JP5928666B2 - 変性フェノール性水酸基含有化合物、変性フェノール性水酸基含有化合物の製造方法、感光性組成物、レジスト材料及びレジスト塗膜 - Google Patents
変性フェノール性水酸基含有化合物、変性フェノール性水酸基含有化合物の製造方法、感光性組成物、レジスト材料及びレジスト塗膜 Download PDFInfo
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- JP5928666B2 JP5928666B2 JP2015543614A JP2015543614A JP5928666B2 JP 5928666 B2 JP5928666 B2 JP 5928666B2 JP 2015543614 A JP2015543614 A JP 2015543614A JP 2015543614 A JP2015543614 A JP 2015543614A JP 5928666 B2 JP5928666 B2 JP 5928666B2
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- phenolic hydroxyl
- hydroxyl group
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- modified phenolic
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- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 title claims description 118
- 125000002887 hydroxy group Chemical group [H]O* 0.000 title claims description 110
- 150000001875 compounds Chemical class 0.000 title claims description 90
- 239000000203 mixture Substances 0.000 title claims description 45
- 239000000463 material Substances 0.000 title claims description 28
- 238000000576 coating method Methods 0.000 title claims description 17
- 239000011248 coating agent Substances 0.000 title claims description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 125000000217 alkyl group Chemical group 0.000 claims description 55
- 125000004432 carbon atom Chemical group C* 0.000 claims description 39
- 125000003118 aryl group Chemical group 0.000 claims description 36
- 125000001424 substituent group Chemical group 0.000 claims description 36
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical class C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 claims description 34
- 125000003545 alkoxy group Chemical group 0.000 claims description 31
- 150000001299 aldehydes Chemical class 0.000 claims description 20
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 20
- RGHHSNMVTDWUBI-UHFFFAOYSA-N 4-hydroxybenzaldehyde Chemical compound OC1=CC=C(C=O)C=C1 RGHHSNMVTDWUBI-UHFFFAOYSA-N 0.000 claims description 13
- 125000004183 alkoxy alkyl group Chemical group 0.000 claims description 12
- 125000004122 cyclic group Chemical group 0.000 claims description 12
- 125000005842 heteroatom Chemical group 0.000 claims description 12
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 12
- 125000004453 alkoxycarbonyl group Chemical group 0.000 claims description 11
- 125000005843 halogen group Chemical group 0.000 claims description 11
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 10
- 125000005160 aryl oxy alkyl group Chemical group 0.000 claims description 10
- SMQUZDBALVYZAC-UHFFFAOYSA-N salicylaldehyde Chemical compound OC1=CC=CC=C1C=O SMQUZDBALVYZAC-UHFFFAOYSA-N 0.000 claims description 10
- 125000004665 trialkylsilyl group Chemical group 0.000 claims description 10
- 125000002252 acyl group Chemical group 0.000 claims description 9
- 125000005161 aryl oxy carbonyl group Chemical group 0.000 claims description 9
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- IAVREABSGIHHMO-UHFFFAOYSA-N 3-hydroxybenzaldehyde Chemical compound OC1=CC=CC(C=O)=C1 IAVREABSGIHHMO-UHFFFAOYSA-N 0.000 claims description 6
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 claims description 6
- BUDQDWGNQVEFAC-UHFFFAOYSA-N Dihydropyran Chemical compound C1COC=CC1 BUDQDWGNQVEFAC-UHFFFAOYSA-N 0.000 claims description 5
- DFQICHCWIIJABH-UHFFFAOYSA-N naphthalene-2,7-diol Chemical compound C1=CC(O)=CC2=CC(O)=CC=C21 DFQICHCWIIJABH-UHFFFAOYSA-N 0.000 claims description 5
- 125000001931 aliphatic group Chemical group 0.000 claims description 4
- 229950011260 betanaphthol Drugs 0.000 claims description 4
- FZZQNEVOYIYFPF-UHFFFAOYSA-N naphthalene-1,6-diol Chemical compound OC1=CC=CC2=CC(O)=CC=C21 FZZQNEVOYIYFPF-UHFFFAOYSA-N 0.000 claims description 4
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 4
- FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-dioxonaphthalene Natural products C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 claims description 3
- BOKGTLAJQHTOKE-UHFFFAOYSA-N 1,5-dihydroxynaphthalene Chemical compound C1=CC=C2C(O)=CC=CC2=C1O BOKGTLAJQHTOKE-UHFFFAOYSA-N 0.000 claims description 3
- 239000003054 catalyst Substances 0.000 claims description 3
- PCILLCXFKWDRMK-UHFFFAOYSA-N naphthalene-1,4-diol Chemical compound C1=CC=C2C(O)=CC=C(O)C2=C1 PCILLCXFKWDRMK-UHFFFAOYSA-N 0.000 claims description 3
- 125000003107 substituted aryl group Chemical group 0.000 claims description 3
- DYHSDKLCOJIUFX-UHFFFAOYSA-N tert-butoxycarbonyl anhydride Chemical compound CC(C)(C)OC(=O)OC(=O)OC(C)(C)C DYHSDKLCOJIUFX-UHFFFAOYSA-N 0.000 claims description 3
- 230000002378 acidificating effect Effects 0.000 claims description 2
- JRNGUTKWMSBIBF-UHFFFAOYSA-N naphthalene-2,3-diol Chemical compound C1=CC=C2C=C(O)C(O)=CC2=C1 JRNGUTKWMSBIBF-UHFFFAOYSA-N 0.000 claims description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 2
- 125000000547 substituted alkyl group Chemical group 0.000 claims 1
- -1 naphthoquinone diazide compound Chemical class 0.000 description 156
- 229920005989 resin Polymers 0.000 description 55
- 239000011347 resin Substances 0.000 description 55
- 238000006243 chemical reaction Methods 0.000 description 40
- 235000013824 polyphenols Nutrition 0.000 description 37
- 239000010408 film Substances 0.000 description 32
- 150000001923 cyclic compounds Chemical class 0.000 description 28
- 229920003986 novolac Polymers 0.000 description 28
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 24
- 206010034972 Photosensitivity reaction Diseases 0.000 description 22
- 230000015572 biosynthetic process Effects 0.000 description 22
- 230000036211 photosensitivity Effects 0.000 description 22
- 238000003786 synthesis reaction Methods 0.000 description 22
- 239000003960 organic solvent Substances 0.000 description 19
- 239000003513 alkali Substances 0.000 description 17
- 239000003795 chemical substances by application Substances 0.000 description 17
- 150000002989 phenols Chemical class 0.000 description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 17
- 125000001624 naphthyl group Chemical group 0.000 description 15
- 238000005259 measurement Methods 0.000 description 14
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 12
- 150000002430 hydrocarbons Chemical group 0.000 description 12
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 11
- 229930003836 cresol Natural products 0.000 description 11
- 239000000047 product Substances 0.000 description 11
- 125000006239 protecting group Chemical group 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 11
- 238000001228 spectrum Methods 0.000 description 10
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 9
- 239000002253 acid Substances 0.000 description 9
- 239000010410 layer Substances 0.000 description 9
- 239000012044 organic layer Substances 0.000 description 9
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 8
- 239000003377 acid catalyst Substances 0.000 description 8
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 8
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 7
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 7
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 7
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 6
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 6
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 6
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 6
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 6
- 239000012046 mixed solvent Substances 0.000 description 6
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 6
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 6
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N Butyraldehyde Chemical compound CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 5
- YXHKONLOYHBTNS-UHFFFAOYSA-N Diazomethane Chemical compound C=[N+]=[N-] YXHKONLOYHBTNS-UHFFFAOYSA-N 0.000 description 5
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 5
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 125000006267 biphenyl group Chemical group 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 239000007795 chemical reaction product Substances 0.000 description 5
- 125000005448 ethoxyethyl group Chemical group [H]C([H])([H])C([H])([H])OC([H])([H])C([H])([H])* 0.000 description 5
- 238000000434 field desorption mass spectrometry Methods 0.000 description 5
- 239000000945 filler Substances 0.000 description 5
- 125000003454 indenyl group Chemical group C1(C=CC2=CC=CC=C12)* 0.000 description 5
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 239000000178 monomer Substances 0.000 description 5
- 239000005011 phenolic resin Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 4
- IUNJCFABHJZSKB-UHFFFAOYSA-N 2,4-dihydroxybenzaldehyde Chemical compound OC1=CC=C(C=O)C(O)=C1 IUNJCFABHJZSKB-UHFFFAOYSA-N 0.000 description 4
- CDAWCLOXVUBKRW-UHFFFAOYSA-N 2-aminophenol Chemical class NC1=CC=CC=C1O CDAWCLOXVUBKRW-UHFFFAOYSA-N 0.000 description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 description 4
- 125000004744 butyloxycarbonyl group Chemical group 0.000 description 4
- VTJUKNSKBAOEHE-UHFFFAOYSA-N calixarene Chemical group COC(=O)COC1=C(CC=2C(=C(CC=3C(=C(C4)C=C(C=3)C(C)(C)C)OCC(=O)OC)C=C(C=2)C(C)(C)C)OCC(=O)OC)C=C(C(C)(C)C)C=C1CC1=C(OCC(=O)OC)C4=CC(C(C)(C)C)=C1 VTJUKNSKBAOEHE-UHFFFAOYSA-N 0.000 description 4
- CBOQJANXLMLOSS-UHFFFAOYSA-N ethyl vanillin Chemical compound CCOC1=CC(C=O)=CC=C1O CBOQJANXLMLOSS-UHFFFAOYSA-N 0.000 description 4
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 4
