JP5891300B2 - 誘導結合プラズマエッチングリアクタのためのガス分配シャワーヘッド - Google Patents
誘導結合プラズマエッチングリアクタのためのガス分配シャワーヘッド Download PDFInfo
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- 238000005530 etching Methods 0.000 title claims description 96
- 238000009616 inductively coupled plasma Methods 0.000 title claims description 4
- 239000000758 substrate Substances 0.000 claims description 75
- 238000012545 processing Methods 0.000 claims description 69
- 238000000034 method Methods 0.000 claims description 62
- 238000000151 deposition Methods 0.000 claims description 51
- 230000008021 deposition Effects 0.000 claims description 49
- 239000000919 ceramic Substances 0.000 claims description 40
- 239000004065 semiconductor Substances 0.000 claims description 32
- 238000007740 vapor deposition Methods 0.000 claims description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- 238000007789 sealing Methods 0.000 claims description 13
- 238000000576 coating method Methods 0.000 claims description 9
- 238000004891 communication Methods 0.000 claims description 9
- 239000012530 fluid Substances 0.000 claims description 9
- 229910010293 ceramic material Inorganic materials 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 8
- 239000002210 silicon-based material Substances 0.000 claims description 7
- 238000001020 plasma etching Methods 0.000 claims description 6
- 229920000642 polymer Polymers 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 283
- 238000009623 Bosch process Methods 0.000 description 8
- 241000237509 Patinopecten sp. Species 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 4
- 235000020637 scallop Nutrition 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000004341 Octafluorocyclobutane Substances 0.000 description 1
- 229910018503 SF6 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- BCCOBQSFUDVTJQ-UHFFFAOYSA-N octafluorocyclobutane Chemical compound FC1(F)C(F)(F)C(F)(F)C1(F)F BCCOBQSFUDVTJQ-UHFFFAOYSA-N 0.000 description 1
- 235000019407 octafluorocyclobutane Nutrition 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
- B05B1/18—Roses; Shower heads
- B05B1/185—Roses; Shower heads characterised by their outlet element; Mounting arrangements therefor
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- B05D1/62—Plasma-deposition of organic layers
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
