JP5852461B2 - 超音波探触子及びそれを用いた超音波診断装置 - Google Patents

超音波探触子及びそれを用いた超音波診断装置 Download PDF

Info

Publication number
JP5852461B2
JP5852461B2 JP2012029259A JP2012029259A JP5852461B2 JP 5852461 B2 JP5852461 B2 JP 5852461B2 JP 2012029259 A JP2012029259 A JP 2012029259A JP 2012029259 A JP2012029259 A JP 2012029259A JP 5852461 B2 JP5852461 B2 JP 5852461B2
Authority
JP
Japan
Prior art keywords
film
substrate
ultrasonic probe
ultrasonic
beam portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012029259A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013165753A (ja
JP2013165753A5 (enExample
Inventor
吉村　保廣
保廣 吉村
永田　達也
達也 永田
暁史 佐光
暁史 佐光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Aloka Medical Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Aloka Medical Ltd filed Critical Hitachi Aloka Medical Ltd
Priority to JP2012029259A priority Critical patent/JP5852461B2/ja
Priority to US14/377,265 priority patent/US9846145B2/en
Priority to PCT/JP2013/053335 priority patent/WO2013122075A1/ja
Priority to EP13748547.0A priority patent/EP2815700A4/en
Priority to CN201380008619.0A priority patent/CN104114097B/zh
Publication of JP2013165753A publication Critical patent/JP2013165753A/ja
Publication of JP2013165753A5 publication Critical patent/JP2013165753A5/ja
Application granted granted Critical
Publication of JP5852461B2 publication Critical patent/JP5852461B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/13—Tomography
    • A61B8/14—Echo-tomography
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/46—Ultrasonic, sonic or infrasonic diagnostic devices with special arrangements for interfacing with the operator or the patient
    • A61B8/461—Displaying means of special interest
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/044—Internal reflections (echoes), e.g. on walls or defects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/101—Number of transducers one transducer

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Veterinary Medicine (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Biophysics (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Public Health (AREA)
  • Gynecology & Obstetrics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
JP2012029259A 2012-02-14 2012-02-14 超音波探触子及びそれを用いた超音波診断装置 Active JP5852461B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012029259A JP5852461B2 (ja) 2012-02-14 2012-02-14 超音波探触子及びそれを用いた超音波診断装置
US14/377,265 US9846145B2 (en) 2012-02-14 2013-02-13 Ultrasound probe and ultrasound equipment using same
PCT/JP2013/053335 WO2013122075A1 (ja) 2012-02-14 2013-02-13 超音波探触子及びそれを用いた超音波診断装置
EP13748547.0A EP2815700A4 (en) 2012-02-14 2013-02-13 ULTRASONIC PROBE AND ULTRASONIC EQUIPMENT USING THE SAME
CN201380008619.0A CN104114097B (zh) 2012-02-14 2013-02-13 超声波探头以及使用了该超声波探头的超声波诊断装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012029259A JP5852461B2 (ja) 2012-02-14 2012-02-14 超音波探触子及びそれを用いた超音波診断装置

Publications (3)

Publication Number Publication Date
JP2013165753A JP2013165753A (ja) 2013-08-29
JP2013165753A5 JP2013165753A5 (enExample) 2014-09-25
JP5852461B2 true JP5852461B2 (ja) 2016-02-03

Family

ID=48984185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012029259A Active JP5852461B2 (ja) 2012-02-14 2012-02-14 超音波探触子及びそれを用いた超音波診断装置

Country Status (5)

