JP6241577B2 - ノボラック型樹脂及びレジスト膜 - Google Patents
ノボラック型樹脂及びレジスト膜 Download PDFInfo
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- JP6241577B2 JP6241577B2 JP2017525995A JP2017525995A JP6241577B2 JP 6241577 B2 JP6241577 B2 JP 6241577B2 JP 2017525995 A JP2017525995 A JP 2017525995A JP 2017525995 A JP2017525995 A JP 2017525995A JP 6241577 B2 JP6241577 B2 JP 6241577B2
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- resin
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- ether
- novolak
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- 229920003986 novolac Polymers 0.000 title claims description 114
- 229920005989 resin Polymers 0.000 claims description 137
- 239000011347 resin Substances 0.000 claims description 137
- 239000000203 mixture Substances 0.000 claims description 68
- 125000000217 alkyl group Chemical group 0.000 claims description 36
- 239000003795 chemical substances by application Substances 0.000 claims description 33
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 25
- 125000004183 alkoxy alkyl group Chemical group 0.000 claims description 21
- 125000004453 alkoxycarbonyl group Chemical group 0.000 claims description 21
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 21
- 125000005842 heteroatom Chemical group 0.000 claims description 21
- 125000002252 acyl group Chemical group 0.000 claims description 20
- 125000003545 alkoxy group Chemical group 0.000 claims description 18
- 125000004665 trialkylsilyl group Chemical group 0.000 claims description 16
- 125000005843 halogen group Chemical group 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 10
- 125000000732 arylene group Chemical group 0.000 claims description 9
- 239000013638 trimer Substances 0.000 claims description 8
- 239000000539 dimer Substances 0.000 claims description 7
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 claims description 4
- -1 phenol compound Chemical class 0.000 description 180
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 65
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 52
- 239000010408 film Substances 0.000 description 42
- 150000001875 compounds Chemical class 0.000 description 30
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 29
- 238000004519 manufacturing process Methods 0.000 description 27
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- 125000003118 aryl group Chemical group 0.000 description 21
- 238000006243 chemical reaction Methods 0.000 description 21
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- 238000005227 gel permeation chromatography Methods 0.000 description 19
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 19
- 238000000034 method Methods 0.000 description 18
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- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 15
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 15
- 238000001312 dry etching Methods 0.000 description 15
- 125000006239 protecting group Chemical group 0.000 description 15
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 14
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 14
- 239000003513 alkali Substances 0.000 description 14
- 239000003822 epoxy resin Substances 0.000 description 14