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- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/3211—Antennas, e.g. particular shapes of coils
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- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
- H01L21/30655—Plasma etching; Reactive-ion etching comprising alternated and repeated etching and passivation steps, e.g. Bosch process
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
- H01J2237/3341—Reactive etching
Description
本発明は、たとえば、以下のような態様で実現することもできる。
適用例1:
基板支持体に支持された半導体基板にプラズマエッチングを施す誘導結合プラズマ処理装置のためのセラミックシャワーヘッドであって、
平坦な下面と、中央部分が厚く外側部分が薄い段付きの上面と、前記外側部分の環状領域に配置され前記上面および前記下面の間に伸びる複数の軸方向ガス孔と、前記下面の外周において前記外側部分に配置された真空シール面と、前記複数の軸方向ガス孔が配置された前記環状領域を規定する前記上面上の内側および外側真空シール面と、を有するセラミック材料の下側プレートと、
平坦な上面および下面と、外周から内向きに伸びる複数の半径方向ガス流路と、前記下面から前記複数の半径方向ガス流路まで伸びる複数の軸方向ガス流路と、を有するセラミック材料の環状の上側プレートと、
を備え、
前記環状の上側プレートは、前記下側プレートの前記中央部分を囲み、前記下側プレートの前記外側部分の前記上面を覆うように構成されており、前記上側プレートの前記複数の軸方向ガス流路が、前記下側プレートの前記複数の軸方向ガス孔と流体連通するように構成されている、セラミックシャワーヘッド。
適用例2:
適用例1のセラミックシャワーヘッドであって、前記下側プレートは、少なくとも2列の軸方向ガス孔を備え、前記列の各々は、20ないし50の前記軸方向ガス孔を有する、セラミックシャワーヘッド。
適用例3:
適用例2のセラミックシャワーヘッドであって、前記下側プレートは、約20インチの直径、前記中央部分における約1.5インチの厚さ、および、前記外側部分における約0.8インチの厚さを有し、前記2列のガス孔は、0.04インチの直径を有すると共に前記下側プレートの中心から約5インチに配置された32個のガス孔の内側の列と、約0.04インチの直径を有すると共に前記下側プレートの前記中心から約6.5インチに配置された32個のガス孔の外側の列とを含み、前記シール面は、前記下面の段に配置され、前記段は、約0.4インチの深さおよび約1.2インチの幅を有する、セラミックシャワーヘッド。
適用例4:
適用例1のセラミックシャワーヘッドであって、前記上側プレートは、約0.125インチの直径を有すると共に45°ごとに配置された少なくとも8つの半径方向ガス流路と、約0.125インチの直径を有すると共に前記上側プレートの中心から約5.75インチに配置された少なくとも8つの軸方向ガス流路と、約1.7インチの幅および約0.015ないし0.02インチの深さを有する環状プレナムを規定する環状凹部と、前記環状プレナムを囲む内側および外側O−リング溝と、を備え、前記環状プレナムは、前記上側プレートの前記ガス流路と前記下側プレートの前記ガス孔との間の流体連通を提供する、セラミックシャワーヘッド。
適用例5:
適用例4のセラミックシャワーヘッドであって、前記上側プレートは、さらに、約0.4インチの直径を有すると共に前記上側プレートの前記上面に配置された8対の軸方向取り付け穴と、約0.35インチの直径を有すると共に前記上側プレートの外周の平坦な取り付け面に配置された8対の半径方向取り付け穴と、を備え、各対の前記取り付け穴の中心は、約1インチ離間されている、セラミックシャワーヘッド。
適用例6:
適用例1のシャワーヘッドであって、前記上側プレートおよび下側プレートは、高純度アルミナで製造され、前記下側プレートの前記下面は、前記シール面を除いて前記下面全体を覆う高純度イットリアのコーティングを備える、シャワーヘッド。
適用例7:
半導体基板を内部で処理する処理チャンバと、
処理中に前記半導体を支持する基板支持体と、
前記チャンバの誘電体窓を形成する適用例1のセラミックシャワーヘッドと、
前記誘電体窓を通して前記チャンバ内にRFエネルギを誘導結合して、前記基板支持体と前記誘電体窓との間のチャンバギャップ内でプロセスガスをプラズマに励起するよう動作可能なアンテナと、
エッチングガスおよび蒸着ガスを含むプロセスガスを、前記環状プレナム内の前記エッチングガスが200ミリ秒以内で前記蒸着ガスに置き換えられるように、または、前記環状プレナム内の前記蒸着ガスが200ミリ秒以内で前記エッチングガスに置き換えられるように、前記セラミックシャワーヘッドの前記半径方向ガス流路に交互に供給するよう動作可能なガス供給システムと、
を備え、
前記プラズマ処理装置は、少なくとも10μm/分の速度で前記半導体基板上のシリコン材料に開口部をエッチングするよう動作可能である、プラズマ処理装置。
適用例8:
適用例7のプラズマ処理装置であって、前記エッチングガスは、SF 6 、NF 3 、および、CF 4 から選択され、前記蒸着ガスは、C 4 F 8 、C 4 F 6 、CH 2 F 2 、CHF 3 、CH 3 Fから選択される、プラズマ処理装置。
適用例9:
適用例7のプラズマ処理装置を用いて半導体基板を処理する方法であって、
(a)前記処理チャンバ内の前記基板支持体上に前記半導体基板を支持する工程と、
(b)前記蒸着ガスの流れを遮断して、前記エッチングガスが前記セラミックシャワーヘッドの前記ガス孔を通して前記チャンバギャップに流れ込むように前記エッチングガスを前記環状プレナムに供給する工程と、
(c)前記チャンバギャップ内の前記エッチングガスを第1のプラズマに励起して、前記第1のプラズマで前記半導体基板に開口部をプラズマエッチングする工程と、
(d)前記エッチングガスの流れを遮断して、前記蒸着ガスが前記セラミックシャワーヘッドの前記ガス孔を通して前記チャンバギャップに流れ込むように前記蒸着ガスを前記環状プレナムに供給する工程と、
(e)前記チャンバギャップ内の前記蒸着ガスを第2のプラズマに励起して、前記第2のプラズマで前記開口部内にポリマを蒸着させる工程と、
(f)1.8秒以内の総サイクル時間で工程(b)〜(e)を繰り返す工程と、
を備える、方法。
適用例10:
適用例9の方法であって、前記半導体基板はシリコンウエハであり、前記エッチングガスは、工程(b)において、約500ミリ秒の期間内に、前記チャンバギャップ内の前記蒸着ガスと置き換わり、前記蒸着ガスは、工程(d)において、約500ミリ秒の期間内に、前記チャンバギャップ内の前記エッチングガスと置き換わる、方法。
適用例11:
適用例9の方法であって、前記プレナム内の圧力は、工程(b)〜(e)の間、少なくとも1Torrである、方法。
適用例12:
適用例9の方法であって、前記エッチングガスを供給する総時間は1.3秒以内であり、前記蒸着ガスを供給する総時間は0.7秒以内である、方法。
適用例13:
適用例9の方法であって、前記エッチングガスの供給中の前記チャンバギャップ内の圧力は、少なくとも150mTorrであり、前記蒸着ガスの供給中の前記チャンバギャップ内の圧力は、150mTorr未満である、方法。
適用例14:
適用例9の方法であって、前記エッチングガスは、少なくとも500sccmの流量で前記プレナムに供給され、前記蒸着ガスは、500sccm未満の流量で前記プレナムに供給される、方法。
適用例15:
適用例9の方法であって、前記半導体基板と前記シャワーヘッドプレートとの間の前記チャンバギャップは、少なくとも4インチである、方法。
Claims (15)
- 基板支持体に支持された半導体基板にプラズマエッチングを施す誘導結合プラズマ処理装置のためのセラミックシャワーヘッドであって、
平坦な下面と、中央部分が厚く外側部分が薄い段付きの上面と、前記外側部分の環状領域に配置され前記上面および前記下面の間に伸びる複数の軸方向ガス孔と、前記下面の外周において前記外側部分に配置された真空シール面と、前記複数の軸方向ガス孔が配置された前記環状領域を規定する前記上面上の内側および外側真空シール面と、を有するセラミック材料の下側プレートと、
平坦な上面および下面と、外周から内向きに伸びる複数の半径方向ガス流路と、前記下面から前記複数の半径方向ガス流路まで伸びる複数の軸方向ガス流路と、を有するセラミック材料の環状の上側プレートと、
を備え、
前記環状の上側プレートは、前記下側プレートの前記中央部分を囲み、前記下側プレートの前記外側部分の前記上面を覆うように構成されており、前記上側プレートの前記複数の軸方向ガス流路が、前記下側プレートの前記複数の軸方向ガス孔と流体連通するように構成されている、セラミックシャワーヘッド。 - 請求項1に記載のセラミックシャワーヘッドであって、前記下側プレートは、少なくとも2列の軸方向ガス孔を備え、前記列の各々は、20ないし50の前記軸方向ガス孔を有する、セラミックシャワーヘッド。
- 請求項2に記載のセラミックシャワーヘッドであって、前記下側プレートは、約20インチの直径、前記中央部分における約1.5インチの厚さ、および、前記外側部分における約0.8インチの厚さを有し、前記2列のガス孔は、0.04インチの直径を有すると共に前記下側プレートの中心から約5インチに配置された32個のガス孔の内側の列と、約0.04インチの直径を有すると共に前記下側プレートの前記中心から約6.5インチに配置された32個のガス孔の外側の列とを含み、前記シール面は、前記下面の段に配置され、前記段は、約0.4インチの深さおよび約1.2インチの幅を有する、セラミックシャワーヘッド。
- 請求項1に記載のセラミックシャワーヘッドであって、前記上側プレートは、約0.125インチの直径を有すると共に45°ごとに配置された少なくとも8つの半径方向ガス流路と、約0.125インチの直径を有すると共に前記上側プレートの中心から約5.75インチに配置された少なくとも8つの軸方向ガス流路と、約1.7インチの幅および約0.015ないし0.02インチの深さを有する環状プレナムを規定する環状凹部と、前記環状プレナムを囲む内側および外側O−リング溝と、を備え、前記環状プレナムは、前記上側プレートの前記ガス流路と前記下側プレートの前記ガス孔との間の流体連通を提供する、セラミックシャワーヘッド。
- 請求項4に記載のセラミックシャワーヘッドであって、前記上側プレートは、さらに、約0.4インチの直径を有すると共に前記上側プレートの前記上面に配置された8対の軸方向取り付け穴と、約0.35インチの直径を有すると共に前記上側プレートの外周の平坦な取り付け面に配置された8対の半径方向取り付け穴と、を備え、各対の前記取り付け穴の中心は、約1インチ離間されている、セラミックシャワーヘッド。
