JP5945400B2 - 検出光学系および走査型顕微鏡 - Google Patents

検出光学系および走査型顕微鏡 Download PDF

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Publication number
JP5945400B2
JP5945400B2 JP2011252674A JP2011252674A JP5945400B2 JP 5945400 B2 JP5945400 B2 JP 5945400B2 JP 2011252674 A JP2011252674 A JP 2011252674A JP 2011252674 A JP2011252674 A JP 2011252674A JP 5945400 B2 JP5945400 B2 JP 5945400B2
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Japan
Prior art keywords
light
diffraction grating
wavelength
vph diffraction
specimen
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Expired - Fee Related
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JP2011252674A
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English (en)
Japanese (ja)
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JP2013109082A (ja
JP2013109082A5 (enExample
Inventor
富岡　正治
正治 富岡
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Olympus Corp
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Olympus Corp
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Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2011252674A priority Critical patent/JP5945400B2/ja
Priority to US13/669,634 priority patent/US8885162B2/en
Priority to EP12007625.2A priority patent/EP2594979B1/en
Publication of JP2013109082A publication Critical patent/JP2013109082A/ja
Publication of JP2013109082A5 publication Critical patent/JP2013109082A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0076—Optical details of the image generation arrangements using fluorescence or luminescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0237—Adjustable, e.g. focussing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1838—Holographic gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G01J3/4406—Fluorescence spectrometry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Microscoopes, Condenser (AREA)
JP2011252674A 2011-11-18 2011-11-18 検出光学系および走査型顕微鏡 Expired - Fee Related JP5945400B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011252674A JP5945400B2 (ja) 2011-11-18 2011-11-18 検出光学系および走査型顕微鏡
US13/669,634 US8885162B2 (en) 2011-11-18 2012-11-06 Detection optical system and scanning microscope
EP12007625.2A EP2594979B1 (en) 2011-11-18 2012-11-09 Detection optical system and scanning microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011252674A JP5945400B2 (ja) 2011-11-18 2011-11-18 検出光学系および走査型顕微鏡

Publications (3)

Publication Number Publication Date
JP2013109082A JP2013109082A (ja) 2013-06-06
JP2013109082A5 JP2013109082A5 (enExample) 2014-12-18
JP5945400B2 true JP5945400B2 (ja) 2016-07-05

Family

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Family Applications (1)

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JP2011252674A Expired - Fee Related JP5945400B2 (ja) 2011-11-18 2011-11-18 検出光学系および走査型顕微鏡

Country Status (3)

Country Link
US (1) US8885162B2 (enExample)
EP (1) EP2594979B1 (enExample)
JP (1) JP5945400B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022025728A1 (ko) * 2020-07-30 2022-02-03 주식회사 스킨어세이 분광기

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5945400B2 (ja) * 2011-11-18 2016-07-05 オリンパス株式会社 検出光学系および走査型顕微鏡
JP6408796B2 (ja) 2014-06-11 2018-10-17 オリンパス株式会社 レーザ顕微鏡装置
JP6456617B2 (ja) * 2014-07-15 2019-01-23 オリンパス株式会社 顕微鏡装置
KR102240270B1 (ko) 2014-07-21 2021-04-14 삼성전자주식회사 광 변환 모듈 및 광학 측정 시스템
WO2016061710A1 (zh) * 2014-10-21 2016-04-28 清华大学 一种快速宽视场体全息荧光显微成像系统
CN105352923B (zh) * 2014-10-21 2018-08-03 清华大学 一种快速宽视场体全息荧光显微成像系统
JP6375239B2 (ja) * 2015-02-05 2018-08-15 オリンパス株式会社 レーザ顕微鏡装置
KR101884118B1 (ko) * 2017-03-14 2018-07-31 한양대학교 산학협력단 투과 회절 격자 기반 분광기
DE102017127122B4 (de) * 2017-11-17 2022-05-05 Endress+Hauser Conducta Gmbh+Co. Kg Spektrometrisches Messgerät
TR202010646A1 (tr) * 2020-07-06 2022-01-21 Orta Dogu Teknik Ueniversitesi Deği̇şken kirinim opti̇k elemanli opti̇k spektrometre
US20230304922A1 (en) 2022-03-23 2023-09-28 Tetsuroh Tatebe Spectroscope and analysis system

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US3600093A (en) * 1969-11-10 1971-08-17 Sperry Rand Corp Continuously blazed optical monochromator
DE10038049A1 (de) * 2000-08-02 2002-02-14 Leica Microsystems Optische Anordnung zur Selektion und Detektion des Spektalbereichs eines Lichtstrahls
US6583873B1 (en) * 2000-09-25 2003-06-24 The Carnegie Institution Of Washington Optical devices having a wavelength-tunable dispersion assembly that has a volume dispersive diffraction grating
TW538258B (en) * 2002-07-16 2003-06-21 Ind Tech Res Inst Grating interferometer device with tunable resolution
TWI245473B (en) * 2003-06-30 2005-12-11 Delta Electronics Inc Tunable laser source and wavelength selecting method thereof
JP4646506B2 (ja) * 2003-09-11 2011-03-09 オリンパス株式会社 レーザ走査型顕微鏡
JP4633386B2 (ja) * 2004-05-25 2011-02-16 オリンパス株式会社 走査型レーザ顕微鏡及びそれを用いたデータ取得方法
JP4804727B2 (ja) 2004-06-24 2011-11-02 オリンパス株式会社 光走査型共焦点顕微鏡
JP4645173B2 (ja) * 2004-11-26 2011-03-09 株式会社ニコン 分光器、及びこれを備えている顕微分光装置
DE102005042890B4 (de) * 2005-09-09 2007-05-31 Leica Microsystems Cms Gmbh Konfokalmikroskop und Verfahren zur Detektion mit einem Konfokalmikroskop
US7564547B2 (en) 2005-11-07 2009-07-21 Wafermasters, Inc. Spectroscopy system
US20070160325A1 (en) * 2006-01-11 2007-07-12 Hyungbin Son Angle-tunable transmissive grating
KR100817726B1 (ko) * 2008-01-18 2008-03-31 주식회사 나노베이스 파장 가변 장치 및 그 방법
KR100885537B1 (ko) * 2008-09-03 2009-02-26 주식회사 나노베이스 파장 가변 분광계 및 그 파장 가변 방법
JP2011197351A (ja) * 2010-03-19 2011-10-06 Olympus Corp 反射型回折格子、及び、それを用いた分光器及びパルス整形器
JP5541972B2 (ja) * 2010-06-09 2014-07-09 オリンパス株式会社 走査型共焦点顕微鏡
JP5965099B2 (ja) * 2010-11-05 2016-08-03 住友電気工業株式会社 光学装置およびその調整方法
JP5945400B2 (ja) * 2011-11-18 2016-07-05 オリンパス株式会社 検出光学系および走査型顕微鏡

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022025728A1 (ko) * 2020-07-30 2022-02-03 주식회사 스킨어세이 분광기
US12326363B2 (en) 2020-07-30 2025-06-10 Answeray Inc. Spectroscope

Also Published As

Publication number Publication date
US8885162B2 (en) 2014-11-11
EP2594979B1 (en) 2019-03-27
US20130128268A1 (en) 2013-05-23
JP2013109082A (ja) 2013-06-06
EP2594979A1 (en) 2013-05-22

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