JP5864920B2 - 回折格子の製造方法 - Google Patents

回折格子の製造方法 Download PDF

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Publication number
JP5864920B2
JP5864920B2 JP2011151277A JP2011151277A JP5864920B2 JP 5864920 B2 JP5864920 B2 JP 5864920B2 JP 2011151277 A JP2011151277 A JP 2011151277A JP 2011151277 A JP2011151277 A JP 2011151277A JP 5864920 B2 JP5864920 B2 JP 5864920B2
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JP
Japan
Prior art keywords
diffraction grating
grating
blazed diffraction
workpiece
manufacturing
Prior art date
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Active
Application number
JP2011151277A
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English (en)
Japanese (ja)
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JP2012145908A5 (enExample
JP2012145908A (ja
Inventor
隆 助川
隆 助川
成 杉山
成 杉山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011151277A priority Critical patent/JP5864920B2/ja
Priority to ES11009814T priority patent/ES2427789T3/es
Priority to EP13004129.6A priority patent/EP2667228B1/en
Priority to EP11009814.2A priority patent/EP2466346B1/en
Priority to US13/330,748 priority patent/US9678253B2/en
Publication of JP2012145908A publication Critical patent/JP2012145908A/ja
Publication of JP2012145908A5 publication Critical patent/JP2012145908A5/ja
Application granted granted Critical
Publication of JP5864920B2 publication Critical patent/JP5864920B2/ja
Priority to US15/590,427 priority patent/US10168457B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B19/00—Selenium; Tellurium; Compounds thereof
    • C01B19/007—Tellurides or selenides of metals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • H10F77/169—Thin semiconductor films on metallic or insulating substrates
    • H10F77/1696—Thin semiconductor films on metallic or insulating substrates the films including Group II-VI materials, e.g. CdTe or CdS

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2011151277A 2010-12-20 2011-07-07 回折格子の製造方法 Active JP5864920B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2011151277A JP5864920B2 (ja) 2010-12-20 2011-07-07 回折格子の製造方法
EP13004129.6A EP2667228B1 (en) 2010-12-20 2011-12-13 Diffraction grating
EP11009814.2A EP2466346B1 (en) 2010-12-20 2011-12-13 Manufacturing method of diffraction grating in CdTe or CdZnTe
ES11009814T ES2427789T3 (es) 2010-12-20 2011-12-13 Método de fabricación de una rejilla de difracción en CdTe o CdZnTe
US13/330,748 US9678253B2 (en) 2010-12-20 2011-12-20 Manufacturing method of diffraction grating
US15/590,427 US10168457B2 (en) 2010-12-20 2017-05-09 Manufacturing method of diffraction grating

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010282546 2010-12-20
JP2010282546 2010-12-20
JP2011151277A JP5864920B2 (ja) 2010-12-20 2011-07-07 回折格子の製造方法

Publications (3)

Publication Number Publication Date
JP2012145908A JP2012145908A (ja) 2012-08-02
JP2012145908A5 JP2012145908A5 (enExample) 2014-03-27
JP5864920B2 true JP5864920B2 (ja) 2016-02-17

Family

ID=45445703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011151277A Active JP5864920B2 (ja) 2010-12-20 2011-07-07 回折格子の製造方法

Country Status (4)

Country Link
US (2) US9678253B2 (enExample)
EP (2) EP2667228B1 (enExample)
JP (1) JP5864920B2 (enExample)
ES (1) ES2427789T3 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014002295A (ja) * 2012-06-20 2014-01-09 Canon Inc 回折格子の製造方法
JP2014002294A (ja) * 2012-06-20 2014-01-09 Canon Inc 回折格子の製造方法

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5731811B2 (ja) * 2010-12-15 2015-06-10 キヤノン株式会社 ブレーズ型回折格子の製造方法及びそのための型の製造方法
JP6032869B2 (ja) * 2011-03-10 2016-11-30 キヤノン株式会社 ブレーズ型回折格子
JP5972100B2 (ja) * 2012-08-13 2016-08-17 キヤノン株式会社 反射型回折素子
CN103499851B (zh) 2013-09-29 2015-06-10 清华大学深圳研究生院 一种闪耀凹面光栅制作方法
JP2015121605A (ja) * 2013-12-20 2015-07-02 キヤノン株式会社 回折格子および回折格子の製造方法
JP6253724B2 (ja) * 2016-07-08 2017-12-27 キヤノン株式会社 反射型回折素子
CN109407192A (zh) * 2018-11-26 2019-03-01 中国科学院长春光学精密机械与物理研究所 一种光栅刻划机刻线位置测量光路的调整方法及其系统
CN110788710B (zh) * 2019-10-16 2021-02-19 中国电子科技集团公司第十一研究所 一种碲锌镉晶体表面磨抛装置
CN112372036B (zh) * 2020-10-30 2023-05-23 东北林业大学 一种亚波长闪耀光栅结构的加工方法
JP7647481B2 (ja) * 2021-10-05 2025-03-18 日本電気硝子株式会社 イマージョン回折素子
WO2025097039A1 (en) * 2023-11-03 2025-05-08 Applied Materials, Inc. Blazed grating formation by staircase etch

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946363B2 (ja) * 1979-04-06 1984-11-12 日本電信電話株式会社 平面回折格子の製法
EP0007108B1 (en) * 1978-07-18 1983-04-13 Nippon Telegraph and Telephone Public Corporation A method of manufacturing a diffraction grating structure
US4376663A (en) * 1980-11-18 1983-03-15 The United States Of America As Represented By The Secretary Of The Army Method for growing an epitaxial layer of CdTe on an epitaxial layer of HgCdTe grown on a CdTe substrate
US4475792A (en) * 1982-07-27 1984-10-09 The United States Of America As Represented By The Secretary Of The Navy High resolution diffraction grating
JP2003075622A (ja) * 2001-09-05 2003-03-12 Toshiba Corp 回折格子、回折格子の加工方法及び光学要素
JP5669434B2 (ja) * 2009-05-09 2015-02-12 キヤノン株式会社 回折素子及び回折素子の製造方法及びそれを用いた分光器

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014002295A (ja) * 2012-06-20 2014-01-09 Canon Inc 回折格子の製造方法
JP2014002294A (ja) * 2012-06-20 2014-01-09 Canon Inc 回折格子の製造方法
US9372289B2 (en) 2012-06-20 2016-06-21 Canon Kabushiki Kaisha Method of manufacturing a diffraction grating
US9715049B2 (en) 2012-06-20 2017-07-25 Canon Kabushiki Kaisha Method of manufacturing a diffraction grating

Also Published As

Publication number Publication date
US20170242166A1 (en) 2017-08-24
EP2667228B1 (en) 2017-07-19
EP2667228A1 (en) 2013-11-27
US10168457B2 (en) 2019-01-01
JP2012145908A (ja) 2012-08-02
EP2466346B1 (en) 2013-09-11
US9678253B2 (en) 2017-06-13
EP2466346A1 (en) 2012-06-20
US20120156967A1 (en) 2012-06-21
ES2427789T3 (es) 2013-11-04

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