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- ZNZYKNKBJPZETN-WELNAUFTSA-N Dialdehyde 11678 Chemical compound N1C2=CC=CC=C2C2=C1[C@H](C[C@H](/C(=C/O)C(=O)OC)[C@@H](C=C)C=O)NCC2 ZNZYKNKBJPZETN-WELNAUFTSA-N 0.000 description 12
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- 239000003377 acid catalyst Substances 0.000 description 12
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- 238000001723 curing Methods 0.000 description 10
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- 239000011572 manganese Substances 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
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- 206010034972 Photosensitivity reaction Diseases 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 9
- 238000011156 evaluation Methods 0.000 description 9
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- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 8
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- 238000002156 mixing Methods 0.000 description 8
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- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 7
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 7
- 239000000047 product Substances 0.000 description 7
- 239000004094 surface-active agent Substances 0.000 description 7
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 6
- NXXYKOUNUYWIHA-UHFFFAOYSA-N 2,6-Dimethylphenol Chemical compound CC1=CC=CC(C)=C1O NXXYKOUNUYWIHA-UHFFFAOYSA-N 0.000 description 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 6
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 6
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 6
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 6
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 5
- 238000001644 13C nuclear magnetic resonance spectroscopy Methods 0.000 description 5
- HIXDQWDOVZUNNA-UHFFFAOYSA-N 2-(3,4-dimethoxyphenyl)-5-hydroxy-7-methoxychromen-4-one Chemical compound C=1C(OC)=CC(O)=C(C(C=2)=O)C=1OC=2C1=CC=C(OC)C(OC)=C1 HIXDQWDOVZUNNA-UHFFFAOYSA-N 0.000 description 5
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 5
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- YXHKONLOYHBTNS-UHFFFAOYSA-N Diazomethane Chemical compound C=[N+]=[N-] YXHKONLOYHBTNS-UHFFFAOYSA-N 0.000 description 5
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- 239000002253 acid Substances 0.000 description 5
- 239000000654 additive Substances 0.000 description 5
- 239000004305 biphenyl Substances 0.000 description 5
- 235000010290 biphenyl Nutrition 0.000 description 5
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- 230000000052 comparative effect Effects 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 150000004292 cyclic ethers Chemical class 0.000 description 5
- 239000000945 filler Substances 0.000 description 5
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 5
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- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 5
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- 239000002244 precipitate Substances 0.000 description 5
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 5
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 5
- 229920002554 vinyl polymer Polymers 0.000 description 5
- CDAWCLOXVUBKRW-UHFFFAOYSA-N 2-aminophenol Chemical class NC1=CC=CC=C1O CDAWCLOXVUBKRW-UHFFFAOYSA-N 0.000 description 4