- 125000001188 haloalkyl group Chemical group 0.000 description 4
- 125000004464 hydroxyphenyl group Chemical group 0.000 description 4
- 229940100630 metacresol Drugs 0.000 description 4
- 235000006408 oxalic acid Nutrition 0.000 description 4
- 229940116315 oxalic acid Drugs 0.000 description 4
- 239000003504 photosensitizing agent Substances 0.000 description 4
- 239000011342 resin composition Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 238000006467 substitution reaction Methods 0.000 description 4
- 239000004094 surface-active agent Substances 0.000 description 4
- 238000005160 1H NMR spectroscopy Methods 0.000 description 3
- OISVCGZHLKNMSJ-UHFFFAOYSA-N 2,6-dimethylpyridine Chemical compound CC1=CC=CC(C)=N1 OISVCGZHLKNMSJ-UHFFFAOYSA-N 0.000 description 3
- GJYCVCVHRSWLNY-UHFFFAOYSA-N 2-butylphenol Chemical class CCCCC1=CC=CC=C1O GJYCVCVHRSWLNY-UHFFFAOYSA-N 0.000 description 3
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 3
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 3
- WTQZSMDDRMKJRI-UHFFFAOYSA-N 4-diazoniophenolate Chemical group [O-]C1=CC=C([N+]#N)C=C1 WTQZSMDDRMKJRI-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- HGINCPLSRVDWNT-UHFFFAOYSA-N Acrolein Chemical compound C=CC=O HGINCPLSRVDWNT-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 3
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 3
- NBBJYMSMWIIQGU-UHFFFAOYSA-N Propionic aldehyde Chemical compound CCC=O NBBJYMSMWIIQGU-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- HUMNYLRZRPPJDN-UHFFFAOYSA-N benzenecarboxaldehyde Natural products O=CC1=CC=CC=C1 HUMNYLRZRPPJDN-UHFFFAOYSA-N 0.000 description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 3
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 3
- JARKCYVAAOWBJS-UHFFFAOYSA-N caproic aldehyde Natural products CCCCCC=O JARKCYVAAOWBJS-UHFFFAOYSA-N 0.000 description 3
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 3
- 230000003197 catalytic effect Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 125000003754 ethoxycarbonyl group Chemical group C(=O)(OCC)* 0.000 description 3
- 125000001153 fluoro group Chemical group F* 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 229920002223 polystyrene Polymers 0.000 description 3
- 125000006225 propoxyethyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])OC([H])([H])C([H])([H])* 0.000 description 3
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 3
- 125000004742 propyloxycarbonyl group Chemical group 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 3
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 3
- 125000003718 tetrahydrofuranyl group Chemical group 0.000 description 3
- 125000001412 tetrahydropyranyl group Chemical group 0.000 description 3
- HGBOYTHUEUWSSQ-UHFFFAOYSA-N valeric aldehyde Natural products CCCCC=O HGBOYTHUEUWSSQ-UHFFFAOYSA-N 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- WNXJIVFYUVYPPR-UHFFFAOYSA-N 1,3-dioxolane Chemical compound C1COCO1 WNXJIVFYUVYPPR-UHFFFAOYSA-N 0.000 description 2
- OITQDWKMIPXGFL-UHFFFAOYSA-N 1-hydroxy-2-naphthaldehyde Chemical compound C1=CC=C2C(O)=C(C=O)C=CC2=C1 OITQDWKMIPXGFL-UHFFFAOYSA-N 0.000 description 2
- QWBBPBRQALCEIZ-UHFFFAOYSA-N 2,3-dimethylphenol Chemical compound CC1=CC=CC(O)=C1C QWBBPBRQALCEIZ-UHFFFAOYSA-N 0.000 description 2
- CPEXFJVZFNYXGU-UHFFFAOYSA-N 2,4,6-trihydroxybenzophenone Chemical compound OC1=CC(O)=CC(O)=C1C(=O)C1=CC=CC=C1 CPEXFJVZFNYXGU-UHFFFAOYSA-N 0.000 description 2
- NKTOLZVEWDHZMU-UHFFFAOYSA-N 2,5-xylenol Chemical compound CC1=CC=C(C)C(O)=C1 NKTOLZVEWDHZMU-UHFFFAOYSA-N 0.000 description 2
- NXXYKOUNUYWIHA-UHFFFAOYSA-N 2,6-Dimethylphenol Chemical compound CC1=CC=CC(C)=C1O NXXYKOUNUYWIHA-UHFFFAOYSA-N 0.000 description 2
- IXQGCWUGDFDQMF-UHFFFAOYSA-N 2-Ethylphenol Chemical class CCC1=CC=CC=C1O IXQGCWUGDFDQMF-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- GXYCPGOCXLHIAT-UHFFFAOYSA-N 2-cyclohexyl-6-[(3-cyclohexyl-2-hydroxyphenyl)-(2-hydroxyphenyl)methyl]phenol Chemical compound OC1=CC=CC=C1C(C=1C(=C(C2CCCCC2)C=CC=1)O)C1=CC=CC(C2CCCCC2)=C1O GXYCPGOCXLHIAT-UHFFFAOYSA-N 0.000 description 2
- IBGBGRVKPALMCQ-UHFFFAOYSA-N 3,4-dihydroxybenzaldehyde Chemical compound OC1=CC=C(C=O)C=C1O IBGBGRVKPALMCQ-UHFFFAOYSA-N 0.000 description 2
- YCOXTKKNXUZSKD-UHFFFAOYSA-N 3,4-xylenol Chemical compound CC1=CC=C(O)C=C1C YCOXTKKNXUZSKD-UHFFFAOYSA-N 0.000 description 2
- TUAMRELNJMMDMT-UHFFFAOYSA-N 3,5-xylenol Chemical compound CC1=CC(C)=CC(O)=C1 TUAMRELNJMMDMT-UHFFFAOYSA-N 0.000 description 2
- HMNKTRSOROOSPP-UHFFFAOYSA-N 3-Ethylphenol Chemical compound CCC1=CC=CC(O)=C1 HMNKTRSOROOSPP-UHFFFAOYSA-N 0.000 description 2
- VHYFNPMBLIVWCW-UHFFFAOYSA-N 4-Dimethylaminopyridine Chemical compound CN(C)C1=CC=NC=C1 VHYFNPMBLIVWCW-UHFFFAOYSA-N 0.000 description 2
- PLIKAWJENQZMHA-UHFFFAOYSA-N 4-aminophenol Chemical compound NC1=CC=C(O)C=C1 PLIKAWJENQZMHA-UHFFFAOYSA-N 0.000 description 2
- HXDOZKJGKXYMEW-UHFFFAOYSA-N 4-ethylphenol Chemical compound CCC1=CC=C(O)C=C1 HXDOZKJGKXYMEW-UHFFFAOYSA-N 0.000 description 2
- BLYYQDFZPGAAQM-UHFFFAOYSA-N 6-methoxy-1h-pyrimidin-2-one Chemical compound COC1=CC=NC(O)=N1 BLYYQDFZPGAAQM-UHFFFAOYSA-N 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- AMIMRNSIRUDHCM-UHFFFAOYSA-N Isopropylaldehyde Chemical compound CC(C)C=O AMIMRNSIRUDHCM-UHFFFAOYSA-N 0.000 description 2
- XNWPXDGRBWJIES-UHFFFAOYSA-N Maclurin Chemical compound OC1=CC(O)=CC(O)=C1C(=O)C1=CC=C(O)C(O)=C1 XNWPXDGRBWJIES-UHFFFAOYSA-N 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- 229930040373 Paraformaldehyde Natural products 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229920001214 Polysorbate 60 Polymers 0.000 description 2
- IYFATESGLOUGBX-YVNJGZBMSA-N Sorbitan monopalmitate Chemical compound CCCCCCCCCCCCCCCC(=O)OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O IYFATESGLOUGBX-YVNJGZBMSA-N 0.000 description 2
- 239000004147 Sorbitan trioleate Substances 0.000 description 2
- PRXRUNOAOLTIEF-ADSICKODSA-N Sorbitan trioleate Chemical compound CCCCCCCC\C=C/CCCCCCCC(=O)OC[C@@H](OC(=O)CCCCCCC\C=C/CCCCCCCC)[C@H]1OC[C@H](O)[C@H]1OC(=O)CCCCCCC\C=C/CCCCCCCC PRXRUNOAOLTIEF-ADSICKODSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 2
- IKHGUXGNUITLKF-XPULMUKRSA-N acetaldehyde Chemical compound [14CH]([14CH3])=O IKHGUXGNUITLKF-XPULMUKRSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 125000005036 alkoxyphenyl group Chemical group 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- 125000003236 benzoyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C(*)=O 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 238000003776 cleavage reaction Methods 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 125000002933 cyclohexyloxy group Chemical group C1(CCCCC1)O* 0.000 description 2
- 238000007405 data analysis Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- JXTHNDFMNIQAHM-UHFFFAOYSA-N dichloroacetic acid Chemical compound OC(=O)C(Cl)Cl JXTHNDFMNIQAHM-UHFFFAOYSA-N 0.000 description 2
- 235000014113 dietary fatty acids Nutrition 0.000 description 2
- KZTYYGOKRVBIMI-UHFFFAOYSA-N diphenyl sulfone Chemical compound C=1C=CC=CC=1S(=O)(=O)C1=CC=CC=C1 KZTYYGOKRVBIMI-UHFFFAOYSA-N 0.000 description 2
- SNRUBQQJIBEYMU-UHFFFAOYSA-N dodecane Chemical compound CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- 239000000194 fatty acid Substances 0.000 description 2
- 229930195729 fatty acid Natural products 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- HYBBIBNJHNGZAN-UHFFFAOYSA-N furfural Chemical compound O=CC1=CC=CO1 HYBBIBNJHNGZAN-UHFFFAOYSA-N 0.000 description 2
- LEQAOMBKQFMDFZ-UHFFFAOYSA-N glyoxal Chemical compound O=CC=O LEQAOMBKQFMDFZ-UHFFFAOYSA-N 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-M hexanoate Chemical compound CCCCCC([O-])=O FUZZWVXGSFPDMH-UHFFFAOYSA-M 0.000 description 2
- 125000003707 hexyloxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 2
- 229920001519 homopolymer Polymers 0.000 description 2
- 150000002440 hydroxy compounds Chemical class 0.000 description 2
- 238000002329 infrared spectrum Methods 0.000 description 2
- 239000011256 inorganic filler Substances 0.000 description 2
- 229910003475 inorganic filler Inorganic materials 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- OKJPEAGHQZHRQV-UHFFFAOYSA-N iodoform Chemical compound IC(I)I OKJPEAGHQZHRQV-UHFFFAOYSA-N 0.000 description 2
- JVTZFYYHCGSXJV-UHFFFAOYSA-N isovanillin Chemical compound COC1=CC=C(C=O)C=C1O JVTZFYYHCGSXJV-UHFFFAOYSA-N 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 125000001160 methoxycarbonyl group Chemical group [H]C([H])([H])OC(*)=O 0.000 description 2
- LPEKGGXMPWTOCB-UHFFFAOYSA-N methyl 2-hydroxypropionate Chemical compound COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 2
- NXPPAOGUKPJVDI-UHFFFAOYSA-N naphthalene-1,2-diol Chemical compound C1=CC=CC2=C(O)C(O)=CC=C21 NXPPAOGUKPJVDI-UHFFFAOYSA-N 0.000 description 2
- 150000004780 naphthols Chemical class 0.000 description 2
- 125000004957 naphthylene group Chemical group 0.000 description 2
- 125000004998 naphthylethyl group Chemical group C1(=CC=CC2=CC=CC=C12)CC* 0.000 description 2
- 125000004923 naphthylmethyl group Chemical group C1(=CC=CC2=CC=CC=C12)C* 0.000 description 2
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 2
- JJVNINGBHGBWJH-UHFFFAOYSA-N ortho-vanillin Chemical compound COC1=CC=CC(C=O)=C1O JJVNINGBHGBWJH-UHFFFAOYSA-N 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- QNGNSVIICDLXHT-UHFFFAOYSA-N para-ethylbenzaldehyde Natural products CCC1=CC=C(C=O)C=C1 QNGNSVIICDLXHT-UHFFFAOYSA-N 0.000 description 2
