JP5877043B2 - デュプレクサ - Google Patents

デュプレクサ Download PDF

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Publication number
JP5877043B2
JP5877043B2 JP2011255545A JP2011255545A JP5877043B2 JP 5877043 B2 JP5877043 B2 JP 5877043B2 JP 2011255545 A JP2011255545 A JP 2011255545A JP 2011255545 A JP2011255545 A JP 2011255545A JP 5877043 B2 JP5877043 B2 JP 5877043B2
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JP
Japan
Prior art keywords
resonator
filter
thin film
piezoelectric thin
chip
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Application number
JP2011255545A
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English (en)
Japanese (ja)
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JP2013110655A (ja
JP2013110655A5 (https=
Inventor
西原　時弘
時弘 西原
眞司 谷口
眞司 谷口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Yuden Co Ltd
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Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Yuden Co Ltd filed Critical Taiyo Yuden Co Ltd
Priority to JP2011255545A priority Critical patent/JP5877043B2/ja
Priority to US13/610,393 priority patent/US9240768B2/en
Priority to CN201210479096.5A priority patent/CN103138032B/zh
Publication of JP2013110655A publication Critical patent/JP2013110655A/ja
Publication of JP2013110655A5 publication Critical patent/JP2013110655A5/ja
Application granted granted Critical
Publication of JP5877043B2 publication Critical patent/JP5877043B2/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/542—Filters comprising resonators of piezoelectric or electrostrictive material including passive elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/60—Electric coupling means therefor
    • H03H9/605—Electric coupling means therefor consisting of a ladder configuration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/703—Networks using bulk acoustic wave devices
    • H03H9/706—Duplexers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/72—Networks using surface acoustic waves
    • H03H9/725—Duplexers

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2011255545A 2011-11-22 2011-11-22 デュプレクサ Active JP5877043B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011255545A JP5877043B2 (ja) 2011-11-22 2011-11-22 デュプレクサ
US13/610,393 US9240768B2 (en) 2011-11-22 2012-09-11 Duplexer with transmission and reception filters each including resonators formed on different chips
CN201210479096.5A CN103138032B (zh) 2011-11-22 2012-11-22 双工器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011255545A JP5877043B2 (ja) 2011-11-22 2011-11-22 デュプレクサ

Publications (3)

Publication Number Publication Date
JP2013110655A JP2013110655A (ja) 2013-06-06
JP2013110655A5 JP2013110655A5 (https=) 2015-01-15
JP5877043B2 true JP5877043B2 (ja) 2016-03-02

Family

ID=48426207

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011255545A Active JP5877043B2 (ja) 2011-11-22 2011-11-22 デュプレクサ

Country Status (3)

Country Link
US (1) US9240768B2 (https=)
JP (1) JP5877043B2 (https=)
CN (1) CN103138032B (https=)