- GJYCVCVHRSWLNY-UHFFFAOYSA-N 2-butylphenol Chemical compound CCCCC1=CC=CC=C1O GJYCVCVHRSWLNY-UHFFFAOYSA-N 0.000 description 4
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- YCOXTKKNXUZSKD-UHFFFAOYSA-N 3,4-xylenol Chemical compound CC1=CC=C(O)C=C1C YCOXTKKNXUZSKD-UHFFFAOYSA-N 0.000 description 4
- 229930185605 Bisphenol Natural products 0.000 description 4
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 4
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- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 125000003710 aryl alkyl group Chemical group 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
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- 125000001424 substituent group Chemical group 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 150000003457 sulfones Chemical class 0.000 description 1
- 150000003459 sulfonic acid esters Chemical class 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium Chemical compound [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000001973 tert-pentyl group Chemical group [H]C([H])([H])C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000003718 tetrahydrofuranyl group Chemical group 0.000 description 1
- 125000001412 tetrahydropyranyl group Chemical group 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- DWWMSEANWMWMCB-UHFFFAOYSA-N tribromomethylsulfonylbenzene Chemical compound BrC(Br)(Br)S(=O)(=O)C1=CC=CC=C1 DWWMSEANWMWMCB-UHFFFAOYSA-N 0.000 description 1
- HFFLGKNGCAIQMO-UHFFFAOYSA-N trichloroacetaldehyde Chemical compound ClC(Cl)(Cl)C=O HFFLGKNGCAIQMO-UHFFFAOYSA-N 0.000 description 1
- VZUBRRXYUOJBRS-UHFFFAOYSA-N trichloromethylsulfonylbenzene Chemical compound ClC(Cl)(Cl)S(=O)(=O)C1=CC=CC=C1 VZUBRRXYUOJBRS-UHFFFAOYSA-N 0.000 description 1
- ITMCEJHCFYSIIV-UHFFFAOYSA-M triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-M 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 229950002929 trinitrophenol Drugs 0.000 description 1
- AAAQKTZKLRYKHR-UHFFFAOYSA-N triphenylmethane Chemical compound C1=CC=CC=C1C(C=1C=CC=CC=1)C1=CC=CC=C1 AAAQKTZKLRYKHR-UHFFFAOYSA-N 0.000 description 1
- ZFEAYIKULRXTAR-UHFFFAOYSA-M triphenylsulfanium;chloride Chemical compound [Cl-].C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 ZFEAYIKULRXTAR-UHFFFAOYSA-M 0.000 description 1
- WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 description 1
- 239000012953 triphenylsulfonium Substances 0.000 description 1
- FAYMLNNRGCYLSR-UHFFFAOYSA-M triphenylsulfonium triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 FAYMLNNRGCYLSR-UHFFFAOYSA-M 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- 238000005292 vacuum distillation Methods 0.000 description 1
- 229960000834 vinyl ether Drugs 0.000 description 1
- 125000005023 xylyl group Chemical group 0.000 description 1
Images
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- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
- C08G8/08—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ
- C08G8/20—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ with polyhydric phenols
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- C07C39/12—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings
- C07C39/15—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings with all hydroxy groups on non-condensed rings, e.g. phenylphenol