- 125000004115 pentoxy group Chemical group [*]OC([H])([H])C([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 125000006678 phenoxycarbonyl group Chemical group 0.000 description 2
- DTUQWGWMVIHBKE-UHFFFAOYSA-N phenylacetaldehyde Chemical compound O=CCC1=CC=CC=C1 DTUQWGWMVIHBKE-UHFFFAOYSA-N 0.000 description 2
- 125000000286 phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 125000001325 propanoyl group Chemical group O=C([*])C([H])([H])C([H])([H])[H] 0.000 description 2
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 230000007017 scission Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000011071 sorbitan monopalmitate Nutrition 0.000 description 2
- 239000001570 sorbitan monopalmitate Substances 0.000 description 2
- 229940031953 sorbitan monopalmitate Drugs 0.000 description 2
- 235000019337 sorbitan trioleate Nutrition 0.000 description 2
- 229960000391 sorbitan trioleate Drugs 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 150000003460 sulfonic acids Chemical class 0.000 description 2
- HJUGFYREWKUQJT-UHFFFAOYSA-N tetrabromomethane Chemical compound BrC(Br)(Br)Br HJUGFYREWKUQJT-UHFFFAOYSA-N 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 125000003944 tolyl group Chemical group 0.000 description 2
- DKZBBWMURDFHNE-UHFFFAOYSA-N trans-coniferylaldehyde Natural products COC1=CC(C=CC=O)=CC=C1O DKZBBWMURDFHNE-UHFFFAOYSA-N 0.000 description 2
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- MWOOGOJBHIARFG-UHFFFAOYSA-N vanillin Chemical compound COC1=CC(C=O)=CC=C1O MWOOGOJBHIARFG-UHFFFAOYSA-N 0.000 description 2
- 125000005023 xylyl group Chemical group 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- QWRVAXMLZCMVSL-UHFFFAOYSA-N (2,4,6-trihydroxyphenyl)-(3,4,5-trihydroxyphenyl)methanone Chemical compound OC1=CC(O)=CC(O)=C1C(=O)C1=CC(O)=C(O)C(O)=C1 QWRVAXMLZCMVSL-UHFFFAOYSA-N 0.000 description 1
- GBQZZLQKUYLGFT-UHFFFAOYSA-N (2,4-dihydroxyphenyl)-(2,3,4-trihydroxyphenyl)methanone Chemical compound OC1=CC(O)=CC=C1C(=O)C1=CC=C(O)C(O)=C1O GBQZZLQKUYLGFT-UHFFFAOYSA-N 0.000 description 1
- OKJFKPFBSPZTAH-UHFFFAOYSA-N (2,4-dihydroxyphenyl)-(4-hydroxyphenyl)methanone Chemical compound C1=CC(O)=CC=C1C(=O)C1=CC=C(O)C=C1O OKJFKPFBSPZTAH-UHFFFAOYSA-N 0.000 description 1
- GKQOIQKMFFMJLF-UHFFFAOYSA-N (2-hydroxyphenyl)-(2,3,4,5-tetrahydroxyphenyl)methanone Chemical compound OC1=C(O)C(O)=CC(C(=O)C=2C(=CC=CC=2)O)=C1O GKQOIQKMFFMJLF-UHFFFAOYSA-N 0.000 description 1
- XLBGWOVCPLFKCQ-UHFFFAOYSA-N (2-methylphenyl)-(2,3,4-trihydroxyphenyl)methanone Chemical compound CC1=CC=CC=C1C(=O)C1=CC=C(O)C(O)=C1O XLBGWOVCPLFKCQ-UHFFFAOYSA-N 0.000 description 1
- WHOZNOZYMBRCBL-OUKQBFOZSA-N (2E)-2-Tetradecenal Chemical compound CCCCCCCCCCC\C=C\C=O WHOZNOZYMBRCBL-OUKQBFOZSA-N 0.000 description 1
- RYNQKSJRFHJZTK-UHFFFAOYSA-N (3-methoxy-3-methylbutyl) acetate Chemical compound COC(C)(C)CCOC(C)=O RYNQKSJRFHJZTK-UHFFFAOYSA-N 0.000 description 1
- ZRDYULMDEGRWRC-UHFFFAOYSA-N (4-hydroxyphenyl)-(2,3,4-trihydroxyphenyl)methanone Chemical compound C1=CC(O)=CC=C1C(=O)C1=CC=C(O)C(O)=C1O ZRDYULMDEGRWRC-UHFFFAOYSA-N 0.000 description 1
- FFJCNSLCJOQHKM-CLFAGFIQSA-N (z)-1-[(z)-octadec-9-enoxy]octadec-9-ene Chemical compound CCCCCCCC\C=C/CCCCCCCCOCCCCCCCC\C=C/CCCCCCCC FFJCNSLCJOQHKM-CLFAGFIQSA-N 0.000 description 1
- QXSZNDIIPUOQMB-UHFFFAOYSA-N 1,1,2,2-tetrabromoethane Chemical compound BrC(Br)C(Br)Br QXSZNDIIPUOQMB-UHFFFAOYSA-N 0.000 description 1
- ZORQXIQZAOLNGE-UHFFFAOYSA-N 1,1-difluorocyclohexane Chemical compound FC1(F)CCCCC1 ZORQXIQZAOLNGE-UHFFFAOYSA-N 0.000 description 1
- QFQZKISCBJKVHI-UHFFFAOYSA-N 1,2,3,4,5,6-hexabromocyclohexane Chemical compound BrC1C(Br)C(Br)C(Br)C(Br)C1Br QFQZKISCBJKVHI-UHFFFAOYSA-N 0.000 description 1
- HGRZLIGHKHRTRE-UHFFFAOYSA-N 1,2,3,4-tetrabromobutane Chemical compound BrCC(Br)C(Br)CBr HGRZLIGHKHRTRE-UHFFFAOYSA-N 0.000 description 1
- ZLHVUJZMRIVALY-UHFFFAOYSA-N 1,2-bis(tribromomethyl)benzene Chemical compound BrC(Br)(Br)C1=CC=CC=C1C(Br)(Br)Br ZLHVUJZMRIVALY-UHFFFAOYSA-N 0.000 description 1
- WEWXCIOGPKAVFO-UHFFFAOYSA-N 1,2-bis(trichloromethyl)benzene Chemical compound ClC(Cl)(Cl)C1=CC=CC=C1C(Cl)(Cl)Cl WEWXCIOGPKAVFO-UHFFFAOYSA-N 0.000 description 1
- JIHQDMXYYFUGFV-UHFFFAOYSA-N 1,3,5-triazine Chemical class C1=NC=NC=N1 JIHQDMXYYFUGFV-UHFFFAOYSA-N 0.000 description 1
- BGJSXRVXTHVRSN-UHFFFAOYSA-N 1,3,5-trioxane Chemical compound C1OCOCO1 BGJSXRVXTHVRSN-UHFFFAOYSA-N 0.000 description 1
- NZUPFZNVGSWLQC-UHFFFAOYSA-N 1,3,5-tris(2,3-dibromopropyl)-1,3,5-triazinane-2,4,6-trione Chemical compound BrCC(Br)CN1C(=O)N(CC(Br)CBr)C(=O)N(CC(Br)CBr)C1=O NZUPFZNVGSWLQC-UHFFFAOYSA-N 0.000 description 1
- FQXOOGHQVPKHPG-UHFFFAOYSA-N 1,3-diazinane-2,4,5-trione Chemical compound O=C1NCC(=O)C(=O)N1 FQXOOGHQVPKHPG-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- IDTYDQPRLOBBTP-UHFFFAOYSA-N 1-[(e)-benzenesulfonyl(diazo)methyl]sulfonyl-2,3,4-triethylbenzene Chemical compound CCC1=C(CC)C(CC)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1=CC=CC=C1 IDTYDQPRLOBBTP-UHFFFAOYSA-N 0.000 description 1
- VRJMNRDMTITXBQ-UHFFFAOYSA-N 1-[(e)-benzenesulfonyl(diazo)methyl]sulfonyl-2-fluorobenzene Chemical compound FC1=CC=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1=CC=CC=C1 VRJMNRDMTITXBQ-UHFFFAOYSA-N 0.000 description 1
- WZHXDRXXWWSRNJ-UHFFFAOYSA-N 1-[(e)-benzenesulfonyl(diazo)methyl]sulfonyl-3-fluorobenzene Chemical compound FC1=CC=CC(S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C=2C=CC=CC=2)=C1 WZHXDRXXWWSRNJ-UHFFFAOYSA-N 0.000 description 1
- QMHZUTFUNFWCAZ-UHFFFAOYSA-N 1-[(e)-benzenesulfonyl(diazo)methyl]sulfonyl-4-fluorobenzene Chemical compound C1=CC(F)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1=CC=CC=C1 QMHZUTFUNFWCAZ-UHFFFAOYSA-N 0.000 description 1
- BTSCRIOTQMCBSG-UHFFFAOYSA-N 1-[(e)-cyclohexylsulfonyl(diazo)methyl]sulfonyl-2,3,4-triethylbenzene Chemical compound CCC1=C(CC)C(CC)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCCC1 BTSCRIOTQMCBSG-UHFFFAOYSA-N 0.000 description 1
- NNTVKKVXIRRJBT-UHFFFAOYSA-N 1-[(e)-cyclohexylsulfonyl(diazo)methyl]sulfonyl-2-(trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCCC1 NNTVKKVXIRRJBT-UHFFFAOYSA-N 0.000 description 1
- LRTOSKQWLJCIMC-UHFFFAOYSA-N 1-[(e)-cyclohexylsulfonyl(diazo)methyl]sulfonyl-2-fluorobenzene Chemical compound FC1=CC=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCCC1 LRTOSKQWLJCIMC-UHFFFAOYSA-N 0.000 description 1
- OJBXIOQRCNRVSH-UHFFFAOYSA-N 1-[(e)-cyclohexylsulfonyl(diazo)methyl]sulfonyl-2-methoxybenzene Chemical compound COC1=CC=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCCC1 OJBXIOQRCNRVSH-UHFFFAOYSA-N 0.000 description 1
- DJNJYHICXLORPJ-UHFFFAOYSA-N 1-[(e)-cyclohexylsulfonyl(diazo)methyl]sulfonyl-3-(trifluoromethoxy)benzene Chemical compound FC(F)(F)OC1=CC=CC(S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C2CCCCC2)=C1 DJNJYHICXLORPJ-UHFFFAOYSA-N 0.000 description 1
- IJNHUZXKPKRQJI-UHFFFAOYSA-N 1-[(e)-cyclohexylsulfonyl(diazo)methyl]sulfonyl-3-(trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=CC(S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C2CCCCC2)=C1 IJNHUZXKPKRQJI-UHFFFAOYSA-N 0.000 description 1
- FBBSWONCJGTYDR-UHFFFAOYSA-N 1-[(e)-cyclohexylsulfonyl(diazo)methyl]sulfonyl-3-methoxybenzene Chemical compound COC1=CC=CC(S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C2CCCCC2)=C1 FBBSWONCJGTYDR-UHFFFAOYSA-N 0.000 description 1
- OACVOEACKCXTRO-UHFFFAOYSA-N 1-[(e)-cyclohexylsulfonyl(diazo)methyl]sulfonyl-4-(trifluoromethoxy)benzene Chemical compound C1=CC(OC(F)(F)F)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCCC1 OACVOEACKCXTRO-UHFFFAOYSA-N 0.000 description 1
- AKPSGEMFHXOCLL-UHFFFAOYSA-N 1-[(e)-cyclohexylsulfonyl(diazo)methyl]sulfonyl-4-(trifluoromethyl)benzene Chemical compound C1=CC(C(F)(F)F)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCCC1 AKPSGEMFHXOCLL-UHFFFAOYSA-N 0.000 description 1
- JQQNLYXEBGRFSO-UHFFFAOYSA-N 1-[(e)-cyclohexylsulfonyl(diazo)methyl]sulfonyl-4-fluorobenzene Chemical compound C1=CC(F)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCCC1 JQQNLYXEBGRFSO-UHFFFAOYSA-N 0.000 description 1
- DSQMBAOLQJPAFO-UHFFFAOYSA-N 1-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-2,3,4-triethylbenzene Chemical compound CCC1=C(CC)C(CC)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCC1 DSQMBAOLQJPAFO-UHFFFAOYSA-N 0.000 description 1
- WTRMDRRWNUHZMZ-UHFFFAOYSA-N 1-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-2,3,4-trimethylbenzene Chemical compound CC1=C(C)C(C)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCC1 WTRMDRRWNUHZMZ-UHFFFAOYSA-N 0.000 description 1
- GGVNCWFELLUVTD-UHFFFAOYSA-N 1-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-2-(trifluoromethoxy)benzene Chemical compound FC(F)(F)OC1=CC=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCC1 GGVNCWFELLUVTD-UHFFFAOYSA-N 0.000 description 1
- MLAAVDFDASQQPA-UHFFFAOYSA-N 1-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-2-(trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCC1 MLAAVDFDASQQPA-UHFFFAOYSA-N 0.000 description 1
- PTUIGOFPXHSAPJ-UHFFFAOYSA-N 1-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-2-fluorobenzene Chemical compound FC1=CC=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCC1 PTUIGOFPXHSAPJ-UHFFFAOYSA-N 0.000 description 1
- XLEGABJNFGGCMB-UHFFFAOYSA-N 1-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-2-methoxybenzene Chemical compound COC1=CC=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCC1 XLEGABJNFGGCMB-UHFFFAOYSA-N 0.000 description 1