Families Citing this family (100)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105659495B (zh) * 2013-08-21 2018-06-19 株式会社村田制作所 压电谐振器及其制造方法
JP5765501B1 (ja) * 2013-09-17 2015-08-19 株式会社村田製作所 デュプレクサ
JP6374653B2 (ja) 2013-11-18 2018-08-15 太陽誘電株式会社 弾性波フィルタ及び分波器
DE102014109264B4 (de) * 2014-07-02 2017-11-16 Snaptrack, Inc. Resonatorschaltung mit erweiterten Freiheitsgraden, Filter mit verbesserter Abstimmbarkeit und Duplexer mit verbesserter Abstimmbarkeit
JP6400970B2 (ja) * 2014-07-25 2018-10-03 太陽誘電株式会社 フィルタおよびデュプレクサ
KR101931679B1 (ko) * 2014-10-06 2018-12-21 가부시키가이샤 무라타 세이사쿠쇼 래더형 필터 및 듀플렉서
JP6332101B2 (ja) 2015-03-26 2018-05-30 株式会社村田製作所 弾性表面波フィルタ
JP6494545B2 (ja) 2016-02-23 2019-04-03 太陽誘電株式会社 デュプレクサ
JP6534366B2 (ja) 2016-06-07 2019-06-26 太陽誘電株式会社 弾性波デバイス
JP6886264B2 (ja) * 2016-09-21 2021-06-16 太陽誘電株式会社 弾性波デバイス並びに複合基板およびその製造方法
US10541673B2 (en) * 2016-10-28 2020-01-21 Skyworks Solutions, Inc. Acoustic wave filter including two types of acoustic wave resonators
JP6534406B2 (ja) * 2017-03-21 2019-06-26 太陽誘電株式会社 マルチプレクサ
CN111587536B (zh) * 2018-01-12 2024-01-19 株式会社村田制作所 弹性波装置、多工器、高频前端电路及通信装置
US11323089B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Filter using piezoelectric film bonded to high resistivity silicon substrate with trap-rich layer
US11146232B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Transversely-excited film bulk acoustic resonator with reduced spurious modes
US12040779B2 (en) 2020-04-20 2024-07-16 Murata Manufacturing Co., Ltd. Small transversely-excited film bulk acoustic resonators with enhanced Q-factor
US10790802B2 (en) 2018-06-15 2020-09-29 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate
US11936358B2 (en) 2020-11-11 2024-03-19 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with low thermal impedance
US12237826B2 (en) 2018-06-15 2025-02-25 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
US11996827B2 (en) 2018-06-15 2024-05-28 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with periodic etched holes
US11323090B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator using Y-X-cut lithium niobate for high power applications
US11509279B2 (en) 2020-07-18 2022-11-22 Resonant Inc. Acoustic resonators and filters with reduced temperature coefficient of frequency
US10601392B2 (en) 2018-06-15 2020-03-24 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator
US12088281B2 (en) 2021-02-03 2024-09-10 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multi-mark interdigital transducer
US11206009B2 (en) 2019-08-28 2021-12-21 Resonant Inc. Transversely-excited film bulk acoustic resonator with interdigital transducer with varied mark and pitch
US11323096B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator with periodic etched holes
US10911023B2 (en) 2018-06-15 2021-02-02 Resonant Inc. Transversely-excited film bulk acoustic resonator with etch-stop layer
US10637438B2 (en) 2018-06-15 2020-04-28 Resonant Inc. Transversely-excited film bulk acoustic resonators for high power applications
SG10201902753RA (en) 2018-04-12 2019-11-28 Skyworks Solutions Inc Filter Including Two Types Of Acoustic Wave Resonators
DE102018113624A1 (de) * 2018-06-07 2019-12-12 RF360 Europe GmbH Elektroakustischer Resonator und HF-Filter, das einen elektroakustischen Resonator umfasst
US11901878B2 (en) 2018-06-15 2024-02-13 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes with a wider top layer
US11888463B2 (en) 2018-06-15 2024-01-30 Murata Manufacturing Co., Ltd. Multi-port filter using transversely-excited film bulk acoustic resonators
US11349452B2 (en) 2018-06-15 2022-05-31 Resonant Inc. Transversely-excited film bulk acoustic filters with symmetric layout
US11374549B2 (en) 2018-06-15 2022-06-28 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
US12009798B2 (en) 2018-06-15 2024-06-11 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with electrodes having irregular hexagon cross-sectional shapes
US11876498B2 (en) 2018-06-15 2024-01-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
US11146238B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Film bulk acoustic resonator fabrication method
US12113512B2 (en) 2021-03-29 2024-10-08 Murata Manufacturing Co., Ltd. Layout of XBARs with multiple sub-resonators in parallel
US12149227B2 (en) 2018-06-15 2024-11-19 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US11996822B2 (en) 2018-06-15 2024-05-28 Murata Manufacturing Co., Ltd. Wide bandwidth time division duplex transceiver
US11967945B2 (en) 2018-06-15 2024-04-23 Murata Manufacturing Co., Ltd. Transversly-excited film bulk acoustic resonators and filters
US11323095B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Rotation in XY plane to suppress spurious modes in XBAR devices
US12155371B2 (en) 2021-03-29 2024-11-26 Murata Manufacturing Co., Ltd. Layout of xbars with multiple sub-resonators in series
US12095441B2 (en) 2018-06-15 2024-09-17 Murata Manufacturing Co., Ltd. Transversely excited film bulk acoustic resonator with recessed interdigital transducer fingers
US10985728B2 (en) 2018-06-15 2021-04-20 Resonant Inc. Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer
US12184261B2 (en) 2018-06-15 2024-12-31 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with a cavity having round end zones
US11949402B2 (en) 2020-08-31 2024-04-02 Murata Manufacturing Co., Ltd. Resonators with different membrane thicknesses on the same die
US11323091B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator with diaphragm support pedestals
US11916539B2 (en) 2020-02-28 2024-02-27 Murata Manufacturing Co., Ltd. Split-ladder band N77 filter using transversely-excited film bulk acoustic resonators
