JP5841750B2 - 顕微鏡用の自動合焦装置および適切な自動焦点開口絞り - Google Patents

顕微鏡用の自動合焦装置および適切な自動焦点開口絞り Download PDF

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JP5841750B2
JP5841750B2 JP2011136142A JP2011136142A JP5841750B2 JP 5841750 B2 JP5841750 B2 JP 5841750B2 JP 2011136142 A JP2011136142 A JP 2011136142A JP 2011136142 A JP2011136142 A JP 2011136142A JP 5841750 B2 JP5841750 B2 JP 5841750B2
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autofocus
diaphragm
aperture stop
aperture
triangular
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JP2012008566A (ja
JP2012008566A5 (https=
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ラルフ　クリューガー
クリューガー ラルフ
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ライカ マイクロシステムス ツェーエムエス ゲーエムベーハー
ライカ マイクロシステムス ツェーエムエス ゲーエムベーハー
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/245—Devices for focusing using auxiliary sources, detectors

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Automatic Focus Adjustment (AREA)
JP2011136142A 2010-06-23 2011-06-20 顕微鏡用の自動合焦装置および適切な自動焦点開口絞り Active JP5841750B2 (ja)

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Application Number Priority Date Filing Date Title
DE102010030430.1 2010-06-23
DE102010030430.1A DE102010030430B4 (de) 2010-06-23 2010-06-23 Triangulierende Autofokuseinrichtung für Mikroskope und Verwendungen hiervon

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JP2012008566A JP2012008566A (ja) 2012-01-12
JP2012008566A5 JP2012008566A5 (https=) 2014-05-22
JP5841750B2 true JP5841750B2 (ja) 2016-01-13

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US (1) US8829402B2 (https=)
JP (1) JP5841750B2 (https=)
CN (1) CN102313976B (https=)
DE (1) DE102010030430B4 (https=)

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DE102011075809A1 (de) * 2011-05-13 2012-11-15 Carl Zeiss Microimaging Gmbh Verfahren und Vorrichtung zum Festlegen eines z-Bereiches in einer Probe, in dem ein z-Stapel der Probe mittels eines Mikroskops aufzunehmen ist
DE102011082756A1 (de) * 2011-09-15 2013-03-21 Leica Microsystems (Schweiz) Ag Autofokussierverfahren und -einrichtung für ein Mikroskop
US10455137B2 (en) * 2014-07-28 2019-10-22 Orbotech Ltd. Auto-focus system
DE102014110606B4 (de) * 2014-07-28 2017-10-19 Leica Microsystems Cms Gmbh Mikroskop mit einer Strahlteileranordnung
DE102017218449B3 (de) 2017-10-16 2019-02-21 Leica Microsystems Cms Gmbh Mikroskopieverfahren mit Fokusstabilisierung, Recheneinheit, Mikroskopsystem und Computerprogrammprodukt
DE102018105442A1 (de) * 2018-03-09 2019-09-12 Carl Zeiss Microscopy Gmbh Kameramodul für ein Mikroskop und Verfahren zu dessen Betrieb
DE102018126009B4 (de) * 2018-10-19 2022-05-19 Leica Microsystems Cms Gmbh Verfahren und Mikroskop zur Bestimmung der Dicke eines Deck- oder Tragglases
DE102018125995A1 (de) 2018-10-19 2020-04-23 Leica Microsystems Cms Gmbh Verfahren und Mikroskop zur Bestimmung einer Verkippung eines Deckglases
DE102018126011A1 (de) 2018-10-19 2020-04-23 Leica Microsystems Cms Gmbh Verfahren zur Bestimmung des Brechungsindex eines optischen Mediums in einem Mikroskop und Mikroskop
DE102018126002B4 (de) 2018-10-19 2020-10-08 Leica Microsystems Cms Gmbh Verfahren und Mikroskop zur Bestimmung des Brechungsindex eines optischen Mediums
DE102018131427B4 (de) 2018-12-07 2021-04-29 Leica Microsystems Cms Gmbh Verfahren zur automatischen Positionsermittlung auf einer Probenanordnung und entsprechendes Mikroskop, Computerprogramm und Computerprogrammprodukt
DE102019109832B3 (de) 2019-04-12 2020-04-23 Leica Microsystems Cms Gmbh Lichtblattmikroskop und Verfahren zum Erfassen einer Messgröße
US11086118B2 (en) * 2019-04-29 2021-08-10 Molecular Devices, Llc Self-calibrating and directional focusing systems and methods for infinity corrected microscopes
EP4528353A3 (de) 2020-09-01 2025-09-17 BMG Labtech GmbH Autofokussystem für eine optische mess- oder mikroskopievorrichtung, verfahren zur fokuseinstellung bei einer optischen mess- oder mikroskopievorrichtung sowie optische mess- oder mikroskopievorrichtung
CN113267884B (zh) * 2021-05-24 2022-06-28 凌云光技术股份有限公司 一种多层自动对焦的方法及系统
EP4194918A1 (en) 2021-12-10 2023-06-14 Leica Microsystems CMS GmbH Method for controlling microscopic imaging and corresponding microscope control arrangement and microscope
JPWO2024106237A1 (https=) * 2022-11-15 2024-05-23
DE102023107032A1 (de) * 2023-03-21 2024-09-26 Carl Zeiss Microscopy Gmbh Mikroskop und Verfahren zum Autofokussieren
CN119148373A (zh) * 2024-10-08 2024-12-17 江苏集萃苏科思科技有限公司 用于自动对焦传感器的中继系统、传感器、系统以及方法
CN119986957B (zh) * 2025-02-08 2025-10-24 浙江大学 一种适用于半透明晶圆的自动对焦系统和厚度测量系统