- SXGMCKVTICMABI-UHFFFAOYSA-N 1-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-3-(trifluoromethoxy)benzene Chemical compound FC(F)(F)OC1=CC=CC(S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C2CCCC2)=C1 SXGMCKVTICMABI-UHFFFAOYSA-N 0.000 description 1
- VXGUWMURHPHFOV-UHFFFAOYSA-N 1-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-3-(trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=CC(S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C2CCCC2)=C1 VXGUWMURHPHFOV-UHFFFAOYSA-N 0.000 description 1
- ODIPRGFRAUTSSO-UHFFFAOYSA-N 1-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-3-fluorobenzene Chemical compound FC1=CC=CC(S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C2CCCC2)=C1 ODIPRGFRAUTSSO-UHFFFAOYSA-N 0.000 description 1
- LOFZUNITXHFLMP-UHFFFAOYSA-N 1-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-3-methoxybenzene Chemical compound COC1=CC=CC(S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C2CCCC2)=C1 LOFZUNITXHFLMP-UHFFFAOYSA-N 0.000 description 1
- IEKUNYSKOFRUHD-UHFFFAOYSA-N 1-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-4-(trifluoromethoxy)benzene Chemical compound C1=CC(OC(F)(F)F)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCC1 IEKUNYSKOFRUHD-UHFFFAOYSA-N 0.000 description 1
- UFUQSHZJMXUALP-UHFFFAOYSA-N 1-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-4-fluorobenzene Chemical compound C1=CC(F)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCC1 UFUQSHZJMXUALP-UHFFFAOYSA-N 0.000 description 1
- NJHIZYZZMBCPRE-UHFFFAOYSA-N 1-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-4-methoxybenzene Chemical compound C1=CC(OC)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCC1 NJHIZYZZMBCPRE-UHFFFAOYSA-N 0.000 description 1
- BOGFHOWTVGAYFK-UHFFFAOYSA-N 1-[2-(2-propoxyethoxy)ethoxy]propane Chemical compound CCCOCCOCCOCCC BOGFHOWTVGAYFK-UHFFFAOYSA-N 0.000 description 1
- MPZONYDWWZNHTN-UHFFFAOYSA-N 1-[benzenesulfonyl(diazo)methyl]sulfonyl-2,3,4-trimethylbenzene Chemical compound CC1=C(C)C(C)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1=CC=CC=C1 MPZONYDWWZNHTN-UHFFFAOYSA-N 0.000 description 1
- ZRYZLLDGNCBYPU-UHFFFAOYSA-N 1-[benzenesulfonyl(diazo)methyl]sulfonyl-2-methoxybenzene Chemical compound COC1=CC=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1=CC=CC=C1 ZRYZLLDGNCBYPU-UHFFFAOYSA-N 0.000 description 1
- PZHWSUNJDSVCRN-UHFFFAOYSA-N 1-[benzenesulfonyl(diazo)methyl]sulfonyl-3-methoxybenzene Chemical compound COC1=CC=CC(S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C=2C=CC=CC=2)=C1 PZHWSUNJDSVCRN-UHFFFAOYSA-N 0.000 description 1
- NVBFXSOUFCFTPA-UHFFFAOYSA-N 1-[cyclohexylsulfonyl(diazo)methyl]sulfonyl-2,3,4-trimethylbenzene Chemical compound CC1=C(C)C(C)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCCC1 NVBFXSOUFCFTPA-UHFFFAOYSA-N 0.000 description 1
- XVPQJGVKKBHNAR-UHFFFAOYSA-N 1-[cyclohexylsulfonyl(diazo)methyl]sulfonyl-4-methoxybenzene Chemical compound C1=CC(OC)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCCC1 XVPQJGVKKBHNAR-UHFFFAOYSA-N 0.000 description 1
- OESYNCIYSBWEQV-UHFFFAOYSA-N 1-[diazo-(2,4-dimethylphenyl)sulfonylmethyl]sulfonyl-2,4-dimethylbenzene Chemical compound CC1=CC(C)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1=CC=C(C)C=C1C OESYNCIYSBWEQV-UHFFFAOYSA-N 0.000 description 1
- YYZOIOMXFRIKKO-UHFFFAOYSA-N 1-[diazo-(2-methoxyphenyl)sulfonylmethyl]sulfonyl-2-methoxybenzene Chemical compound COC1=CC=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1=CC=CC=C1OC YYZOIOMXFRIKKO-UHFFFAOYSA-N 0.000 description 1
- SLVLAUFYMXMTDX-UHFFFAOYSA-N 1-[diazo-(3-methoxyphenyl)sulfonylmethyl]sulfonyl-3-methoxybenzene Chemical compound COC1=CC=CC(S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C=2C=C(OC)C=CC=2)=C1 SLVLAUFYMXMTDX-UHFFFAOYSA-N 0.000 description 1
- NRIGUVWTNMVMCA-UHFFFAOYSA-N 1-[diazo-(4-methoxyphenyl)sulfonylmethyl]sulfonyl-4-methoxybenzene Chemical compound C1=CC(OC)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1=CC=C(OC)C=C1 NRIGUVWTNMVMCA-UHFFFAOYSA-N 0.000 description 1
- CZSGULMSQFIXDD-UHFFFAOYSA-N 1-chloro-2-[(e)-cyclohexylsulfonyl(diazo)methyl]sulfonylbenzene Chemical compound ClC1=CC=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCCC1 CZSGULMSQFIXDD-UHFFFAOYSA-N 0.000 description 1
- WNXKLXIJVBRLBW-UHFFFAOYSA-N 1-chloro-3-[(e)-cyclohexylsulfonyl(diazo)methyl]sulfonylbenzene Chemical compound ClC1=CC=CC(S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C2CCCCC2)=C1 WNXKLXIJVBRLBW-UHFFFAOYSA-N 0.000 description 1
- GTXQMRKYEDJJBR-UHFFFAOYSA-N 1-chloro-3-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonylbenzene Chemical compound ClC1=CC=CC(S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C2CCCC2)=C1 GTXQMRKYEDJJBR-UHFFFAOYSA-N 0.000 description 1
- NBBCNYOHRIFTPP-UHFFFAOYSA-N 1-chloro-4-[(e)-cyclohexylsulfonyl(diazo)methyl]sulfonylbenzene Chemical compound C1=CC(Cl)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCCC1 NBBCNYOHRIFTPP-UHFFFAOYSA-N 0.000 description 1
- LPWJJIOMGWVUFI-UHFFFAOYSA-N 1-chloro-4-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonylbenzene Chemical compound C1=CC(Cl)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCC1 LPWJJIOMGWVUFI-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- 238000001644 13C nuclear magnetic resonance spectroscopy Methods 0.000 description 1
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 1
- 150000008081 1H-pyrimidin-4-ones Chemical class 0.000 description 1
- DNCYBUMDUBHIJZ-UHFFFAOYSA-N 1h-pyrimidin-6-one Chemical compound O=C1C=CN=CN1 DNCYBUMDUBHIJZ-UHFFFAOYSA-N 0.000 description 1
- VUBUXALTYMBEQO-UHFFFAOYSA-N 2,2,3,3,3-pentafluoro-1-phenylpropan-1-one Chemical compound FC(F)(F)C(F)(F)C(=O)C1=CC=CC=C1 VUBUXALTYMBEQO-UHFFFAOYSA-N 0.000 description 1
- HTQNYBBTZSBWKL-UHFFFAOYSA-N 2,3,4-trihydroxbenzophenone Chemical compound OC1=C(O)C(O)=CC=C1C(=O)C1=CC=CC=C1 HTQNYBBTZSBWKL-UHFFFAOYSA-N 0.000 description 1
- JTTIOYHBNXDJOD-UHFFFAOYSA-N 2,4,6-triaminopyrimidine Chemical compound NC1=CC(N)=NC(N)=N1 JTTIOYHBNXDJOD-UHFFFAOYSA-N 0.000 description 1
- CCZNFGBAORROPB-UHFFFAOYSA-N 2,4,6-tris(dibromomethyl)-1,3,5-triazine Chemical compound BrC(Br)C1=NC(C(Br)Br)=NC(C(Br)Br)=N1 CCZNFGBAORROPB-UHFFFAOYSA-N 0.000 description 1
- URJAUSYMVIZTHC-UHFFFAOYSA-N 2,4,6-tris(tribromomethyl)-1,3,5-triazine Chemical compound BrC(Br)(Br)C1=NC(C(Br)(Br)Br)=NC(C(Br)(Br)Br)=N1 URJAUSYMVIZTHC-UHFFFAOYSA-N 0.000 description 1
- DXUMYHZTYVPBEZ-UHFFFAOYSA-N 2,4,6-tris(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 DXUMYHZTYVPBEZ-UHFFFAOYSA-N 0.000 description 1
- KUFFULVDNCHOFZ-UHFFFAOYSA-N 2,4-xylenol Chemical compound CC1=CC=C(O)C(C)=C1 KUFFULVDNCHOFZ-UHFFFAOYSA-N 0.000 description 1
- JEARLRMCZMBVFC-UHFFFAOYSA-N 2,5-dimethoxy-1h-pyrimidin-6-one Chemical compound COC1=CN=C(OC)N=C1O JEARLRMCZMBVFC-UHFFFAOYSA-N 0.000 description 1
- XOJPOIGPYBYDJF-UHFFFAOYSA-N 2,5-dimethoxypyrimidin-4-amine Chemical compound COC1=CN=C(OC)N=C1N XOJPOIGPYBYDJF-UHFFFAOYSA-N 0.000 description 1
- HMOMINHDSCYPKH-UHFFFAOYSA-N 2,5-dimethyl-1h-pyrimidin-6-one Chemical compound CC1=NC=C(C)C(=O)N1 HMOMINHDSCYPKH-UHFFFAOYSA-N 0.000 description 1
- UXKNAXNFIYFMIB-UHFFFAOYSA-N 2,5-dimethylpyrimidin-4-amine Chemical compound CC1=CN=C(C)N=C1N UXKNAXNFIYFMIB-UHFFFAOYSA-N 0.000 description 1
- LNTJJKHTAZFVJJ-UHFFFAOYSA-N 2,6-dimethoxypyrimidin-4-amine Chemical compound COC1=CC(N)=NC(OC)=N1 LNTJJKHTAZFVJJ-UHFFFAOYSA-N 0.000 description 1
- UQFHLJKWYIJISA-UHFFFAOYSA-N 2,6-dimethyl-1h-pyrimidin-4-one Chemical compound CC1=CC(O)=NC(C)=N1 UQFHLJKWYIJISA-UHFFFAOYSA-N 0.000 description 1
- BJJDXAFKCKSLTE-UHFFFAOYSA-N 2,6-dimethylpyrimidin-4-amine Chemical compound CC1=CC(N)=NC(C)=N1 BJJDXAFKCKSLTE-UHFFFAOYSA-N 0.000 description 1
- SFRDXVJWXWOTEW-UHFFFAOYSA-N 2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)CO SFRDXVJWXWOTEW-UHFFFAOYSA-N 0.000 description 1
- AUFJTVGCSJNQIF-UHFFFAOYSA-N 2-Amino-4,6-dihydroxypyrimidine Chemical compound NC1=NC(O)=CC(=O)N1 AUFJTVGCSJNQIF-UHFFFAOYSA-N 0.000 description 1
- GHCFWKFREBNSPC-UHFFFAOYSA-N 2-Amino-4-methylpyrimidine Chemical compound CC1=CC=NC(N)=N1 GHCFWKFREBNSPC-UHFFFAOYSA-N 0.000 description 1
- JODRRPJMQDFCBJ-UHFFFAOYSA-N 2-Hydroxy-4-methylbenzaldehyde Chemical compound CC1=CC=C(C=O)C(O)=C1 JODRRPJMQDFCBJ-UHFFFAOYSA-N 0.000 description 1
- PKZJLOCLABXVMC-UHFFFAOYSA-N 2-Methoxybenzaldehyde Chemical compound COC1=CC=CC=C1C=O PKZJLOCLABXVMC-UHFFFAOYSA-N 0.000 description 1
- DFQNAODLWREVJO-UHFFFAOYSA-N 2-[(e)-benzenesulfonyl(diazo)methyl]sulfonyl-1,3,5-triethylbenzene Chemical compound CCC1=CC(CC)=CC(CC)=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1=CC=CC=C1 DFQNAODLWREVJO-UHFFFAOYSA-N 0.000 description 1
- UOWAAELCFIOLNF-UHFFFAOYSA-N 2-[(e)-benzenesulfonyl(diazo)methyl]sulfonyl-1,3,5-trimethylbenzene Chemical compound CC1=CC(C)=CC(C)=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1=CC=CC=C1 UOWAAELCFIOLNF-UHFFFAOYSA-N 0.000 description 1
- FKUSJHSSAKCMSR-UHFFFAOYSA-N 2-[(e)-cyclohexylsulfonyl(diazo)methyl]sulfonyl-1,3,5-trimethylbenzene Chemical compound CC1=CC(C)=CC(C)=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCCC1 FKUSJHSSAKCMSR-UHFFFAOYSA-N 0.000 description 1
- BWGFSJOYQLKRNP-UHFFFAOYSA-N 2-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-1,3,5-triethylbenzene Chemical compound CCC1=CC(CC)=CC(CC)=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCC1 BWGFSJOYQLKRNP-UHFFFAOYSA-N 0.000 description 1
- SRLIQJWKKGRHQG-UHFFFAOYSA-N 2-[(e)-cyclopentylsulfonyl(diazo)methyl]sulfonyl-1,3,5-trimethylbenzene Chemical compound CC1=CC(C)=CC(C)=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCC1 SRLIQJWKKGRHQG-UHFFFAOYSA-N 0.000 description 1