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- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
- C08G8/08—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ
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- C08G8/08—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ
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- C08L61/06—Condensation polymers of aldehydes or ketones with phenols only of aldehydes with phenols
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Description
で表される構造部位を繰り返し単位として有し、樹脂中に存在するXのうち少なくとも一つが3級アルキル基、アルコキシアルキル基、アシル基、アルコキシカルボニル基、ヘテロ原子含有環状炭化水素基、トリアルキルシリル基の何れかであることを特徴とするノボラック型樹脂に関する。
本発明のノボラック型樹脂は、下記構造式(1)又は(2)
で表される構造部位を繰り返し単位として有し、樹脂中に存在するXのうち少なくとも一つが3級アルキル基、アルコキシアルキル基、アシル基、アルコキシカルボニル基、ヘテロ原子含有環状炭化水素基、トリアルキルシリル基の何れかであることを特徴とする。
で表される構造部位同士が2つのメチレン基で結節された、所謂ラダー状の剛直かつ対称性の高い分子構造を有することから、これまでにない高い耐熱性と耐ドライエッチング性とを実現する。
装置:日本電子株式会社製「JNM−LA300」
溶媒:DMSO−d6
で表される4官能フェノール化合物(A)と、ホルムアルデヒドとを必須の成分として反応させて中間体ノボラック型樹脂を得、得られた中間体ノボラック型樹脂のフェノール性水酸基の水素原子の一部乃至全部を、3級アルキル基、アルコキシアルキル基、アシル基、アルコキシカルボニル基、ヘテロ原子含有環状炭化水素基、トリアルキルシリル基の何れかで置換する方法が挙げられる。
[GPCの測定条件]
測定装置:東ソー株式会社製「HLC−8220 GPC」
カラム:昭和電工株式会社製「Shodex KF802」(8.0mmФ×300mm)
+昭和電工株式会社製「Shodex KF802」(8.0mmФ×300mm)
+昭和電工株式会社製「Shodex KF803」(8.0mmФ×300mm)
+昭和電工株式会社製「Shodex KF804」(8.0mmФ×300mm)
カラム温度:40℃
検出器: RI(示差屈折計)
データ処理:東ソー株式会社製「GPC−8020モデルIIバージョン4.30」
展開溶媒:テトラヒドロフラン
流速:1.0ml/分
試料:樹脂固形分換算で0.5質量%のテトラヒドロフラン溶液をマイクロフィルターでろ過したもの
注入量:0.1ml
標準試料:下記単分散ポリスチレン
(標準試料:単分散ポリスチレン)
東ソー株式会社製「A−500」
東ソー株式会社製「A−2500」
東ソー株式会社製「A−5000」
東ソー株式会社製「F−1」
東ソー株式会社製「F−2」
東ソー株式会社製「F−4」
東ソー株式会社製「F−10」
東ソー株式会社製「F−20」
の何れかで表される化合物(以下「保護基導入剤」と略記する。)とを反応させる方法が挙げられる。
[GPCの測定条件]
測定装置:東ソー株式会社製「HLC−8220 GPC」
カラム:昭和電工株式会社製「Shodex KF802」(8.0mmФ×300mm)+昭和電工株式会社製「Shodex KF802」(8.0mmФ×300mm)
+昭和電工株式会社製「Shodex KF803」(8.0mmФ×300mm)+昭和電工株式会社製「Shodex KF804」(8.0mmФ×300mm)
カラム温度:40℃
検出器: RI(示差屈折計)
データ処理:東ソー株式会社製「GPC−8020モデルIIバージョン4.30」
展開溶媒:テトラヒドロフラン
流速:1.0mL/分
試料:樹脂固形分換算で0.5質量%のテトラヒドロフラン溶液をマイクロフィルターでろ過したもの
注入量:0.1mL
標準試料:下記単分散ポリスチレン
(標準試料:単分散ポリスチレン)
東ソー株式会社製「A−500」
東ソー株式会社製「A−2500」
東ソー株式会社製「A−5000」
東ソー株式会社製「F−1」
東ソー株式会社製「F−2」
東ソー株式会社製「F−4」
東ソー株式会社製「F−10」
東ソー株式会社製「F−20」
[1H−NMRスペクトル測定条件]
測定モード:SGNNE(NOE消去の1H完全デカップリング法)
パルス角度:45℃パルス
試料濃度:30wt%
積算回数:10000回
[13C−NMRスペクトル測定条件]
測定モード:SGNNE(NOE消去の1H完全デカップリング法)
パルス角度:45℃パルス
試料濃度:30wt%
積算回数:10000回
測定モード:リニアーモード
試料調整:サンプル/ジスラノール/トリフルオロ酢酸ナトリウム/THF=10/10/1/1
冷却管を設置した100mlの二口フラスコに2,5−キシレノール73g(0.6mol)、テレフタルアルデヒド20g(0.15mol)を仕込み、2−エトキシエタノール300mlに溶解させた。氷浴中で冷却しながら硫酸10gを添加した後、80℃のオイルバス中で2時間加熱、攪拌し反応させた。反応後、得られた溶液に水を加えて粗成生物を再沈殿させた。沈殿した粗生成物をアセトンに再溶解し、さらに水で再沈殿させた後、沈殿物を濾別して真空乾燥を行い、淡赤色粉末の4官能フェノール化合物(A−1)62gを得た。1H−NMRにて下記構造式で表される化合物の生成を確認した。また、GPCチャート図から算出される純度は98.2%であった。4官能フェノール化合物(A−1)のGPCチャートを図1に、1H−NMRチャートを図2に示す。
冷却管を設置した2Lの4口フラスコに製造例1で得た4官能フェノール化合物(A−1)59g(0.1mol)を、メタノール250mlと酢酸250mlとの混合溶液中に溶解させた。氷浴中で冷却しながら硫酸20gを添加した後、92%パラホルムアルデヒド15g(0.5mol)を仕込み、水浴で60℃まで昇温した。10時間加熱、攪拌を継続し反応させた後、得られた溶液に水を加えて生成物を沈殿させ、濾別し、真空乾燥して赤色固体の粗成生物を得た。粗生成物をシリカゲルカラム(展開溶媒:ヘキサン/酢酸エチル=1/1)で精製し、2量体を主成分とする中間体ノボラック型樹脂(1)23.4gと、3量体を主成分とする中間体ノボラック型樹脂(2)21.6gを得た。中間体ノボラック型樹脂(1)のGPC、13C−NMR、TOF−MSを図3、図4、図5に、中間体ノボラック型樹脂(2)のGPC、13C−NMR、TOF−MSを図6、図7、図8に示す。中間体ノボラック型樹脂(1)の数平均分子量(Mn)は1,552、重量平均分子量(Mw)は1,666、多分散度(Mw/Mn)は1.07であり、TOF−MSスペクトルにて2量体のナトリウム付加物の存在を示す1,219のピークが観測された。中間体ノボラック型樹脂(2)の数平均分子量(Mn)は2,832、重量平均分子量(Mw)は3,447、多分散度(Mw/Mn)は1.22であり、TOF−MSスペクトルにて3量体のナトリウム付加物の存在を示す1,830のピークが観測された。
