JP5844163B2 - 研磨装置 - Google Patents

研磨装置 Download PDF

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Publication number
JP5844163B2
JP5844163B2 JP2012003870A JP2012003870A JP5844163B2 JP 5844163 B2 JP5844163 B2 JP 5844163B2 JP 2012003870 A JP2012003870 A JP 2012003870A JP 2012003870 A JP2012003870 A JP 2012003870A JP 5844163 B2 JP5844163 B2 JP 5844163B2
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JP
Japan
Prior art keywords
head cover
polishing
dresser
head
top ring
Prior art date
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Active
Application number
JP2012003870A
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English (en)
Japanese (ja)
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JP2013141735A5 (enExample
JP2013141735A (ja
Inventor
隆一 小菅
隆一 小菅
曽根　忠一
忠一 曽根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2012003870A priority Critical patent/JP5844163B2/ja
Priority to TW101149798A priority patent/TWI535528B/zh
Priority to US13/736,180 priority patent/US9028297B2/en
Priority to KR1020130003284A priority patent/KR101617493B1/ko
Publication of JP2013141735A publication Critical patent/JP2013141735A/ja
Publication of JP2013141735A5 publication Critical patent/JP2013141735A5/ja
Application granted granted Critical
Publication of JP5844163B2 publication Critical patent/JP5844163B2/ja
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP2012003870A 2012-01-12 2012-01-12 研磨装置 Active JP5844163B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012003870A JP5844163B2 (ja) 2012-01-12 2012-01-12 研磨装置
TW101149798A TWI535528B (zh) 2012-01-12 2012-12-25 Grinding device
US13/736,180 US9028297B2 (en) 2012-01-12 2013-01-08 Polishing apparatus
KR1020130003284A KR101617493B1 (ko) 2012-01-12 2013-01-11 연마 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012003870A JP5844163B2 (ja) 2012-01-12 2012-01-12 研磨装置

Publications (3)

Publication Number Publication Date
JP2013141735A JP2013141735A (ja) 2013-07-22
JP2013141735A5 JP2013141735A5 (enExample) 2015-07-16
JP5844163B2 true JP5844163B2 (ja) 2016-01-13

Family

ID=48945959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012003870A Active JP5844163B2 (ja) 2012-01-12 2012-01-12 研磨装置

Country Status (4)

Country Link
US (1) US9028297B2 (enExample)
JP (1) JP5844163B2 (enExample)
KR (1) KR101617493B1 (enExample)
TW (1) TWI535528B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2639710B2 (ja) 1987-12-03 1997-08-13 ドイツチエ バブコツク ヴエルケ アクチエンゲゼルシャフト パイプをきれいにする装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104742008B (zh) * 2013-12-27 2017-03-22 中芯国际集成电路制造(上海)有限公司 化学机械研磨方法及化学机械研磨装置
JP6342198B2 (ja) * 2014-03-31 2018-06-13 株式会社荏原製作所 研磨装置の構成部品用のカバー、研磨装置の構成部品、および、研磨装置
US10576604B2 (en) * 2014-04-30 2020-03-03 Ebara Corporation Substrate polishing apparatus
CN104117898B (zh) * 2014-07-02 2016-08-17 吴志坚 艺术抛光工具
KR102177123B1 (ko) * 2014-08-28 2020-11-11 삼성전자주식회사 화학적 기계적 연마 장치
CN106272038A (zh) * 2015-06-04 2017-01-04 有研半导体材料有限公司 一种硅片抛光机边缘导轮
JP7220648B2 (ja) * 2019-12-20 2023-02-10 株式会社荏原製作所 基板処理装置および基板処理方法
CN112720247B (zh) * 2020-12-30 2022-04-19 合肥晶合集成电路股份有限公司 一种化学机械平坦化设备及其应用
CN117067101A (zh) * 2023-08-22 2023-11-17 西可装备制造(衡阳)有限公司 一种研磨摆动机构及研磨抛光机

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2649439B1 (fr) 1989-07-07 1991-09-20 Ferco Int Usine Ferrures Palier intermediaire pour fenetre, porte ou analogue
JP3043578B2 (ja) 1993-10-25 2000-05-22 東芝機械株式会社 研磨装置
JPH09195640A (ja) * 1996-01-19 1997-07-29 Tostem Corp 換気框を備えたサッシまたは戸
JPH1075507A (ja) * 1996-08-29 1998-03-17 Energy Support Corp 開閉装置の防塵方法
JP3722591B2 (ja) * 1997-05-30 2005-11-30 株式会社日立製作所 研磨装置
JPH11129132A (ja) * 1997-10-28 1999-05-18 Amada Eng Center Co Ltd 板材加工複合機における防塵装置
JP3013302B2 (ja) * 1998-03-20 2000-02-28 ユキワ精工株式会社 回転テーブル装置
JPH11320385A (ja) * 1998-05-14 1999-11-24 Matsushita Electric Ind Co Ltd 研磨方法及びその装置
JP2000082859A (ja) * 1998-07-13 2000-03-21 Hitachi Metals Ltd 固体レ―ザ装置
US6033290A (en) * 1998-09-29 2000-03-07 Applied Materials, Inc. Chemical mechanical polishing conditioner
JP2007313644A (ja) * 1999-05-17 2007-12-06 Ebara Corp ドレッシング装置
US6419559B1 (en) * 2000-07-10 2002-07-16 Applied Materials, Inc. Using a purge gas in a chemical mechanical polishing apparatus with an incrementally advanceable polishing sheet
JP2003306259A (ja) * 2002-04-12 2003-10-28 Shinko Electric Ind Co Ltd 長尺帯状体の送り異常検知装置
US7288165B2 (en) * 2003-10-24 2007-10-30 Applied Materials, Inc. Pad conditioning head for CMP process
JP2008166709A (ja) 2006-12-05 2008-07-17 Ebara Corp 基板研磨装置、及び基板研磨設備
JP2009026569A (ja) * 2007-07-19 2009-02-05 Toyota Motor Corp 密閉型電池の気密検査方法及び密閉型電池

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2639710B2 (ja) 1987-12-03 1997-08-13 ドイツチエ バブコツク ヴエルケ アクチエンゲゼルシャフト パイプをきれいにする装置

Also Published As

Publication number Publication date
US9028297B2 (en) 2015-05-12
KR20130083406A (ko) 2013-07-22
TWI535528B (zh) 2016-06-01
JP2013141735A (ja) 2013-07-22
US20130210324A1 (en) 2013-08-15
KR101617493B1 (ko) 2016-05-02
TW201332713A (zh) 2013-08-16

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