- WEHRHTLIUJOHKE-UHFFFAOYSA-N 2-[(e)-diazo-(2,4-dimethylphenyl)sulfonylmethyl]sulfonyl-1,3,5-trimethylbenzene Chemical compound CC1=CC(C)=CC=C1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1=C(C)C=C(C)C=C1C WEHRHTLIUJOHKE-UHFFFAOYSA-N 0.000 description 1
- LJBWJFWNFUKAGS-UHFFFAOYSA-N 2-[bis(2-hydroxyphenyl)methyl]phenol Chemical class OC1=CC=CC=C1C(C=1C(=CC=CC=1)O)C1=CC=CC=C1O LJBWJFWNFUKAGS-UHFFFAOYSA-N 0.000 description 1
- XQCZBXHVTFVIFE-UHFFFAOYSA-N 2-amino-4-hydroxypyrimidine Chemical compound NC1=NC=CC(O)=N1 XQCZBXHVTFVIFE-UHFFFAOYSA-N 0.000 description 1
- ZMXIVNPDKWXQBH-UHFFFAOYSA-N 2-amino-5-hydroxy-1h-pyrimidin-6-one Chemical compound NC1=NC=C(O)C(=O)N1 ZMXIVNPDKWXQBH-UHFFFAOYSA-N 0.000 description 1
- NVYMOVCPYONOSF-UHFFFAOYSA-N 2-aminopyrimidin-5-ol Chemical compound NC1=NC=C(O)C=N1 NVYMOVCPYONOSF-UHFFFAOYSA-N 0.000 description 1
- NDOPHXWIAZIXPR-UHFFFAOYSA-N 2-bromobenzaldehyde Chemical compound BrC1=CC=CC=C1C=O NDOPHXWIAZIXPR-UHFFFAOYSA-N 0.000 description 1
- VADKRMSMGWJZCF-UHFFFAOYSA-N 2-bromophenol Chemical compound OC1=CC=CC=C1Br VADKRMSMGWJZCF-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- CVXYHECBHMSYDW-UHFFFAOYSA-N 2-butoxyethanol 1-methoxypropan-2-ol Chemical compound COCC(C)O.CCCCOCCO CVXYHECBHMSYDW-UHFFFAOYSA-N 0.000 description 1
- ISPYQTSUDJAMAB-UHFFFAOYSA-N 2-chlorophenol Chemical compound OC1=CC=CC=C1Cl ISPYQTSUDJAMAB-UHFFFAOYSA-N 0.000 description 1
- UGTLUFFXPPWXTO-UHFFFAOYSA-N 2-cyclohexyl-4-[(3-cyclohexyl-4-hydroxy-5-methylphenyl)-(2-hydroxyphenyl)methyl]-6-methylphenol Chemical compound OC=1C(C)=CC(C(C=2C=C(C(O)=C(C)C=2)C2CCCCC2)C=2C(=CC=CC=2)O)=CC=1C1CCCCC1 UGTLUFFXPPWXTO-UHFFFAOYSA-N 0.000 description 1
- MNTAGVBVGOTZSS-UHFFFAOYSA-N 2-cyclohexyl-4-[(3-cyclohexyl-4-hydroxy-5-methylphenyl)-(3-hydroxyphenyl)methyl]-6-methylphenol Chemical compound OC=1C(C)=CC(C(C=2C=C(O)C=CC=2)C=2C=C(C(O)=C(C)C=2)C2CCCCC2)=CC=1C1CCCCC1 MNTAGVBVGOTZSS-UHFFFAOYSA-N 0.000 description 1
- YBEBOWPOGZFUTF-UHFFFAOYSA-N 2-cyclohexyl-4-[(3-cyclohexyl-4-hydroxyphenyl)-(2-hydroxyphenyl)methyl]phenol Chemical compound OC1=CC=CC=C1C(C=1C=C(C(O)=CC=1)C1CCCCC1)C1=CC=C(O)C(C2CCCCC2)=C1 YBEBOWPOGZFUTF-UHFFFAOYSA-N 0.000 description 1
- LKLREKOGUCIQMG-UHFFFAOYSA-N 2-cyclohexyl-4-[(3-cyclohexyl-4-hydroxyphenyl)-(3-hydroxyphenyl)methyl]phenol Chemical compound OC1=CC=CC(C(C=2C=C(C(O)=CC=2)C2CCCCC2)C=2C=C(C(O)=CC=2)C2CCCCC2)=C1 LKLREKOGUCIQMG-UHFFFAOYSA-N 0.000 description 1
- HPUBZSPPCQQOIB-UHFFFAOYSA-N 2-cyclohexyl-4-[(3-cyclohexyl-4-hydroxyphenyl)-(4-hydroxyphenyl)methyl]phenol Chemical compound C1=CC(O)=CC=C1C(C=1C=C(C(O)=CC=1)C1CCCCC1)C1=CC=C(O)C(C2CCCCC2)=C1 HPUBZSPPCQQOIB-UHFFFAOYSA-N 0.000 description 1
- AFIAIUIEAKCWCD-UHFFFAOYSA-N 2-cyclohexyl-4-[(5-cyclohexyl-4-hydroxy-2-methylphenyl)-(2-hydroxyphenyl)methyl]-5-methylphenol Chemical compound CC1=CC(O)=C(C2CCCCC2)C=C1C(C=1C(=CC(O)=C(C2CCCCC2)C=1)C)C1=CC=CC=C1O AFIAIUIEAKCWCD-UHFFFAOYSA-N 0.000 description 1
- XYIJEFGAYUMNPF-UHFFFAOYSA-N 2-cyclohexyl-4-[(5-cyclohexyl-4-hydroxy-2-methylphenyl)-(3-hydroxyphenyl)methyl]-5-methylphenol Chemical compound CC1=CC(O)=C(C2CCCCC2)C=C1C(C=1C(=CC(O)=C(C2CCCCC2)C=1)C)C1=CC=CC(O)=C1 XYIJEFGAYUMNPF-UHFFFAOYSA-N 0.000 description 1
- TUBNHXBTFDDYPI-UHFFFAOYSA-N 2-cyclohexyl-4-[(5-cyclohexyl-4-hydroxy-2-methylphenyl)-(4-hydroxyphenyl)methyl]-5-methylphenol Chemical compound CC1=CC(O)=C(C2CCCCC2)C=C1C(C=1C(=CC(O)=C(C2CCCCC2)C=1)C)C1=CC=C(O)C=C1 TUBNHXBTFDDYPI-UHFFFAOYSA-N 0.000 description 1
- ATANJDDBSMUMAH-UHFFFAOYSA-N 2-cyclohexyl-6-[(3-cyclohexyl-2-hydroxyphenyl)-(3-hydroxyphenyl)methyl]phenol Chemical compound OC1=CC=CC(C(C=2C(=C(C3CCCCC3)C=CC=2)O)C=2C(=C(C3CCCCC3)C=CC=2)O)=C1 ATANJDDBSMUMAH-UHFFFAOYSA-N 0.000 description 1
- RIILRBVOKGATOA-UHFFFAOYSA-N 2-cyclohexyl-6-[(3-cyclohexyl-2-hydroxyphenyl)-(4-hydroxyphenyl)methyl]phenol Chemical compound C1=CC(O)=CC=C1C(C=1C(=C(C2CCCCC2)C=CC=1)O)C1=CC=CC(C2CCCCC2)=C1O RIILRBVOKGATOA-UHFFFAOYSA-N 0.000 description 1
- 229940093475 2-ethoxyethanol Drugs 0.000 description 1
- HFHFGHLXUCOHLN-UHFFFAOYSA-N 2-fluorophenol Chemical compound OC1=CC=CC=C1F HFHFGHLXUCOHLN-UHFFFAOYSA-N 0.000 description 1
- WHNIMRYJAUUVQJ-UHFFFAOYSA-N 2-hydroxy-1,2-diphenylethanone;4-methylbenzenesulfonic acid Chemical class CC1=CC=C(S(O)(=O)=O)C=C1.C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 WHNIMRYJAUUVQJ-UHFFFAOYSA-N 0.000 description 1
- NTCCNERMXRIPTR-UHFFFAOYSA-N 2-hydroxy-1-naphthaldehyde Chemical compound C1=CC=CC2=C(C=O)C(O)=CC=C21 NTCCNERMXRIPTR-UHFFFAOYSA-N 0.000 description 1
- KQDJTBPASNJQFQ-UHFFFAOYSA-N 2-iodophenol Chemical compound OC1=CC=CC=C1I KQDJTBPASNJQFQ-UHFFFAOYSA-N 0.000 description 1
- CRBJBYGJVIBWIY-UHFFFAOYSA-N 2-isopropylphenol Chemical compound CC(C)C1=CC=CC=C1O CRBJBYGJVIBWIY-UHFFFAOYSA-N 0.000 description 1
- CRWNQZTZTZWPOF-UHFFFAOYSA-N 2-methyl-4-phenylpyridine Chemical compound C1=NC(C)=CC(C=2C=CC=CC=2)=C1 CRWNQZTZTZWPOF-UHFFFAOYSA-N 0.000 description 1
- 125000001216 2-naphthoyl group Chemical group C1=C(C=CC2=CC=CC=C12)C(=O)* 0.000 description 1
- IQUPABOKLQSFBK-UHFFFAOYSA-N 2-nitrophenol Chemical compound OC1=CC=CC=C1[N+]([O-])=O IQUPABOKLQSFBK-UHFFFAOYSA-N 0.000 description 1
- YEYKMVJDLWJFOA-UHFFFAOYSA-N 2-propoxyethanol Chemical compound CCCOCCO YEYKMVJDLWJFOA-UHFFFAOYSA-N 0.000 description 1
- PCYGLFXKCBFGPC-UHFFFAOYSA-N 3,4-Dihydroxy hydroxymethyl benzene Natural products OCC1=CC=C(O)C(O)=C1 PCYGLFXKCBFGPC-UHFFFAOYSA-N 0.000 description 1
- CWLKGDAVCFYWJK-UHFFFAOYSA-N 3-aminophenol Chemical compound NC1=CC=CC(O)=C1 CWLKGDAVCFYWJK-UHFFFAOYSA-N 0.000 description 1
- 229940018563 3-aminophenol Drugs 0.000 description 1
- BMYNFMYTOJXKLE-UHFFFAOYSA-N 3-azaniumyl-2-hydroxypropanoate Chemical compound NCC(O)C(O)=O BMYNFMYTOJXKLE-UHFFFAOYSA-N 0.000 description 1
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 1
- WDOLTPGNWTYNIR-UHFFFAOYSA-N 3-nitro-4-(2-phenylethyl)benzenesulfonic acid Chemical compound [N+](=O)([O-])C1=C(CCC2=CC=CC=C2)C=CC(=C1)S(=O)(=O)O WDOLTPGNWTYNIR-UHFFFAOYSA-N 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
- PPAULTVPKLVLII-UHFFFAOYSA-N 4,5-diaminopyrimidine Chemical compound NC1=CN=CN=C1N PPAULTVPKLVLII-UHFFFAOYSA-N 0.000 description 1
- NFVBIQLNBUFUPN-UHFFFAOYSA-N 4,5-dihydroxy-1h-pyrimidin-6-one Chemical compound OC1=NC=NC(O)=C1O NFVBIQLNBUFUPN-UHFFFAOYSA-N 0.000 description 1
- FNCVECQZXCCHJM-UHFFFAOYSA-N 4,5-dimethoxypyrimidin-2-amine Chemical compound COC1=CN=C(N)N=C1OC FNCVECQZXCCHJM-UHFFFAOYSA-N 0.000 description 1
- DUFGYCAXVIUXIP-UHFFFAOYSA-N 4,6-dihydroxypyrimidine Chemical compound OC1=CC(O)=NC=N1 DUFGYCAXVIUXIP-UHFFFAOYSA-N 0.000 description 1
- OVHHLJFHCUVHRI-UHFFFAOYSA-N 4,6-dimethoxy-1h-pyrimidin-2-one Chemical compound COC1=CC(OC)=NC(O)=N1 OVHHLJFHCUVHRI-UHFFFAOYSA-N 0.000 description 1
- WHEQVHAIRSPYDK-UHFFFAOYSA-N 4,6-dimethyl-1h-pyrimidin-2-one Chemical compound CC1=CC(C)=NC(O)=N1 WHEQVHAIRSPYDK-UHFFFAOYSA-N 0.000 description 1
- NBLFJUWXERDUEN-UHFFFAOYSA-N 4-[(2,3,4-trihydroxyphenyl)methyl]benzene-1,2,3-triol Chemical compound OC1=C(O)C(O)=CC=C1CC1=CC=C(O)C(O)=C1O NBLFJUWXERDUEN-UHFFFAOYSA-N 0.000 description 1
- FNFYXIMJKWENNK-UHFFFAOYSA-N 4-[(2,4-dihydroxyphenyl)methyl]benzene-1,3-diol Chemical compound OC1=CC(O)=CC=C1CC1=CC=C(O)C=C1O FNFYXIMJKWENNK-UHFFFAOYSA-N 0.000 description 1
- YNICUQBUXHBYCH-UHFFFAOYSA-N 4-[(4-hydroxy-2,5-dimethylphenyl)-(2-hydroxyphenyl)methyl]-2,5-dimethylphenol Chemical compound C1=C(O)C(C)=CC(C(C=2C(=CC=CC=2)O)C=2C(=CC(O)=C(C)C=2)C)=C1C YNICUQBUXHBYCH-UHFFFAOYSA-N 0.000 description 1
- PFYOKZAFMIWTQL-UHFFFAOYSA-N 4-[(4-hydroxy-2,5-dimethylphenyl)-(4-hydroxyphenyl)methyl]-2,5-dimethylphenol Chemical compound C1=C(O)C(C)=CC(C(C=2C=CC(O)=CC=2)C=2C(=CC(O)=C(C)C=2)C)=C1C PFYOKZAFMIWTQL-UHFFFAOYSA-N 0.000 description 1
- BMCUJWGUNKCREZ-UHFFFAOYSA-N 4-[(4-hydroxy-3,5-dimethylphenyl)-(2-hydroxyphenyl)methyl]-2,6-dimethylphenol Chemical compound CC1=C(O)C(C)=CC(C(C=2C=C(C)C(O)=C(C)C=2)C=2C(=CC=CC=2)O)=C1 BMCUJWGUNKCREZ-UHFFFAOYSA-N 0.000 description 1
- OHKTUDSKDILFJC-UHFFFAOYSA-N 4-[(4-hydroxy-3,5-dimethylphenyl)-(4-hydroxyphenyl)methyl]-2,6-dimethylphenol Chemical compound CC1=C(O)C(C)=CC(C(C=2C=CC(O)=CC=2)C=2C=C(C)C(O)=C(C)C=2)=C1 OHKTUDSKDILFJC-UHFFFAOYSA-N 0.000 description 1
- NYIWTDSCYULDTJ-UHFFFAOYSA-N 4-[2-(2,3,4-trihydroxyphenyl)propan-2-yl]benzene-1,2,3-triol Chemical compound C=1C=C(O)C(O)=C(O)C=1C(C)(C)C1=CC=C(O)C(O)=C1O NYIWTDSCYULDTJ-UHFFFAOYSA-N 0.000 description 1
- YMSALPCDWZMQQG-UHFFFAOYSA-N 4-[2-(2,4-dihydroxyphenyl)propan-2-yl]benzene-1,3-diol Chemical compound C=1C=C(O)C=C(O)C=1C(C)(C)C1=CC=C(O)C=C1O YMSALPCDWZMQQG-UHFFFAOYSA-N 0.000 description 1
- WXYSZTISEJBRHW-UHFFFAOYSA-N 4-[2-[4-[1,1-bis(4-hydroxyphenyl)ethyl]phenyl]propan-2-yl]phenol Chemical compound C=1C=C(C(C)(C=2C=CC(O)=CC=2)C=2C=CC(O)=CC=2)C=CC=1C(C)(C)C1=CC=C(O)C=C1 WXYSZTISEJBRHW-UHFFFAOYSA-N 0.000 description 1
- UWFUILMHBCVIMK-UHFFFAOYSA-N 4-[bis(4-hydroxy-3,5-dimethylphenyl)methyl]benzene-1,2-diol Chemical compound CC1=C(O)C(C)=CC(C(C=2C=C(O)C(O)=CC=2)C=2C=C(C)C(O)=C(C)C=2)=C1 UWFUILMHBCVIMK-UHFFFAOYSA-N 0.000 description 1
- WFCQTAXSWSWIHS-UHFFFAOYSA-N 4-[bis(4-hydroxyphenyl)methyl]phenol Chemical compound C1=CC(O)=CC=C1C(C=1C=CC(O)=CC=1)C1=CC=C(O)C=C1 WFCQTAXSWSWIHS-UHFFFAOYSA-N 0.000 description 1
- NRQDOYYENOERHE-UHFFFAOYSA-N 4-cyclohexyl-2-[(5-cyclohexyl-2-hydroxy-4-methylphenyl)-(4-hydroxyphenyl)methyl]-5-methylphenol Chemical compound CC1=CC(O)=C(C(C=2C=CC(O)=CC=2)C=2C(=CC(C)=C(C3CCCCC3)C=2)O)C=C1C1CCCCC1 NRQDOYYENOERHE-UHFFFAOYSA-N 0.000 description 1
- JRHHJNMASOIRDS-UHFFFAOYSA-N 4-ethoxybenzaldehyde Chemical compound CCOC1=CC=C(C=O)C=C1 JRHHJNMASOIRDS-UHFFFAOYSA-N 0.000 description 1