US12301212B2 (en) 2018-06-15 2025-05-13 Murata Manufacturing Co., Ltd. XBAR resonators with non-rectangular diaphragms
US12191838B2 (en) 2018-06-15 2025-01-07 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic device and method
US12040781B2 (en) 2018-06-15 2024-07-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US11996825B2 (en) 2020-06-17 2024-05-28 Murata Manufacturing Co., Ltd. Filter using lithium niobate and rotated lithium tantalate transversely-excited film bulk acoustic resonators
US10797675B2 (en) 2018-06-15 2020-10-06 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated z-cut lithium niobate
US11349450B2 (en) 2018-06-15 2022-05-31 Resonant Inc. Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes
US10826462B2 (en) 2018-06-15 2020-11-03 Resonant Inc. Transversely-excited film bulk acoustic resonators with molybdenum conductors
US12021496B2 (en) 2020-08-31 2024-06-25 Murata Manufacturing Co., Ltd. Resonators with different membrane thicknesses on the same die
US11264966B2 (en) 2018-06-15 2022-03-01 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack
US11909381B2 (en) 2018-06-15 2024-02-20 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
US12191837B2 (en) 2018-06-15 2025-01-07 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic device
US11329628B2 (en) 2020-06-17 2022-05-10 Resonant Inc. Filter using lithium niobate and lithium tantalate transversely-excited film bulk acoustic resonators
US12463619B2 (en) 2018-06-15 2025-11-04 Murata Manufacturing Co., Ltd. Filter device
US12119808B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US12119805B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Substrate processing and membrane release of transversely-excited film bulk acoustic resonator using a sacrificial tub
US11870423B2 (en) 2018-06-15 2024-01-09 Murata Manufacturing Co., Ltd. Wide bandwidth temperature-compensated transversely-excited film bulk acoustic resonator
US10917072B2 (en) * 2019-06-24 2021-02-09 Resonant Inc. Split ladder acoustic wave filters
US10992284B2 (en) 2018-06-15 2021-04-27 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
US10998882B2 (en) 2018-06-15 2021-05-04 Resonant Inc. XBAR resonators with non-rectangular diaphragms
US12224732B2 (en) 2018-06-15 2025-02-11 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic resonators and filters for 27 GHz communications bands
US12237827B2 (en) 2018-06-15 2025-02-25 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic filters with multiple piezoelectric plate thicknesses
US12155374B2 (en) 2021-04-02 2024-11-26 Murata Manufacturing Co., Ltd. Tiled transversely-excited film bulk acoustic resonator high power filters
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DE102018132881B4 (de) * 2018-12-19 2020-08-06 RF360 Europe GmbH Akustische Filter mit verbesserter Reflektivität
CN111727564B (zh) * 2018-12-28 2024-01-19 株式会社村田制作所 滤波器装置以及多工器
WO2020186261A1 (en) 2019-03-14 2020-09-17 Resonant Inc. Transversely-excited film bulk acoustic resonator with half-lambda dielectric layer
CN118353412A (zh) 2019-04-05 2024-07-16 株式会社村田制作所 横向激励薄膜体声波谐振器封装和方法
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CN111224641B (zh) * 2020-01-22 2021-08-10 诺思(天津)微系统有限责任公司 一种滤波器、双工器、高频前端电路及通信装置
US12506462B2 (en) 2020-02-28 2025-12-23 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multi-pitch interdigital transducer
US12255625B2 (en) 2020-02-28 2025-03-18 Murata Manufacturing Co., Ltd. Filter using transversely-excited film bulk acoustic resonators with inductively coupled sub-resonators
US12341490B2 (en) 2020-04-20 2025-06-24 Murata Manufacturing Co., Ltd. Low loss transversely-excited film bulk acoustic resonators and filters
US12341493B2 (en) 2020-04-20 2025-06-24 Murata Manufacturing Co., Ltd. Low loss transversely-excited film bulk acoustic resonators and filters
US12278617B2 (en) 2020-04-20 2025-04-15 Murata Manufacturing Co., Ltd. High Q solidly-mounted transversely-excited film bulk acoustic resonators
US11811391B2 (en) 2020-05-04 2023-11-07 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with etched conductor patterns
CN112054777B (zh) * 2020-05-09 2024-11-15 诺思(天津)微系统有限责任公司 体声波谐振器组件及制造方法、滤波器及电子设备
US11742828B2 (en) 2020-06-30 2023-08-29 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with symmetric diaphragm
KR102463862B1 (ko) * 2020-08-20 2022-11-04 (주)와이솔 개선된 온도계수를 갖는 fbar 칩 및 패키지
US12255617B2 (en) 2020-11-11 2025-03-18 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic resonators with low thermal impedance
US12003226B2 (en) 2020-11-11 2024-06-04 Murata Manufacturing Co., Ltd Transversely-excited film bulk acoustic resonator with low thermal impedance
CN114978085B (zh) * 2021-02-26 2025-09-23 诺思(天津)微系统有限责任公司 双工器、抑制双工器高次谐振的方法以及电子设备
CN115051680B (zh) * 2021-03-08 2026-01-09 诺思(天津)微系统有限责任公司 具有单晶和多晶体声波谐振器的滤波器及电子设备
JP7627174B2 (ja) * 2021-05-31 2025-02-05 太陽誘電株式会社 ラダー型フィルタおよびマルチプレクサ
CN113507275A (zh) * 2021-07-15 2021-10-15 绍兴汉天下微电子有限公司 一种体声波滤波器、版图布局方法以及通信器件
JP7849195B2 (ja) * 2022-03-14 2026-04-21 太陽誘電株式会社 マルチプレクサ
CN114567287B (zh) * 2022-03-21 2025-02-07 苏州汉天下电子有限公司 多工器
CN114465601B (zh) * 2022-04-13 2022-08-12 苏州汉天下电子有限公司 一种滤波器、双工器以及多工器
CN115913169B (zh) * 2022-12-29 2024-03-15 苏州声芯电子科技有限公司 改善声表滤波器件温漂的电路封装结构和封装方法
CN118659755B (zh) * 2024-08-19 2025-02-14 广州市艾佛光通科技有限公司 一种温度补偿型薄膜体声波谐振器及其制备方法和滤波器

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Also Published As

Publication number Publication date
CN103138032A (zh) 2013-06-05
JP2013110655A (ja) 2013-06-06
CN103138032B (zh) 2016-06-22
US20130127565A1 (en) 2013-05-23
US9240768B2 (en) 2016-01-19

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