JP5927946B2 - 多層配線板の製造方法 - Google Patents
多層配線板の製造方法 Download PDFInfo
- Publication number
- JP5927946B2 JP5927946B2 JP2012019842A JP2012019842A JP5927946B2 JP 5927946 B2 JP5927946 B2 JP 5927946B2 JP 2012019842 A JP2012019842 A JP 2012019842A JP 2012019842 A JP2012019842 A JP 2012019842A JP 5927946 B2 JP5927946 B2 JP 5927946B2
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- wiring board
- resin
- multilayer wiring
- press plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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- 238000004519 manufacturing process Methods 0.000 title claims description 62
- 229920005989 resin Polymers 0.000 claims description 154
- 239000011347 resin Substances 0.000 claims description 154
- 239000004020 conductor Substances 0.000 claims description 64
- 238000000034 method Methods 0.000 claims description 64
- 238000010438 heat treatment Methods 0.000 claims description 37
- 238000003825 pressing Methods 0.000 claims description 30
- 238000010030 laminating Methods 0.000 claims description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 11
- 239000010439 graphite Substances 0.000 claims description 11
- 229910002804 graphite Inorganic materials 0.000 claims description 11
- 229920005992 thermoplastic resin Polymers 0.000 claims description 10
- 239000004642 Polyimide Substances 0.000 claims description 6
- 229920001721 polyimide Polymers 0.000 claims description 6
- -1 polytetrafluoroethylene Polymers 0.000 claims description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 4
- 239000011148 porous material Substances 0.000 claims description 4
- 238000003475 lamination Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 52
- 239000000463 material Substances 0.000 description 14
- 239000011888 foil Substances 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229920000106 Liquid crystal polymer Polymers 0.000 description 2
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000010425 asbestos Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000006260 foam Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 229910052895 riebeckite Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011490 mineral wool Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Images
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012019842A JP5927946B2 (ja) | 2011-02-14 | 2012-02-01 | 多層配線板の製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011028244 | 2011-02-14 | ||
| JP2011028244 | 2011-02-14 | ||
| JP2012019842A JP5927946B2 (ja) | 2011-02-14 | 2012-02-01 | 多層配線板の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014175997A Division JP5820915B2 (ja) | 2011-02-14 | 2014-08-29 | 多層配線板の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012186451A JP2012186451A (ja) | 2012-09-27 |
| JP2012186451A5 JP2012186451A5 (OSRAM) | 2014-10-30 |
| JP5927946B2 true JP5927946B2 (ja) | 2016-06-01 |
Family
ID=47016202
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012019842A Active JP5927946B2 (ja) | 2011-02-14 | 2012-02-01 | 多層配線板の製造方法 |
| JP2014175997A Active JP5820915B2 (ja) | 2011-02-14 | 2014-08-29 | 多層配線板の製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014175997A Active JP5820915B2 (ja) | 2011-02-14 | 2014-08-29 | 多層配線板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP5927946B2 (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014125894A1 (ja) * | 2013-02-15 | 2014-08-21 | 株式会社村田製作所 | 積層回路基板 |
| EP2827359B1 (en) * | 2013-07-17 | 2019-06-12 | Applied Materials, Inc. | Cleaning method for thin-film processing applications and apparatus for use therein |
| JP7201371B2 (ja) * | 2018-03-08 | 2023-01-10 | 株式会社クラレ | 熱可塑性液晶ポリマー多層構造体の製造方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0739614Y2 (ja) * | 1993-04-12 | 1995-09-13 | 日本ピラー工業株式会社 | クッション材 |
| JP2002176258A (ja) * | 2000-12-08 | 2002-06-21 | Toshiba Chem Corp | プリント配線板の製造方法 |
| CN100334929C (zh) * | 2002-05-21 | 2007-08-29 | 株式会社大和工业 | 层间连接结构的形成方法 |
| JP3867673B2 (ja) * | 2003-01-28 | 2007-01-10 | 松下電工株式会社 | 多層プリント配線板の製造方法 |
| JP2007266165A (ja) * | 2006-03-28 | 2007-10-11 | Matsushita Electric Ind Co Ltd | 多層配線基板の製造方法 |
| WO2009072531A1 (ja) * | 2007-12-05 | 2009-06-11 | Mitsubishi Plastics, Inc. | キャビティー部を有する多層配線基板 |
| JP4998414B2 (ja) * | 2008-09-05 | 2012-08-15 | 株式会社デンソー | 多層基板の製造方法 |
| JP2010283300A (ja) * | 2009-06-08 | 2010-12-16 | Panasonic Corp | 突起電極付き配線基板及び突起電極付き配線基板の製造方法 |
| JP5051260B2 (ja) * | 2010-03-26 | 2012-10-17 | 日立化成工業株式会社 | プレス装置、多層基板の製造方法、および多層基板 |
-
2012
- 2012-02-01 JP JP2012019842A patent/JP5927946B2/ja active Active
-
2014
- 2014-08-29 JP JP2014175997A patent/JP5820915B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012186451A (ja) | 2012-09-27 |
| JP2014220544A (ja) | 2014-11-20 |
| JP5820915B2 (ja) | 2015-11-24 |
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