- FUGYGGDSWSUORM-UHFFFAOYSA-N 4-hydroxystyrene Chemical compound OC1=CC=C(C=C)C=C1 FUGYGGDSWSUORM-UHFFFAOYSA-N 0.000 description 1
- YNXLSFXQTQKQEF-UHFFFAOYSA-N 4-methoxypyrimidin-2-amine Chemical compound COC1=CC=NC(N)=N1 YNXLSFXQTQKQEF-UHFFFAOYSA-N 0.000 description 1
- YXZXRYDYTRYFAF-UHFFFAOYSA-M 4-methylbenzenesulfonate;triphenylsulfanium Chemical compound CC1=CC=C(S([O-])(=O)=O)C=C1.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 YXZXRYDYTRYFAF-UHFFFAOYSA-M 0.000 description 1
- ZNPSUQQXTRRSBM-UHFFFAOYSA-N 4-n-Pentylphenol Chemical compound CCCCCC1=CC=C(O)C=C1 ZNPSUQQXTRRSBM-UHFFFAOYSA-N 0.000 description 1
- IGFHQQFPSIBGKE-UHFFFAOYSA-N 4-nonylphenol Chemical compound CCCCCCCCCC1=CC=C(O)C=C1 IGFHQQFPSIBGKE-UHFFFAOYSA-N 0.000 description 1
- NTDQQZYCCIDJRK-UHFFFAOYSA-N 4-octylphenol Chemical compound CCCCCCCCC1=CC=C(O)C=C1 NTDQQZYCCIDJRK-UHFFFAOYSA-N 0.000 description 1
- POPWHGDFIAXJQZ-UHFFFAOYSA-N 5,6-dimethoxy-1h-pyrimidin-2-one Chemical compound COC1=CN=C(O)N=C1OC POPWHGDFIAXJQZ-UHFFFAOYSA-N 0.000 description 1
- YIJYGMPPWWXWLA-UHFFFAOYSA-N 5,6-dimethyl-1h-pyrimidin-2-one Chemical compound CC=1C=NC(=O)NC=1C YIJYGMPPWWXWLA-UHFFFAOYSA-N 0.000 description 1
- QIPKQEKUQASMNI-UHFFFAOYSA-N 5-hydroxy-1h-pyrimidin-2-one Chemical compound OC1=CN=C(O)N=C1 QIPKQEKUQASMNI-UHFFFAOYSA-N 0.000 description 1
- URCOLWAKIPNTEM-UHFFFAOYSA-N 5-hydroxy-1h-pyrimidin-6-one Chemical compound OC1=CN=CN=C1O URCOLWAKIPNTEM-UHFFFAOYSA-N 0.000 description 1
- UNSHAGBDMCDYEN-UHFFFAOYSA-N 5-methoxy-1h-pyrimidin-2-one Chemical compound COC1=CN=C(O)N=C1 UNSHAGBDMCDYEN-UHFFFAOYSA-N 0.000 description 1
- KAHHAPNRIQLSFT-UHFFFAOYSA-N 5-methoxypyrimidin-2-amine Chemical compound COC1=CN=C(N)N=C1 KAHHAPNRIQLSFT-UHFFFAOYSA-N 0.000 description 1
- UAQOYBJXXMLVQI-UHFFFAOYSA-N 5-methyl-1h-pyrimidin-2-one Chemical compound CC1=CN=C(O)N=C1 UAQOYBJXXMLVQI-UHFFFAOYSA-N 0.000 description 1
- MHZNCOBCMWBPPM-UHFFFAOYSA-N 5-methylpyrimidin-2-amine Chemical compound CC1=CN=C(N)N=C1 MHZNCOBCMWBPPM-UHFFFAOYSA-N 0.000 description 1
- NLLCDONDZDHLCI-UHFFFAOYSA-N 6-amino-5-hydroxy-1h-pyrimidin-2-one Chemical compound NC=1NC(=O)N=CC=1O NLLCDONDZDHLCI-UHFFFAOYSA-N 0.000 description 1
- LNDZXOWGUAIUBG-UHFFFAOYSA-N 6-aminouracil Chemical compound NC1=CC(=O)NC(=O)N1 LNDZXOWGUAIUBG-UHFFFAOYSA-N 0.000 description 1
- XZIIFPSPUDAGJM-UHFFFAOYSA-N 6-chloro-2-n,2-n-diethylpyrimidine-2,4-diamine Chemical compound CCN(CC)C1=NC(N)=CC(Cl)=N1 XZIIFPSPUDAGJM-UHFFFAOYSA-N 0.000 description 1
- BJUBNSLNAGEBDW-UHFFFAOYSA-N 6-hydroxynaphthalene-1-carbaldehyde Chemical class O=CC1=CC=CC2=CC(O)=CC=C21 BJUBNSLNAGEBDW-UHFFFAOYSA-N 0.000 description 1
- AHHHDTLXONDKQF-UHFFFAOYSA-N 6-methyl-1h-pyrimidin-2-one Chemical compound CC1=CC=NC(O)=N1 AHHHDTLXONDKQF-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 229910015900 BF3 Inorganic materials 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- GHWGJMDJBRTAIH-UHFFFAOYSA-N C1(=CC=CC=C1)C(=[N+]=[N-])S(=O)(=O)C1=C(C=C(C=C1CC)CC)CC Chemical compound C1(=CC=CC=C1)C(=[N+]=[N-])S(=O)(=O)C1=C(C=C(C=C1CC)CC)CC GHWGJMDJBRTAIH-UHFFFAOYSA-N 0.000 description 1
- SJTXQOFZBPAXOO-UHFFFAOYSA-N CCS(=O)(=O)O.C(F)(F)F Chemical compound CCS(=O)(=O)O.C(F)(F)F SJTXQOFZBPAXOO-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 244000168525 Croton tiglium Species 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- 102000004190 Enzymes Human genes 0.000 description 1
- 108090000790 Enzymes Proteins 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- PLUBXMRUUVWRLT-UHFFFAOYSA-N Ethyl methanesulfonate Chemical compound CCOS(C)(=O)=O PLUBXMRUUVWRLT-UHFFFAOYSA-N 0.000 description 1
- 239000002841 Lewis acid Substances 0.000 description 1
- PEEHTFAAVSWFBL-UHFFFAOYSA-N Maleimide Chemical compound O=C1NC(=O)C=C1 PEEHTFAAVSWFBL-UHFFFAOYSA-N 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- WRQNANDWMGAFTP-UHFFFAOYSA-N Methylacetoacetic acid Chemical compound COC(=O)CC(C)=O WRQNANDWMGAFTP-UHFFFAOYSA-N 0.000 description 1
- YEHBSYBHJRIVOF-UHFFFAOYSA-N NC1=NC(=CC(=N1)C)C.NC1=NC=C(C(=N1)C)C Chemical compound NC1=NC(=CC(=N1)C)C.NC1=NC=C(C(=N1)C)C YEHBSYBHJRIVOF-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- OUYHTSFXOODGQT-UHFFFAOYSA-N OS(C(F)(F)F)(=O)=O.OS(C(F)(F)F)(=O)=O.OS(C(F)(F)F)(=O)=O.N Chemical compound OS(C(F)(F)F)(=O)=O.OS(C(F)(F)F)(=O)=O.OS(C(F)(F)F)(=O)=O.N OUYHTSFXOODGQT-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229920001213 Polysorbate 20 Polymers 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- CZPWVGJYEJSRLH-UHFFFAOYSA-N Pyrimidine Chemical compound C1=CN=CN=C1 CZPWVGJYEJSRLH-UHFFFAOYSA-N 0.000 description 1
- PDSYUPDPCXPHGH-UHFFFAOYSA-N S1(=O)(=O)CCCC1.BrC1S(=O)(=O)CCC1Br Chemical class S1(=O)(=O)CCCC1.BrC1S(=O)(=O)CCC1Br PDSYUPDPCXPHGH-UHFFFAOYSA-N 0.000 description 1
- HVUMOYIDDBPOLL-XWVZOOPGSA-N Sorbitan monostearate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O HVUMOYIDDBPOLL-XWVZOOPGSA-N 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- SLINHMUFWFWBMU-UHFFFAOYSA-N Triisopropanolamine Chemical compound CC(O)CN(CC(C)O)CC(C)O SLINHMUFWFWBMU-UHFFFAOYSA-N 0.000 description 1
- ISAKRJDGNUQOIC-UHFFFAOYSA-N Uracil Chemical compound O=C1C=CNC(=O)N1 ISAKRJDGNUQOIC-UHFFFAOYSA-N 0.000 description 1
- YPPVLYIFEAESGO-UHFFFAOYSA-N [2,3-bis(methylsulfonyloxy)phenyl] methanesulfonate Chemical compound CS(=O)(=O)OC1=CC=CC(OS(C)(=O)=O)=C1OS(C)(=O)=O YPPVLYIFEAESGO-UHFFFAOYSA-N 0.000 description 1
- DCYQPMGIYRPCBA-UHFFFAOYSA-N [2,3-bis(trifluoromethylsulfonyloxy)phenyl] trifluoromethanesulfonate Chemical compound FC(F)(F)S(=O)(=O)OC1=CC=CC(OS(=O)(=O)C(F)(F)F)=C1OS(=O)(=O)C(F)(F)F DCYQPMGIYRPCBA-UHFFFAOYSA-N 0.000 description 1
- OIHCCWXZFYNOJS-UHFFFAOYSA-N [2,3-bis-(4-methylphenyl)sulfonyloxyphenyl] 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OC1=CC=CC(OS(=O)(=O)C=2C=CC(C)=CC=2)=C1OS(=O)(=O)C1=CC=C(C)C=C1 OIHCCWXZFYNOJS-UHFFFAOYSA-N 0.000 description 1
- QFKJMDYQKVPGNM-UHFFFAOYSA-N [benzenesulfonyl(diazo)methyl]sulfonylbenzene Chemical compound C=1C=CC=CC=1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1=CC=CC=C1 QFKJMDYQKVPGNM-UHFFFAOYSA-N 0.000 description 1
- GLGXSTXZLFQYKJ-UHFFFAOYSA-N [cyclohexylsulfonyl(diazo)methyl]sulfonylcyclohexane Chemical compound C1CCCCC1S(=O)(=O)C(=[N+]=[N-])S(=O)(=O)C1CCCCC1 GLGXSTXZLFQYKJ-UHFFFAOYSA-N 0.000 description 1
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical compound [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 description 1
- XFSBVAOIAHNAPC-WSORPINJSA-N acetylbenzoylaconine Chemical compound O([C@H]1[C@]2(O)C[C@H]3C45[C@@H]6[C@@H]([C@@]([C@H]31)(OC(C)=O)[C@@H](O)[C@@H]2OC)[C@H](OC)C4[C@]([C@@H](C[C@H]5OC)O)(COC)CN6CC)C(=O)C1=CC=CC=C1 XFSBVAOIAHNAPC-WSORPINJSA-N 0.000 description 1
- 239000012190 activator Substances 0.000 description 1
- 125000005073 adamantyl group Chemical group C12(CC3CC(CC(C1)C3)C2)* 0.000 description 1
- 125000005074 adamantylmethyl group Chemical group 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000008346 aqueous phase Substances 0.000 description 1
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- HNYOPLTXPVRDBG-UHFFFAOYSA-N barbituric acid Chemical compound O=C1CC(=O)NC(=O)N1 HNYOPLTXPVRDBG-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 239000000440 bentonite Substances 0.000 description 1
- 229910000278 bentonite Inorganic materials 0.000 description 1
- SVPXDRXYRYOSEX-UHFFFAOYSA-N bentoquatam Chemical compound O.O=[Si]=O.O=[Al]O[Al]=O SVPXDRXYRYOSEX-UHFFFAOYSA-N 0.000 description 1
- 150000003935 benzaldehydes Chemical class 0.000 description 1
- 150000001555 benzenes Chemical class 0.000 description 1
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 1
- 229940092714 benzenesulfonic acid Drugs 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- 125000001584 benzyloxycarbonyl group Chemical group C(=O)(OCC1=CC=CC=C1)* 0.000 description 1
- YXVFYQXJAXKLAK-UHFFFAOYSA-N biphenyl-4-ol Chemical compound C1=CC(O)=CC=C1C1=CC=CC=C1 YXVFYQXJAXKLAK-UHFFFAOYSA-N 0.000 description 1
- WXNRYSGJLQFHBR-UHFFFAOYSA-N bis(2,4-dihydroxyphenyl)methanone Chemical compound OC1=CC(O)=CC=C1C(=O)C1=CC=C(O)C=C1O WXNRYSGJLQFHBR-UHFFFAOYSA-N 0.000 description 1
- OWMVSZAMULFTJU-UHFFFAOYSA-N bis-tris Chemical compound OCCN(CCO)C(CO)(CO)CO OWMVSZAMULFTJU-UHFFFAOYSA-N 0.000 description 1
- 229920001400 block copolymer Polymers 0.000 description 1
- 125000004799 bromophenyl group Chemical group 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- QYJXDIUNDMRLAO-UHFFFAOYSA-N butyl 4-methylbenzenesulfonate Chemical compound CCCCOS(=O)(=O)C1=CC=C(C)C=C1 QYJXDIUNDMRLAO-UHFFFAOYSA-N 0.000 description 1
- LFLBHTZRLVHUQC-UHFFFAOYSA-N butyl methanesulfonate Chemical compound CCCCOS(C)(=O)=O LFLBHTZRLVHUQC-UHFFFAOYSA-N 0.000 description 1
- SEXLAQXMAFCJCO-UHFFFAOYSA-N butyl trifluoromethanesulfonate Chemical compound CCCCOS(=O)(=O)C(F)(F)F SEXLAQXMAFCJCO-UHFFFAOYSA-N 0.000 description 1
- 125000004063 butyryl group Chemical group O=C([*])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
- 239000000920 calcium hydroxide Substances 0.000 description 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- FOCAUTSVDIKZOP-UHFFFAOYSA-N chloroacetic acid Chemical compound OC(=O)CCl FOCAUTSVDIKZOP-UHFFFAOYSA-N 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 238000004581 coalescence Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 150000004292 cyclic ethers Chemical class 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 125000004210 cyclohexylmethyl group Chemical group [H]C([H])(*)C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C1([H])[H] 0.000 description 1