- 請求項1に記載のシャワーヘッドであって、前記上側プレートおよび下側プレートは、高純度アルミナで製造され、前記下側プレートの前記下面は、前記シール面を除いて前記下面全体を覆う高純度イットリアのコーティングを備える、シャワーヘッド。
- プラズマ処理装置であって、
半導体基板を内部で処理する処理チャンバと、
処理中に前記半導体を支持する基板支持体と、
前記チャンバの誘電体窓を形成する請求項1に記載のセラミックシャワーヘッドと、
前記誘電体窓を通して前記チャンバ内にRFエネルギを誘導結合して、前記基板支持体と前記誘電体窓との間のチャンバギャップ内でプロセスガスをプラズマに励起するよう動作可能なアンテナと、
エッチングガスおよび蒸着ガスを含むプロセスガスを、前記環状プレナム内の前記エッチングガスが200ミリ秒以内で前記蒸着ガスに置き換えられるように、または、前記環状プレナム内の前記蒸着ガスが200ミリ秒以内で前記エッチングガスに置き換えられるように、前記セラミックシャワーヘッドの前記半径方向ガス流路に交互に供給するよう動作可能なガス供給システムと、
を備え、
前記プラズマ処理装置は、少なくとも10μm/分の速度で前記半導体基板上のシリコン材料に開口部をエッチングするよう動作可能である、プラズマ処理装置。 - 請求項7に記載のプラズマ処理装置であって、前記エッチングガスは、SF6、NF3、および、CF4から選択され、前記蒸着ガスは、C4F8、C4F6、CH2F2、CHF3、CH3Fから選択される、プラズマ処理装置。
- 請求項7に記載のプラズマ処理装置を用いて半導体基板を処理する方法であって、
(a)前記処理チャンバ内の前記基板支持体上に前記半導体基板を支持する工程と、
(b)前記蒸着ガスの流れを遮断して、前記エッチングガスが前記セラミックシャワーヘッドの前記ガス孔を通して前記チャンバギャップに流れ込むように前記エッチングガスを前記環状プレナムに供給する工程と、
(c)前記チャンバギャップ内の前記エッチングガスを第1のプラズマに励起して、前記第1のプラズマで前記半導体基板に開口部をプラズマエッチングする工程と、
(d)前記エッチングガスの流れを遮断して、前記蒸着ガスが前記セラミックシャワーヘッドの前記ガス孔を通して前記チャンバギャップに流れ込むように前記蒸着ガスを前記環状プレナムに供給する工程と、
(e)前記チャンバギャップ内の前記蒸着ガスを第2のプラズマに励起して、前記第2のプラズマで前記開口部内にポリマを蒸着させる工程と、
(f)1.8秒以内の総サイクル時間で工程(b)〜(e)を繰り返す工程と、
を備える、方法。 - 請求項9に記載の方法であって、前記半導体基板はシリコンウエハであり、前記エッチングガスは、工程(b)において、約500ミリ秒の期間内に、前記チャンバギャップ内の前記蒸着ガスと置き換わり、前記蒸着ガスは、工程(d)において、約500ミリ秒の期間内に、前記チャンバギャップ内の前記エッチングガスと置き換わる、方法。
- 請求項9に記載の方法であって、前記プレナム内の圧力は、工程(b)〜(e)の間、少なくとも1Torrである、方法。
- 請求項9に記載の方法であって、前記エッチングガスを供給する総時間は1.3秒以内であり、前記蒸着ガスを供給する総時間は0.7秒以内である、方法。
- 請求項9に記載の方法であって、前記エッチングガスの供給中の前記チャンバギャップ内の圧力は、少なくとも150mTorrであり、前記蒸着ガスの供給中の前記チャンバギャップ内の圧力は、150mTorr未満である、方法。
- 請求項9に記載の方法であって、前記エッチングガスは、少なくとも500sccmの流量で前記プレナムに供給され、前記蒸着ガスは、500sccm未満の流量で前記プレナムに供給される、方法。
- 請求項9に記載の方法であって、前記半導体基板と前記シャワーヘッドプレートとの間の前記チャンバギャップは、少なくとも4インチである、方法。
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US9099398B2 (en) | 2015-08-04 |
TW201641741A (zh) | 2016-12-01 |
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US9934979B2 (en) | 2018-04-03 |
WO2012166364A1 (en) | 2012-12-06 |
TW201300570A (zh) | 2013-01-01 |
US20120309204A1 (en) | 2012-12-06 |
TWI563121B (en) | 2016-12-21 |
KR20140039010A (ko) | 2014-03-31 |
TWI612179B (zh) | 2018-01-21 |
JP2014523635A (ja) | 2014-09-11 |
TW201250831A (en) | 2012-12-16 |
US8562785B2 (en) | 2013-10-22 |
TWI559392B (zh) | 2016-11-21 |
US20140065827A1 (en) | 2014-03-06 |
CN103597113A (zh) | 2014-02-19 |
US20150318147A1 (en) | 2015-11-05 |
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