冷却管を設置した100ml3口フラスコに製造例2で合成した中間体ノボラック型樹脂(1)6g、保護基導入剤としてエチルビニルエーテル4gを仕込んだ後、1,3−ジオキソラン30gに溶解させた。35wt%塩酸水溶液0.01gを添加した後、25℃で4時間攪拌を継続し反応させた。反応中にメタノールで滴定を行い、メタノール溶解成分が消失し、水酸基のほぼすべてに保護基が導入されたことを確認した後、25wt%アンモニア水溶液0.1gを添加した。得られた溶液に水を加えて再沈殿操作を行い、沈殿物を濾別、真空乾燥して赤色粉末のノボラック型樹脂(1)6.2gを得た。
保護基導入剤として、エチルビニルエーテル4gに替えてジヒドロピラン4.4gとした以外は実施例1と同様の操作を行い、赤色粉末のノボラック型樹脂(2)6.7gを得た。
中間体ノボラック型樹脂(1)6gに替えて中間体ノボラック型樹脂(2)6gとした以外は実施例1と同様の操作を行い、赤色粉末のノボラック型樹脂(3)6.1gを得た。
保護前のフェノール樹脂を中間体ノボラック型樹脂(2)6g、保護基導入剤として、チルビニルエーテル4gに替えてジヒドロピラン4.4gとした以外は実施例3と同様の操作を行い、赤色粉末のボラック型樹脂(4)6.4gを得た。
攪拌機、温度計を備えた2Lの4つ口フラスコに、m−クレゾール648g(6mol)、p−クレゾール432g(4mol)、シュウ酸2.5g(0.2mol)、42%ホルムアルデヒド492gを仕込み、100℃まで昇温して反応させた。常圧、200℃の条件下で脱水及び蒸留し、更に230℃で6時間減圧蒸留を行い、淡黄色固形の中間体ノボラック型樹脂(1’)736gを得た。中間体ノボラック型樹脂(1’)の数平均分子量(Mn)は1,450、重量平均分子量(Mw)は10,316、多分散度(Mw/Mn)は7.116であった。
実施例1〜5、比較製造例1で得たノボラック型樹脂について、下記の要領で感光性組成物を調整し、各種評価を行った。結果を表1に示す。
ノボラック型樹脂1.9gをプロピレングリコールモノメチルエーテルアセテート8gに溶解させ、この溶液に光酸発生剤0.1gを加えて溶解させた。これを0.2μmのメンブランフィルターで濾過し、感光性組成物を得た。
光酸発生剤は和光純薬株式会社製「WPAG−336」[ジフェニル(4−メチルフェニル)スルフォニウムトリフルオロメタンスルフォネート]を用いた。
前記ノボラック型樹脂1.9gをプロピレングリコールモノメチルエーテルアセテート8gに溶解させ、これを0.2μmのメンブランフィルターで濾過し、耐熱性試験用組成物を得た。
先で得た感光性組成物を5インチシリコンウェハー上に約1μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で60秒乾燥させた。このウェハーを2枚用意し、一方を「露光なしサンプル」とした。他方を「露光有サンプル」としてghi線ランプ(ウシオ電機株式会社製「マルチライト」)を用いて100mJ/cm2のghi線を照射したのち、140℃、60秒間の条件で加熱処理を行った。
「露光なしサンプル」と「露光有サンプル」の両方をアルカリ現像液(2.38%水酸化テトラメチルアンモニウム水溶液)に60秒間浸漬した後、110℃のホットプレート上で60秒乾燥させた。各サンプルの現像液浸漬前後の膜厚を測定し、その差分を60で除した値をアルカリ現像性[ADR(nm/s)]とした。
先で得た感光性組成物を5インチシリコンウェハー上に約1μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で60秒乾燥させた。このウェハー上にラインアンドスペースが1:1であり、ライン幅が1〜10μmまで1μmごとに設定されたレジストパターン対応のマスクを密着させた後、ghi線ランプ(ウシオ電機株式会社製「マルチライト」)を用いてghi線を照射し、140℃、60秒間の条件で加熱処理を行った。次いで、アルカリ現像液(2.38%水酸化テトラメチルアンモニウム水溶液)に60秒間浸漬した後、110℃のホットプレート上で60秒乾燥させた。
ghi線露光量を30mJ/cm2から5mJ/cm2毎に増加させた場合の、ライン幅3μmを忠実に再現することのできる露光量(Eop露光量)を評価した。
先で得た感光性組成物を5インチシリコンウェハー上に約1μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で60秒乾燥させた。得られたウェハー上にフォトマスクを乗せ、先のアルカリ現像性評価の場合と同様の方法でghi線200mJ/cm2を照射し、アルカリ現像操作を行った。レーザーマイクロスコープ(株式会社キーエンス製「VK−X200」)を用いてパターン状態を確認し、L/S=5μmで解像できているものを○、L/S=5μmで解像できていないものを×として評価した。
先で得た耐熱性試験用組成物を5インチシリコンウェハー上に約1μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で60秒乾燥させた。得られたウェハーより樹脂分をかきとり、そのガラス転移温度(Tg)を測定した。ガラス転移温度(Tg)の測定は示差走査熱量計(DSC)(株式会社TAインスツルメント製「Q100」)を用いて、窒素雰囲気下、温度範囲−100〜200℃、昇温温度10℃/分の条件で行った。
実施例1〜4、比較製造例1で得たノボラック型樹脂について、下記の要領で硬化性組成物を調整し、各種の評価試験を行った。結果を表2に示す。
ノボラック型樹脂1.6g、硬化剤(東京化成工業株式会社製「1,3,4,6−テトラキス(メトキシメチル)グリコールウリル」)0.4gをプロピレングリコールモノメチルエーテルアセテート3gに溶解させ、これを0.2μmのメンブランフィルターで濾過し、硬化性組成物を得た。
先で得た硬化性組成物を5インチシリコンウェハー上にスピンコーターで塗布し、110℃のホットプレート上で60秒乾燥させた。酸素濃度20容量%のホットプレート内にて、180℃で60秒間加熱し、更に、350℃で120秒間加熱して、膜厚0.3μmの硬化塗膜月シリコンウェハーを得た。ウェハー上の硬化塗膜を、エッチング装置(神鋼精機社製の「EXAM」)を使用して、CF4/Ar/O2(CF4:40mL/分、Ar:20mL/分、O2:5mL/分 圧力:20Pa RFパワー:200W 処理時間:40秒 温度:15℃)の条件でエッチング処理した。このときのエッチング処理前後の膜厚を測定して、エッチングレートを算出し、エッチング耐性を評価した。評価基準は以下の通りである。
○:エッチングレートが150nm/分以下の場合
×:エッチングレートが150nm/分を超える場合
Claims (7)
- 前記構造式(1)又は(2)で表される構造部位の繰り返し単位数が2である2量体、又は、前記構造式(1)又は(2)で表される構造部位の繰り返し単位数が3である3量体を含有する請求項1記載のノボラック型樹脂。
- 請求項1又は2に記載のノボラック型樹脂と光酸発生剤とを含有する感光性組成物。
- 請求項3記載の感光性組成物からなるレジスト材料。
- 請求項1又は2に記載のノボラック型樹脂と硬化剤とを含有する硬化性組成物。
- 請求項5記載の硬化性組成物の硬化物。
- 請求項5記載の硬化性組成物からなるレジスト材料。
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