- 125000003074 decanoyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C(*)=O 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000006612 decyloxy group Chemical group 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- GUJOJGAPFQRJSV-UHFFFAOYSA-N dialuminum;dioxosilane;oxygen(2-);hydrate Chemical compound O.[O-2].[O-2].[O-2].[Al+3].[Al+3].O=[Si]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O GUJOJGAPFQRJSV-UHFFFAOYSA-N 0.000 description 1
- 239000012954 diazonium Substances 0.000 description 1
- 150000001989 diazonium salts Chemical class 0.000 description 1
- 229960005215 dichloroacetic acid Drugs 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- 125000000532 dioxanyl group Chemical group 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- OZLBDYMWFAHSOQ-UHFFFAOYSA-N diphenyliodanium Chemical compound C=1C=CC=CC=1[I+]C1=CC=CC=C1 OZLBDYMWFAHSOQ-UHFFFAOYSA-N 0.000 description 1
- UMIKAXKFQJWKCV-UHFFFAOYSA-M diphenyliodanium;4-methylbenzenesulfonate Chemical compound CC1=CC=C(S([O-])(=O)=O)C=C1.C=1C=CC=CC=1[I+]C1=CC=CC=C1 UMIKAXKFQJWKCV-UHFFFAOYSA-M 0.000 description 1
- SBQIJPBUMNWUKN-UHFFFAOYSA-M diphenyliodanium;trifluoromethanesulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C=1C=CC=CC=1[I+]C1=CC=CC=C1 SBQIJPBUMNWUKN-UHFFFAOYSA-M 0.000 description 1
- NJLLQSBAHIKGKF-UHFFFAOYSA-N dipotassium dioxido(oxo)titanium Chemical compound [K+].[K+].[O-][Ti]([O-])=O NJLLQSBAHIKGKF-UHFFFAOYSA-N 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- PZLGBVIKYPHZTH-UHFFFAOYSA-N ethene;2-nonylphenol Chemical compound C=C.CCCCCCCCCC1=CC=CC=C1O PZLGBVIKYPHZTH-UHFFFAOYSA-N 0.000 description 1
- GFUIDHWFLMPAGY-UHFFFAOYSA-N ethyl 2-hydroxy-2-methylpropanoate Chemical compound CCOC(=O)C(C)(C)O GFUIDHWFLMPAGY-UHFFFAOYSA-N 0.000 description 1
- VRZVPALEJCLXPR-UHFFFAOYSA-N ethyl 4-methylbenzenesulfonate Chemical compound CCOS(=O)(=O)C1=CC=C(C)C=C1 VRZVPALEJCLXPR-UHFFFAOYSA-N 0.000 description 1
- XYIBRDXRRQCHLP-UHFFFAOYSA-N ethyl acetoacetate Chemical compound CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 description 1
- 125000000219 ethylidene group Chemical group [H]C(=[*])C([H])([H])[H] 0.000 description 1
- 238000000105 evaporative light scattering detection Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 125000004216 fluoromethyl group Chemical group [H]C([H])(F)* 0.000 description 1
- WBJINCZRORDGAQ-UHFFFAOYSA-N formic acid ethyl ester Natural products CCOC=O WBJINCZRORDGAQ-UHFFFAOYSA-N 0.000 description 1
- JLYXXMFPNIAWKQ-GNIYUCBRSA-N gamma-hexachlorocyclohexane Chemical compound Cl[C@H]1[C@H](Cl)[C@@H](Cl)[C@@H](Cl)[C@H](Cl)[C@H]1Cl JLYXXMFPNIAWKQ-GNIYUCBRSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 229940015043 glyoxal Drugs 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 1
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000005446 heptyloxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 1
- 239000004312 hexamethylene tetramine Substances 0.000 description 1
- 235000010299 hexamethylene tetramine Nutrition 0.000 description 1
- 125000003104 hexanoyl group Chemical group O=C([*])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical class I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 125000004356 hydroxy functional group Chemical group O* 0.000 description 1
- 125000002768 hydroxyalkyl group Chemical group 0.000 description 1
- 125000002632 imidazolidinyl group Chemical group 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 125000002510 isobutoxy group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])O* 0.000 description 1
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical class OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 1
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 1
- 229910052622 kaolinite Inorganic materials 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 150000007517 lewis acids Chemical class 0.000 description 1
- 229960002809 lindane Drugs 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 229940071125 manganese acetate Drugs 0.000 description 1
- UOGMEBQRZBEZQT-UHFFFAOYSA-L manganese(2+);diacetate Chemical compound [Mn+2].CC([O-])=O.CC([O-])=O UOGMEBQRZBEZQT-UHFFFAOYSA-L 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229920003145 methacrylic acid copolymer Polymers 0.000 description 1
- OCUXHFVNHQTZKR-UHFFFAOYSA-M methanesulfonate;triphenylsulfanium Chemical compound CS([O-])(=O)=O.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 OCUXHFVNHQTZKR-UHFFFAOYSA-M 0.000 description 1
- 229940098779 methanesulfonic acid Drugs 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 125000004184 methoxymethyl group Chemical group [H]C([H])([H])OC([H])([H])* 0.000 description 1
- YSGBMDFJWFIEDF-UHFFFAOYSA-N methyl 2-hydroxy-3-methylbutanoate Chemical compound COC(=O)C(O)C(C)C YSGBMDFJWFIEDF-UHFFFAOYSA-N 0.000 description 1
- VUQUOGPMUUJORT-UHFFFAOYSA-N methyl 4-methylbenzenesulfonate Chemical compound COS(=O)(=O)C1=CC=C(C)C=C1 VUQUOGPMUUJORT-UHFFFAOYSA-N 0.000 description 1
- MBABOKRGFJTBAE-UHFFFAOYSA-N methyl methanesulfonate Chemical compound COS(C)(=O)=O MBABOKRGFJTBAE-UHFFFAOYSA-N 0.000 description 1
- OIRDBPQYVWXNSJ-UHFFFAOYSA-N methyl trifluoromethansulfonate Chemical compound COS(=O)(=O)C(F)(F)F OIRDBPQYVWXNSJ-UHFFFAOYSA-N 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- 229910052901 montmorillonite Inorganic materials 0.000 description 1
- MNZMMCVIXORAQL-UHFFFAOYSA-N naphthalene-2,6-diol Chemical compound C1=C(O)C=CC2=CC(O)=CC=C21 MNZMMCVIXORAQL-UHFFFAOYSA-N 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000006611 nonyloxy group Chemical group 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- BTFQKIATRPGRBS-UHFFFAOYSA-N o-tolualdehyde Chemical compound CC1=CC=CC=C1C=O BTFQKIATRPGRBS-UHFFFAOYSA-N 0.000 description 1
- 125000002801 octanoyl group Chemical group C(CCCCCCC)(=O)* 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000005447 octyloxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 239000012766 organic filler Substances 0.000 description 1
- 150000002896 organic halogen compounds Chemical class 0.000 description 1
- 125000000160 oxazolidinyl group Chemical group 0.000 description 1
- 125000001820 oxy group Chemical group [*:1]O[*:2] 0.000 description 1
- 125000005702 oxyalkylene group Chemical group 0.000 description 1
- 229920002866 paraformaldehyde Polymers 0.000 description 1
- 125000001148 pentyloxycarbonyl group Chemical group 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 229940044654 phenolsulfonic acid Drugs 0.000 description 1
- KZQFPRKQBWRRHQ-UHFFFAOYSA-N phenyl 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OC1=CC=CC=C1 KZQFPRKQBWRRHQ-UHFFFAOYSA-N 0.000 description 1
- WXVUCMFEGJUVTN-UHFFFAOYSA-N phenyl methanesulfonate Chemical compound CS(=O)(=O)OC1=CC=CC=C1 WXVUCMFEGJUVTN-UHFFFAOYSA-N 0.000 description 1
- GRJHONXDTNBDTC-UHFFFAOYSA-N phenyl trifluoromethanesulfonate Chemical compound FC(F)(F)S(=O)(=O)OC1=CC=CC=C1 GRJHONXDTNBDTC-UHFFFAOYSA-N 0.000 description 1
- LSSGAGGYJWTEPQ-UHFFFAOYSA-N phenyl-(2,3,6-trihydroxyphenyl)methanone Chemical compound OC1=CC=C(O)C(C(=O)C=2C=CC=CC=2)=C1O LSSGAGGYJWTEPQ-UHFFFAOYSA-N 0.000 description 1
- 229940100595 phenylacetaldehyde Drugs 0.000 description 1
- 125000003170 phenylsulfonyl group Chemical group C1(=CC=CC=C1)S(=O)(=O)* 0.000 description 1
- QCDYQQDYXPDABM-UHFFFAOYSA-N phloroglucinol Chemical compound OC1=CC(O)=CC(O)=C1 QCDYQQDYXPDABM-UHFFFAOYSA-N 0.000 description 1
- 229960001553 phloroglucinol Drugs 0.000 description 1
- OXNIZHLAWKMVMX-UHFFFAOYSA-N picric acid Chemical compound OC1=C([N+]([O-])=O)C=C([N+]([O-])=O)C=C1[N+]([O-])=O OXNIZHLAWKMVMX-UHFFFAOYSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 125000004193 piperazinyl group Chemical group 0.000 description 1
- 125000003386 piperidinyl group Chemical group 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920000259 polyoxyethylene lauryl ether Polymers 0.000 description 1
- 239000000256 polyoxyethylene sorbitan monolaurate Substances 0.000 description 1
- 235000010486 polyoxyethylene sorbitan monolaurate Nutrition 0.000 description 1
- 239000001818 polyoxyethylene sorbitan monostearate Substances 0.000 description 1
- 235000010989 polyoxyethylene sorbitan monostearate Nutrition 0.000 description 1
- 239000001816 polyoxyethylene sorbitan tristearate Substances 0.000 description 1
- 235000010988 polyoxyethylene sorbitan tristearate Nutrition 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 125000004309 pyranyl group Chemical group O1C(C=CC=C1)* 0.000 description 1
- 125000003072 pyrazolidinyl group Chemical group 0.000 description 1
- 150000003222 pyridines Chemical class 0.000 description 1
- LJXQPZWIHJMPQQ-UHFFFAOYSA-N pyrimidin-2-amine Chemical compound NC1=NC=CC=N1 LJXQPZWIHJMPQQ-UHFFFAOYSA-N 0.000 description 1
- VTGOHKSTWXHQJK-UHFFFAOYSA-N pyrimidin-2-ol Chemical compound OC1=NC=CC=N1 VTGOHKSTWXHQJK-UHFFFAOYSA-N 0.000 description 1
- OYRRZWATULMEPF-UHFFFAOYSA-N pyrimidin-4-amine Chemical compound NC1=CC=NC=N1 OYRRZWATULMEPF-UHFFFAOYSA-N 0.000 description 1
- FVLAYJRLBLHIPV-UHFFFAOYSA-N pyrimidin-5-amine Chemical compound NC1=CN=CN=C1 FVLAYJRLBLHIPV-UHFFFAOYSA-N 0.000 description 1
- LTXJLQINBYSQFU-UHFFFAOYSA-N pyrimidin-5-ol Chemical compound OC1=CN=CN=C1 LTXJLQINBYSQFU-UHFFFAOYSA-N 0.000 description 1
- PZRKPUQWIFJRKZ-UHFFFAOYSA-N pyrimidine-2,4,5,6-tetramine Chemical compound NC1=NC(N)=C(N)C(N)=N1 PZRKPUQWIFJRKZ-UHFFFAOYSA-N 0.000 description 1