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JPH0769162B2 (ja) * 1990-04-23 1995-07-26 大日本スクリーン製造株式会社 光学的検査システムのための自動焦点合わせ装置
JP3226299B2 (ja) * 1991-08-09 2001-11-05 オリンパス光学工業株式会社 焦点検出装置
JPH07134242A (ja) * 1993-11-10 1995-05-23 Olympus Optical Co Ltd 焦点検出装置
IL111229A (en) * 1994-10-10 1998-06-15 Nova Measuring Instr Ltd Autofocusing microscope
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JPH1152224A (ja) * 1997-06-04 1999-02-26 Hitachi Ltd 自動焦点検出方法およびその装置並びに検査装置
US6091075A (en) * 1997-06-04 2000-07-18 Hitachi, Ltd. Automatic focus detection method, automatic focus detection apparatus, and inspection apparatus
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US20030184856A1 (en) * 2002-04-02 2003-10-02 Nikon Corporation Focus point detection device and microscope using the same
JP4370554B2 (ja) * 2002-06-14 2009-11-25 株式会社ニコン オートフォーカス装置およびオートフォーカス付き顕微鏡
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JP2004251984A (ja) * 2003-02-18 2004-09-09 Jasco Corp オートフォーカス装置
US7345814B2 (en) 2003-09-29 2008-03-18 Olympus Corporation Microscope system and microscope focus maintaining device for the same
JP4690132B2 (ja) * 2005-07-13 2011-06-01 オリンパス株式会社 焦点検出装置
JP2007163738A (ja) * 2005-12-13 2007-06-28 Nikon Corp 自動焦点調節機構を備えた光学装置
DE102008044509A1 (de) * 2008-09-09 2010-03-11 Vistec Semiconductor Systems Gmbh Vorrichtung und Verfahren zur Bestimmung der Fokusposition

Also Published As

Publication number Publication date
US8829402B2 (en) 2014-09-09
DE102010030430B4 (de) 2015-01-29
US20110317260A1 (en) 2011-12-29
JP2012008566A (ja) 2012-01-12
CN102313976B (zh) 2015-08-19
DE102010030430A1 (de) 2011-12-29
CN102313976A (zh) 2012-01-11

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