 KR KR1020137027650A patent/KR101928348B1/ko active IP Right Grant
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- 2012-04-05 WO PCT/US2012/032331 patent/WO2012138866A1/en active Application Filing
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TW201248757A (en) | 2012-12-01 |
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WO2012138866A1 (en) | 2012-10-11 |
US20160289838A1 (en) | 2016-10-06 |
US10570517B2 (en) | 2020-02-25 |
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