- CSNFMBGHUOSBFU-UHFFFAOYSA-N pyrimidine-2,4,5-triamine Chemical compound NC1=NC=C(N)C(N)=N1 CSNFMBGHUOSBFU-UHFFFAOYSA-N 0.000 description 1
- YAAWASYJIRZXSZ-UHFFFAOYSA-N pyrimidine-2,4-diamine Chemical compound NC1=CC=NC(N)=N1 YAAWASYJIRZXSZ-UHFFFAOYSA-N 0.000 description 1
- DNACGYGXUFTEHO-UHFFFAOYSA-N pyrimidine-2,5-diamine Chemical compound NC1=CN=C(N)N=C1 DNACGYGXUFTEHO-UHFFFAOYSA-N 0.000 description 1
- MPNBXFXEMHPGTK-UHFFFAOYSA-N pyrimidine-4,5,6-triamine Chemical compound NC1=NC=NC(N)=C1N MPNBXFXEMHPGTK-UHFFFAOYSA-N 0.000 description 1
- MISVBCMQSJUHMH-UHFFFAOYSA-N pyrimidine-4,6-diamine Chemical compound NC1=CC(N)=NC=N1 MISVBCMQSJUHMH-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 125000000719 pyrrolidinyl group Chemical group 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000001226 reprecipitation Methods 0.000 description 1
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 1
- 229960001755 resorcinol Drugs 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229940035044 sorbitan monolaurate Drugs 0.000 description 1
- 239000001593 sorbitan monooleate Substances 0.000 description 1
- 235000011069 sorbitan monooleate Nutrition 0.000 description 1
- 229940035049 sorbitan monooleate Drugs 0.000 description 1
- 239000001587 sorbitan monostearate Substances 0.000 description 1
- 235000011076 sorbitan monostearate Nutrition 0.000 description 1
- 229940035048 sorbitan monostearate Drugs 0.000 description 1
- 239000001589 sorbitan tristearate Substances 0.000 description 1
- 235000011078 sorbitan tristearate Nutrition 0.000 description 1
- 229960004129 sorbitan tristearate Drugs 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 150000003440 styrenes Chemical class 0.000 description 1
- 125000003011 styrenyl group Chemical group [H]\C(*)=C(/[H])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 150000003457 sulfones Chemical class 0.000 description 1
- 150000003459 sulfonic acid esters Chemical class 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium Chemical compound [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 125000001973 tert-pentyl group Chemical group [H]C([H])([H])C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000003507 tetrahydrothiofenyl group Chemical group 0.000 description 1
- 125000004632 tetrahydrothiopyranyl group Chemical group S1C(CCCC1)* 0.000 description 1
- KCNSDMPZCKLTQP-UHFFFAOYSA-N tetraphenylen-1-ol Chemical compound C12=CC=CC=C2C2=CC=CC=C2C2=CC=CC=C2C2=C1C=CC=C2O KCNSDMPZCKLTQP-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 230000026683 transduction Effects 0.000 description 1
- 238000010361 transduction Methods 0.000 description 1
- DWWMSEANWMWMCB-UHFFFAOYSA-N tribromomethylsulfonylbenzene Chemical compound BrC(Br)(Br)S(=O)(=O)C1=CC=CC=C1 DWWMSEANWMWMCB-UHFFFAOYSA-N 0.000 description 1
- HFFLGKNGCAIQMO-UHFFFAOYSA-N trichloroacetaldehyde Chemical compound ClC(Cl)(Cl)C=O HFFLGKNGCAIQMO-UHFFFAOYSA-N 0.000 description 1
- VZUBRRXYUOJBRS-UHFFFAOYSA-N trichloromethylsulfonylbenzene Chemical compound ClC(Cl)(Cl)S(=O)(=O)C1=CC=CC=C1 VZUBRRXYUOJBRS-UHFFFAOYSA-N 0.000 description 1
- 125000000025 triisopropylsilyl group Chemical group C(C)(C)[Si](C(C)C)(C(C)C)* 0.000 description 1
- 229950002929 trinitrophenol Drugs 0.000 description 1
- ZFEAYIKULRXTAR-UHFFFAOYSA-M triphenylsulfanium;chloride Chemical compound [Cl-].C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 ZFEAYIKULRXTAR-UHFFFAOYSA-M 0.000 description 1
- WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 description 1
- 239000012953 triphenylsulfonium Substances 0.000 description 1
- FAYMLNNRGCYLSR-UHFFFAOYSA-M triphenylsulfonium triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 FAYMLNNRGCYLSR-UHFFFAOYSA-M 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 239000010456 wollastonite Substances 0.000 description 1
- 229910052882 wollastonite Inorganic materials 0.000 description 1
- 150000003739 xylenols Chemical class 0.000 description 1
- 239000004246 zinc acetate Substances 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C39/00—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring
- C07C39/12—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings
- C07C39/14—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings with at least one hydroxy group on a condensed ring system containing two rings
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
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Description
R2は水素原子、アルキル基、アルコキシ基、置換基を有していてもよいアリール基、置換基を有していてもよいアラルキル基、又はハロゲン原子を表し、複数存在するR2は、互いに同一でもよく異なっていてもよく、
R3は置換基を有していてもよいアルキル基、又は置換基を有していてもよいアリール基を表し、
pは0、1、又は2を表し、qは0、1、又は2を表し、rは4又は5を表し、nは2〜10の整数を表す。但し、pとqの和は1又は2であり、pとqとrの和は6である。]で表される分子構造(但し、下記一般式(2)
で表される分子構造を除く。)からなることを特徴とする、変性フェノール性水酸基含有化合物に関する。
本発明は更に、前記変性フェノール性水酸基含有化合物と光酸発生剤とを含有する感光性組成物、前記感光性組成物からなるレジスト材料、及び前記レジスト材料からなるレジスト塗膜に関する。
装置:日本電子株式会社製「JNM−LA300」
溶媒:DMSO−d6
樹脂(変性フェノール性水酸基含有化合物)の分子量分布は、GPCにより、ポリスチレン標準法において、以下の測定条件にて測定した。
測定装置:東ソー株式会社製「HLC−8220 GPC」、
カラム:昭和電工株式会社製「Shodex KF802」(8.0mmI.D.×300mm)+昭和電工株式会社製「Shodex KF802」(8.0mmI.D.×300mm)+昭和電工株式会社製「Shodex KF803」(8.0mmI.D.×300mm)+昭和電工株式会社製「Shodex KF804」(8.0mmI.D.×300mm)、
検出器:ELSD(オルテックジャパン株式会社製「ELSD2000」)、
データ処理:東ソー株式会社製「GPC−8020モデルIIデータ解析バージョン4.30」、
測定条件:カラム温度 40℃
展開溶媒 テトラヒドロフラン(THF)
流速 1.0mL/分
試料:樹脂固形分換算で1.0質量%のテトラヒドロフラン溶液をマイクロフィルターでろ過したもの(5μL)、
標準試料:前記「GPC−8020モデルIIデータ解析バージョン4.30」の測定マニュアルに準拠して、分子量が既知の下記の単分散ポリスチレンを用いた。
(単分散ポリスチレン)
東ソー株式会社製「A−500」
東ソー株式会社製「A−1000」
東ソー株式会社製「A-2500」
東ソー株式会社製「A−5000」
東ソー株式会社製「F−1」
東ソー株式会社製「F−2」
東ソー株式会社製「F−4」
東ソー株式会社製「F−10」
東ソー株式会社製「F−20」
東ソー株式会社製「F−40」
東ソー株式会社製「F−80」
東ソー株式会社製「F−128」
東ソー株式会社製「F−288」
東ソー株式会社製「F−550」
装置:日本電子株式会社製 AL−400、
測定モード:SGNNE(NOE消去の1H完全デカップリング法)、
溶媒:ジメチルスルホキシド、
パルス角度:45°パルス、
試料濃度 :30wt%、
積算回数 :100回。
装置:日本分光株式会社製 FT/IR−4200typeA、
測定方法:KBr錠剤法、
測定モード:吸光度(Abs)、
分解:4cm−1、
積算回数:32回、
横軸:Wavenumber(cm−1)、
縦軸:Abs。
樹脂(変性フェノール性水酸基含有化合物)のFD−MSスペクトルは、日本電子株式会社製の二重収束型質量分析装置「AX505H(FD505H)」を用いて測定した。
温度計、滴下ロート、冷却管、撹拌器を取り付けたフラスコに、1,6−DHN(1,6−ジヒドロキシナフタレン)160質量部、4−ヒドロキシベンズアルデヒド122質量部、2−エトキシエタノール290質量部、95%硫酸1.7質量部を仕込み、80℃に昇温後8時間撹拌して反応させた。反応終了後、酢酸エチル300g、イオン交換水160gを加えた後、分液漏斗で下層よりpH1の水層を棄却した。次いで、イオン交換水160gによる有機層洗浄を7回実施し、棄却される水層がpH4であることを確認した。上層の有機層を、エバポレータを用いて加熱減圧濃縮、乾燥を行い、目的の環状化合物がGPC面積比で89%含まれるフェノール化合物247質量部を得た。収率は93%であり、FD−MSスペクトルから環状化合物を示す1156のピークが検出された。得られたフェノール化合物のGPCスペクトルを図1に示す。
冷却管を設置した100mL容2口フラスコに、合成例1で単離した環状化合物4.4g、ジヒドロピラン4.2gを仕込み、1,3−ジオキソラン30gに溶解させた。次いで、反応系の溶液に、35wt%塩酸水溶液0.01gを添加した後、25℃(室温)で4時間反応を行った。反応後、反応系の溶液に25wt%アンモニア水溶液0.1gを添加した後、イオン交換水100g中に注ぎ、反応物を沈殿させた。得られた反応物を80℃、1.3kPaで減圧乾燥し、環状化合物(3−a)4.3gを得た。得られた環状化合物(3−a)のGPCスペクトルを図6に示す。ピークの広幅化により、目的生成物が得られたことを確認した。
ジヒドロピラン4.2gに代えてエチルビニルエーテル3.6gを用いた以外は合成例2と同様にして反応を行い、得られた反応物を沈殿させた後、減圧乾燥し、環状化合物(3−b)4.1gを得た。得られた環状化合物(3−b)のGPCスペクトルを図7に示す。ピークの広幅化により、目的生成物が得られたことを確認した。
ジヒドロピラン4.2gに代えて二炭酸ジ−t−ブチル10.9gを用いた以外は合成例2と同様にして反応を行い、得られた反応物を沈殿させた後、減圧乾燥し、環状化合物(3−c)4.2gを得た。得られた環状化合物(3−c)のGPCスペクトルを図8に示す。ピークの広幅化により、目的生成物が得られたことを確認した。
温度計、撹拌器を備えた2L容4つ口フラスコに、m−クレゾール648g(6mol)、p−クレゾール432g(4mol)、シュウ酸2.5g(0.2mol)、42%ホルムアルデヒド492gを仕込み、100℃に昇温し、反応させた。反応終了後、常圧で200℃まで脱水、蒸留し、230℃、6時間減圧蒸留を行い、目的のノボラック樹脂736gを得た。得られたノボラック樹脂のGPCスペクトルを図9に示す。
合成例1で単離した環状化合物4.4gに代えて合成例5で得られたノボラック樹脂6.1gを用いた以外は合成例2と同様にして反応を行い、得られた反応物を沈殿させた後、減圧乾燥し、ノボラック樹脂(3−d)6.0gを得た。
合成例2〜4、6で合成したノボラック樹脂(3−a)〜(3−d)について、表1に示すように、樹脂成分と光酸発生剤であるジフェニル(4−メチルフェニル)スルフォニウムトリフルオロメタンスルフォネート(和光純薬社製、WPAG−336)、プロピレングリコールモノメチルエーテルアセテート(PGMEA)を19/1/80(質量部)で混合して溶解させた後、0.2μmメンブランフィルターを用いて濾過し、感光性組成物(ポジ型レジスト組成物)とした。
得られた各ポジ型感光性組成物について、アルカリ現像性、感度、解像度、及び耐熱性を評価した。評価方法は下記の通りとした。評価結果を表1に示す。
感光性組成物を、5インチシリコンウェハー上に約1μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で60秒間乾燥させた。得られたウェハーを、現像液(2.38%水酸化テトラメチルアンモニウム水溶液)に60秒間浸漬させた後、110℃のホットプレート上で60秒間乾燥させた。当該感光性組成物の塗膜の膜厚を、現像液浸漬前後で測定し、その差分を60で除した値をアルカリ現像性(ADR(nm/s))とした。露光させる場合は、ghi線ランプ(ウシオ電機社製、マルチライト)で十分に露光される100mJ/cm2照射した後、140℃、60秒間の条件でPEB(Post Exposure Bake)を施したウェハーを用いてADR測定を実施した。
感光性組成物を約1μmの厚さで塗布して乾燥せしめたウェハー上に、ラインアンドスペースが1:1の1〜10μmレジストパターン対応のマスクを密着させた後、ghi線ランプで3μmを忠実に再現することのできる露光量(Eop露光量)を求めた。
感光性組成物を塗布して乾燥したシリコンウェハー上にフォトマスクを乗せ、ghi線ランプ(ウシオ電機社製、マルチライト)で100mJ/cm2照射し感光せしめた。照射後の塗膜を、ADR測定と同様にして現像し乾燥させた。現像後のウェハー上のレジストパターンのパターン状態を、キーエンス社製レーザーマイクロスコープ(VK−8500)を用いて評価した。評価は、L/S=5μmで解像できているものを「○」、L/S=5μmで解像できていないものを「×」とした。
感光性組成物を5インチシリコンウェハー上に約1μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で60秒間乾燥させた。得られたウェハーより樹脂分をかきとり、Tgを測定した。Tgの測定は、示差走査熱量計(株式会社TAインスツルメント製、示差走査熱量計(DSC)Q100)を用いて、窒素雰囲気下、温度範囲:−100〜200℃、昇温温度:10℃/分の条件で走査を行い、測定結果をガラス転移温度(Tg)とした。
Claims (9)
- 下記一般式(3)
で表されるヒドロキシナフタレン類(A)と下記一般式(4)
で表されるアルデヒド類(B)とを、酸性触媒又は塩基性触媒の存在下で反応させてフェノール性水酸基含有中間体を得、次いで、得られたフェノール性水酸基含有中間体のフェノール性水酸基の水素原子の少なくとも一部を、3級アルキル基、アルコキシアルキル基、アリールオキシアルキル基、アシル基、アルコキシカルボニル基、アリールオキシカルボニル基、ヘテロ原子含有環状脂肪族炭化水素基、及びトリアルキルシリル基からなる群より選択される一種以上で置換することを特徴とする、変性フェノール性水酸基含有化合物の製造方法。 - 前記ヒドロキシナフタレン類(A)が1−ナフトール、2−ナフトール、1,4−ジヒドロキシナフタレン、1,5−ジヒドロキシナフタレン、1,6−ジヒドロキシナフタレン、2,3−ジヒドロキシナフタレン、2,7−ジヒドロキシナフタレンからなる群から選ばれる1種以上のものであり、アルデヒド類(B)がサリチルアルデヒド、3−ヒドロキシベンズアルデヒド及び4−ヒドロキシベンズアルデヒドからなる群から選ばれる1種以上のものである請求項1記載の変性フェノール性水酸基含有化合物の製造方法。
- 前記一般式(6−1)〜(6−8)の何れかで表される化合物がエチルビニルエーテル、二炭酸ジ−t−ブチル、ジヒドロピランからなる群から選ばれる一種以上のものである請求項3記載の変性フェノール性水酸基含有化合物の製造方法。
- 下記一般式(1)
R2は水素原子、アルキル基、アルコキシ基、置換基を有していてもよいアリール基、置換基を有していてもよいアラルキル基、又はハロゲン原子を表し、複数存在するR2は、互いに同一でもよく異なっていてもよく、
R3は置換基を有していてもよいアルキル基、又は置換基を有していてもよいアリール基を表し、
pは0、1、又は2を表し、qは0、1、又は2を表し、rは4又は5を表し、nは2〜10の整数を表す。但し、pとqの和は1又は2であり、pとqとrの和は6である。]で表される分子構造を有し、分子構造中のn個の繰り返し構造のうち、少なくとも一つはpの値が1又は2であるものである変性フェノール性水酸基含有化合物。 - 前記R1が、アルコキシアルキル基、アルコキシカルボニル基、又は酸素原子含有環状脂肪族炭化水素基である、請求項5記載の変性フェノール性水酸基含有化合物。
- 請求項5又は6に記載の変性フェノール性水酸基含有化合物と光酸発生剤とを含有する感光性組成物。
- 請求項7記載の感光性組成物からなるレジスト材料。
- 請求項8記載のレジスト材料からなるレジスト塗膜。
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