Country Link
US (1) US9846145B2 (enExample)
EP (1) EP2815700A4 (enExample)
JP (1) JP5852461B2 (enExample)
CN (1) CN104114097B (enExample)
WO (1) WO2013122075A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104379268B (zh) * 2012-05-31 2017-02-22 皇家飞利浦有限公司 晶片及其制造方法
US10130339B2 (en) * 2014-06-30 2018-11-20 Seiko Epson Corporation Ultrasound sensor and method of manufacturing thereof
DE202015007010U1 (de) * 2015-10-07 2015-10-22 Rosenberger Hochfrequenztechnik Gmbh & Co. Kg Verbinder
JP6724502B2 (ja) * 2016-04-06 2020-07-15 セイコーエプソン株式会社 超音波装置
JP6739556B2 (ja) * 2016-06-30 2020-08-12 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 医療用機器のための封止されたコントロールパネル
JP6606034B2 (ja) 2016-08-24 2019-11-13 株式会社日立製作所 容量検出型超音波トランスデューサおよびそれを備えた超音波撮像装置
JP7141934B2 (ja) * 2018-12-03 2022-09-26 株式会社日立製作所 超音波トランスデューサ、その製造方法および超音波撮像装置
JP7224190B2 (ja) * 2019-01-15 2023-02-17 株式会社日立製作所 超音波トランスデューサ、その製造方法および超音波撮像装置
JP7236320B2 (ja) * 2019-05-08 2023-03-09 富士フイルムヘルスケア株式会社 超音波探触子及びそれを用いた超音波送受信装置
WO2022210851A1 (ja) * 2021-03-30 2022-10-06 国立大学法人山形大学 可撓性超音波プローブヘッド、超音波プローブ、及び超音波診断装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7612483B2 (en) 2004-02-27 2009-11-03 Georgia Tech Research Corporation Harmonic cMUT devices and fabrication methods
JP2005252056A (ja) * 2004-03-05 2005-09-15 Sony Corp 集積回路装置およびその製造方法
US7888709B2 (en) * 2004-09-15 2011-02-15 Sonetics Ultrasound, Inc. Capacitive micromachined ultrasonic transducer and manufacturing method
JP4735117B2 (ja) 2005-08-08 2011-07-27 栗田工業株式会社 製紙方法
JP4434109B2 (ja) 2005-09-05 2010-03-17 株式会社日立製作所 電気・音響変換素子
WO2007046180A1 (ja) * 2005-10-18 2007-04-26 Hitachi, Ltd. 超音波トランスデューサ、超音波探触子および超音波撮像装置
CN101238754A (zh) 2005-10-18 2008-08-06 株式会社日立制作所 超声波换能器、超声波探头以及超声波摄像装置
US20070180916A1 (en) * 2006-02-09 2007-08-09 General Electric Company Capacitive micromachined ultrasound transducer and methods of making the same
GB0605576D0 (en) 2006-03-20 2006-04-26 Oligon Ltd MEMS device
JP4730162B2 (ja) 2006-03-24 2011-07-20 株式会社日立製作所 超音波送受信デバイス，超音波探触子およびその製造方法
JP4958631B2 (ja) 2007-05-14 2012-06-20 株式会社日立製作所 超音波送受信デバイス及びそれを用いた超音波探触子
JP2010004199A (ja) * 2008-06-19 2010-01-07 Hitachi Ltd 超音波トランスデューサおよびその製造方法
EP2145696A1 (en) 2008-07-15 2010-01-20 UAB Minatech Capacitive micromachined ultrasonic transducer and its fabrication method
JP2011259186A (ja) * 2010-06-09 2011-12-22 Canon Inc 静電容量型電気機械変換装置及びその製造方法

Also Published As

Publication number Publication date
US9846145B2 (en) 2017-12-19
JP2013165753A (ja) 2013-08-29
US20150011890A1 (en) 2015-01-08
EP2815700A1 (en) 2014-12-24
WO2013122075A1 (ja) 2013-08-22
EP2815700A4 (en) 2015-11-04
CN104114097B (zh) 2016-04-13
CN104114097A (zh) 2014-10-22

Similar Documents

Publication Publication Date Title
JP5852461B2 (ja) 超音波探触子及びそれを用いた超音波診断装置
JP5928151B2 (ja) 超音波トランスデューサー、超音波プローブ、診断装置および電子機器
CN103720486B (zh) 超声波转换器装置、探测头、超声波探测器及电子设备
EP2688686B1 (en) Ultrasonic cmut with suppressed acoustic coupling to the substrate
JP6065421B2 (ja) 超音波プローブおよび超音波検査装置
JP5589826B2 (ja) 超音波センサー
JP6123171B2 (ja) 超音波トランスデューサー、超音波プローブおよび超音波検査装置
JP7224190B2 (ja) 超音波トランスデューサ、その製造方法および超音波撮像装置
JP2017023554A (ja) 超音波デバイス、超音波モジュール、電子機器、及び超音波測定装置
CN109196881B (zh) 超声波器件、超声波模块和超声波测量装置
JP5834679B2 (ja) 超音波プローブおよび超音波画像診断装置
CN104013420B (zh) 超声波探测器器件、头单元、探测器及超声波图像装置
JP6601190B2 (ja) 圧電モジュール、超音波モジュール及び電子機器
JP6860470B2 (ja) 超音波センサ
CN104771190A (zh) 超声波装置、超声波换能器装置及超声波图像装置
JP6135184B2 (ja) 超音波トランスデューサーデバイス、ヘッドユニット、プローブ及び超音波画像装置
JP6795986B2 (ja) 超音波探触子、超音波診断装置
JP2018029700A (ja) 超音波デバイス、超音波モジュール、及び超音波装置
JP7312274B2 (ja) 超音波デバイス及び超音波診断装置
JP5780347B2 (ja) 生体検査装置
WO2022210851A1 (ja) 可撓性超音波プローブヘッド、超音波プローブ、及び超音波診断装置
JP6288235B2 (ja) 超音波プローブおよび超音波検査装置
JP2016063499A (ja) トランスデューサ、および被検体情報取得装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140811

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140811

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20150901

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20151028

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20151117

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20151204

R150 Certificate of patent or registration of utility model

Ref document number: 5852461

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250